GB1274252A - The production of stereoscopic images by means of electron microscopy - Google Patents

The production of stereoscopic images by means of electron microscopy

Info

Publication number
GB1274252A
GB1274252A GB46673/69A GB4667369A GB1274252A GB 1274252 A GB1274252 A GB 1274252A GB 46673/69 A GB46673/69 A GB 46673/69A GB 4667369 A GB4667369 A GB 4667369A GB 1274252 A GB1274252 A GB 1274252A
Authority
GB
United Kingdom
Prior art keywords
axis
rotatable
support
angle
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB46673/69A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1274252A publication Critical patent/GB1274252A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

1,274,252. Electron microscopes. SIEMENS A.G. 22 Sept., 1969 [23 Sept., 1968], No. 46673/69. Heading H1D. In an electron beam microscope, especially of the scanning type, wherein a beam along the Z axis (Fig. 1) bombards a sample at P, the sample preferably being a crystalline object having a surface the normal to which intersects the sphere O at C, stereoscopic images are produced by first rotating the object about the Z axis until the point C moves to C<SP>11</SP> where the perpendicular to the Y axis makes an angle ##/2 with the YZ plane, and subsequently rotating the object about the Y axis through the stereoscopic angle ## so that C<SP>11</SP> moves to Cl; since the electron beam is equally inclined to the surface at C<SP>11</SP> and Cl respectively when producing each image, the image intensity remains unchanged. In an alternative procedure the object is rotated through the sterepscopic angle about an axis parallel to the normal to the surface being observed. Fig. 2 shows a suitable support for the object P which is mounted on a U-shaped holder H2 which is rotatable about the X axis in a frame R which is rotatable about the Y axis in a U-shaped holder H1; this is mounted on a shaft A rotatable about the Z axis and translatable along three axes by slides S1-S3. In another support arrangement (Fig. 3, not shown) the object is mounted on a slide mounted on a second slide which is rotatably mounted on a U-shaped support (H4) rotatable about the X axis in a second U-shaped support (H3) rotatable about the Y axis. The shaft carrying the second support (H3) is journalled in an L-shaped member (W) the other end of which is mounted on a shaft (A5) rotatable about the Z axis and mounted on two slides for translation along two axes.
GB46673/69A 1968-09-23 1969-09-22 The production of stereoscopic images by means of electron microscopy Expired GB1274252A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19681789019 DE1789019B1 (en) 1968-09-23 1968-09-23 METHOD OF GENERATING A STEREO IMAGE BY USING ELECTRON BEAM MICROSCOPY

Publications (1)

Publication Number Publication Date
GB1274252A true GB1274252A (en) 1972-05-17

Family

ID=5706761

Family Applications (1)

Application Number Title Priority Date Filing Date
GB46673/69A Expired GB1274252A (en) 1968-09-23 1969-09-22 The production of stereoscopic images by means of electron microscopy

Country Status (6)

Country Link
US (1) US3629577A (en)
CH (2) CH508213A (en)
DE (1) DE1789019B1 (en)
FR (1) FR2018682A1 (en)
GB (1) GB1274252A (en)
NL (1) NL6913045A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108626546A (en) * 2018-08-10 2018-10-09 ***日国际有限公司 A kind of Universal rotary holder

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993909A (en) * 1973-03-16 1976-11-23 U.S. Philips Corporation Substrate holder for etching thin films
US4128765A (en) * 1976-10-29 1978-12-05 Joseph Franks Ion beam machining techniques and apparatus
US4587431A (en) * 1983-04-22 1986-05-06 Jeol Ltd. Specimen manipulating mechanism for charged-particle beam instrument
DE3335581A1 (en) * 1983-09-30 1985-04-18 Siemens AG, 1000 Berlin und 8000 München SAMPLE HOLDER FOR SECONDARY ION MASS SPECTROMETRY AND OTHER SENSITIVE PARTICLE BEAM ANALYSIS METHODS AND METHOD FOR THEIR OPERATION
JPS625548A (en) * 1985-07-01 1987-01-12 Hitachi Ltd Ion beam processing device
NL8803101A (en) * 1988-12-19 1990-07-16 Philips Nv OBJECT HOLDER FOR POSITIONING AN OBJECT IN A BEAM.
NL8803153A (en) * 1988-12-23 1990-07-16 Philips Nv ELECTRON BUNDLE DEVICE WITH DYNAMIC FOCUSING.
US4975586A (en) * 1989-02-28 1990-12-04 Eaton Corporation Ion implanter end station
JP3133307B2 (en) * 1989-10-13 2001-02-05 株式会社日立製作所 electronic microscope
DE4140710A1 (en) * 1991-12-10 1993-06-17 Integrated Circuit Testing POSITIONING SYSTEM
US5337178A (en) * 1992-12-23 1994-08-09 International Business Machines Corporation Titlable optical microscope stage
US5481111A (en) * 1994-01-03 1996-01-02 Philips Electronics North America Corporation Electron microscope having a goniometer controlled from the image frame of reference
US5734164A (en) * 1996-11-26 1998-03-31 Amray, Inc. Charged particle apparatus having a canted column
IT247963Y1 (en) * 1999-12-23 2002-09-20 Fiat Auto Spa ACCESSORY SAMPLE HOLDER DEVICE, FOR STEREOSCOPIC ANALYSIS. ELECTRONIC SCANNING MICROSCOPE.
EP1158563A1 (en) * 2000-05-22 2001-11-28 Advantest Corporation Particle beam system
DE102010021534A1 (en) * 2010-05-19 2011-11-24 Eberhard-Karls-Universität Tübingen Universitätsklinikum Direct investigation of biological material ex vivo
US20120043712A1 (en) * 2010-08-17 2012-02-23 Varian Semiconductor Equipment Associates, Inc. Mechanism and method for aligning a workpiece to a shadow mask
US9720220B2 (en) * 2015-03-11 2017-08-01 University Of Manitoba Tomography accessory device for microscopes
US9921400B2 (en) * 2015-12-17 2018-03-20 City University Of Hong Kong System and method for manipulating an object for imaging
CN110993475B (en) * 2019-12-05 2020-08-28 山东省分析测试中心 Scanning electron microscope universal rotating sample table for fracture analysis and scanning electron microscope

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2360677A (en) * 1941-11-21 1944-10-17 Rca Corp Object support for electron microscopes
DE1226228B (en) * 1959-07-24 1966-10-06 Max Planck Gesellschaft Movable preparation table for a body beam apparatus, in particular an electron microscope or electron diffraction device
DE1539063C3 (en) * 1965-03-06 1974-07-04 Ugo Prof. Bologna Valdre (Italien) Preparation cartridge for electron microscopes with slide carrier that can be tilted in all directions

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108626546A (en) * 2018-08-10 2018-10-09 ***日国际有限公司 A kind of Universal rotary holder

Also Published As

Publication number Publication date
FR2018682A1 (en) 1970-06-26
CH514840A (en) 1971-10-31
NL6913045A (en) 1970-03-25
US3629577A (en) 1971-12-21
CH508213A (en) 1971-05-31
DE1789019B1 (en) 1972-04-27

Similar Documents

Publication Publication Date Title
GB1274252A (en) The production of stereoscopic images by means of electron microscopy
GB1452720A (en) Coating apparatus
US4532422A (en) Electron holography microscope
US3086112A (en) Corpuscular radiation apparatus
GB1225856A (en)
US2360677A (en) Object support for electron microscopes
GB1398513A (en) Electron probe instruments
Beeston High voltage microscopy of biological specimens: some practical considerations
GB1455105A (en) Binocular microscope
DE102020200933A1 (en) Active stereo depth sensor projector
DE535262C (en) Device for electrical image transmission
GB1301008A (en) Improvements in or relating to specimen stages for electron microscopes
Nankivell A method of observing selected areas in electron and optical microscopes
US2606292A (en) Method and apparatus for combined electron microscope and diffraction
Hamilton et al. The production of transparent profiles of dust particles as an aid to automatized particle counting
US2441850A (en) Apparatus for stereoscopic work
GB1300624A (en) Charged particle beam apparatus having means to observe a stereo-image of a specimen
US3639759A (en) Double crystal x-ray spectrometer
US3342994A (en) Specimen support for an electron microscope with means to rotate a circular specimen holder
GB1493133A (en) Preparation of specimens to be examined by electron microscopy techniques
US3316402A (en) Arrangement for exchanging pole piece systems in corpuscular radiation apparatus
JPS52137257A (en) Electron microscope
JPS5850610Y2 (en) Sample equipment for electron microscopes, etc.
GB1424224A (en) Method and apparatus for the generation and recording of electron diffraction patterns
GB1108366A (en) Improvements in or relating to electron microscopes

Legal Events

Date Code Title Description
429A Application made for amendment of specification (sect. 29/1949)
429H Application (made) for amendment of specification now open to opposition (sect. 29/1949)
429D Case decided by the comptroller ** specification amended (sect. 29/1949)
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees