GB0127390D0 - Manufacture of optical devices - Google Patents

Manufacture of optical devices

Info

Publication number
GB0127390D0
GB0127390D0 GB0127390A GB0127390A GB0127390D0 GB 0127390 D0 GB0127390 D0 GB 0127390D0 GB 0127390 A GB0127390 A GB 0127390A GB 0127390 A GB0127390 A GB 0127390A GB 0127390 D0 GB0127390 D0 GB 0127390D0
Authority
GB
United Kingdom
Prior art keywords
manufacture
optical devices
optical
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
GB0127390A
Other versions
GB2382156A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Marconi Optical Components Ltd
Original Assignee
Marconi Optical Components Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Marconi Optical Components Ltd filed Critical Marconi Optical Components Ltd
Priority to GB0127390A priority Critical patent/GB2382156A/en
Publication of GB0127390D0 publication Critical patent/GB0127390D0/en
Priority to AU2002343026A priority patent/AU2002343026A1/en
Priority to PCT/GB2002/005162 priority patent/WO2003042759A2/en
Publication of GB2382156A publication Critical patent/GB2382156A/en
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G03F7/70475—Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
GB0127390A 2001-11-15 2001-11-15 Manufacture of optical devices Withdrawn GB2382156A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0127390A GB2382156A (en) 2001-11-15 2001-11-15 Manufacture of optical devices
AU2002343026A AU2002343026A1 (en) 2001-11-15 2002-11-15 Manufacture of optical devices
PCT/GB2002/005162 WO2003042759A2 (en) 2001-11-15 2002-11-15 Manufacture of optical devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0127390A GB2382156A (en) 2001-11-15 2001-11-15 Manufacture of optical devices

Publications (2)

Publication Number Publication Date
GB0127390D0 true GB0127390D0 (en) 2002-01-09
GB2382156A GB2382156A (en) 2003-05-21

Family

ID=9925806

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0127390A Withdrawn GB2382156A (en) 2001-11-15 2001-11-15 Manufacture of optical devices

Country Status (3)

Country Link
AU (1) AU2002343026A1 (en)
GB (1) GB2382156A (en)
WO (1) WO2003042759A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7261982B2 (en) 2003-08-07 2007-08-28 Jds Uniphase Corporation Planar circuit optimization
US7687210B2 (en) 2007-06-25 2010-03-30 International Business Machines Corporation Space tolerance with stitching
KR20240018578A (en) 2021-06-03 2024-02-13 가부시키가이샤 후지쿠라 프린티드 서킷 Manufacturing method of flexible printed wiring board

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155722A (en) * 1986-12-19 1988-06-28 Hitachi Ltd Aligner
NL8903108A (en) * 1989-12-20 1991-07-16 Philips Nv METHOD FOR MANUFACTURING AN APPARATUS AND MASK GROUP FOR THE METHOD
US5298761A (en) * 1991-06-17 1994-03-29 Nikon Corporation Method and apparatus for exposure process
KR100468234B1 (en) * 1996-05-08 2005-06-22 가부시키가이샤 니콘 Exposure method, exposure apparatus and disc
WO1999066370A1 (en) * 1998-06-17 1999-12-23 Nikon Corporation Method for producing mask
US6003223A (en) * 1998-11-19 1999-12-21 Headway Technologies, Inc. Common alignment target image field stitching method for step and repeat alignment in photoresist
US6225013B1 (en) * 1999-05-20 2001-05-01 Tower Semiconductor Ltd. Stitching design rules for forming interconnect layers
GB2356786B (en) * 1999-11-29 2003-09-03 Marconi Electronic Syst Ltd Method and apparatus for aligning a crystalline substrate

Also Published As

Publication number Publication date
GB2382156A (en) 2003-05-21
AU2002343026A1 (en) 2003-05-26
WO2003042759A3 (en) 2003-11-27
WO2003042759A2 (en) 2003-05-22

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Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
WAP Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1)