GB0127390D0 - Manufacture of optical devices - Google Patents
Manufacture of optical devicesInfo
- Publication number
- GB0127390D0 GB0127390D0 GB0127390A GB0127390A GB0127390D0 GB 0127390 D0 GB0127390 D0 GB 0127390D0 GB 0127390 A GB0127390 A GB 0127390A GB 0127390 A GB0127390 A GB 0127390A GB 0127390 D0 GB0127390 D0 GB 0127390D0
- Authority
- GB
- United Kingdom
- Prior art keywords
- manufacture
- optical devices
- optical
- devices
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70475—Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0127390A GB2382156A (en) | 2001-11-15 | 2001-11-15 | Manufacture of optical devices |
AU2002343026A AU2002343026A1 (en) | 2001-11-15 | 2002-11-15 | Manufacture of optical devices |
PCT/GB2002/005162 WO2003042759A2 (en) | 2001-11-15 | 2002-11-15 | Manufacture of optical devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0127390A GB2382156A (en) | 2001-11-15 | 2001-11-15 | Manufacture of optical devices |
Publications (2)
Publication Number | Publication Date |
---|---|
GB0127390D0 true GB0127390D0 (en) | 2002-01-09 |
GB2382156A GB2382156A (en) | 2003-05-21 |
Family
ID=9925806
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0127390A Withdrawn GB2382156A (en) | 2001-11-15 | 2001-11-15 | Manufacture of optical devices |
Country Status (3)
Country | Link |
---|---|
AU (1) | AU2002343026A1 (en) |
GB (1) | GB2382156A (en) |
WO (1) | WO2003042759A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7261982B2 (en) | 2003-08-07 | 2007-08-28 | Jds Uniphase Corporation | Planar circuit optimization |
US7687210B2 (en) | 2007-06-25 | 2010-03-30 | International Business Machines Corporation | Space tolerance with stitching |
KR20240018578A (en) | 2021-06-03 | 2024-02-13 | 가부시키가이샤 후지쿠라 프린티드 서킷 | Manufacturing method of flexible printed wiring board |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63155722A (en) * | 1986-12-19 | 1988-06-28 | Hitachi Ltd | Aligner |
NL8903108A (en) * | 1989-12-20 | 1991-07-16 | Philips Nv | METHOD FOR MANUFACTURING AN APPARATUS AND MASK GROUP FOR THE METHOD |
US5298761A (en) * | 1991-06-17 | 1994-03-29 | Nikon Corporation | Method and apparatus for exposure process |
KR100468234B1 (en) * | 1996-05-08 | 2005-06-22 | 가부시키가이샤 니콘 | Exposure method, exposure apparatus and disc |
WO1999066370A1 (en) * | 1998-06-17 | 1999-12-23 | Nikon Corporation | Method for producing mask |
US6003223A (en) * | 1998-11-19 | 1999-12-21 | Headway Technologies, Inc. | Common alignment target image field stitching method for step and repeat alignment in photoresist |
US6225013B1 (en) * | 1999-05-20 | 2001-05-01 | Tower Semiconductor Ltd. | Stitching design rules for forming interconnect layers |
GB2356786B (en) * | 1999-11-29 | 2003-09-03 | Marconi Electronic Syst Ltd | Method and apparatus for aligning a crystalline substrate |
-
2001
- 2001-11-15 GB GB0127390A patent/GB2382156A/en not_active Withdrawn
-
2002
- 2002-11-15 AU AU2002343026A patent/AU2002343026A1/en not_active Abandoned
- 2002-11-15 WO PCT/GB2002/005162 patent/WO2003042759A2/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
GB2382156A (en) | 2003-05-21 |
AU2002343026A1 (en) | 2003-05-26 |
WO2003042759A3 (en) | 2003-11-27 |
WO2003042759A2 (en) | 2003-05-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
732E | Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977) | ||
WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |