GB0125896D0 - High resolution patterning method - Google Patents

High resolution patterning method

Info

Publication number
GB0125896D0
GB0125896D0 GB0125896A GB0125896A GB0125896D0 GB 0125896 D0 GB0125896 D0 GB 0125896D0 GB 0125896 A GB0125896 A GB 0125896A GB 0125896 A GB0125896 A GB 0125896A GB 0125896 D0 GB0125896 D0 GB 0125896D0
Authority
GB
United Kingdom
Prior art keywords
high resolution
patterning method
resolution patterning
resolution
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0125896A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Priority to GB0125896A priority Critical patent/GB0125896D0/en
Publication of GB0125896D0 publication Critical patent/GB0125896D0/en
Ceased legal-status Critical Current

Links

GB0125896A 2001-10-29 2001-10-29 High resolution patterning method Ceased GB0125896D0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0125896A GB0125896D0 (en) 2001-10-29 2001-10-29 High resolution patterning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0125896A GB0125896D0 (en) 2001-10-29 2001-10-29 High resolution patterning method

Publications (1)

Publication Number Publication Date
GB0125896D0 true GB0125896D0 (en) 2001-12-19

Family

ID=9924707

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0125896A Ceased GB0125896D0 (en) 2001-10-29 2001-10-29 High resolution patterning method

Country Status (1)

Country Link
GB (1) GB0125896D0 (en)

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)