AU2002339067A1 - High resolution patterning method - Google Patents

High resolution patterning method

Info

Publication number
AU2002339067A1
AU2002339067A1 AU2002339067A AU2002339067A AU2002339067A1 AU 2002339067 A1 AU2002339067 A1 AU 2002339067A1 AU 2002339067 A AU2002339067 A AU 2002339067A AU 2002339067 A AU2002339067 A AU 2002339067A AU 2002339067 A1 AU2002339067 A1 AU 2002339067A1
Authority
AU
Australia
Prior art keywords
high resolution
patterning method
resolution patterning
resolution
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002339067A
Inventor
William Norman Damerell
Daniel Robert Johnson
Anthony William Nigel Kynaston-Pearson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qinetiq Ltd
Original Assignee
Qinetiq Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qinetiq Ltd filed Critical Qinetiq Ltd
Publication of AU2002339067A1 publication Critical patent/AU2002339067A1/en
Abandoned legal-status Critical Current

Links

AU2002339067A 2001-10-29 2002-10-25 High resolution patterning method Abandoned AU2002339067A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0125883.9 2001-10-29

Publications (1)

Publication Number Publication Date
AU2002339067A1 true AU2002339067A1 (en) 2003-05-12

Family

ID=

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