FR3059341B1 - Electrode pour installation de traitement de surface d'un substrat en mouvement, unite et installation correspondantes - Google Patents
Electrode pour installation de traitement de surface d'un substrat en mouvement, unite et installation correspondantes Download PDFInfo
- Publication number
- FR3059341B1 FR3059341B1 FR1661573A FR1661573A FR3059341B1 FR 3059341 B1 FR3059341 B1 FR 3059341B1 FR 1661573 A FR1661573 A FR 1661573A FR 1661573 A FR1661573 A FR 1661573A FR 3059341 B1 FR3059341 B1 FR 3059341B1
- Authority
- FR
- France
- Prior art keywords
- installation
- motion
- electrode
- substrate
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000009434 installation Methods 0.000 title 2
- 239000000758 substrate Substances 0.000 title 1
- 238000004381 surface treatment Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
- C23C16/0245—Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/3255—Material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32568—Relative arrangement or disposition of electrodes; moving means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32605—Removable or replaceable electrodes or electrode systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1661573A FR3059341B1 (fr) | 2016-11-28 | 2016-11-28 | Electrode pour installation de traitement de surface d'un substrat en mouvement, unite et installation correspondantes |
| PCT/FR2017/053080 WO2018096235A1 (fr) | 2016-11-28 | 2017-11-13 | Électrode pour installation de traitement de surface d'un substrat en mouvement, unité et installation de traitement correspondantes |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1661573A FR3059341B1 (fr) | 2016-11-28 | 2016-11-28 | Electrode pour installation de traitement de surface d'un substrat en mouvement, unite et installation correspondantes |
| FR1661573 | 2016-11-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR3059341A1 FR3059341A1 (fr) | 2018-06-01 |
| FR3059341B1 true FR3059341B1 (fr) | 2018-12-07 |
Family
ID=57963340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1661573A Active FR3059341B1 (fr) | 2016-11-28 | 2016-11-28 | Electrode pour installation de traitement de surface d'un substrat en mouvement, unite et installation correspondantes |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR3059341B1 (fr) |
| WO (1) | WO2018096235A1 (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111501026A (zh) * | 2020-04-28 | 2020-08-07 | 无锡思锐电子设备科技有限公司 | 一种提高太阳能电池片中氧化铝薄膜质量的方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997013266A2 (fr) * | 1995-06-19 | 1997-04-10 | The University Of Tennessee Research Corporation | Procedes et electrodes de decharge pour la generation de plasmas sous pression d'une atmosphere et materiaux traites selon ces procedes |
| JPH10251843A (ja) * | 1997-03-11 | 1998-09-22 | Sony Corp | 真空蒸着装置 |
| US20080156266A1 (en) * | 2006-12-07 | 2008-07-03 | Sharp Kabushiki Kaisha | Plasma processing apparatus |
| WO2008082297A1 (fr) | 2006-12-28 | 2008-07-10 | Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno | Unité de plasma de décharge à barrière diélectrique de surface et procédé de génération de plasma de surface |
| US20120255492A1 (en) * | 2011-04-06 | 2012-10-11 | Atomic Energy Council-Institute Of Nuclear Enetgy Research | Large Area Atmospheric Pressure Plasma Enhanced Chemical Vapor Deposition Apparatus |
| EP2866318A1 (fr) | 2013-10-24 | 2015-04-29 | OCE-Technologies B.V. | Électrode pour traitement de décharge à barrière diélectrique d'un substrat |
| EP2960358A1 (fr) * | 2014-06-25 | 2015-12-30 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Source plasma et procédé de traitement de surface |
| JP6276670B2 (ja) | 2014-09-19 | 2018-02-07 | 富士フイルム株式会社 | 大気圧プラズマ処理装置 |
| EP3054032B1 (fr) | 2015-02-09 | 2017-08-23 | Coating Plasma Industrie | Installation pour le dépôt de film sur et/ou modification de la surface d'un substrat en mouvement |
| CZ28677U1 (cs) | 2015-05-27 | 2015-10-06 | Masarykova Univerzita | Zařízení pro povrchovou plazmovou úpravu materiálu ze skupiny fólie, papír, textilie, netkaná textilie |
-
2016
- 2016-11-28 FR FR1661573A patent/FR3059341B1/fr active Active
-
2017
- 2017-11-13 WO PCT/FR2017/053080 patent/WO2018096235A1/fr active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018096235A1 (fr) | 2018-05-31 |
| FR3059341A1 (fr) | 2018-06-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PLFP | Fee payment |
Year of fee payment: 2 |
|
| PLSC | Publication of the preliminary search report |
Effective date: 20180601 |
|
| PLFP | Fee payment |
Year of fee payment: 4 |
|
| PLFP | Fee payment |
Year of fee payment: 5 |
|
| PLFP | Fee payment |
Year of fee payment: 6 |
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| PLFP | Fee payment |
Year of fee payment: 7 |
|
| PLFP | Fee payment |
Year of fee payment: 8 |