FR3017243B1 - Procede de fabrication d’un empilement de couches minces decollable de son substrat - Google Patents

Procede de fabrication d’un empilement de couches minces decollable de son substrat

Info

Publication number
FR3017243B1
FR3017243B1 FR1450890A FR1450890A FR3017243B1 FR 3017243 B1 FR3017243 B1 FR 3017243B1 FR 1450890 A FR1450890 A FR 1450890A FR 1450890 A FR1450890 A FR 1450890A FR 3017243 B1 FR3017243 B1 FR 3017243B1
Authority
FR
France
Prior art keywords
stack
substrate
manufacturing
thin layers
removable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1450890A
Other languages
English (en)
Other versions
FR3017243A1 (fr
Inventor
Brendan Dunne
Stephanie Angle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electricite de France SA
Original Assignee
Nexcis SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nexcis SAS filed Critical Nexcis SAS
Priority to FR1450890A priority Critical patent/FR3017243B1/fr
Priority to EP14827455.8A priority patent/EP3103140A1/fr
Priority to US15/116,979 priority patent/US20170170359A1/en
Priority to JP2016550216A priority patent/JP2017507486A/ja
Priority to CN201480074964.9A priority patent/CN106233469A/zh
Priority to PCT/EP2014/079393 priority patent/WO2015117715A1/fr
Publication of FR3017243A1 publication Critical patent/FR3017243A1/fr
Application granted granted Critical
Publication of FR3017243B1 publication Critical patent/FR3017243B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
    • H01L31/1864—Annealing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/047—PV cell arrays including PV cells having multiple vertical junctions or multiple V-groove junctions formed in a semiconductor substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/042—PV modules or arrays of single PV cells
    • H01L31/0475—PV cell arrays made by cells in a planar, e.g. repetitive, configuration on a single semiconductor substrate; PV cell microarrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/541—CuInSe2 material PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/547—Monocrystalline silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Sustainable Development (AREA)
  • Photovoltaic Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
FR1450890A 2014-02-05 2014-02-05 Procede de fabrication d’un empilement de couches minces decollable de son substrat Active FR3017243B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR1450890A FR3017243B1 (fr) 2014-02-05 2014-02-05 Procede de fabrication d’un empilement de couches minces decollable de son substrat
EP14827455.8A EP3103140A1 (fr) 2014-02-05 2014-12-29 Procede de fabrication d'un empilement de couches minces decollable de son substrat
US15/116,979 US20170170359A1 (en) 2014-02-05 2014-12-29 Method for producing a thin-film stack that can be disbonded from its substrate
JP2016550216A JP2017507486A (ja) 2014-02-05 2014-12-29 基板から剥離可能な薄膜積層体を製造するための方法
CN201480074964.9A CN106233469A (zh) 2014-02-05 2014-12-29 用于制造能从其衬底脱粘的薄膜叠层的方法
PCT/EP2014/079393 WO2015117715A1 (fr) 2014-02-05 2014-12-29 Procede de fabrication d'un empilement de couches minces decollable de son substrat

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1450890A FR3017243B1 (fr) 2014-02-05 2014-02-05 Procede de fabrication d’un empilement de couches minces decollable de son substrat

Publications (2)

Publication Number Publication Date
FR3017243A1 FR3017243A1 (fr) 2015-08-07
FR3017243B1 true FR3017243B1 (fr) 2016-02-12

Family

ID=50976785

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1450890A Active FR3017243B1 (fr) 2014-02-05 2014-02-05 Procede de fabrication d’un empilement de couches minces decollable de son substrat

Country Status (6)

Country Link
US (1) US20170170359A1 (fr)
EP (1) EP3103140A1 (fr)
JP (1) JP2017507486A (fr)
CN (1) CN106233469A (fr)
FR (1) FR3017243B1 (fr)
WO (1) WO2015117715A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107779819A (zh) * 2017-11-02 2018-03-09 丰盛印刷（苏州）有限公司 芯片溅镀治具及溅镀方法
US11220735B2 (en) * 2018-02-08 2022-01-11 Medtronic Minimed, Inc. Methods for controlling physical vapor deposition metal film adhesion to substrates and surfaces

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100983838B1 (ko) * 2005-04-06 2010-09-27 아크조 노벨 엔.브이. 투명 전도성 산화물의 무기 코팅을 갖는 호일 조각의 제조 방법
US8207008B1 (en) * 2008-08-01 2012-06-26 Stion Corporation Affixing method and solar decal device using a thin film photovoltaic
US20120055612A1 (en) * 2010-09-02 2012-03-08 International Business Machines Corporation Electrodeposition methods of gallium and gallium alloy films and related photovoltaic structures
US20120255600A1 (en) * 2011-04-06 2012-10-11 International Business Machines Corporation Method of bonding and formation of back surface field (bsf) for multi-junction iii-v solar cells
US8642884B2 (en) * 2011-09-09 2014-02-04 International Business Machines Corporation Heat treatment process and photovoltaic device based on said process
CN102881733B (zh) * 2012-10-19 2015-01-07 上海太阳能电池研究与发展中心 以聚合物为衬底的薄膜太阳能电池复合背电极及制备方法
US10546964B2 (en) * 2012-11-15 2020-01-28 Taiwan Semiconductor Manufacturing Co., Ltd. Molybdenum selenide sublayers with controlled thickness in solar cells and methods for forming the same
CN103456802B (zh) * 2013-09-04 2015-09-09 南开大学 一种用于聚酰亚胺衬底铜铟镓硒薄膜太阳能电池的背电极

Also Published As

Publication number Publication date
JP2017507486A (ja) 2017-03-16
WO2015117715A1 (fr) 2015-08-13
US20170170359A1 (en) 2017-06-15
EP3103140A1 (fr) 2016-12-14
FR3017243A1 (fr) 2015-08-07
CN106233469A (zh) 2016-12-14

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