FR2980846B1 - Procede de determination sans contact de l'epaisseur d'un echantillon, systeme correspondant - Google Patents

Procede de determination sans contact de l'epaisseur d'un echantillon, systeme correspondant

Info

Publication number
FR2980846B1
FR2980846B1 FR1158905A FR1158905A FR2980846B1 FR 2980846 B1 FR2980846 B1 FR 2980846B1 FR 1158905 A FR1158905 A FR 1158905A FR 1158905 A FR1158905 A FR 1158905A FR 2980846 B1 FR2980846 B1 FR 2980846B1
Authority
FR
France
Prior art keywords
sample
thickness
corresponding system
contact determination
determination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1158905A
Other languages
English (en)
Other versions
FR2980846A1 (fr
Inventor
Dmitry Melyukov
Pierre-Yves Thro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1158905A priority Critical patent/FR2980846B1/fr
Priority to PCT/EP2012/069539 priority patent/WO2013050417A1/fr
Publication of FR2980846A1 publication Critical patent/FR2980846A1/fr
Application granted granted Critical
Publication of FR2980846B1 publication Critical patent/FR2980846B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0658—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of emissivity or reradiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G01B21/085—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness using thermal means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
FR1158905A 2011-10-03 2011-10-03 Procede de determination sans contact de l'epaisseur d'un echantillon, systeme correspondant Active FR2980846B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1158905A FR2980846B1 (fr) 2011-10-03 2011-10-03 Procede de determination sans contact de l'epaisseur d'un echantillon, systeme correspondant
PCT/EP2012/069539 WO2013050417A1 (fr) 2011-10-03 2012-10-03 Procédé de détermination sans contact de l'épaisseur d'un échantillon, système correspondant

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR1158905A FR2980846B1 (fr) 2011-10-03 2011-10-03 Procede de determination sans contact de l'epaisseur d'un echantillon, systeme correspondant
FR1158905 2011-10-03

Publications (2)

Publication Number Publication Date
FR2980846A1 FR2980846A1 (fr) 2013-04-05
FR2980846B1 true FR2980846B1 (fr) 2014-05-30

Family

ID=46970300

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1158905A Active FR2980846B1 (fr) 2011-10-03 2011-10-03 Procede de determination sans contact de l'epaisseur d'un echantillon, systeme correspondant

Country Status (2)

Country Link
FR (1) FR2980846B1 (fr)
WO (1) WO2013050417A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2980845B1 (fr) * 2011-10-03 2013-10-04 Commissariat Energie Atomique Procede de determination sans contact du rayon d'un faisceau, systeme correspondant
FR3007523B1 (fr) * 2013-06-21 2016-06-17 Commissariat Energie Atomique Procede de determination de la diffusivite thermique et systeme pour la mise en oeuvre
FR3007831B1 (fr) * 2013-07-01 2015-06-19 Enovasense Procede de mesure de l'epaisseur d'une couche d'un materiau, procede de galvanisation et dispositif de mesure associes

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4679946A (en) * 1984-05-21 1987-07-14 Therma-Wave, Inc. Evaluating both thickness and compositional variables in a thin film sample
FR2589566A1 (fr) 1985-11-06 1987-05-07 Cegedur Procede de mesure au defile et sans contact de l'epaisseur et de la temperature de feuilles metalliques minces au moyen de courants de foucault
DE60041661D1 (de) * 1999-12-02 2009-04-09 Thermal Wave Imaging Inc Verfahren und system zur bezugsfreien thermographischen erkennung von suboberflächendefekten unter verwendung komprimierter bilddaten
DE10355440A1 (de) 2003-11-27 2005-06-23 Contitech Holding Gmbh Verfahren und Vorrichtung zur Messung der Wanddicke von Kunststoffteilen
AR070418A1 (es) * 2009-02-12 2010-04-07 Consejo Nac Invest Cient Tec Metodo y aparato para determinar la dilatacion de un material mediante un dispositivo sensor de error de foco

Also Published As

Publication number Publication date
FR2980846A1 (fr) 2013-04-05
WO2013050417A1 (fr) 2013-04-11

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