FR2977937B1 - Detecteur bolometrique a performances ameliorees - Google Patents

Detecteur bolometrique a performances ameliorees

Info

Publication number
FR2977937B1
FR2977937B1 FR1156461A FR1156461A FR2977937B1 FR 2977937 B1 FR2977937 B1 FR 2977937B1 FR 1156461 A FR1156461 A FR 1156461A FR 1156461 A FR1156461 A FR 1156461A FR 2977937 B1 FR2977937 B1 FR 2977937B1
Authority
FR
France
Prior art keywords
improved performances
bolometric detector
bolometric
detector
performances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1156461A
Other languages
English (en)
Other versions
FR2977937A1 (fr
Inventor
Charlie Koechlin
Patrick Bouchon
Riad Haidar
Jean-Luc Pelouard
Jean-Jacques Yon
Joel Deschamps
Fabrice Pardo
Stephane Collin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Centre National de la Recherche Scientifique CNRS
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR1156461A priority Critical patent/FR2977937B1/fr
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA, Centre National de la Recherche Scientifique CNRS, Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to PCT/EP2012/063771 priority patent/WO2013010933A1/fr
Priority to JP2014520616A priority patent/JP5969606B2/ja
Priority to CN201280044662.8A priority patent/CN103930755B/zh
Priority to EP12742821.7A priority patent/EP2732253B1/fr
Priority to US14/131,298 priority patent/US9417134B2/en
Publication of FR2977937A1 publication Critical patent/FR2977937A1/fr
Application granted granted Critical
Publication of FR2977937B1 publication Critical patent/FR2977937B1/fr
Priority to IL230253A priority patent/IL230253A/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144—Devices controlled by radiation
    • H01L27/146—Imager structures
    • H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
    • H01L27/14685—Process for coatings or optical elements
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/20—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only
    • H04N23/23—Cameras or camera modules comprising electronic image sensors; Control thereof for generating image signals from infrared radiation only from thermal infrared radiation
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/30—Transforming light or analogous information into electric information
    • H04N5/33—Transforming infrared radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • G01J2005/202—Arrays
    • G01J2005/204—Arrays prepared by semiconductor processing, e.g. VLSI

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Radiation Pyrometers (AREA)
FR1156461A 2011-07-15 2011-07-15 Detecteur bolometrique a performances ameliorees Expired - Fee Related FR2977937B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR1156461A FR2977937B1 (fr) 2011-07-15 2011-07-15 Detecteur bolometrique a performances ameliorees
JP2014520616A JP5969606B2 (ja) 2011-07-15 2012-07-13 性能が向上したマイクロボロメータアレイ
CN201280044662.8A CN103930755B (zh) 2011-07-15 2012-07-13 具有改进性能的微测热辐射计阵列
EP12742821.7A EP2732253B1 (fr) 2011-07-15 2012-07-13 Matrice de microbolomètres à performance améliorée
PCT/EP2012/063771 WO2013010933A1 (fr) 2011-07-15 2012-07-13 Matrice de microbolomètres à performance améliorée
US14/131,298 US9417134B2 (en) 2011-07-15 2012-07-13 Microbolometer array with improved performance
IL230253A IL230253A (en) 2011-07-15 2013-12-31 An array of microbolometers with improved performance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1156461A FR2977937B1 (fr) 2011-07-15 2011-07-15 Detecteur bolometrique a performances ameliorees

Publications (2)

Publication Number Publication Date
FR2977937A1 FR2977937A1 (fr) 2013-01-18
FR2977937B1 true FR2977937B1 (fr) 2013-08-16

Family

ID=46603894

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1156461A Expired - Fee Related FR2977937B1 (fr) 2011-07-15 2011-07-15 Detecteur bolometrique a performances ameliorees

Country Status (7)

Country Link
US (1) US9417134B2 (fr)
EP (1) EP2732253B1 (fr)
JP (1) JP5969606B2 (fr)
CN (1) CN103930755B (fr)
FR (1) FR2977937B1 (fr)
IL (1) IL230253A (fr)
WO (1) WO2013010933A1 (fr)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2581721B1 (fr) 2011-10-10 2019-05-08 Samsung Electronics Co., Ltd Détecteur thermique infrarouge et son procédé de fabrication
KR20140045842A (ko) * 2012-10-09 2014-04-17 삼성전자주식회사 공진 주파수가 다른 복수의 공진 구조체를 포함하는 전자기파 스펙트럼 분석기 및 적외선 열상 분석기
KR101902920B1 (ko) * 2012-12-11 2018-10-01 삼성전자주식회사 광대역 표면 플라즈몬 공진기를 포함하는 적외선 검출기
FR2999805B1 (fr) 2012-12-17 2017-12-22 Commissariat Energie Atomique Procede de realisation d'un dispositif de detection infrarouge
KR101910573B1 (ko) * 2012-12-20 2018-10-22 삼성전자주식회사 광대역 광 흡수체를 포함하는 적외선 검출기
KR102040149B1 (ko) * 2013-02-01 2019-11-04 삼성전자주식회사 적외선 검출기
JP2014235146A (ja) * 2013-06-05 2014-12-15 セイコーエプソン株式会社 テラヘルツ波検出装置、カメラ、イメージング装置および計測装置
WO2015048424A1 (fr) * 2013-09-27 2015-04-02 Robert Bosch Gmbh Nitrure de titane pour bolomètres à mems
WO2015053720A1 (fr) * 2013-10-10 2015-04-16 Kivanc Azgin Détecteur ir mécanique à base de vibrations et procédé d'imagerie ir l'utilisant
FR3017456B1 (fr) * 2014-02-12 2017-06-23 Commissariat Energie Atomique Detecteur bolometrique a structure mim incluant un element thermometre
DE102014204676A1 (de) * 2014-03-13 2015-09-17 Robert Bosch Gmbh Wärmesensor und Verfahren zur Herstellung eines Wärmesensors
US20170030775A1 (en) * 2014-04-18 2017-02-02 Nec Corporation Terahertz-wave detector
US9964663B2 (en) * 2014-08-26 2018-05-08 The United States Of America, As Represented By The Secretary Of The Navy Extended infrared imaging system
FR3026483A1 (fr) * 2014-09-26 2016-04-01 Commissariat Energie Atomique Detecteur bolometrique a structures mim de dimensions differentes
US9945727B2 (en) 2014-12-10 2018-04-17 Robert Bosch Gmbh Resistive switching for MEMS devices
SG11201705483YA (en) * 2015-01-09 2017-08-30 Apple Inc Polarization selective, frequency selective, and wide dynamic range detectors, imaging arrays, readout integrated circuits, and sensor systems
JP6401647B2 (ja) * 2015-03-31 2018-10-10 三菱電機株式会社 赤外線センサおよび赤外線センサアレイ
US10234379B2 (en) 2015-04-15 2019-03-19 Mitsubishi Electric Corporation Electromagnetic wave detector, electromagnetic wave detector array, and gas analyzing apparatus
CN105004430B (zh) * 2015-07-28 2019-12-06 昆明物理研究所 一种非制冷红外焦平面探测器的光电敏感单元
WO2017041085A1 (fr) * 2015-09-04 2017-03-09 President And Fellows Of Harvard College Modification des propriétés optiques de structures de film mince à l'aide d'un élément absorbant
FR3042272B1 (fr) 2015-10-09 2017-12-15 Commissariat Energie Atomique Bolometre a forte sensibilite spectrale.
DE102015220310A1 (de) * 2015-10-19 2017-04-20 Robert Bosch Gmbh Strahlungssensoranordnung und Gasdetektoranordnung
US10444076B2 (en) 2015-11-26 2019-10-15 Sensirion Ag Infrared device
KR102300621B1 (ko) * 2016-04-07 2021-09-13 한국전자통신연구원 이중모드 디스플레이
FR3050526B1 (fr) 2016-04-25 2018-05-25 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif de detection de rayonnement electromagnetique a structure d’encapsulation comportant au moins un filtre interferentiel
US9528881B1 (en) 2016-05-18 2016-12-27 Nxp Usa, Inc. Stress isolated detector element and microbolometer detector incorporating same
FR3054318B1 (fr) 2016-07-21 2018-08-31 Commissariat Energie Atomique Detecteur bolometrique avec matrice de filtres a mode guide.
FR3059824B1 (fr) * 2016-12-07 2019-06-21 Ulis Capteur d'image infrarouge
FR3066321B1 (fr) 2017-05-09 2019-06-14 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procede de realisation d'un detecteur bolometrique
CN109282903B (zh) * 2017-07-20 2020-11-13 南京大学 基于表面电磁波共振的高性能cmos红外微测辐射热计
EP3462149B1 (fr) 2017-09-28 2023-10-25 Sensirion AG Dispositif infrarouge
JP2019197834A (ja) * 2018-05-10 2019-11-14 浜松ホトニクス株式会社 光検出素子
KR102036071B1 (ko) * 2018-06-12 2019-10-24 경희대학교 산학협력단 다층 복사 냉각 구조
KR102036069B1 (ko) * 2018-06-12 2019-10-24 경희대학교 산학협력단 공극 패턴을 포함하는 복사 냉각 구조 및 그것의 형성 방법
FR3088512B1 (fr) * 2018-11-09 2020-10-30 Schneider Electric Ind Sas Procede de traitement d'une image
EP3933358B1 (fr) 2019-02-28 2023-11-01 Panasonic Intellectual Property Management Co., Ltd. Capteur infrarouge, réseau de capteurs infrarouges et procédé de fabrication de capteur infrarouge
FR3097047B1 (fr) * 2019-06-05 2021-05-14 Lynred Microbolomètre muni d’une fonction de filtrage
FR3097046B1 (fr) * 2019-06-05 2021-05-21 Lynred Microbolomètre ayant un pas de pixel réduit
FR3098904B1 (fr) * 2019-07-16 2021-06-18 Lynred Micro-bolometre a faible capacite thermique et procede de fabrication associe
CN112802827B (zh) * 2019-11-14 2024-03-01 华为技术有限公司 像素结构和图像传感器
TWI724708B (zh) 2019-12-24 2021-04-11 財團法人工業技術研究院 具有阻擋元件的微機電紅外光感測裝置
FR3105840B1 (fr) * 2019-12-30 2022-01-14 Commissariat Energie Atomique Composant de détection incluant des pixels noirs et procédé de fabrication d’un tel composant
JP7371911B2 (ja) * 2020-01-14 2023-10-31 国立大学法人東北大学 光電変換装置
US11496697B2 (en) * 2020-02-28 2022-11-08 Samsung Electronics Co., Ltd. LWIR sensor with capacitive microbolometer and hybrid visible/LWIR sensor
TWI753712B (zh) * 2020-12-21 2022-01-21 財團法人工業技術研究院 微機電紅外光感測裝置
US11368637B1 (en) * 2021-02-17 2022-06-21 Institut National D'optique Image acquisition method for microbolometer thermal imaging systems
CN113219566B (zh) * 2021-05-10 2022-09-16 东北师范大学 偏振敏感宽带响应长波红外超材料吸收器
CN113566982B (zh) * 2021-07-12 2022-05-24 北京北方高业科技有限公司 一种微桥结构红外探测器
CN115931140A (zh) 2021-08-06 2023-04-07 财团法人工业技术研究院 微机电红外光感测装置及其制造方法
CN114695636B (zh) * 2022-05-31 2022-08-19 季华实验室 一种穿戴式光热热电设备

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4287484A (en) * 1978-10-02 1981-09-01 Xerox Corporation Segmented hollow cathode laser device
WO1997018589A1 (fr) * 1995-11-15 1997-05-22 Lockheed-Martin Ir Imaging Systems, Inc. Detecteur a micropont multiniveaux a deux voies
EP0865672B1 (fr) 1995-12-04 2000-08-30 Lockheed-Martin IR Imaging Systems Detecteur de rayonnement infrarouge, possedant une zone active limitee
JP3040356B2 (ja) * 1997-01-27 2000-05-15 三菱電機株式会社 赤外線固体撮像素子
JP3605285B2 (ja) * 1997-11-25 2004-12-22 三菱電機株式会社 熱型赤外線検出器アレイ
US6621083B2 (en) 2000-12-29 2003-09-16 Honeywell International Inc. High-absorption wide-band pixel for bolometer arrays
US7223959B2 (en) * 2005-07-20 2007-05-29 Lockheed Martin Corporation Plasma absorption wave limiter
JP4878238B2 (ja) * 2005-08-01 2012-02-15 キヤノン株式会社 標的物質検出用の素子及びそれを用いた標的物質の検出方法、並びにそのための検出装置及びキット
CN101355118A (zh) * 2007-07-25 2009-01-28 中国科学院半导体研究所 光学复合膜作电极的GaN功率型LED的制备方法
JP5288772B2 (ja) * 2007-11-02 2013-09-11 キヤノン株式会社 化学センサ素子、センシング装置およびセンシング方法
JP5123146B2 (ja) * 2008-11-25 2013-01-16 パナソニック株式会社 赤外線センサおよびその製造方法
FR2940522B1 (fr) * 2008-12-24 2011-03-18 Commissariat Energie Atomique Photodetecteur comprenant une region semiconductrice tres mince
JP4964935B2 (ja) * 2009-10-30 2012-07-04 三菱電機株式会社 半導体光素子および半導体光装置
US8513605B2 (en) * 2010-04-28 2013-08-20 L-3 Communications Corporation Optically transitioning thermal detector structures
US8610070B2 (en) * 2010-04-28 2013-12-17 L-3 Communications Corporation Pixel-level optical elements for uncooled infrared detector devices
CN101949836B (zh) * 2010-08-25 2011-11-30 华中科技大学 一种热辐射红外发射和探测集成器件

Also Published As

Publication number Publication date
US9417134B2 (en) 2016-08-16
WO2013010933A1 (fr) 2013-01-24
JP5969606B2 (ja) 2016-08-17
IL230253A (en) 2017-12-31
US20140226021A1 (en) 2014-08-14
CN103930755B (zh) 2017-05-10
EP2732253B1 (fr) 2015-07-08
FR2977937A1 (fr) 2013-01-18
JP2014521094A (ja) 2014-08-25
EP2732253A1 (fr) 2014-05-21
CN103930755A (zh) 2014-07-16

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