FR2951713B1 - Micro-volet a actionnement electromagnetique - Google Patents

Micro-volet a actionnement electromagnetique

Info

Publication number
FR2951713B1
FR2951713B1 FR0957543A FR0957543A FR2951713B1 FR 2951713 B1 FR2951713 B1 FR 2951713B1 FR 0957543 A FR0957543 A FR 0957543A FR 0957543 A FR0957543 A FR 0957543A FR 2951713 B1 FR2951713 B1 FR 2951713B1
Authority
FR
France
Prior art keywords
axis
shutter
micro
moveable plate
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0957543A
Other languages
English (en)
Other versions
FR2951713A1 (fr
Inventor
Orphee Cugat
Nicolas Abele
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Lemoptix SA
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0957543A priority Critical patent/FR2951713B1/fr
Application filed by Lemoptix SA, Centre National de la Recherche Scientifique CNRS filed Critical Lemoptix SA
Priority to PCT/FR2010/052301 priority patent/WO2011051620A2/fr
Priority to CN201080049053.2A priority patent/CN102844263B/zh
Priority to US13/504,760 priority patent/US9025229B2/en
Priority to JP2012535903A priority patent/JP5663590B2/ja
Publication of FR2951713A1 publication Critical patent/FR2951713A1/fr
Application granted granted Critical
Publication of FR2951713B1 publication Critical patent/FR2951713B1/fr
Priority to US14/536,234 priority patent/US9212047B2/en
Priority to US14/968,542 priority patent/US20170168288A1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light
    • G02B26/023—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light comprising movable attenuating elements, e.g. neutral density filters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K26/00—Machines adapted to function as torque motors, i.e. to exert a torque when stalled
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/18—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with coil systems moving upon intermittent or reversed energisation thereof by interaction with a fixed field system, e.g. permanent magnets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Electromagnetism (AREA)
  • Analytical Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Shutters For Cameras (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
FR0957543A 2009-10-27 2009-10-27 Micro-volet a actionnement electromagnetique Active FR2951713B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0957543A FR2951713B1 (fr) 2009-10-27 2009-10-27 Micro-volet a actionnement electromagnetique
CN201080049053.2A CN102844263B (zh) 2009-10-27 2010-10-27 电磁致动微快门
US13/504,760 US9025229B2 (en) 2009-10-27 2010-10-27 Electromagnetically actuated microshutter
JP2012535903A JP5663590B2 (ja) 2009-10-27 2010-10-27 電磁駆動型マイクロミラー
PCT/FR2010/052301 WO2011051620A2 (fr) 2009-10-27 2010-10-27 Micro-volet a actionnement electromagnetique
US14/536,234 US9212047B2 (en) 2009-10-27 2014-11-07 Electromagnetically actuated microshutter
US14/968,542 US20170168288A1 (en) 2009-10-27 2015-12-14 Electromagnetically actuated microshutter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0957543A FR2951713B1 (fr) 2009-10-27 2009-10-27 Micro-volet a actionnement electromagnetique

Publications (2)

Publication Number Publication Date
FR2951713A1 FR2951713A1 (fr) 2011-04-29
FR2951713B1 true FR2951713B1 (fr) 2012-04-13

Family

ID=42671893

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0957543A Active FR2951713B1 (fr) 2009-10-27 2009-10-27 Micro-volet a actionnement electromagnetique

Country Status (5)

Country Link
US (3) US9025229B2 (fr)
JP (1) JP5663590B2 (fr)
CN (1) CN102844263B (fr)
FR (1) FR2951713B1 (fr)
WO (1) WO2011051620A2 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9819253B2 (en) 2012-10-25 2017-11-14 Intel Corporation MEMS device
US20160124214A1 (en) * 2014-10-31 2016-05-05 Intel Corporation Electromagnetic mems device
US11573296B2 (en) * 2017-02-28 2023-02-07 Hamamatsu Photonics K.K. Optical module and distance measurement device
CN107120474B (zh) * 2017-03-31 2018-11-27 昆明理工大学 一种基于光驱动液控换向微阀装置及其使用方法
JP7015653B2 (ja) 2017-08-10 2022-02-03 浜松ホトニクス株式会社 光モジュール、及び、光モジュールの製造方法
JP7313831B2 (ja) * 2019-01-30 2023-07-25 浜松ホトニクス株式会社 光モジュール
US11543491B2 (en) * 2020-05-04 2023-01-03 GM Global Technology Operations LLC Optimized current path to enable flat MEMS mirror
CN111682729B (zh) * 2020-06-30 2022-03-25 歌尔股份有限公司 振动装置以及电子设备
CN113991914B (zh) * 2021-09-30 2023-01-24 歌尔股份有限公司 振动马达

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4564757A (en) * 1982-09-30 1986-01-14 Burroughs Corporation Mirror position sensor for improved track selection in optical data disk system
EP0866345B1 (fr) * 1996-06-07 2003-09-03 Nihon Shingo Kabushiki Kaisha Photodetecteur a axe variable
US6188504B1 (en) 1996-06-28 2001-02-13 Olympus Optical Co., Ltd. Optical scanner
JP3684003B2 (ja) * 1996-10-22 2005-08-17 オリンパス株式会社 光スキャナ
JP4414498B2 (ja) * 1997-12-09 2010-02-10 オリンパス株式会社 光偏向器
GB2384060B (en) * 2000-08-27 2004-12-15 Corning Intellisense Corp Magnetically actuated micro-electro-mechanical apparatus
JP2002156598A (ja) * 2000-11-16 2002-05-31 Omron Corp ガルバノミラー
JP2002221686A (ja) * 2001-01-25 2002-08-09 Miyota Kk プレーナー型ガルバノミラー及びその製造方法
JP3808756B2 (ja) * 2001-11-09 2006-08-16 日本信号株式会社 プレーナ型電磁アクチュエータ
JP2004177649A (ja) * 2002-11-27 2004-06-24 Nec Tokin Corp 可変光減衰器
JP2004243512A (ja) * 2002-12-27 2004-09-02 Nippon Signal Co Ltd:The プレーナ型電磁アクチュエータ
JP3775677B2 (ja) * 2003-05-07 2006-05-17 船井電機株式会社 Ｍｅｍｓミラー装置および光ディスク装置
JP4544972B2 (ja) * 2003-12-04 2010-09-15 オリンパス株式会社 光偏向器
JP4729289B2 (ja) * 2003-12-04 2011-07-20 オリンパス株式会社 光偏向器
JP4694196B2 (ja) 2004-12-28 2011-06-08 オリンパス株式会社 光偏向器
US7557972B2 (en) * 2006-06-07 2009-07-07 Canon Kabushiki Kaisha Oscillator device, optical deflector and optical instrument using the same
JP5272989B2 (ja) * 2009-09-17 2013-08-28 ブラザー工業株式会社 ２次元光スキャナ

Also Published As

Publication number Publication date
FR2951713A1 (fr) 2011-04-29
CN102844263A (zh) 2012-12-26
US20170168288A1 (en) 2017-06-15
JP5663590B2 (ja) 2015-02-04
JP2013508785A (ja) 2013-03-07
US20130003155A1 (en) 2013-01-03
CN102844263B (zh) 2016-01-20
US9212047B2 (en) 2015-12-15
US20150062685A1 (en) 2015-03-05
WO2011051620A3 (fr) 2012-11-15
US9025229B2 (en) 2015-05-05
WO2011051620A2 (fr) 2011-05-05

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Legal Events

Date Code Title Description
CA Change of address

Effective date: 20150904

TP Transmission of property

Owner name: INTEL CORPORATION, US

Effective date: 20150904

TP Transmission of property

Owner name: INTEL CORPORATION, US

Effective date: 20150911

PLFP Fee payment

Year of fee payment: 8

PLFP Fee payment

Year of fee payment: 9