FR2859281B1 - Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique - Google Patents

Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique

Info

Publication number
FR2859281B1
FR2859281B1 FR0310397A FR0310397A FR2859281B1 FR 2859281 B1 FR2859281 B1 FR 2859281B1 FR 0310397 A FR0310397 A FR 0310397A FR 0310397 A FR0310397 A FR 0310397A FR 2859281 B1 FR2859281 B1 FR 2859281B1
Authority
FR
France
Prior art keywords
protection
deformable membrane
against high
micromechanical structure
membrane against
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR0310397A
Other languages
English (en)
Other versions
FR2859281A1 (fr
Inventor
Sebastiano Brida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Auxitrol SA
Original Assignee
Auxitrol SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Auxitrol SA filed Critical Auxitrol SA
Priority to FR0310397A priority Critical patent/FR2859281B1/fr
Priority to PCT/FR2004/002236 priority patent/WO2005024370A1/fr
Publication of FR2859281A1 publication Critical patent/FR2859281A1/fr
Application granted granted Critical
Publication of FR2859281B1 publication Critical patent/FR2859281B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
FR0310397A 2003-09-02 2003-09-02 Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique Expired - Lifetime FR2859281B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR0310397A FR2859281B1 (fr) 2003-09-02 2003-09-02 Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique
PCT/FR2004/002236 WO2005024370A1 (fr) 2003-09-02 2004-09-02 Protection d’une membrane deformable contre de fortes deformations dans une structure micromecanique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0310397A FR2859281B1 (fr) 2003-09-02 2003-09-02 Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique

Publications (2)

Publication Number Publication Date
FR2859281A1 FR2859281A1 (fr) 2005-03-04
FR2859281B1 true FR2859281B1 (fr) 2005-12-23

Family

ID=34130716

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0310397A Expired - Lifetime FR2859281B1 (fr) 2003-09-02 2003-09-02 Protection d'une membrane deformable contre de fortes deformations dans une structure micromecanique

Country Status (2)

Country Link
FR (1) FR2859281B1 (fr)
WO (1) WO2005024370A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020100244A1 (de) 2020-01-08 2021-07-08 X-FAB Global Services GmbH Verfahren zur Herstellung eines Membran-Bauelements und ein Membran-Bauelement

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2982023B1 (fr) * 2011-10-26 2015-03-06 Auxitrol Sa Structure micromecanique a membrane deformable et a protection contre de fortes deformations
US9410861B2 (en) * 2014-03-25 2016-08-09 Honeywell International Inc. Pressure sensor with overpressure protection

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4852408A (en) * 1987-09-03 1989-08-01 Scott Fetzer Company Stop for integrated circuit diaphragm
US4879627A (en) * 1988-12-30 1989-11-07 United Technologies Corporation Differential capacitive pressure sensor with over-pressure protection
WO1992004724A1 (fr) * 1990-08-30 1992-03-19 Platz Karl Otto Interrupteur a pression
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
JPH10148591A (ja) * 1996-09-19 1998-06-02 Fuji Koki Corp 圧力検出装置
US6595066B1 (en) * 2002-04-05 2003-07-22 Kulite Semiconductor Products, Inc. Stopped leadless differential sensor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020100244A1 (de) 2020-01-08 2021-07-08 X-FAB Global Services GmbH Verfahren zur Herstellung eines Membran-Bauelements und ein Membran-Bauelement
US11708265B2 (en) 2020-01-08 2023-07-25 X-FAB Global Services GmbH Method for manufacturing a membrane component and a membrane component

Also Published As

Publication number Publication date
WO2005024370A1 (fr) 2005-03-17
FR2859281A1 (fr) 2005-03-04

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