FR2839061B1 - MICROMECHANICAL COMPONENT WITH INSULATED AREA AND METHOD FOR MANUFACTURING THE SAME - Google Patents

MICROMECHANICAL COMPONENT WITH INSULATED AREA AND METHOD FOR MANUFACTURING THE SAME

Info

Publication number
FR2839061B1
FR2839061B1 FR0305333A FR0305333A FR2839061B1 FR 2839061 B1 FR2839061 B1 FR 2839061B1 FR 0305333 A FR0305333 A FR 0305333A FR 0305333 A FR0305333 A FR 0305333A FR 2839061 B1 FR2839061 B1 FR 2839061B1
Authority
FR
France
Prior art keywords
manufacturing
same
micromechanical component
insulated area
insulated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0305333A
Other languages
French (fr)
Other versions
FR2839061A1 (en
Inventor
Matthias Fuertsch
Heribert Weber
Frank Fischer
Lars Metzger
Frieder Sundermeier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of FR2839061A1 publication Critical patent/FR2839061A1/en
Application granted granted Critical
Publication of FR2839061B1 publication Critical patent/FR2839061B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/0069—Thermal properties, e.g. improve thermal insulation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0214—Biosensors; Chemical sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0278—Temperature sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B81B2203/0338—Channels

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR0305333A 2002-04-30 2003-04-30 MICROMECHANICAL COMPONENT WITH INSULATED AREA AND METHOD FOR MANUFACTURING THE SAME Expired - Fee Related FR2839061B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2002119254 DE10219254B4 (en) 2002-04-30 2002-04-30 Micromechanical component with an isolation region and corresponding manufacturing method

Publications (2)

Publication Number Publication Date
FR2839061A1 FR2839061A1 (en) 2003-10-31
FR2839061B1 true FR2839061B1 (en) 2007-04-06

Family

ID=28798928

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0305333A Expired - Fee Related FR2839061B1 (en) 2002-04-30 2003-04-30 MICROMECHANICAL COMPONENT WITH INSULATED AREA AND METHOD FOR MANUFACTURING THE SAME

Country Status (2)

Country Link
DE (1) DE10219254B4 (en)
FR (1) FR2839061B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH707797A1 (en) * 2013-03-28 2014-09-30 Silicior Sa A method of manufacturing a micro-mechanical part substantially flat, and micro-mechanical part comprising at least a portion formed of silicon oxide.

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01109250A (en) * 1987-10-22 1989-04-26 Toshiba Corp Gas sensor
US5578528A (en) * 1995-05-02 1996-11-26 Industrial Technology Research Institute Method of fabrication glass diaphragm on silicon macrostructure
FR2736205B1 (en) * 1995-06-30 1997-09-19 Motorola Semiconducteurs SEMICONDUCTOR SENSOR DEVICE AND ITS FORMING METHOD
DE19608370A1 (en) * 1996-03-05 1996-07-25 Josef Dr Lechner Micro-mechanical channel prodn. with connection to surrounding atmos.
EP0856825B1 (en) * 1997-01-31 2004-11-17 STMicroelectronics S.r.l. Process for manufacturing integrated semiconductor devices comprising a chemoresistive gas microsensor
US6096656A (en) * 1999-06-24 2000-08-01 Sandia Corporation Formation of microchannels from low-temperature plasma-deposited silicon oxynitride

Also Published As

Publication number Publication date
DE10219254B4 (en) 2011-08-11
DE10219254A1 (en) 2003-11-13
FR2839061A1 (en) 2003-10-31

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20151231