FR2813458B1 - Resonateur piezoelectrique, et dispositif electronique le comportant - Google Patents
Resonateur piezoelectrique, et dispositif electronique le comportantInfo
- Publication number
- FR2813458B1 FR2813458B1 FR0111303A FR0111303A FR2813458B1 FR 2813458 B1 FR2813458 B1 FR 2813458B1 FR 0111303 A FR0111303 A FR 0111303A FR 0111303 A FR0111303 A FR 0111303A FR 2813458 B1 FR2813458 B1 FR 2813458B1
- Authority
- FR
- France
- Prior art keywords
- same
- electronic device
- piezoelectric resonator
- resonator
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02086—Means for compensation or elimination of undesirable effects
- H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/174—Membranes
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000262837 | 2000-08-31 | ||
JP2001240600A JP3858639B2 (ja) | 2000-08-31 | 2001-08-08 | 圧電共振子および電子機器 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2813458A1 FR2813458A1 (fr) | 2002-03-01 |
FR2813458B1 true FR2813458B1 (fr) | 2005-04-15 |
Family
ID=26598925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0111303A Expired - Fee Related FR2813458B1 (fr) | 2000-08-31 | 2001-08-31 | Resonateur piezoelectrique, et dispositif electronique le comportant |
Country Status (4)
Country | Link |
---|---|
US (1) | US6577043B2 (fr) |
JP (1) | JP3858639B2 (fr) |
DE (1) | DE10142158B4 (fr) |
FR (1) | FR2813458B1 (fr) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1322951A2 (fr) * | 2000-09-20 | 2003-07-02 | Molecular Reflections | Matrice ultrasonore micro-usin e s'utilisant comme des sondes r sonantes |
DE10335331A1 (de) * | 2003-08-01 | 2005-03-03 | Epcos Ag | Elektrisches Bauelement mit überlappenden Elektroden und Verfahren zur Herstellung |
JP4567742B2 (ja) * | 2005-08-30 | 2010-10-20 | 京セラ株式会社 | 圧電共振素子及びそれを用いた圧電共振装置 |
US8004021B2 (en) * | 2006-04-21 | 2011-08-23 | Bioscale, Inc. | Microfabricated devices and method for fabricating microfabricated devices |
US20090053401A1 (en) * | 2007-08-24 | 2009-02-26 | Maxim Integrated Products, Inc. | Piezoelectric deposition for BAW resonators |
US7567024B2 (en) * | 2007-09-26 | 2009-07-28 | Maxim Integrated Products, Inc. | Methods of contacting the top layer of a BAW resonator |
US8512800B2 (en) * | 2007-12-04 | 2013-08-20 | Triquint Semiconductor, Inc. | Optimal acoustic impedance materials for polished substrate coating to suppress passband ripple in BAW resonators and filters |
US7768364B2 (en) * | 2008-06-09 | 2010-08-03 | Maxim Integrated Products, Inc. | Bulk acoustic resonators with multi-layer electrodes |
WO2012064283A1 (fr) * | 2010-11-08 | 2012-05-18 | Agency For Science, Technology And Research | Référence croisée à une application concernée |
JP5588889B2 (ja) * | 2011-02-08 | 2014-09-10 | 太陽誘電株式会社 | 弾性波デバイスおよびフィルタ |
WO2018012443A1 (fr) | 2016-07-14 | 2018-01-18 | 株式会社村田製作所 | Transformateur piézoélectrique |
JP6673484B2 (ja) | 2016-08-24 | 2020-03-25 | 株式会社村田製作所 | 圧電トランス |
WO2019161166A1 (fr) | 2018-02-16 | 2019-08-22 | Avx Corporation | Ensemble d'électrodes de condensateur à auto-alignement ayant une tension de claquage améliorée |
US11469690B2 (en) * | 2020-11-24 | 2022-10-11 | Toyota Motor Engineering & Manufacturing North America, Inc. | Electrode pairs having saw-tooth configuration and artificial muscles including same |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE420034A (fr) * | 1936-02-21 | |||
US3221962A (en) * | 1963-11-22 | 1965-12-07 | Ridge Tool Co | Apparatus for cutting pipe |
NL6912167A (fr) * | 1969-08-09 | 1971-02-11 | ||
JPS54138392A (en) * | 1978-04-20 | 1979-10-26 | Citizen Watch Co Ltd | At cut crystal oscillator |
US4356421A (en) * | 1980-03-25 | 1982-10-26 | Tohoku Metal Industries, Ltd. | Piezoelectric resonators of an energy-trapping type of a width extensional vibratory mode |
GB2118773B (en) * | 1982-03-24 | 1985-12-18 | Gen Electric Plc | Thickness shear mode piezoelectric devices |
US4481488A (en) * | 1982-11-08 | 1984-11-06 | Motorola, Inc. | Trapped energy resonator for oscillator and multiple resonator applications |
JP2935232B2 (ja) | 1991-12-04 | 1999-08-16 | 株式会社村田製作所 | Fmディスクリミネータ用圧電共振子 |
JPH08148968A (ja) * | 1994-11-24 | 1996-06-07 | Mitsubishi Electric Corp | 薄膜圧電素子 |
JPH08154032A (ja) | 1994-11-29 | 1996-06-11 | Matsushita Electric Ind Co Ltd | 圧電共振子 |
-
2001
- 2001-08-08 JP JP2001240600A patent/JP3858639B2/ja not_active Expired - Fee Related
- 2001-08-28 US US09/940,303 patent/US6577043B2/en not_active Expired - Lifetime
- 2001-08-29 DE DE10142158A patent/DE10142158B4/de not_active Expired - Fee Related
- 2001-08-31 FR FR0111303A patent/FR2813458B1/fr not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE10142158B4 (de) | 2005-05-04 |
US20020030420A1 (en) | 2002-03-14 |
JP2002152006A (ja) | 2002-05-24 |
DE10142158A1 (de) | 2002-03-28 |
FR2813458A1 (fr) | 2002-03-01 |
US6577043B2 (en) | 2003-06-10 |
JP3858639B2 (ja) | 2006-12-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |
Effective date: 20160429 |