FR2810375B1 - Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide - Google Patents

Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide

Info

Publication number
FR2810375B1
FR2810375B1 FR0007627A FR0007627A FR2810375B1 FR 2810375 B1 FR2810375 B1 FR 2810375B1 FR 0007627 A FR0007627 A FR 0007627A FR 0007627 A FR0007627 A FR 0007627A FR 2810375 B1 FR2810375 B1 FR 2810375B1
Authority
FR
France
Prior art keywords
generating device
vacuum generating
pump body
flow control
thermal conduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0007627A
Other languages
English (en)
Other versions
FR2810375A1 (fr
Inventor
Francois Houze
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0007627A priority Critical patent/FR2810375B1/fr
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Priority to DE60133459T priority patent/DE60133459D1/de
Priority to US10/049,132 priority patent/US6679676B2/en
Priority to PCT/FR2001/001866 priority patent/WO2001096744A1/fr
Priority to JP2002510839A priority patent/JP2004503713A/ja
Priority to EP01945446A priority patent/EP1290346B1/fr
Priority to AT01945446T priority patent/ATE391237T1/de
Publication of FR2810375A1 publication Critical patent/FR2810375A1/fr
Application granted granted Critical
Publication of FR2810375B1 publication Critical patent/FR2810375B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Physical Vapour Deposition (AREA)
  • Sampling And Sample Adjustment (AREA)
FR0007627A 2000-06-15 2000-06-15 Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide Expired - Fee Related FR2810375B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0007627A FR2810375B1 (fr) 2000-06-15 2000-06-15 Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
US10/049,132 US6679676B2 (en) 2000-06-15 2001-06-15 Temperature control with constant cooling flow and temperature for vacuum generating device
PCT/FR2001/001866 WO2001096744A1 (fr) 2000-06-15 2001-06-15 Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide
JP2002510839A JP2004503713A (ja) 2000-06-15 2001-06-15 一定の冷却流および温度による真空発生装置の温度制御
DE60133459T DE60133459D1 (de) 2000-06-15 2001-06-15 Temperaturregelung für eine vakuumvorrichtung
EP01945446A EP1290346B1 (fr) 2000-06-15 2001-06-15 Regulation thermique pour dispositif de generation de vide
AT01945446T ATE391237T1 (de) 2000-06-15 2001-06-15 Temperaturregelung für eine vakuumvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0007627A FR2810375B1 (fr) 2000-06-15 2000-06-15 Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide

Publications (2)

Publication Number Publication Date
FR2810375A1 FR2810375A1 (fr) 2001-12-21
FR2810375B1 true FR2810375B1 (fr) 2002-11-29

Family

ID=8851283

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0007627A Expired - Fee Related FR2810375B1 (fr) 2000-06-15 2000-06-15 Regulation thermique a debit et temperature de refroidissement constants pour dispositif de generation de vide

Country Status (7)

Country Link
US (1) US6679676B2 (fr)
EP (1) EP1290346B1 (fr)
JP (1) JP2004503713A (fr)
AT (1) ATE391237T1 (fr)
DE (1) DE60133459D1 (fr)
FR (1) FR2810375B1 (fr)
WO (1) WO2001096744A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5172615B2 (ja) * 2008-11-12 2013-03-27 Ｃｋｄ株式会社 温度制御装置
CN103149949B (zh) * 2013-01-09 2016-08-03 上海空间推进研究所 一种基于帕尔贴效应的气体微流量控制器
CN117846931B (zh) * 2024-03-08 2024-05-14 江苏纬恩复材科技有限公司 一种真空泵管道连接结构、热压罐及其工作方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61236123A (ja) * 1985-04-12 1986-10-21 Hitachi Ltd 真空処理装置
JPS648388A (en) * 1987-06-30 1989-01-12 Oki Electric Ind Co Ltd Vacuum pump device
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
FR2634829B1 (fr) * 1988-07-27 1990-09-14 Cit Alcatel Pompe a vide
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JPH04164188A (ja) * 1990-10-26 1992-06-09 Hitachi Ltd 半導体製造装置排気用ターボ分子ポンプ
JPH05118296A (ja) * 1991-10-25 1993-05-14 Hitachi Ltd ドライ真空ポンプ
WO1994000694A1 (fr) * 1992-06-19 1994-01-06 Leybold Aktiengesellschaft Pompe a vide a gaz et a friction
JPH07174099A (ja) * 1992-08-14 1995-07-11 Hitachi Ltd 真空ポンプの冷却装置
JP3831113B2 (ja) * 1998-03-31 2006-10-11 大晃機械工業株式会社 真空ポンプ

Also Published As

Publication number Publication date
JP2004503713A (ja) 2004-02-05
FR2810375A1 (fr) 2001-12-21
WO2001096744A1 (fr) 2001-12-20
DE60133459D1 (de) 2008-05-15
EP1290346A1 (fr) 2003-03-12
EP1290346B1 (fr) 2008-04-02
US20020106285A1 (en) 2002-08-08
ATE391237T1 (de) 2008-04-15
US6679676B2 (en) 2004-01-20

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Legal Events

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CD Change of name or company name
ST Notification of lapse

Effective date: 20100226