FR2780162B1 - Structure de test de circuit, circuit integre et procede de test - Google Patents

Structure de test de circuit, circuit integre et procede de test

Info

Publication number
FR2780162B1
FR2780162B1 FR9807788A FR9807788A FR2780162B1 FR 2780162 B1 FR2780162 B1 FR 2780162B1 FR 9807788 A FR9807788 A FR 9807788A FR 9807788 A FR9807788 A FR 9807788A FR 2780162 B1 FR2780162 B1 FR 2780162B1
Authority
FR
France
Prior art keywords
circuit
test
integrated circuit
test method
test structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9807788A
Other languages
English (en)
Other versions
FR2780162A1 (fr
Inventor
Benoit Froment
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR9807788A priority Critical patent/FR2780162B1/fr
Priority to US09/336,269 priority patent/US6366098B1/en
Publication of FR2780162A1 publication Critical patent/FR2780162A1/fr
Application granted granted Critical
Publication of FR2780162B1 publication Critical patent/FR2780162B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
FR9807788A 1998-06-19 1998-06-19 Structure de test de circuit, circuit integre et procede de test Expired - Fee Related FR2780162B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR9807788A FR2780162B1 (fr) 1998-06-19 1998-06-19 Structure de test de circuit, circuit integre et procede de test
US09/336,269 US6366098B1 (en) 1998-06-19 1999-06-18 Test structure, integrated circuit, and test method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9807788A FR2780162B1 (fr) 1998-06-19 1998-06-19 Structure de test de circuit, circuit integre et procede de test

Publications (2)

Publication Number Publication Date
FR2780162A1 FR2780162A1 (fr) 1999-12-24
FR2780162B1 true FR2780162B1 (fr) 2000-09-08

Family

ID=9527623

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9807788A Expired - Fee Related FR2780162B1 (fr) 1998-06-19 1998-06-19 Structure de test de circuit, circuit integre et procede de test

Country Status (2)

Country Link
US (1) US6366098B1 (fr)
FR (1) FR2780162B1 (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6934669B1 (en) * 1999-08-26 2005-08-23 Roberto Suaya Capacitance measurements for an integrated circuit
DE10001129A1 (de) * 2000-01-13 2001-07-26 Infineon Technologies Ag Schaltungsanordnung zur Kapazitätsmessung von Strukturen in einer integrierten Schaltung
DE10010946C2 (de) * 2000-03-06 2002-06-20 Infineon Technologies Ag Schaltungsanordnung und Verfahren zum Bewerten von Kapazitäten
US6856143B2 (en) * 2002-06-14 2005-02-15 Texas Instruments Incorporated System and method for measuring a capacitance of a conductor
US6788074B2 (en) * 2002-06-21 2004-09-07 Texas Instruments Incorporated System and method for using a capacitance measurement to monitor the manufacture of a semiconductor
US6870375B2 (en) * 2002-07-01 2005-03-22 Texas Instruments Incorporated System and method for measuring a capacitance associated with an integrated circuit
US6731129B1 (en) * 2002-12-17 2004-05-04 International Business Machines Corporation Apparatus for measuring capacitance of a semiconductor device
JP4342959B2 (ja) * 2003-01-21 2009-10-14 株式会社ルネサステクノロジ 容量値測定用回路及び配線特性の解析方法
DE60306892T2 (de) * 2003-05-02 2007-08-30 Stmicroelectronics S.R.L., Agrate Brianza Verfahren und Anordnung zur Messung der Kopplungskapazität zwischen zwei Leiterbahnen
JP4593891B2 (ja) * 2003-07-08 2010-12-08 パナソニック株式会社 半導体装置
US6987394B1 (en) * 2003-09-22 2006-01-17 Sun Microsystems, Inc. Full-wave rectifier for capacitance measurements
US6980009B2 (en) * 2003-10-22 2005-12-27 International Business Machines Corporation Structure for measurement of capacitance of ultra-thin dielectrics
FR2885416B1 (fr) * 2005-05-07 2016-06-10 Acam Messelectronic Gmbh Procede et dispositif de mesure de capacites.
TWI306950B (en) * 2006-11-06 2009-03-01 Macronix Int Co Ltd Method for measuring intrinsic capacitances of a mos device
US20100221846A1 (en) 2007-10-12 2010-09-02 Nxp B.V. Sensor, a sensor array, and a method of operating a sensor
US20110254569A1 (en) * 2010-04-15 2011-10-20 Peter Bogner Measurement apparatus
DE102010046214A1 (de) * 2010-09-21 2012-03-22 Infineon Technologies Ag Teststruktur und Verfahren zum Testen eines Wafers
WO2013108082A1 (fr) 2012-01-20 2013-07-25 Freescale Semiconductor, Inc. Module de mesure de la capacité sur puce et procédé de mesure d'une charge capacitive sur puce
CN102854398B (zh) * 2012-08-23 2016-12-21 上海华虹宏力半导体制造有限公司 寄生电容的测量方法以及栅介质层厚度的计算方法
CN104407229A (zh) * 2014-10-24 2015-03-11 中国人民解放军国防科学技术大学 一种双栅极场效应晶体管电容的测试方法
FR3111006B1 (fr) * 2020-05-28 2023-05-26 St Microelectronics Crolles 2 Sas Dispositif intégré de fonction physique non-clonable

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5519327A (en) * 1994-06-10 1996-05-21 Vlsi Technology, Inc. Pulse circuit using a transmission line
US5576628A (en) * 1994-09-30 1996-11-19 Telcom Semiconductor, Inc. Method and apparatus to measure capacitance

Also Published As

Publication number Publication date
FR2780162A1 (fr) 1999-12-24
US6366098B1 (en) 2002-04-02

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Legal Events

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Effective date: 20100226