FR2750248B1 - Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter - Google Patents

Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter

Info

Publication number
FR2750248B1
FR2750248B1 FR9607625A FR9607625A FR2750248B1 FR 2750248 B1 FR2750248 B1 FR 2750248B1 FR 9607625 A FR9607625 A FR 9607625A FR 9607625 A FR9607625 A FR 9607625A FR 2750248 B1 FR2750248 B1 FR 2750248B1
Authority
FR
France
Prior art keywords
getter
pumping device
implementing
evaporable
metal wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9607625A
Other languages
English (en)
Other versions
FR2750248A1 (fr
Inventor
Cristoforo Benvenuti
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Organisation Europeene pour la Recherche Nucleaire
Original Assignee
Organisation Europeene pour la Recherche Nucleaire
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9607625A priority Critical patent/FR2750248B1/fr
Application filed by Organisation Europeene pour la Recherche Nucleaire filed Critical Organisation Europeene pour la Recherche Nucleaire
Priority to EP97929213A priority patent/EP0906635B1/fr
Priority to DE69719507T priority patent/DE69719507T2/de
Priority to CA2258118A priority patent/CA2258118C/fr
Priority to JP50227698A priority patent/JP4620187B2/ja
Priority to ES97929213T priority patent/ES2193382T3/es
Priority to US09/202,668 priority patent/US6468043B1/en
Priority to DK97929213T priority patent/DK0906635T3/da
Priority to PT97929213T priority patent/PT906635E/pt
Priority to AT97929213T priority patent/ATE233946T1/de
Priority to AU33404/97A priority patent/AU3340497A/en
Priority to PCT/EP1997/003180 priority patent/WO1997049109A1/fr
Priority to RU99100321/09A priority patent/RU2193254C2/ru
Publication of FR2750248A1 publication Critical patent/FR2750248A1/fr
Application granted granted Critical
Publication of FR2750248B1 publication Critical patent/FR2750248B1/fr
Priority to NO19985927A priority patent/NO317454B1/no
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H01J7/183—Composition or manufacture of getters
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/14—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J7/18—Means for absorbing or adsorbing gas, e.g. by gettering
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
    • H05H7/14—Vacuum chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vessels, Lead-In Wires, Accessory Apparatuses For Cathode-Ray Tubes (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Fats And Perfumes (AREA)
  • Thermal Insulation (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Physical Vapour Deposition (AREA)
  • Finger-Pressure Massage (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
FR9607625A 1996-06-19 1996-06-19 Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter Expired - Lifetime FR2750248B1 (fr)

Priority Applications (14)

Application Number Priority Date Filing Date Title
FR9607625A FR2750248B1 (fr) 1996-06-19 1996-06-19 Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter
AU33404/97A AU3340497A (en) 1996-06-19 1997-06-18 Pumping device by non-vaporisable getter and method for using this getter
CA2258118A CA2258118C (fr) 1996-06-19 1997-06-18 Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter
JP50227698A JP4620187B2 (ja) 1996-06-19 1997-06-18 非蒸発性ゲッターによるポンプ装置およびこのゲッターの使用法
ES97929213T ES2193382T3 (es) 1996-06-19 1997-06-18 Procedimiento de puesta en marcha de un rarefactor-"getter" no evaporable.
US09/202,668 US6468043B1 (en) 1996-06-19 1997-06-18 Pumping device by non-vaporisable getter and method for using this getter
DK97929213T DK0906635T3 (da) 1996-06-19 1997-06-18 Fremgangsmåde til anvendelse af en ikke fordampelig getter
PT97929213T PT906635E (pt) 1996-06-19 1997-06-18 Processo para a utilizacao de um absorvente de gases nao vaporizavel
EP97929213A EP0906635B1 (fr) 1996-06-19 1997-06-18 Procede de mise en oeuvre d'un getter non evaporable
DE69719507T DE69719507T2 (de) 1996-06-19 1997-06-18 Verfahren zur anwendung eines nicht verdampfbaren getters
PCT/EP1997/003180 WO1997049109A1 (fr) 1996-06-19 1997-06-18 Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter
RU99100321/09A RU2193254C2 (ru) 1996-06-19 1997-06-18 Откачивающее устройство, предусматривающее применение неиспаряющегося геттера, и способы применения данного геттера
AT97929213T ATE233946T1 (de) 1996-06-19 1997-06-18 Verfahren zur anwendung eines nicht verdampfbaren getters
NO19985927A NO317454B1 (no) 1996-06-19 1998-12-17 Fremgangsmate for anvendelse av en ikke-fordampbar getter.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9607625A FR2750248B1 (fr) 1996-06-19 1996-06-19 Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter

Publications (2)

Publication Number Publication Date
FR2750248A1 FR2750248A1 (fr) 1997-12-26
FR2750248B1 true FR2750248B1 (fr) 1998-08-28

Family

ID=9493210

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9607625A Expired - Lifetime FR2750248B1 (fr) 1996-06-19 1996-06-19 Dispositif de pompage par getter non evaporable et procede de mise en oeuvre de ce getter

Country Status (14)

Country Link
US (1) US6468043B1 (fr)
EP (1) EP0906635B1 (fr)
JP (1) JP4620187B2 (fr)
AT (1) ATE233946T1 (fr)
AU (1) AU3340497A (fr)
CA (1) CA2258118C (fr)
DE (1) DE69719507T2 (fr)
DK (1) DK0906635T3 (fr)
ES (1) ES2193382T3 (fr)
FR (1) FR2750248B1 (fr)
NO (1) NO317454B1 (fr)
PT (1) PT906635E (fr)
RU (1) RU2193254C2 (fr)
WO (1) WO1997049109A1 (fr)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1312248B1 (it) * 1999-04-12 2002-04-09 Getters Spa Metodo per aumentare la produttivita' di processi di deposizione distrati sottili su un substrato e dispositivi getter per la
US7315115B1 (en) 2000-10-27 2008-01-01 Canon Kabushiki Kaisha Light-emitting and electron-emitting devices having getter regions
IT1319141B1 (it) * 2000-11-28 2003-09-23 Getters Spa Unita' di accelerazione e focalizzazione, a vuoto migliorato, diimpiantatori ionici per la produzione di dispositivi a semiconduttore
ITMI20012389A1 (it) * 2001-11-12 2003-05-12 Getters Spa Catodo cavo con getter integrato per lampade a scarica e metodi per la sua realizzazione
DE10209423A1 (de) * 2002-03-05 2003-09-18 Schwerionenforsch Gmbh Beschichtung aus einer Gettermetall-Legierung sowie Anordnung und Verfahren zur Herstellung derselben
ITMI20031178A1 (it) * 2003-06-11 2004-12-12 Getters Spa Depositi multistrato getter non evaporabili ottenuti per
ES2291846T3 (es) 2004-01-22 2008-03-01 European Organisation For Nuclear Research Cern Colector solar de panel plano evacuable.
US7888891B2 (en) * 2004-03-29 2011-02-15 National Cerebral And Cardiovascular Center Particle beam accelerator
GB0523838D0 (en) * 2005-11-23 2006-01-04 Oxford Instr Analytical Ltd X-Ray detector and method
ITMI20070301A1 (it) * 2007-02-16 2008-08-17 Getters Spa Supporti comprendenti materiali getter e sorgenti di metalli alcalini o alcalino-terrosi per sistemi di termoregolazione basati su effetto tunnel
EP1983548A1 (fr) * 2007-04-20 2008-10-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Chambre d'émetteur, appareil à particule chargée et son procédé de fonctionnement
EP2071188A1 (fr) 2007-12-10 2009-06-17 VARIAN S.p.A. Dispositif pour le dépôt de getters non évaporables (NEGs) et procédé de dépôt utilisant un tel dispositif
CN102089600B (zh) * 2008-06-11 2012-11-28 Srb能源研究有限公司 高效率的真空太阳能电池板
CN102691640B (zh) * 2012-05-29 2015-12-02 储琦 一种抽气***及工艺
RU2513563C2 (ru) * 2012-08-17 2014-04-20 Федеральное государственное унитарное предприятие "Научно-производственное предприятие "Исток" (ФГУП "НПП "Исток") Спеченный неиспаряющийся геттер
RU2663813C2 (ru) * 2014-06-26 2018-08-10 Саес Геттерс С.П.А. Геттерная насосная система
DE102016123146A1 (de) 2016-06-03 2017-12-07 Movatec Gmbh Vakuumgerät und Verfahren zur Beschichtung von Bauteilen
US20200149519A1 (en) * 2016-11-28 2020-05-14 Inter-University Research Institute Corporation High Energy Accelerator Research Organization Non-evaporable getter coated component and chamber, manufacturing method and manufacturing apparatus
FR3072788B1 (fr) 2017-10-24 2020-05-29 Commissariat A L'energie Atomique Et Aux Energies Alternatives Source de rayonnement infrarouge modulable
JP2022178656A (ja) 2021-05-20 2022-12-02 大学共同利用機関法人 高エネルギー加速器研究機構 非蒸発型ゲッタコーティング装置、非蒸発型ゲッタコーティング容器・配管の製造方法、非蒸発型ゲッタコーティング容器・配管
FR3128307A1 (fr) 2021-10-14 2023-04-21 Safran Electronics & Defense Getter non evaporable activable a faible temperature, dispositif de pompage et enceinte contenant un tel getter
CN116575005B (zh) * 2023-05-10 2024-01-16 中国科学院近代物理研究所 一种TiZrCo真空吸气剂薄膜及其制备方法与应用

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA622379A (en) * 1961-06-20 Union Carbide Corporation Getters
NL52890C (fr) * 1936-06-21
US2175695A (en) * 1937-11-27 1939-10-10 Gen Electric Gettering
BE476526A (fr) * 1946-10-05
GB828982A (en) * 1956-12-28 1960-02-24 Gen Electric Improvements in evacuated and gas-filled devices and methods of manufacturing
US3544829A (en) * 1968-02-03 1970-12-01 Tokyo Shibaura Electric Co Low pressure mercury vapour discharge lamp
US4038738A (en) * 1975-01-10 1977-08-02 Uddeholms Aktiebolag Method and means for the production of bar stock from metal powder
US4097195A (en) * 1975-02-12 1978-06-27 Varian Associates, Inc. High vacuum pump
US4050914A (en) * 1976-07-26 1977-09-27 S.A.E.S. Getters S.P.A. Accelerator for charged particles
JPS5459662A (en) * 1977-10-20 1979-05-14 Nippon Oxygen Co Ltd Preparation of thermos in metal
DE3814389A1 (de) * 1988-04-28 1989-11-09 Kernforschungsanlage Juelich Verfahren zur restgasminderung in hochvakuumanlagen durch getterschichten und deren erzeugung sowie entsprechend beschichtete hochvakuumanlagen
JPH03147298A (ja) * 1989-11-01 1991-06-24 Mitsubishi Electric Corp 加速器用真空容器
JPH03239869A (ja) * 1990-02-13 1991-10-25 Japan Steel Works Ltd:The 真空チャンバー
JP2967785B2 (ja) * 1990-04-24 1999-10-25 株式会社日本製鋼所 ゲツターポンプ装置
JP2561570Y2 (ja) * 1991-08-06 1998-01-28 株式会社日本製鋼所 高真空排気装置
JP2721602B2 (ja) * 1991-08-26 1998-03-04 株式会社日本製鋼所 水素吸蔵合金による水素排気方法及び装置
EP0563465B1 (fr) * 1991-12-10 1997-11-05 Shell Internationale Researchmaatschappij B.V. Procédé et dispositif pour créer le vide
JP3290697B2 (ja) * 1992-04-30 2002-06-10 株式会社東芝 真空排気装置
IT1255438B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
IT1255439B (it) * 1992-07-17 1995-10-31 Getters Spa Pompa getter non evaporabile
JPH07233785A (ja) * 1994-02-23 1995-09-05 Ishikawajima Harima Heavy Ind Co Ltd 非蒸発型ゲッターポンプ
JP3309193B2 (ja) * 1994-03-17 2002-07-29 株式会社日立製作所 真空ダクト内表面処理方法および真空ダクト内表面処理装置
US5688708A (en) * 1996-06-24 1997-11-18 Motorola Method of making an ultra-high vacuum field emission display

Also Published As

Publication number Publication date
JP2001503830A (ja) 2001-03-21
EP0906635A1 (fr) 1999-04-07
NO317454B1 (no) 2004-11-01
DE69719507T2 (de) 2004-02-19
AU3340497A (en) 1998-01-07
NO985927L (no) 1998-12-17
JP4620187B2 (ja) 2011-01-26
RU2193254C2 (ru) 2002-11-20
FR2750248A1 (fr) 1997-12-26
ATE233946T1 (de) 2003-03-15
WO1997049109A1 (fr) 1997-12-24
DE69719507D1 (de) 2003-04-10
PT906635E (pt) 2003-07-31
DK0906635T3 (da) 2003-06-23
US6468043B1 (en) 2002-10-22
ES2193382T3 (es) 2003-11-01
CA2258118A1 (fr) 1997-12-24
CA2258118C (fr) 2010-08-17
NO985927D0 (no) 1998-12-17
EP0906635B1 (fr) 2003-03-05

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