FR2693814B1 - Procédé pour convertir un signal de mesure, convertisseur, dispositif de mesure et circuit de mesure de Pirani. - Google Patents

Procédé pour convertir un signal de mesure, convertisseur, dispositif de mesure et circuit de mesure de Pirani.

Info

Publication number
FR2693814B1
FR2693814B1 FR9308824A FR9308824A FR2693814B1 FR 2693814 B1 FR2693814 B1 FR 2693814B1 FR 9308824 A FR9308824 A FR 9308824A FR 9308824 A FR9308824 A FR 9308824A FR 2693814 B1 FR2693814 B1 FR 2693814B1
Authority
FR
France
Prior art keywords
converter
converting
measurement signal
pirani
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9308824A
Other languages
English (en)
Other versions
FR2693814A1 (fr
Inventor
Rudolph Stocker
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2693814A1 publication Critical patent/FR2693814A1/fr
Application granted granted Critical
Publication of FR2693814B1 publication Critical patent/FR2693814B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
    • G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
    • G01D3/036—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure on measuring arrangements themselves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
FR9308824A 1992-07-20 1993-07-19 Procédé pour convertir un signal de mesure, convertisseur, dispositif de mesure et circuit de mesure de Pirani. Expired - Fee Related FR2693814B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH2278/92A CH684805A5 (de) 1992-07-20 1992-07-20 Verfahren zur Wandlung eines gemessenen Signals, Wandler zu dessen Ausführung sowie Messanordnung.

Publications (2)

Publication Number Publication Date
FR2693814A1 FR2693814A1 (fr) 1994-01-21
FR2693814B1 true FR2693814B1 (fr) 1994-10-21

Family

ID=4230034

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9308824A Expired - Fee Related FR2693814B1 (fr) 1992-07-20 1993-07-19 Procédé pour convertir un signal de mesure, convertisseur, dispositif de mesure et circuit de mesure de Pirani.

Country Status (6)

Country Link
US (1) US5475623A (fr)
JP (1) JP3213125B2 (fr)
CH (1) CH684805A5 (fr)
DE (1) DE4324119C2 (fr)
FR (1) FR2693814B1 (fr)
IT (1) IT1265164B1 (fr)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4445534C1 (de) * 1994-12-20 1995-11-23 Saskia Hochvakuum Und Labortec Verfahren und Vorrichtung zum Gewinnen eines Kalibrierwerts für einen piezoelektrischen Vakuum-Druckmesser
US6023979A (en) 1997-07-21 2000-02-15 Helix Technology Apparatus and methods for heat loss pressure measurement
US7076920B2 (en) * 2000-03-22 2006-07-18 Mks Instruments, Inc. Method of using a combination differential and absolute pressure transducer for controlling a load lock
US7087451B2 (en) * 2004-03-24 2006-08-08 Intel Corporation Microfabricated hot wire vacuum sensor
US7483795B2 (en) * 2004-08-10 2009-01-27 Robertshaw Controls Company Pressure and temperature compensation algorithm for use with a piezo-resistive strain gauge type pressure sensor
WO2009035123A1 (fr) * 2007-09-13 2009-03-19 Canon Anelva Technix Corporation Manomètre de pirani
US8878598B2 (en) * 2010-12-28 2014-11-04 British Virgin Islands Central Digital Inc. Sensing module
CH704815A1 (de) * 2011-03-30 2012-10-15 Inficon Gmbh Gasdruckmesszellenanordnung.
US9429479B2 (en) * 2012-07-18 2016-08-30 Millar Instruments Methods, devices, and systems which determine a parameter value of an object or an environment from a voltage reading associated with a common mode signal of a balanced circuit
DE102013219437B4 (de) * 2013-09-26 2015-12-10 Robert Bosch Gmbh Verfahren und Vorrichtung zum Bewerten einer Güte eines Vakuums
US10845263B2 (en) 2018-04-17 2020-11-24 Mks Instruments, Inc. Thermal conductivity gauge
WO2020121576A1 (fr) * 2018-12-12 2020-06-18 株式会社アルバック Vacuomètre et système de mesure de pression comprenant un vacuomètre
EP3690417A1 (fr) * 2019-02-01 2020-08-05 Sens4 A/S Appareil pour la mesure du vide à perte thermique ayant une compensation de température améliorée et une plage de mesure étendue
US20240118158A1 (en) * 2022-10-11 2024-04-11 Mks Instruments, Inc. Pirani Gauge
CN115683296B (zh) * 2022-12-30 2023-04-18 广东泓胜科技股份有限公司 道路称重传感器数据的动态阈值处理方法及相关设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2030956A (en) * 1929-09-25 1936-02-18 Western Electric Co Measuring apparatus
US3580081A (en) * 1969-09-10 1971-05-25 Veeco Instr Inc Vacuum gauge
US3700918A (en) * 1970-04-13 1972-10-24 Mitsubishi Electric Corp Logarithmic amplifier
US4004141A (en) * 1975-08-04 1977-01-18 Curtis Douglas R Linear/logarithmic analog multiplier
DE3230405A1 (de) * 1981-08-28 1983-03-10 Boc Ltd., London Gasdruck-messschaltung
GB2105047B (en) * 1981-08-28 1986-04-03 British Oxygen Co Ltd Pirani gauges
US4604532A (en) * 1983-01-03 1986-08-05 Analog Devices, Incorporated Temperature compensated logarithmic circuit
DD262778A3 (de) * 1987-04-21 1988-12-14 Inst Stahlbeton Schaltungsanordnung zur linearisierung und normierung des kennlinienfeldes einer in einem messwertaufnehmer erzeugten wechselspannungs-messsignals
JPH0671185B2 (ja) * 1988-07-20 1994-09-07 三洋電機株式会社 対数増幅回路
EP0379841B2 (fr) * 1989-01-23 1998-11-04 Balzers Aktiengesellschaft Appareil de mesure de pression d'un gaz
NL8902422A (nl) * 1989-09-29 1991-04-16 Philips Nv Meetinrichting.
US5012140A (en) * 1990-03-19 1991-04-30 Tektronix, Inc. Logarithmic amplifier with gain control
NL9002279A (nl) * 1990-10-19 1992-05-18 Philips Nv Meetinrichting met normeringscircuit.
US5327029A (en) * 1993-05-06 1994-07-05 Martin Marietta Energy Systems, Inc. Logarithmic current measurement circuit with improved accuracy and temperature stability and associated method

Also Published As

Publication number Publication date
US5475623A (en) 1995-12-12
JPH06160226A (ja) 1994-06-07
FR2693814A1 (fr) 1994-01-21
CH684805A5 (de) 1994-12-30
DE4324119C2 (de) 2002-06-27
IT1265164B1 (it) 1996-10-31
JP3213125B2 (ja) 2001-10-02
ITMI931570A1 (it) 1995-01-16
DE4324119A1 (de) 1994-01-27
ITMI931570A0 (it) 1993-07-16

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Legal Events

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ST Notification of lapse

Effective date: 20120330