FR2650664B1 - Dispositif de mesure de deplacement par interferometrie - Google Patents

Dispositif de mesure de deplacement par interferometrie

Info

Publication number
FR2650664B1
FR2650664B1 FR8910359A FR8910359A FR2650664B1 FR 2650664 B1 FR2650664 B1 FR 2650664B1 FR 8910359 A FR8910359 A FR 8910359A FR 8910359 A FR8910359 A FR 8910359A FR 2650664 B1 FR2650664 B1 FR 2650664B1
Authority
FR
France
Prior art keywords
measurement device
displacement measurement
interferometry
interferometry displacement
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR8910359A
Other languages
English (en)
Other versions
FR2650664A1 (fr
Inventor
Laurent Berger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MICRO CONTROLE
Original Assignee
MICRO CONTROLE
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MICRO CONTROLE filed Critical MICRO CONTROLE
Priority to FR8910359A priority Critical patent/FR2650664B1/fr
Priority to PCT/FR1990/000582 priority patent/WO1991002214A1/fr
Publication of FR2650664A1 publication Critical patent/FR2650664A1/fr
Application granted granted Critical
Publication of FR2650664B1 publication Critical patent/FR2650664B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02083—Interferometers characterised by particular signal processing and presentation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
FR8910359A 1989-08-01 1989-08-01 Dispositif de mesure de deplacement par interferometrie Expired - Lifetime FR2650664B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR8910359A FR2650664B1 (fr) 1989-08-01 1989-08-01 Dispositif de mesure de deplacement par interferometrie
PCT/FR1990/000582 WO1991002214A1 (fr) 1989-08-01 1990-08-01 Dispositif de mesure de deplacement par interferometrie

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8910359A FR2650664B1 (fr) 1989-08-01 1989-08-01 Dispositif de mesure de deplacement par interferometrie

Publications (2)

Publication Number Publication Date
FR2650664A1 FR2650664A1 (fr) 1991-02-08
FR2650664B1 true FR2650664B1 (fr) 1991-11-15

Family

ID=9384359

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8910359A Expired - Lifetime FR2650664B1 (fr) 1989-08-01 1989-08-01 Dispositif de mesure de deplacement par interferometrie

Country Status (2)

Country Link
FR (1) FR2650664B1 (fr)
WO (1) WO1991002214A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04331333A (ja) * 1991-05-02 1992-11-19 Canon Inc 波長変化測定装置
GB2268582B (en) * 1992-07-09 1995-12-20 Roke Manor Research Improvements in or relating to interferometers
ES2079282B1 (es) * 1993-09-13 1997-11-16 Fagor S Coop Dispositivo interferometrico y metodo para medir y para estabilizar la longitud de onda de diodo laser.

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3734623A (en) * 1972-03-01 1973-05-22 Bendix Corp Interferometer utilizing a tunable laser or similar frequency variable wave energy generator
US3970389A (en) * 1974-02-14 1976-07-20 Mendrin Michael J Variable frequency interferometer
DE3715627A1 (de) * 1987-05-11 1988-12-08 Hommelwerke Gmbh Vorrichtung zur messung des abstandes zwischen der vorrichtung und einer messflaeche

Also Published As

Publication number Publication date
FR2650664A1 (fr) 1991-02-08
WO1991002214A1 (fr) 1991-02-21

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Legal Events

Date Code Title Description
ST Notification of lapse