FR2602055B1 - Capteur d'acceleration capacitif - Google Patents

Capteur d'acceleration capacitif

Info

Publication number
FR2602055B1
FR2602055B1 FR8710556A FR8710556A FR2602055B1 FR 2602055 B1 FR2602055 B1 FR 2602055B1 FR 8710556 A FR8710556 A FR 8710556A FR 8710556 A FR8710556 A FR 8710556A FR 2602055 B1 FR2602055 B1 FR 2602055B1
Authority
FR
France
Prior art keywords
acceleration sensor
capacitive acceleration
capacitive
sensor
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8710556A
Other languages
English (en)
Other versions
FR2602055A1 (fr
Inventor
Helmut Seidel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Airbus Defence and Space GmbH
Original Assignee
Messerschmitt Bolkow Blohm AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Messerschmitt Bolkow Blohm AG filed Critical Messerschmitt Bolkow Blohm AG
Publication of FR2602055A1 publication Critical patent/FR2602055A1/fr
Application granted granted Critical
Publication of FR2602055B1 publication Critical patent/FR2602055B1/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Measuring Fluid Pressure (AREA)
FR8710556A 1986-07-26 1987-07-24 Capteur d'acceleration capacitif Expired FR2602055B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19863625411 DE3625411A1 (de) 1986-07-26 1986-07-26 Kapazitiver beschleunigungssensor

Publications (2)

Publication Number Publication Date
FR2602055A1 FR2602055A1 (fr) 1988-01-29
FR2602055B1 true FR2602055B1 (fr) 1989-12-22

Family

ID=6306096

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8710556A Expired FR2602055B1 (fr) 1986-07-26 1987-07-24 Capteur d'acceleration capacitif

Country Status (4)

Country Link
CH (1) CH673897A5 (fr)
DE (1) DE3625411A1 (fr)
FR (1) FR2602055B1 (fr)
GB (1) GB2194341B (fr)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI81915C (fi) * 1987-11-09 1990-12-10 Vaisala Oy Kapacitiv accelerationsgivare och foerfarande foer framstaellning daerav.
DE3742385A1 (de) * 1987-12-14 1989-06-22 Siemens Ag Beschleunigungsempfindliches elektronisches bauelement
US4825335A (en) * 1988-03-14 1989-04-25 Endevco Corporation Differential capacitive transducer and method of making
JPH0623782B2 (ja) * 1988-11-15 1994-03-30 株式会社日立製作所 静電容量式加速度センサ及び半導体圧力センサ
US4930042A (en) * 1989-02-28 1990-05-29 United Technologies Capacitive accelerometer with separable damping and sensitivity
US4930043A (en) * 1989-02-28 1990-05-29 United Technologies Closed-loop capacitive accelerometer with spring constraint
US5008774A (en) * 1989-02-28 1991-04-16 United Technologies Corporation Capacitive accelerometer with mid-plane proof mass
US4928203A (en) * 1989-02-28 1990-05-22 United Technologies Capacitive accelerometer with hinges on top and bottom surface
DD282530A5 (de) * 1989-04-24 1990-09-12 Karl Marx Stadt Tech Hochschul Kapazitiver mikromechanischer beschleunigungssensor
DE4015464A1 (de) * 1989-06-05 1990-12-06 Motorola Inc Doppelt-integrierende silicium-beschleunigungserfassungseinrichtung
DE3922476A1 (de) * 1989-07-06 1991-01-17 Siemens Ag Kapazitiver beschleunigungssensor in mikromechanischer ausfuehrung
US5115291A (en) * 1989-07-27 1992-05-19 Honeywell Inc. Electrostatic silicon accelerometer
US5006487A (en) * 1989-07-27 1991-04-09 Honeywell Inc. Method of making an electrostatic silicon accelerometer
DE69019343T2 (de) 1989-12-28 1996-02-15 Wako Kk Beschleunigungssensoren.
US6864677B1 (en) 1993-12-15 2005-03-08 Kazuhiro Okada Method of testing a sensor
DE4016471A1 (de) * 1990-05-22 1991-11-28 Bosch Gmbh Robert Mikromechanischer neigungssensor
US5253526A (en) * 1990-05-30 1993-10-19 Copal Company Limited Capacitive acceleration sensor with free diaphragm
DE4022495A1 (de) * 1990-07-14 1992-01-23 Bosch Gmbh Robert Mikromechanischer drehratensensor
US5233213A (en) * 1990-07-14 1993-08-03 Robert Bosch Gmbh Silicon-mass angular acceleration sensor
DE4102805A1 (de) * 1991-01-31 1992-08-13 Bosch Gmbh Robert Kapazitiver beschleunigungssensor
DE9205416U1 (de) * 1992-04-21 1993-05-19 Kampfrath, Gerit, Dr. Dynamischer Beschleunigungssensor
DE4226430C2 (de) * 1992-08-10 1996-02-22 Karlsruhe Forschzent Kapazitiver Beschleunigungssensor
DE4326666C1 (de) * 1993-08-09 1995-02-23 Wild Heerbrugg Ag Kapazitiver Sensor
US5824901A (en) * 1993-08-09 1998-10-20 Leica Geosystems Ag Capacitive sensor for measuring accelerations and inclinations
DE4406342C1 (de) * 1994-02-26 1995-03-09 Kernforschungsz Karlsruhe Sensor und Verfahren zu dessen Herstellung
US6602216B1 (en) * 1998-05-18 2003-08-05 William E. Nordt, III Plantar fascia tension device
CN101529257B (zh) * 2006-11-14 2011-06-15 松下电器产业株式会社 传感器
JP5354006B2 (ja) * 2009-03-04 2013-11-27 コニカミノルタ株式会社 平行移動機構および平行移動機構の製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL136155C (fr) * 1966-09-09
US3709042A (en) * 1969-05-14 1973-01-09 S Lee Capacitance accelerometer
JPS5516228A (en) * 1978-07-21 1980-02-04 Hitachi Ltd Capacity type sensor
US4244225A (en) * 1979-06-08 1981-01-13 Itt Industries, Inc. Mechanical resonator arrangements
SE436936B (sv) * 1981-01-29 1985-01-28 Asea Ab Integrerad kapacitiv givare
CH642461A5 (fr) * 1981-07-02 1984-04-13 Centre Electron Horloger Accelerometre.
GB2102579B (en) * 1981-07-14 1984-11-21 Sundstrand Data Control Force transducer flexure reed bearing electrical connectors
US4699006A (en) * 1984-03-19 1987-10-13 The Charles Stark Draper Laboratory, Inc. Vibratory digital integrating accelerometer
US4598585A (en) * 1984-03-19 1986-07-08 The Charles Stark Draper Laboratory, Inc. Planar inertial sensor
US4574327A (en) * 1984-05-18 1986-03-04 Becton, Dickinson And Company Capacitive transducer
US4679434A (en) * 1985-07-25 1987-07-14 Litton Systems, Inc. Integrated force balanced accelerometer

Also Published As

Publication number Publication date
GB2194341B (en) 1990-05-23
GB2194341A (en) 1988-03-02
DE3625411C2 (fr) 1988-05-11
CH673897A5 (fr) 1990-04-12
GB8716443D0 (en) 1987-08-19
DE3625411A1 (de) 1988-02-04
FR2602055A1 (fr) 1988-01-29

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