FR2564602A1 - Capteur optique astigmate sans contact - Google Patents
Capteur optique astigmate sans contact Download PDFInfo
- Publication number
- FR2564602A1 FR2564602A1 FR8407874A FR8407874A FR2564602A1 FR 2564602 A1 FR2564602 A1 FR 2564602A1 FR 8407874 A FR8407874 A FR 8407874A FR 8407874 A FR8407874 A FR 8407874A FR 2564602 A1 FR2564602 A1 FR 2564602A1
- Authority
- FR
- France
- Prior art keywords
- optical sensor
- tion
- detector
- optical
- sensor defined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 63
- 201000009310 astigmatism Diseases 0.000 claims description 14
- 239000006185 dispersion Substances 0.000 claims 2
- 241000238876 Acari Species 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 239000011159 matrix material Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 10
- 238000005259 measurement Methods 0.000 abstract description 8
- 230000005855 radiation Effects 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 description 7
- 238000011144 upstream manufacturing Methods 0.000 description 7
- 230000006870 function Effects 0.000 description 5
- 238000005305 interferometry Methods 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 2
- 244000232745 Bactris gasipaes Species 0.000 description 1
- 241001061137 Caulophrynidae Species 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/08—Anamorphotic objectives
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB08411592A GB2158228A (en) | 1984-05-05 | 1984-05-05 | Astigmatic non-contact optical probe |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2564602A1 true FR2564602A1 (fr) | 1985-11-22 |
Family
ID=10560565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8407874A Pending FR2564602A1 (fr) | 1984-05-05 | 1984-05-21 | Capteur optique astigmate sans contact |
Country Status (5)
Country | Link |
---|---|
CH (1) | CH658312A5 (de) |
DE (1) | DE3418767A1 (de) |
FR (1) | FR2564602A1 (de) |
GB (1) | GB2158228A (de) |
SE (1) | SE8402589L (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2595815A1 (fr) * | 1986-03-17 | 1987-09-18 | Clecim Sa | Procede et dispositif de reperage des defauts de planeite d'une tole |
FR2604515A1 (fr) * | 1986-09-29 | 1988-04-01 | Spectec Sa | Dispositif de mesure de position par mesure d'astigmatisme a l'aide d'une detection optique differentielle |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4732485A (en) * | 1985-04-17 | 1988-03-22 | Olympus Optical Co., Ltd. | Optical surface profile measuring device |
DE3536700C3 (de) * | 1985-10-15 | 1994-07-07 | Focus Mestechnik Gmbh & Co Kg | Gerät zum Ermitteln des lokalen Abstandes einer Prüffläche von einer Referenzfläche, deren geometrische Lage in bezug auf das Gerät bekannt ist |
NZ223988A (en) * | 1987-03-24 | 1990-11-27 | Commw Scient Ind Res Org | Optical distance measuring |
DK574487A (de) * | 1987-11-02 | 1989-05-03 | Lars Bager | |
WO1991003988A1 (de) * | 1989-09-22 | 1991-04-04 | Peter Rohleder | Vorrichtung zur herstellung von zahnersatzteilen |
DE4012927C2 (de) * | 1990-04-24 | 1995-10-12 | Daimler Benz Aerospace Ag | Meß-Verfahren und -Vorrichtung zur dreidimensionalen Lageregelung des Brennpunktes eines Hochenergie-Laserstrahls |
GB9028215D0 (en) * | 1990-12-31 | 1991-02-13 | Smiths Industries Plc | Electro-optic apparatus |
GB9705105D0 (en) | 1997-03-12 | 1997-04-30 | Brown & Sharpe Limited | Optical surface measurement apparatus and methods |
US5923425A (en) * | 1997-11-20 | 1999-07-13 | Tropel Corporation | Grazing incidence interferometry for measuring transparent plane-parallel plates |
DE19955702C2 (de) * | 1999-11-18 | 2001-11-15 | Fraunhofer Ges Forschung | Verfahren und Vorrichtung zum Antasten der Oberfläche eines dreidimensionalen Objekts sowie Verfahren und Vorrichtung zur Vermessung zumindest eines Teiles der Oberfläche eines dreidimensionalen Objekts |
GB2468177B (en) * | 2009-02-27 | 2011-01-12 | Univ Sogang Ind Univ Coop Foun | Optical surface measuring apparatus and method |
US9599558B2 (en) | 2012-08-07 | 2017-03-21 | Carl Zeiss Industrielle Messtechnik Gmbh | Measuring device for measuring a measurement object and related method |
WO2014023344A1 (de) | 2012-08-07 | 2014-02-13 | Carl Zeiss Industrielle Messtechnik Gmbh | Verbesserter chromatischer sensor und verfahren |
CN109752858B (zh) * | 2019-03-18 | 2021-05-18 | 贵州航天电子科技有限公司 | 一种线偏振激光发射光学装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1493963A (en) * | 1974-01-15 | 1977-12-07 | Thomson Brandt | Optical focusing device |
GB2066449A (en) * | 1979-12-21 | 1981-07-08 | Rolls Royce | Monitoring distance variations |
-
1984
- 1984-05-05 GB GB08411592A patent/GB2158228A/en not_active Withdrawn
- 1984-05-14 SE SE8402589A patent/SE8402589L/ not_active Application Discontinuation
- 1984-05-19 DE DE19843418767 patent/DE3418767A1/de not_active Withdrawn
- 1984-05-21 FR FR8407874A patent/FR2564602A1/fr active Pending
- 1984-05-22 CH CH251784A patent/CH658312A5/fr not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1493963A (en) * | 1974-01-15 | 1977-12-07 | Thomson Brandt | Optical focusing device |
GB2066449A (en) * | 1979-12-21 | 1981-07-08 | Rolls Royce | Monitoring distance variations |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2595815A1 (fr) * | 1986-03-17 | 1987-09-18 | Clecim Sa | Procede et dispositif de reperage des defauts de planeite d'une tole |
FR2604515A1 (fr) * | 1986-09-29 | 1988-04-01 | Spectec Sa | Dispositif de mesure de position par mesure d'astigmatisme a l'aide d'une detection optique differentielle |
Also Published As
Publication number | Publication date |
---|---|
SE8402589D0 (sv) | 1984-05-14 |
GB8411592D0 (en) | 1984-06-13 |
SE8402589L (sv) | 1985-11-15 |
GB2158228A (en) | 1985-11-06 |
DE3418767A1 (de) | 1985-11-21 |
CH658312A5 (fr) | 1986-10-31 |
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