FR2564602A1 - Capteur optique astigmate sans contact - Google Patents

Capteur optique astigmate sans contact Download PDF

Info

Publication number: FR2564602A1
Authority: FR; France
Prior art keywords: optical sensor; tion; detector; optical; sensor defined
Prior art date: 1984-05-05
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

FR8407874A

Other languages

English (en)

French (fr)

Inventor

James L Doty

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Spectron Development Laboratories Inc

Original Assignee

Spectron Development Laboratories Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-05-05

Filing date

1984-05-21

Publication date

1985-11-22

1984-05-21 Application filed by Spectron Development Laboratories Inc filed Critical Spectron Development Laboratories Inc

1985-11-22 Publication of FR2564602A1 publication Critical patent/FR2564602A1/fr

Status Pending legal-status Critical Current

Links

230000003287 optical effect Effects 0.000 title claims abstract description 63
201000009310 astigmatism Diseases 0.000 claims description 14
239000006185 dispersion Substances 0.000 claims 2
241000238876 Acari Species 0.000 claims 1
238000001514 detection method Methods 0.000 claims 1
239000011159 matrix material Substances 0.000 claims 1
238000000034 method Methods 0.000 abstract description 10
238000005259 measurement Methods 0.000 abstract description 8
230000005855 radiation Effects 0.000 abstract description 6
238000004519 manufacturing process Methods 0.000 description 7
238000011144 upstream manufacturing Methods 0.000 description 7
230000006870 function Effects 0.000 description 5
238000005305 interferometry Methods 0.000 description 4
238000012545 processing Methods 0.000 description 4
150000001768 cations Chemical class 0.000 description 2
244000232745 Bactris gasipaes Species 0.000 description 1
241001061137 Caulophrynidae Species 0.000 description 1
BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
238000004458 analytical method Methods 0.000 description 1
230000008878 coupling Effects 0.000 description 1
238000010168 coupling process Methods 0.000 description 1
238000005859 coupling reaction Methods 0.000 description 1
238000013461 design Methods 0.000 description 1
238000002955 isolation Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
230000015654 memory Effects 0.000 description 1
238000005457 optimization Methods 0.000 description 1
230000001012 protector Effects 0.000 description 1
239000000523 sample Substances 0.000 description 1
238000012360 testing method Methods 0.000 description 1
238000012800 visualization Methods 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/08—Anamorphotic objectives

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Optics & Photonics (AREA)
Length Measuring Devices By Optical Means (AREA)

FR8407874A 1984-05-05 1984-05-21 Capteur optique astigmate sans contact Pending FR2564602A1 (fr)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GB08411592A GB2158228A (en)	1984-05-05	1984-05-05	Astigmatic non-contact optical probe

Publications (1)

Publication Number	Publication Date
FR2564602A1 true FR2564602A1 (fr)	1985-11-22

Family

ID=10560565

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR8407874A Pending FR2564602A1 (fr)	1984-05-05	1984-05-21	Capteur optique astigmate sans contact

Country Status (5)

Country	Link
CH (1)	CH658312A5 (de)
DE (1)	DE3418767A1 (de)
FR (1)	FR2564602A1 (de)
GB (1)	GB2158228A (de)
SE (1)	SE8402589L (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2595815A1 (fr) *	1986-03-17	1987-09-18	Clecim Sa	Procede et dispositif de reperage des defauts de planeite d'une tole
FR2604515A1 (fr) *	1986-09-29	1988-04-01	Spectec Sa	Dispositif de mesure de position par mesure d'astigmatisme a l'aide d'une detection optique differentielle

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4732485A (en) *	1985-04-17	1988-03-22	Olympus Optical Co., Ltd.	Optical surface profile measuring device
DE3536700C3 (de) *	1985-10-15	1994-07-07	Focus Mestechnik Gmbh & Co Kg	Gerät zum Ermitteln des lokalen Abstandes einer Prüffläche von einer Referenzfläche, deren geometrische Lage in bezug auf das Gerät bekannt ist
NZ223988A (en) *	1987-03-24	1990-11-27	Commw Scient Ind Res Org	Optical distance measuring
DK574487A (de) *	1987-11-02	1989-05-03	Lars Bager
WO1991003988A1 (de) *	1989-09-22	1991-04-04	Peter Rohleder	Vorrichtung zur herstellung von zahnersatzteilen
DE4012927C2 (de) *	1990-04-24	1995-10-12	Daimler Benz Aerospace Ag	Meß-Verfahren und -Vorrichtung zur dreidimensionalen Lageregelung des Brennpunktes eines Hochenergie-Laserstrahls
GB9028215D0 (en) *	1990-12-31	1991-02-13	Smiths Industries Plc	Electro-optic apparatus
GB9705105D0 (en)	1997-03-12	1997-04-30	Brown & Sharpe Limited	Optical surface measurement apparatus and methods
US5923425A (en) *	1997-11-20	1999-07-13	Tropel Corporation	Grazing incidence interferometry for measuring transparent plane-parallel plates
DE19955702C2 (de) *	1999-11-18	2001-11-15	Fraunhofer Ges Forschung	Verfahren und Vorrichtung zum Antasten der Oberfläche eines dreidimensionalen Objekts sowie Verfahren und Vorrichtung zur Vermessung zumindest eines Teiles der Oberfläche eines dreidimensionalen Objekts
GB2468177B (en) *	2009-02-27	2011-01-12	Univ Sogang Ind Univ Coop Foun	Optical surface measuring apparatus and method
US9599558B2 (en)	2012-08-07	2017-03-21	Carl Zeiss Industrielle Messtechnik Gmbh	Measuring device for measuring a measurement object and related method
WO2014023344A1 (de)	2012-08-07	2014-02-13	Carl Zeiss Industrielle Messtechnik Gmbh	Verbesserter chromatischer sensor und verfahren
CN109752858B (zh) *	2019-03-18	2021-05-18	贵州航天电子科技有限公司	一种线偏振激光发射光学装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1493963A (en) *	1974-01-15	1977-12-07	Thomson Brandt	Optical focusing device
GB2066449A (en) *	1979-12-21	1981-07-08	Rolls Royce	Monitoring distance variations

1984
- 1984-05-05 GB GB08411592A patent/GB2158228A/en not_active Withdrawn
- 1984-05-14 SE SE8402589A patent/SE8402589L/ not_active Application Discontinuation
- 1984-05-19 DE DE19843418767 patent/DE3418767A1/de not_active Withdrawn
- 1984-05-21 FR FR8407874A patent/FR2564602A1/fr active Pending
- 1984-05-22 CH CH251784A patent/CH658312A5/fr not_active IP Right Cessation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB1493963A (en) *	1974-01-15	1977-12-07	Thomson Brandt	Optical focusing device
GB2066449A (en) *	1979-12-21	1981-07-08	Rolls Royce	Monitoring distance variations

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
FR2595815A1 (fr) *	1986-03-17	1987-09-18	Clecim Sa	Procede et dispositif de reperage des defauts de planeite d'une tole
FR2604515A1 (fr) *	1986-09-29	1988-04-01	Spectec Sa	Dispositif de mesure de position par mesure d'astigmatisme a l'aide d'une detection optique differentielle

Also Published As

Publication number	Publication date
SE8402589D0 (sv)	1984-05-14
GB8411592D0 (en)	1984-06-13
SE8402589L (sv)	1985-11-15
GB2158228A (en)	1985-11-06
DE3418767A1 (de)	1985-11-21
CH658312A5 (fr)	1986-10-31

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