GB2468177B - Optical surface measuring apparatus and method - Google Patents

Optical surface measuring apparatus and method

Info

Publication number
GB2468177B
GB2468177B GB0918220A GB0918220A GB2468177B GB 2468177 B GB2468177 B GB 2468177B GB 0918220 A GB0918220 A GB 0918220A GB 0918220 A GB0918220 A GB 0918220A GB 2468177 B GB2468177 B GB 2468177B
Authority
GB
United Kingdom
Prior art keywords
measuring apparatus
optical surface
surface measuring
optical
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0918220A
Other versions
GB2468177A8 (en
GB2468177A (en
GB0918220D0 (en
Inventor
Seung-Yop Lee
Kyoung Up Kim
Jae Hyun Kim
Kyu Man Cho
Young Kyu Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Industry University Cooperation Foundation of Sogang University
Original Assignee
Industry University Cooperation Foundation of Sogang University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020090017175A external-priority patent/KR101085014B1/en
Application filed by Industry University Cooperation Foundation of Sogang University filed Critical Industry University Cooperation Foundation of Sogang University
Priority to GB0918220A priority Critical patent/GB2468177B/en
Publication of GB0918220D0 publication Critical patent/GB0918220D0/en
Publication of GB2468177A publication Critical patent/GB2468177A/en
Publication of GB2468177A8 publication Critical patent/GB2468177A8/en
Application granted granted Critical
Publication of GB2468177B publication Critical patent/GB2468177B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/22—Measuring arrangements characterised by the use of optical techniques for measuring depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB0918220A 2009-02-27 2009-10-16 Optical surface measuring apparatus and method Expired - Fee Related GB2468177B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0918220A GB2468177B (en) 2009-02-27 2009-10-16 Optical surface measuring apparatus and method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090017175A KR101085014B1 (en) 2009-02-27 2009-02-27 Optical surface measuring apparatus and method
GB0918220A GB2468177B (en) 2009-02-27 2009-10-16 Optical surface measuring apparatus and method

Publications (4)

Publication Number Publication Date
GB0918220D0 GB0918220D0 (en) 2009-12-02
GB2468177A GB2468177A (en) 2010-09-01
GB2468177A8 GB2468177A8 (en) 2010-09-22
GB2468177B true GB2468177B (en) 2011-01-12

Family

ID=41462511

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0918220A Expired - Fee Related GB2468177B (en) 2009-02-27 2009-10-16 Optical surface measuring apparatus and method

Country Status (1)

Country Link
GB (1) GB2468177B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2820837A4 (en) * 2012-03-01 2016-03-09 H4 Eng Inc Apparatus and method for automatic video recording
CN105606036B (en) * 2014-11-20 2018-07-06 中国航空工业第六一八研究所 A kind of surface form deviation method of inspection based on surface topography data

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1493963A (en) * 1974-01-15 1977-12-07 Thomson Brandt Optical focusing device
GB2158228A (en) * 1984-05-05 1985-11-06 Spectron Dev Lab Inc Astigmatic non-contact optical probe
EP1271095A2 (en) * 2001-06-11 2003-01-02 Mitutoyo Corporation Focusing servo device and focusing servo method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1493963A (en) * 1974-01-15 1977-12-07 Thomson Brandt Optical focusing device
GB2158228A (en) * 1984-05-05 1985-11-06 Spectron Dev Lab Inc Astigmatic non-contact optical probe
EP1271095A2 (en) * 2001-06-11 2003-01-02 Mitutoyo Corporation Focusing servo device and focusing servo method

Also Published As

Publication number Publication date
GB2468177A8 (en) 2010-09-22
GB2468177A (en) 2010-09-01
GB0918220D0 (en) 2009-12-02

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20181016