FR2564360B1 - Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante - Google Patents
Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournanteInfo
- Publication number
- FR2564360B1 FR2564360B1 FR8407881A FR8407881A FR2564360B1 FR 2564360 B1 FR2564360 B1 FR 2564360B1 FR 8407881 A FR8407881 A FR 8407881A FR 8407881 A FR8407881 A FR 8407881A FR 2564360 B1 FR2564360 B1 FR 2564360B1
- Authority
- FR
- France
- Prior art keywords
- rotating structure
- double
- fluid
- parts
- machining machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C1/00—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods
- B24C1/08—Methods for use of abrasive blasting for producing particular effects; Use of auxiliary equipment in connection with such methods for polishing surfaces, e.g. smoothing a surface by making use of liquid-borne abrasives
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Drilling And Boring (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8407881A FR2564360B1 (fr) | 1984-05-21 | 1984-05-21 | Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante |
US06/766,146 US4665658A (en) | 1984-05-21 | 1985-08-16 | Double face abrading machine and device for transmitting current and fluid between a rotary structure and a non-rotary structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8407881A FR2564360B1 (fr) | 1984-05-21 | 1984-05-21 | Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2564360A1 FR2564360A1 (fr) | 1985-11-22 |
FR2564360B1 true FR2564360B1 (fr) | 1986-10-17 |
Family
ID=9304208
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8407881A Expired FR2564360B1 (fr) | 1984-05-21 | 1984-05-21 | Machine d'usinage double face et dispositif de transmission de courant et de fluide entre une structure tournante et une structure non tournante |
Country Status (2)
Country | Link |
---|---|
US (1) | US4665658A (fr) |
FR (1) | FR2564360B1 (fr) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU637087B2 (en) * | 1989-03-24 | 1993-05-20 | Sumitomo Electric Industries, Ltd. | Apparatus for grinding semiconductor wafer |
US4996798A (en) * | 1989-05-31 | 1991-03-05 | Moore Steven C | Ultra-precision lapping apparatus |
DE3925274A1 (de) * | 1989-07-31 | 1991-02-07 | Diskus Werke Frankfurt Main Ag | Feinbearbeitungsmaschine zum laeppen, feinschleifen oder polieren |
EP0411346A3 (en) * | 1989-07-31 | 1991-04-10 | Diskus Werke Frankfurt Am Main Aktiengesellschaft | Precision grinding machine for lapping, precision grinding or polishing |
US5255474A (en) * | 1990-08-06 | 1993-10-26 | Matsushita Electric Industrial Co., Ltd. | Polishing spindle |
US5595529A (en) * | 1994-03-28 | 1997-01-21 | Speedfam Corporation | Dual column abrading machine |
US5607341A (en) * | 1994-08-08 | 1997-03-04 | Leach; Michael A. | Method and structure for polishing a wafer during manufacture of integrated circuits |
US5989108A (en) * | 1996-09-09 | 1999-11-23 | Koyo Machine Industries Co., Ltd. | Double side grinding apparatus for flat disklike work |
US6102784A (en) * | 1997-11-05 | 2000-08-15 | Speedfam-Ipec Corporation | Method and apparatus for improved gear cleaning assembly in polishing machines |
JP2984263B1 (ja) * | 1998-10-23 | 1999-11-29 | システム精工株式会社 | 研磨方法および研磨装置 |
DE19937784B4 (de) * | 1999-08-10 | 2006-02-16 | Peter Wolters Werkzeugmaschinen Gmbh | Zweischeiben-Feinschleifmaschine |
DE102007056627B4 (de) * | 2007-03-19 | 2023-12-21 | Lapmaster Wolters Gmbh | Verfahren zum gleichzeitigen Schleifen mehrerer Halbleiterscheiben |
DE102009025242B4 (de) * | 2009-06-17 | 2013-05-23 | Siltronic Ag | Verfahren zum beidseitigen chemischen Schleifen einer Halbleiterscheibe |
EP3274129A1 (fr) * | 2015-03-25 | 2018-01-31 | Ancora S.p.A. | Tête de polissage d'articles en céramique ou de pierres naturelles |
DE102016102223A1 (de) * | 2016-02-09 | 2017-08-10 | Lapmaster Wolters Gmbh | Doppel- oder Einseiten-Bearbeitungsmaschine und Verfahren zum Betreiben einer Doppel- oder Einseiten-Bearbeitungsmaschine |
CN112355904B (zh) * | 2020-10-26 | 2022-07-01 | 瓯锟科技温州有限公司 | 一种高效的金属板带表面抛丸处理*** |
CN114102431B (zh) * | 2021-12-02 | 2023-02-03 | 上海载科智能科技有限公司 | 一种金属锅打磨自动化变位机 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1230530A (en) * | 1915-06-01 | 1917-06-19 | Ernest Stead | Lens grinding and polishing machine. |
BE338671A (fr) * | 1925-09-22 | |||
BE431049A (fr) * | 1932-01-23 | |||
GB693706A (en) * | 1950-10-02 | 1953-07-08 | James Wolfe Alexander | Work gauging means for use on honing or like machines |
US2714791A (en) * | 1954-11-12 | 1955-08-09 | Pittsburgh Plate Glass Co | Adjustable rouge trough hanger |
US3221577A (en) * | 1963-01-29 | 1965-12-07 | Baum Leon | Optical system for machines |
US3494078A (en) * | 1966-06-01 | 1970-02-10 | Katsumi Miyamoto | Automatic sizing device of internal grinder |
US3609931A (en) * | 1970-02-16 | 1971-10-05 | Gen Motors Corp | Coolant system for high speed spindles |
US3813828A (en) * | 1973-01-05 | 1974-06-04 | Westinghouse Electric Corp | Method for controlling finished thickness of planetary-lapped parts |
US3913271A (en) * | 1974-02-04 | 1975-10-21 | Speedfam Corp | Apparatus for machining work pieces |
DE2442081C3 (de) * | 1974-09-03 | 1979-11-15 | Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann | Läppmaschine |
GB1475840A (en) * | 1975-04-02 | 1977-06-10 | Precisionlap Ltd | Lapping machine |
US4216630A (en) * | 1977-08-25 | 1980-08-12 | The Aro Corporation | Grinder apparatus with pollution control fluid dispensing means |
DE2950881C2 (de) * | 1979-12-18 | 1983-06-01 | Fa. Peter Wolters, 2370 Rendsburg | Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen |
JPS57168109A (en) * | 1981-04-10 | 1982-10-16 | Shinetsu Eng Kk | Device for measuring thickness of work piece in lapping plate |
DE3128880A1 (de) * | 1981-07-22 | 1983-02-10 | Fa. Peter Wolters, 2370 Rendsburg | Maschine zum laeppen oder polieren |
JPS58137554A (ja) * | 1982-02-12 | 1983-08-16 | Hitachi Ltd | 両面同時研磨機のソフト加圧機構および研磨方法 |
JPS58171256A (ja) * | 1982-04-01 | 1983-10-07 | Toshiba Mach Co Ltd | 両面ポリシング装置 |
JPS58196967A (ja) * | 1982-05-11 | 1983-11-16 | Hitachi Ltd | ウエハの両面研磨方法 |
JPS591162A (ja) * | 1982-06-28 | 1984-01-06 | Hitachi Ltd | 両面研磨装置 |
-
1984
- 1984-05-21 FR FR8407881A patent/FR2564360B1/fr not_active Expired
-
1985
- 1985-08-16 US US06/766,146 patent/US4665658A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
FR2564360A1 (fr) | 1985-11-22 |
US4665658A (en) | 1987-05-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property | ||
ST | Notification of lapse |