FR2556498B1 - Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique - Google Patents
Source d'ions multicharges a plusieurs zones de resonance cyclotronique electroniqueInfo
- Publication number
- FR2556498B1 FR2556498B1 FR8319572A FR8319572A FR2556498B1 FR 2556498 B1 FR2556498 B1 FR 2556498B1 FR 8319572 A FR8319572 A FR 8319572A FR 8319572 A FR8319572 A FR 8319572A FR 2556498 B1 FR2556498 B1 FR 2556498B1
- Authority
- FR
- France
- Prior art keywords
- multicharge
- ion source
- multiple zones
- cyclotronic resonance
- electronic cyclotronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/16—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
- H01J27/18—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8319572A FR2556498B1 (fr) | 1983-12-07 | 1983-12-07 | Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique |
EP84402460A EP0145586B1 (fr) | 1983-12-07 | 1984-11-30 | Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique |
DE8484402460T DE3475244D1 (en) | 1983-12-07 | 1984-11-30 | Multicharged ion source with several electron cyclotron resonance regions |
US06/678,821 US4631438A (en) | 1983-12-07 | 1984-12-06 | Multicharged ion source with several electron cyclotron resonance zones |
JP59257773A JPS60140635A (ja) | 1983-12-07 | 1984-12-07 | マルチチヤージイオン源 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8319572A FR2556498B1 (fr) | 1983-12-07 | 1983-12-07 | Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2556498A1 FR2556498A1 (fr) | 1985-06-14 |
FR2556498B1 true FR2556498B1 (fr) | 1986-09-05 |
Family
ID=9294945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8319572A Expired FR2556498B1 (fr) | 1983-12-07 | 1983-12-07 | Source d'ions multicharges a plusieurs zones de resonance cyclotronique electronique |
Country Status (5)
Country | Link |
---|---|
US (1) | US4631438A (fr) |
EP (1) | EP0145586B1 (fr) |
JP (1) | JPS60140635A (fr) |
DE (1) | DE3475244D1 (fr) |
FR (1) | FR2556498B1 (fr) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0616384B2 (ja) * | 1984-06-11 | 1994-03-02 | 日本電信電話株式会社 | マイクロ波イオン源 |
US4727293A (en) * | 1984-08-16 | 1988-02-23 | Board Of Trustees Operating Michigan State University | Plasma generating apparatus using magnets and method |
US4810935A (en) * | 1985-05-03 | 1989-03-07 | The Australian National University | Method and apparatus for producing large volume magnetoplasmas |
JPS6276137A (ja) * | 1985-09-30 | 1987-04-08 | Hitachi Ltd | イオン源 |
FR2592518B1 (fr) * | 1985-12-26 | 1988-02-12 | Commissariat Energie Atomique | Sources d'ions a resonance cyclotronique electronique |
FR2595868B1 (fr) * | 1986-03-13 | 1988-05-13 | Commissariat Energie Atomique | Source d'ions a resonance cyclotronique electronique a injection coaxiale d'ondes electromagnetiques |
FR2601498B1 (fr) * | 1986-07-10 | 1988-10-07 | Commissariat Energie Atomique | Source d'ions a resonance cyclotronique electronique |
JP2667826B2 (ja) * | 1987-03-18 | 1997-10-27 | 株式会社日立製作所 | マイクロ波多価イオン源 |
DE3810197A1 (de) * | 1987-03-27 | 1988-10-13 | Mitsubishi Electric Corp | Plasma-bearbeitungseinrichtung |
US4778561A (en) * | 1987-10-30 | 1988-10-18 | Veeco Instruments, Inc. | Electron cyclotron resonance plasma source |
US5208512A (en) * | 1990-10-16 | 1993-05-04 | International Business Machines Corporation | Scanned electron cyclotron resonance plasma source |
US5189446A (en) * | 1991-05-17 | 1993-02-23 | International Business Machines Corporation | Plasma wafer processing tool having closed electron cyclotron resonance |
DK0585229T3 (da) * | 1991-05-21 | 1995-12-27 | Materials Research Corp | Blødætsningsmodul til clusterværktøj og tilhørende ECR-plasmagenerator |
FR2681186B1 (fr) * | 1991-09-11 | 1993-10-29 | Commissariat A Energie Atomique | Source d'ions a resonance cyclotronique electronique et a injection coaxiale d'ondes electromagnetiques. |
DE4200235C1 (fr) * | 1992-01-08 | 1993-05-06 | Hoffmeister, Helmut, Dr., 4400 Muenster, De | |
DE19933762C2 (de) * | 1999-07-19 | 2002-10-17 | Juergen Andrae | Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen |
FR2861947B1 (fr) * | 2003-11-04 | 2007-11-09 | Commissariat Energie Atomique | Dispositif pour controler la temperature electronique dans un plasma rce |
RU2526026C2 (ru) | 2009-05-15 | 2014-08-20 | АЛЬФА СОРС ЭлЭлСи | Устройство, система и способ создания пучков частиц на основе эцр |
ES2696227B2 (es) * | 2018-07-10 | 2019-06-12 | Centro De Investig Energeticas Medioambientales Y Tecnologicas Ciemat | Fuente de iones interna para ciclotrones de baja erosion |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3665245A (en) * | 1969-10-27 | 1972-05-23 | Research Corp | Quadrupole ionization gauge |
US4223246A (en) * | 1977-07-01 | 1980-09-16 | Raytheon Company | Microwave tubes incorporating rare earth magnets |
US4393333A (en) * | 1979-12-10 | 1983-07-12 | Hitachi, Ltd. | Microwave plasma ion source |
FR2475798A1 (fr) * | 1980-02-13 | 1981-08-14 | Commissariat Energie Atomique | Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede |
JPS5947421B2 (ja) * | 1980-03-24 | 1984-11-19 | 株式会社日立製作所 | マイクロ波イオン源 |
US4507588A (en) * | 1983-02-28 | 1985-03-26 | Board Of Trustees Operating Michigan State University | Ion generating apparatus and method for the use thereof |
-
1983
- 1983-12-07 FR FR8319572A patent/FR2556498B1/fr not_active Expired
-
1984
- 1984-11-30 EP EP84402460A patent/EP0145586B1/fr not_active Expired
- 1984-11-30 DE DE8484402460T patent/DE3475244D1/de not_active Expired
- 1984-12-06 US US06/678,821 patent/US4631438A/en not_active Expired - Lifetime
- 1984-12-07 JP JP59257773A patent/JPS60140635A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
EP0145586B1 (fr) | 1988-11-17 |
JPH0479460B2 (fr) | 1992-12-16 |
FR2556498A1 (fr) | 1985-06-14 |
DE3475244D1 (en) | 1988-12-22 |
EP0145586A3 (en) | 1985-07-10 |
EP0145586A2 (fr) | 1985-06-19 |
US4631438A (en) | 1986-12-23 |
JPS60140635A (ja) | 1985-07-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |