FR2536874B1 - Appareil d'exposition - Google Patents
Appareil d'expositionInfo
- Publication number
- FR2536874B1 FR2536874B1 FR838318925A FR8318925A FR2536874B1 FR 2536874 B1 FR2536874 B1 FR 2536874B1 FR 838318925 A FR838318925 A FR 838318925A FR 8318925 A FR8318925 A FR 8318925A FR 2536874 B1 FR2536874 B1 FR 2536874B1
- Authority
- FR
- France
- Prior art keywords
- exposure apparatus
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70883—Environment aspects, e.g. pressure of beam-path gas, temperature of optical system
- G03F7/70891—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Toxicology (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Computer Hardware Design (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Projection-Type Copiers In General (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57208766A JPS5999722A (ja) | 1982-11-29 | 1982-11-29 | 半導体焼付露光制御方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2536874A1 FR2536874A1 (fr) | 1984-06-01 |
FR2536874B1 true FR2536874B1 (fr) | 1992-04-30 |
Family
ID=16561731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR838318925A Expired - Lifetime FR2536874B1 (fr) | 1982-11-29 | 1983-11-28 | Appareil d'exposition |
Country Status (5)
Country | Link |
---|---|
US (1) | US4583840A (fr) |
JP (1) | JPS5999722A (fr) |
DE (1) | DE3342995A1 (fr) |
FR (1) | FR2536874B1 (fr) |
GB (1) | GB2131187B (fr) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3447488A1 (de) * | 1984-10-19 | 1986-05-07 | Canon K.K., Tokio/Tokyo | Projektionseinrichtung |
JPS61160934A (ja) * | 1985-01-10 | 1986-07-21 | Canon Inc | 投影光学装置 |
JPS61183928A (ja) * | 1985-02-12 | 1986-08-16 | Nippon Kogaku Kk <Nikon> | 投影光学装置 |
JPS61278141A (ja) * | 1985-05-31 | 1986-12-09 | Canon Inc | 投影倍率調整方法 |
JPS62125359A (ja) * | 1985-11-27 | 1987-06-06 | Canon Inc | 露光装置 |
JPH0712012B2 (ja) * | 1985-12-11 | 1995-02-08 | 株式会社ニコン | 投影露光装置 |
US4989031A (en) * | 1990-01-29 | 1991-01-29 | Nikon Corporation | Projection exposure apparatus |
US5883704A (en) | 1995-08-07 | 1999-03-16 | Nikon Corporation | Projection exposure apparatus wherein focusing of the apparatus is changed by controlling the temperature of a lens element of the projection optical system |
JP3283767B2 (ja) * | 1996-10-02 | 2002-05-20 | キヤノン株式会社 | 露光装置およびデバイス製造方法 |
JPH10116766A (ja) * | 1996-10-11 | 1998-05-06 | Canon Inc | 露光装置及びデバイス製造方法 |
DE19752713A1 (de) * | 1997-11-28 | 1999-06-02 | Zeiss Carl Fa | UV-Optisches System mit reduzierter Alterung |
JP3548464B2 (ja) | 1999-09-01 | 2004-07-28 | キヤノン株式会社 | 露光方法及び走査型露光装置 |
US7513537B2 (en) * | 2003-10-22 | 2009-04-07 | Frank's Casing Crew & Rental Tools, Inc. | Tubular connection with slotted threads |
JP3833209B2 (ja) * | 2003-10-24 | 2006-10-11 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
CN101034261B (zh) * | 2006-03-09 | 2010-08-11 | 中芯国际集成电路制造(上海)有限公司 | 防止由阻挡处理对光学元件的污染的方法和设备 |
AU2007254627B2 (en) * | 2007-12-21 | 2010-07-08 | Canon Kabushiki Kaisha | Geometric parameter measurement of an imaging device |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB592034A (en) * | 1944-04-26 | 1947-09-05 | Franz Urbach | Combined photographic printing and viewing arrangement |
US4083634A (en) * | 1973-01-16 | 1978-04-11 | Canon Kabushiki Kaisha | Pattern exposure apparatus using polychromatic light source |
US4011011A (en) * | 1973-03-09 | 1977-03-08 | The Perkin-Elmer Corporation | Optical projection apparatus |
JPS5225576A (en) * | 1975-08-22 | 1977-02-25 | Hitachi Ltd | Exposure method of photo-resist |
US4202623A (en) * | 1979-01-08 | 1980-05-13 | The Perkin-Elmer Corporation | Temperature compensated alignment system |
US4376581A (en) * | 1979-12-20 | 1983-03-15 | Censor Patent- Und Versuchs-Anstalt | Method of positioning disk-shaped workpieces, preferably semiconductor wafers |
JPS56130707A (en) * | 1980-03-18 | 1981-10-13 | Canon Inc | Photo-printing device |
DE3118802A1 (de) * | 1980-05-14 | 1982-02-25 | Canon K.K., Tokyo | Druckuebertragungsgeraet |
US4370054A (en) * | 1981-04-02 | 1983-01-25 | Canon Kabushiki Kaisha | Projection exposure apparatus |
JPS57169244A (en) * | 1981-04-13 | 1982-10-18 | Canon Inc | Temperature controller for mask and wafer |
DD160756A3 (de) * | 1981-04-24 | 1984-02-29 | Gudrun Dietz | Anordnung zur verbesserung fotochemischer umsetzungsprozesse in fotoresistschichten |
JPS58116735A (ja) * | 1981-12-29 | 1983-07-12 | Canon Inc | 投影焼付方法 |
-
1982
- 1982-11-29 JP JP57208766A patent/JPS5999722A/ja active Granted
-
1983
- 1983-11-18 US US06/553,129 patent/US4583840A/en not_active Expired - Lifetime
- 1983-11-24 GB GB08331399A patent/GB2131187B/en not_active Expired
- 1983-11-28 DE DE19833342995 patent/DE3342995A1/de active Granted
- 1983-11-28 FR FR838318925A patent/FR2536874B1/fr not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4583840A (en) | 1986-04-22 |
JPS5999722A (ja) | 1984-06-08 |
FR2536874A1 (fr) | 1984-06-01 |
GB8331399D0 (en) | 1984-01-04 |
JPH0141013B2 (fr) | 1989-09-01 |
DE3342995A1 (de) | 1984-05-30 |
GB2131187B (en) | 1986-07-30 |
GB2131187A (en) | 1984-06-13 |
DE3342995C2 (fr) | 1990-03-22 |
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