FR2415348B1 - - Google Patents
Info
- Publication number
- FR2415348B1 FR2415348B1 FR7901658A FR7901658A FR2415348B1 FR 2415348 B1 FR2415348 B1 FR 2415348B1 FR 7901658 A FR7901658 A FR 7901658A FR 7901658 A FR7901658 A FR 7901658A FR 2415348 B1 FR2415348 B1 FR 2415348B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
- G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DD20337678A DD135311A1 (de) | 1978-01-24 | 1978-01-24 | Verfahren und einrichtung zur korrektur der ablenkaberrationen in einem korpuskularstrahlgeraet |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2415348A1 FR2415348A1 (fr) | 1979-08-17 |
FR2415348B1 true FR2415348B1 (fr) | 1984-10-12 |
Family
ID=5511337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7901658A Granted FR2415348A1 (fr) | 1978-01-24 | 1979-01-23 | Procede et dispositif pour la correction des aberrations provoquees par deviation dans un appareil a rayonnement corpusculaire |
Country Status (3)
Country | Link |
---|---|
DD (1) | DD135311A1 (fr) |
DE (1) | DE2901426A1 (fr) |
FR (1) | FR2415348A1 (fr) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0175933A1 (fr) * | 1984-09-21 | 1986-04-02 | Siemens Aktiengesellschaft | Système de lentilles à balayage sans défauts chromatiques de déviation pour traitement de matériaux par faisceaux corpusculaires |
DE102010053194A1 (de) | 2010-12-03 | 2012-06-06 | Carl Zeiss Nts Gmbh | Teilchenstrahlgerät mit Ablenksystem |
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1978
- 1978-01-24 DD DD20337678A patent/DD135311A1/xx not_active IP Right Cessation
-
1979
- 1979-01-16 DE DE19792901426 patent/DE2901426A1/de not_active Withdrawn
- 1979-01-23 FR FR7901658A patent/FR2415348A1/fr active Granted
Also Published As
Publication number | Publication date |
---|---|
DE2901426A1 (de) | 1979-07-26 |
FR2415348A1 (fr) | 1979-08-17 |
DD135311A1 (de) | 1979-04-25 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |