FR2396319A1 - Systeme optique achromatique a grossissement unite - Google Patents

Systeme optique achromatique a grossissement unite

Info

Publication number
FR2396319A1
FR2396319A1 FR7816353A FR7816353A FR2396319A1 FR 2396319 A1 FR2396319 A1 FR 2396319A1 FR 7816353 A FR7816353 A FR 7816353A FR 7816353 A FR7816353 A FR 7816353A FR 2396319 A1 FR2396319 A1 FR 2396319A1
Authority
FR
France
Prior art keywords
refractive element
optical system
optical
achromatic optical
achromatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7816353A
Other languages
English (en)
Other versions
FR2396319B1 (fr
Inventor
Frederick H Dill
Raymond E Tibbetts
Et Janusz S Wilczynski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2396319A1 publication Critical patent/FR2396319A1/fr
Application granted granted Critical
Publication of FR2396319B1 publication Critical patent/FR2396319B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/008—Systems specially adapted to form image relays or chained systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/08—Catadioptric systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70225—Optical aspects of catadioptric systems, i.e. comprising reflective and refractive elements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

L'invention concerne les systèmes optiques achromatiques. Le système optique achromatique à grossissement unité comporte une surface réfléchissante concave 26 définissant un axe optique 28, un premier élément réfringent 34 placé entre le foyer 30 et le centre de courbure 32 de la surface 26, un deuxième élément réfringent 42 placé entre la surface 26 et le foyer 30 et un élément optique 50 présentant des surfaces optiques planes, sa surface arrière 52 étant très proche du centre de courbure 32. L'élément réfringent 34 corrige l'aberration chromatique longitudinale des rayons principaux et l'élément réfringent 42 corrige l'aberration chromatique longitudinale résiduelle des rayons marginaux. Applicable notamment dans les systèmes de fabrication de micro-circuits.
FR7816353A 1977-06-30 1978-05-25 Systeme optique achromatique a grossissement unite Granted FR2396319A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/811,754 US4171871A (en) 1977-06-30 1977-06-30 Achromatic unit magnification optical system

Publications (2)

Publication Number Publication Date
FR2396319A1 true FR2396319A1 (fr) 1979-01-26
FR2396319B1 FR2396319B1 (fr) 1982-09-17

Family

ID=25207478

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7816353A Granted FR2396319A1 (fr) 1977-06-30 1978-05-25 Systeme optique achromatique a grossissement unite

Country Status (6)

Country Link
US (1) US4171871A (fr)
JP (1) JPS6055807B2 (fr)
CA (1) CA1095760A (fr)
DE (1) DE2828530C2 (fr)
FR (1) FR2396319A1 (fr)
GB (1) GB1559666A (fr)

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EP0354148A2 (fr) * 1981-05-15 1990-02-07 General Signal Corporation Appareil de projection d'une série d'images sur les éléments d'un substrat semi-conducteur

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US4302079A (en) * 1980-04-10 1981-11-24 Bell Telephone Laboratories, Incorporated Photolithographic projection apparatus using light in the far ultraviolet
GB2148017B (en) * 1981-05-15 1986-04-09 Gen Signal Corp Apparatus for projecting a series of images onto dies of a semiconductor wafer
US4425037A (en) 1981-05-15 1984-01-10 General Signal Corporation Apparatus for projecting a series of images onto dies of a semiconductor wafer
US4391494A (en) * 1981-05-15 1983-07-05 General Signal Corporation Apparatus for projecting a series of images onto dies of a semiconductor wafer
US4444492A (en) * 1982-05-15 1984-04-24 General Signal Corporation Apparatus for projecting a series of images onto dies of a semiconductor wafer
US4779966A (en) * 1984-12-21 1988-10-25 The Perkin-Elmer Corporation Single mirror projection optical system
US4585337A (en) * 1985-01-14 1986-04-29 Phillips Edward H Step-and-repeat alignment and exposure system
US4742376A (en) * 1985-01-14 1988-05-03 Phillips Edward H Step-and-repeat alignment and exposure system
US4669866A (en) * 1985-01-28 1987-06-02 Phillips Edward H Step-and-repeat alignment and exposure system and method therefore
JPS61255342A (ja) 1985-05-09 1986-11-13 Fuji Photo Film Co Ltd ハロゲン化銀カラ−写真感光材料
GB8612609D0 (en) * 1986-05-23 1986-07-02 Wynne C G Optical imaging systems
US4896952A (en) * 1988-04-22 1990-01-30 International Business Machines Corporation Thin film beamsplitter optical element for use in an image-forming lens system
US4964705A (en) * 1988-11-07 1990-10-23 General Signal Corporation Unit magnification optical system
US5040882A (en) * 1988-11-07 1991-08-20 General Signal Corporation Unit magnification optical system with improved reflective reticle
US5031977A (en) * 1989-12-27 1991-07-16 General Signal Corporation Deep ultraviolet (UV) lens for use in a photolighography system
US5241423A (en) * 1990-07-11 1993-08-31 International Business Machines Corporation High resolution reduction catadioptric relay lens
US5159172A (en) * 1990-08-07 1992-10-27 International Business Machines Corporation Optical projection system
US5298939A (en) * 1991-11-04 1994-03-29 Swanson Paul A Method and apparatus for transfer of a reticle pattern onto a substrate by scanning
JP3747958B2 (ja) * 1995-04-07 2006-02-22 株式会社ニコン 反射屈折光学系
US6157497A (en) * 1993-06-30 2000-12-05 Nikon Corporation Exposure apparatus
JP3724517B2 (ja) * 1995-01-18 2005-12-07 株式会社ニコン 露光装置
US5559629A (en) * 1994-08-19 1996-09-24 Tamarack Scientific Co., Inc. Unit magnification projection system and method
JPH08179217A (ja) * 1994-08-19 1996-07-12 Tamarack Scient Co Inc ダイソンレンズ系
US5557469A (en) * 1994-10-28 1996-09-17 Ultratech Stepper, Inc. Beamsplitter in single fold optical system and optical variable magnification method and system
JPH08211294A (ja) * 1995-02-02 1996-08-20 Nikon Corp 投影露光装置
US6512631B2 (en) * 1996-07-22 2003-01-28 Kla-Tencor Corporation Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
JP2949328B2 (ja) * 1995-11-06 1999-09-13 株式会社日立製作所 光露光方法
US5883703A (en) * 1996-02-08 1999-03-16 Megapanel Corporation Methods and apparatus for detecting and compensating for focus errors in a photolithography tool
JP4235778B2 (ja) * 1998-05-21 2009-03-11 株式会社ニコン 投影光学系、投影光学装置、走査型露光装置、光加工方法および露光方法
DE19906874C1 (de) * 1999-02-18 2001-01-11 Zeiss Carl Jena Gmbh Relaisoptik für ein Ablenksystem sowie ein Ablenksystem
TW538256B (en) 2000-01-14 2003-06-21 Zeiss Stiftung Microlithographic reduction projection catadioptric objective
JP2004514943A (ja) * 2000-11-28 2004-05-20 カール・ツアイス・エスエムテイ・アーゲー １５７ｎｍリソグラフィ用の反射屈折投影系
US6956976B2 (en) * 2002-01-04 2005-10-18 Warner Bros. Enterianment Inc. Reduction of differential resolution of separations
US6947607B2 (en) * 2002-01-04 2005-09-20 Warner Bros. Entertainment Inc. Reduction of differential resolution of separations
US7563695B2 (en) * 2002-03-27 2009-07-21 Gsi Group Corporation Method and system for high-speed precise laser trimming and scan lens for use therein
US6879383B2 (en) * 2002-12-27 2005-04-12 Ultratech, Inc. Large-field unit-magnification projection system
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
US20080151365A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR20160085375A (ko) 2004-05-17 2016-07-15 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
US7148953B2 (en) * 2004-11-01 2006-12-12 Ultratech, Inc. Apochromatic unit-magnification projection optical system
US20060238732A1 (en) * 2005-04-21 2006-10-26 Mercado Romeo I High-NA unit-magnification projection optical system having a beamsplitter
FR2885234B1 (fr) * 2005-04-29 2008-07-11 Sagem Systeme optique pour un dispositif de photolithographie
WO2006117378A1 (fr) * 2005-04-29 2006-11-09 Sagem Defense Securite Systeme optique pour un dispositif de lithographie
DE102005061834B4 (de) * 2005-12-23 2007-11-08 Ioss Intelligente Optische Sensoren & Systeme Gmbh Vorrichtung und Verfahren zum optischen Prüfen einer Oberfläche
US7576349B2 (en) 2005-12-23 2009-08-18 Carestream Health, Inc. Radiation image readout apparatus
TWI504963B (zh) * 2006-01-30 2015-10-21 Electro Scient Ind Inc 消色差掃描透鏡
CN100388056C (zh) * 2006-06-02 2008-05-14 上海微电子装备有限公司 一种投影物镜光学***
EP1959289A1 (fr) * 2007-02-13 2008-08-20 Carl Zeiss SMT AG Objectif de projection d'agrandissement d'unité
US8493670B2 (en) 2010-09-10 2013-07-23 Coherent, Inc. Large-field unit-magnification catadioptric projection system
US8659823B2 (en) 2011-04-22 2014-02-25 Coherent, Inc. Unit-magnification catadioptric and catoptric projection optical systems
US9436103B2 (en) * 2014-05-19 2016-09-06 Ultratech, Inc. Wynne-Dyson projection lens with reduced susceptibility to UV damage
CN107179600B (zh) * 2017-07-04 2019-09-27 北京理工大学 一种非制冷红外折反射全景镜头

Citations (4)

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US2742807A (en) * 1954-03-24 1956-04-24 Gardner Denver Co Multiple nut setter
FR1558619A (fr) * 1967-02-01 1969-02-28
DE1957628A1 (de) * 1968-11-15 1970-09-03 Nat Res Dev Optische Einrichtung mit einem Konkavspiegel und mit einem Korrekturteil
SU396662A1 (fr) * 1971-10-18 1973-08-29

Family Cites Families (4)

* Cited by examiner, † Cited by third party
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US2742817A (en) * 1953-05-29 1956-04-24 Eastman Kodak Co Unit magnification catadioptric lens system
AT314859B (de) * 1971-08-24 1974-04-25 Zeiss Carl Spiegellinsen-Objektiv für eine Abbildung mit gemeinsamer Objekt- und Bild-Seite
GB1443271A (en) * 1974-01-02 1976-07-21 Rank Organisation Ltd Reflex lens systems
JPS6019484B2 (ja) * 1975-11-07 1985-05-16 キヤノン株式会社 複写用レンズ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2742807A (en) * 1954-03-24 1956-04-24 Gardner Denver Co Multiple nut setter
FR1558619A (fr) * 1967-02-01 1969-02-28
DE1957628A1 (de) * 1968-11-15 1970-09-03 Nat Res Dev Optische Einrichtung mit einem Konkavspiegel und mit einem Korrekturteil
SU396662A1 (fr) * 1971-10-18 1973-08-29

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0354148A2 (fr) * 1981-05-15 1990-02-07 General Signal Corporation Appareil de projection d'une série d'images sur les éléments d'un substrat semi-conducteur
EP0354148A3 (fr) * 1981-05-15 1990-06-20 General Signal Corporation Appareil de projection d'une série d'images sur les éléments d'un substrat semi-conducteur

Also Published As

Publication number Publication date
DE2828530A1 (de) 1979-01-11
US4171871A (en) 1979-10-23
JPS5413329A (en) 1979-01-31
JPS6055807B2 (ja) 1985-12-06
FR2396319B1 (fr) 1982-09-17
CA1095760A (fr) 1981-02-17
DE2828530C2 (de) 1985-02-28
GB1559666A (en) 1980-01-23

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