FR2394071A1 - Dispositif de mesure de la reflexion d'une surface plane reflechissante - Google Patents
Dispositif de mesure de la reflexion d'une surface plane reflechissanteInfo
- Publication number
- FR2394071A1 FR2394071A1 FR787816725A FR7816725A FR2394071A1 FR 2394071 A1 FR2394071 A1 FR 2394071A1 FR 787816725 A FR787816725 A FR 787816725A FR 7816725 A FR7816725 A FR 7816725A FR 2394071 A1 FR2394071 A1 FR 2394071A1
- Authority
- FR
- France
- Prior art keywords
- measuring
- reflection
- radiation
- reflecting surface
- flat reflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Dispositif pour mesurer la réflexion de la surface plane réfléchissante d'un miroir, dans lequel un rayonnement de mesure est envoyé au travers d'une lentille optique convergente sur la surface à étudier et le rayonnement réfléchi est renvoyé par la même lentille vers un récepteur de rayonnement La distance y de la surface réfléchissante, et la distance x de la source de rayonnement (ou de son image), mesurée par rapport au plan principal de la lentille, sont liées à la distance focale f par la relation :
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH693377A CH615757A5 (fr) | 1977-06-06 | 1977-06-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2394071A1 true FR2394071A1 (fr) | 1979-01-05 |
Family
ID=4317321
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR787816725A Withdrawn FR2394071A1 (fr) | 1977-06-06 | 1978-06-05 | Dispositif de mesure de la reflexion d'une surface plane reflechissante |
Country Status (5)
Country | Link |
---|---|
US (1) | US4201479A (fr) |
CH (1) | CH615757A5 (fr) |
DE (1) | DE2823912A1 (fr) |
FR (1) | FR2394071A1 (fr) |
NL (1) | NL7707660A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3305284A1 (de) * | 1983-02-16 | 1984-08-23 | Siemens AG, 1000 Berlin und 8000 München | Beruehrungslose glanzmessung von oberflaechen und beschichtungen |
GB8415128D0 (en) * | 1984-06-14 | 1984-07-18 | Chaimowicz J C A | Optical displacement sensors |
DE3604624A1 (de) * | 1986-02-14 | 1987-08-20 | Leybold Heraeus Gmbh & Co Kg | Testglaswechsler zur optischen messung von schichteigenschaften in vakuumbeschichtungsanlagen |
US5699164A (en) * | 1996-04-04 | 1997-12-16 | The Boc Group, Inc. | Telecentric reflection head for optical monitor |
AU2764699A (en) * | 1998-02-12 | 1999-08-30 | Diarmaid H. Douglas-Hamilton | Colorimeter and assay device |
US6342707B1 (en) | 2000-06-20 | 2002-01-29 | Katsina Optics, Inc. | Laser scatterometer with adjustable beam block |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3229564A (en) * | 1961-05-12 | 1966-01-18 | Bausch & Lomb | Reflectometer |
DE1548263C3 (de) * | 1966-11-10 | 1975-05-22 | Ernst Leitz Gmbh, 6330 Wetzlar | Verfahren zur Bestimmung der Größe geometrischer Veränderungen oder Abweichungen einer reflektierenden Oberfläche von einer Solloberfläche mittels optischer Mittel |
DE1959612A1 (de) * | 1969-11-27 | 1971-06-03 | Eppendorf Geraetebau Netheler | Vorrichtung zur fotometrischen Messung |
-
1977
- 1977-06-06 CH CH693377A patent/CH615757A5/de not_active IP Right Cessation
- 1977-07-08 NL NL7707660A patent/NL7707660A/xx not_active Application Discontinuation
-
1978
- 1978-05-26 US US05/909,808 patent/US4201479A/en not_active Expired - Lifetime
- 1978-05-31 DE DE19782823912 patent/DE2823912A1/de not_active Withdrawn
- 1978-06-05 FR FR787816725A patent/FR2394071A1/fr not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
NL7707660A (nl) | 1978-12-08 |
CH615757A5 (fr) | 1980-02-15 |
US4201479A (en) | 1980-05-06 |
DE2823912A1 (de) | 1979-01-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |