FR2380070A1 - Machine d'evaporation sous vide a cycle simplifie - Google Patents

Machine d'evaporation sous vide a cycle simplifie

Info

Publication number
FR2380070A1
FR2380070A1 FR7703593A FR7703593A FR2380070A1 FR 2380070 A1 FR2380070 A1 FR 2380070A1 FR 7703593 A FR7703593 A FR 7703593A FR 7703593 A FR7703593 A FR 7703593A FR 2380070 A1 FR2380070 A1 FR 2380070A1
Authority
FR
France
Prior art keywords
pump
substrate
control means
timer
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7703593A
Other languages
English (en)
Other versions
FR2380070B3 (fr
Inventor
Jean-Jacques Bessot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR7703593A priority Critical patent/FR2380070A1/fr
Publication of FR2380070A1 publication Critical patent/FR2380070A1/fr
Application granted granted Critical
Publication of FR2380070B3 publication Critical patent/FR2380070B3/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Machine d'évaporation sous vide simplifiée comportant une seule vanne, une nacelle d'évaporation, une jauge de mesure et une minuterie. Ladite minuterie commande suivant une séquence pré-établie successivement la mise en service de la jauge de mesure du vide, la durée de chauffage de la nacelle d'évaporation, la durée du blocage de la vanne électromagnétique de mise à l'air. Application au dépôt de couches sur des surfaces optiques ou sur les échantillons de microscopie électronique.
FR7703593A 1977-02-09 1977-02-09 Machine d'evaporation sous vide a cycle simplifie Granted FR2380070A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7703593A FR2380070A1 (fr) 1977-02-09 1977-02-09 Machine d'evaporation sous vide a cycle simplifie

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7703593A FR2380070A1 (fr) 1977-02-09 1977-02-09 Machine d'evaporation sous vide a cycle simplifie

Publications (2)

Publication Number Publication Date
FR2380070A1 true FR2380070A1 (fr) 1978-09-08
FR2380070B3 FR2380070B3 (fr) 1980-01-04

Family

ID=9186502

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7703593A Granted FR2380070A1 (fr) 1977-02-09 1977-02-09 Machine d'evaporation sous vide a cycle simplifie

Country Status (1)

Country Link
FR (1) FR2380070A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0120307A2 (fr) * 1983-02-25 1984-10-03 Toyota Jidosha Kabushiki Kaisha Appareil et procédé pour le traitement au plasma d'un matériau en résine
EP0510656A2 (fr) * 1991-04-25 1992-10-28 Hitachi, Ltd. Système et procédé d'évacuation
FR3025808A1 (fr) * 2014-09-12 2016-03-18 Essilor Int Systeme de traitement sous vide configure pour deposer au moins un revetement fonctionnel sur une lentille ophtalmique

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0120307A2 (fr) * 1983-02-25 1984-10-03 Toyota Jidosha Kabushiki Kaisha Appareil et procédé pour le traitement au plasma d'un matériau en résine
EP0120307A3 (en) * 1983-02-25 1989-05-03 Toyota Jidosha Kabushiki Kaisha Apparatus and method for plasma treatment of resin material
EP0461683A2 (fr) * 1983-02-25 1991-12-18 Toyota Jidosha Kabushiki Kaisha Appareil et procédé pour le traitement par plasma de matière plastique
EP0461683A3 (en) * 1983-02-25 1993-09-22 Toyota Jidosha Kabushiki Kaisha Apparatus and method for plasma treatment of resin material
EP0510656A2 (fr) * 1991-04-25 1992-10-28 Hitachi, Ltd. Système et procédé d'évacuation
EP0510656A3 (en) * 1991-04-25 1993-08-04 Hitachi, Ltd. Evacuation system and method therefor
US5259735A (en) * 1991-04-25 1993-11-09 Hitachi, Ltd. Evacuation system and method therefor
FR3025808A1 (fr) * 2014-09-12 2016-03-18 Essilor Int Systeme de traitement sous vide configure pour deposer au moins un revetement fonctionnel sur une lentille ophtalmique

Also Published As

Publication number Publication date
FR2380070B3 (fr) 1980-01-04

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