FR2376820A1 - Procede de fabrication de silicium tres pur - Google Patents
Procede de fabrication de silicium tres purInfo
- Publication number
- FR2376820A1 FR2376820A1 FR7737551A FR7737551A FR2376820A1 FR 2376820 A1 FR2376820 A1 FR 2376820A1 FR 7737551 A FR7737551 A FR 7737551A FR 7737551 A FR7737551 A FR 7737551A FR 2376820 A1 FR2376820 A1 FR 2376820A1
- Authority
- FR
- France
- Prior art keywords
- silicon
- arc
- manufacturing process
- pure silicon
- flux
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 229910052710 silicon Inorganic materials 0.000 title abstract 7
- 239000010703 silicon Substances 0.000 title abstract 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 239000007788 liquid Substances 0.000 abstract 3
- 239000007795 chemical reaction product Substances 0.000 abstract 2
- 230000004907 flux Effects 0.000 abstract 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract 2
- 239000001257 hydrogen Substances 0.000 abstract 2
- -1 silicon halogen Chemical class 0.000 abstract 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 1
- 238000010891 electric arc Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 229910052736 halogen Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000047 product Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
a. Procédé de fabrication de silicium très pur. b. Procédé caractérisé en ce qu'on forme un arc électrique dans l'intervalle axial des électrodes, on introduit un gaz dans l'arc, on fournit une certaine quantité d'hydrogène au flux de l'arc, on introduit dans le flux de l'arc une certaine quantité d'halogène de silicium pour donner des produits de réaction, comprenant du silicium liquide et des halogénures d'hydrogène, on projette les produits de la réaction dans la chambre de réaction pour séparer le silicium liquide des produits gazeux, on dépose le silicium liquide. c. L'invention s'applique notamment à la fabrication du silicium destiné aux composants électroniques.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/757,545 US4102985A (en) | 1977-01-06 | 1977-01-06 | Arc heater production of silicon involving a hydrogen reduction |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2376820A1 true FR2376820A1 (fr) | 1978-08-04 |
Family
ID=25048232
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7737551A Withdrawn FR2376820A1 (fr) | 1977-01-06 | 1977-12-13 | Procede de fabrication de silicium tres pur |
Country Status (5)
Country | Link |
---|---|
US (1) | US4102985A (fr) |
JP (1) | JPS5385719A (fr) |
CA (1) | CA1091280A (fr) |
DE (1) | DE2800281A1 (fr) |
FR (1) | FR2376820A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2405774A1 (fr) * | 1977-10-12 | 1979-05-11 | Westinghouse Electric Corp | Mecanisme et procede de controle de la coulee du silicium liquide |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4272488A (en) * | 1977-05-25 | 1981-06-09 | John S. Pennish | Apparatus for producing and casting liquid silicon |
US4188368A (en) * | 1978-03-29 | 1980-02-12 | Nasa | Method of producing silicon |
US4239740A (en) * | 1979-05-25 | 1980-12-16 | Westinghouse Electric Corp. | Production of high purity silicon by a heterogeneous arc heater reduction |
DE3016807A1 (de) * | 1980-05-02 | 1981-11-05 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zur herstellung von silizium |
US4321246A (en) * | 1980-05-09 | 1982-03-23 | Motorola, Inc. | Polycrystalline silicon production |
US4309259A (en) * | 1980-05-09 | 1982-01-05 | Motorola, Inc. | High pressure plasma hydrogenation of silicon tetrachloride |
US4487162A (en) * | 1980-11-25 | 1984-12-11 | Cann Gordon L | Magnetoplasmadynamic apparatus for the separation and deposition of materials |
US4471003A (en) * | 1980-11-25 | 1984-09-11 | Cann Gordon L | Magnetoplasmadynamic apparatus and process for the separation and deposition of materials |
US4529576A (en) * | 1982-12-27 | 1985-07-16 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
US4584181A (en) * | 1982-12-27 | 1986-04-22 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
DE102005024041A1 (de) * | 2005-05-25 | 2006-11-30 | City Solar Ag | Verfahren zur Herstellung von Silicium aus Halogensilanen |
DE102006043929B4 (de) | 2006-09-14 | 2016-10-06 | Spawnt Private S.À.R.L. | Verfahren zur Herstellung von festen Polysilanmischungen |
DE102008059408A1 (de) | 2008-11-27 | 2010-06-02 | Schmid Silicon Technology Gmbh | Verfahren und Vorrichtungen zur Herstellung von Reinstsilizium |
KR101329750B1 (ko) * | 2011-05-18 | 2013-11-14 | (주)그린사이언스 | 플라즈마 수소화 반응 장치 |
IN2015DN00635A (fr) * | 2012-08-22 | 2015-06-26 | Solvay |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2904404A (en) * | 1957-01-09 | 1959-09-15 | Raytheon Co | Preparation of silicon |
US3765870A (en) * | 1971-12-15 | 1973-10-16 | Westinghouse Electric Corp | Method of direct ore reduction using a short cap arc heater |
US4102764A (en) * | 1976-12-29 | 1978-07-25 | Westinghouse Electric Corp. | High purity silicon production by arc heater reduction of silicon intermediates |
-
1977
- 1977-01-06 US US05/757,545 patent/US4102985A/en not_active Expired - Lifetime
- 1977-11-29 CA CA291,966A patent/CA1091280A/fr not_active Expired
- 1977-12-13 FR FR7737551A patent/FR2376820A1/fr not_active Withdrawn
- 1977-12-29 JP JP16098277A patent/JPS5385719A/ja active Pending
-
1978
- 1978-01-04 DE DE19782800281 patent/DE2800281A1/de not_active Ceased
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2405774A1 (fr) * | 1977-10-12 | 1979-05-11 | Westinghouse Electric Corp | Mecanisme et procede de controle de la coulee du silicium liquide |
Also Published As
Publication number | Publication date |
---|---|
JPS5385719A (en) | 1978-07-28 |
DE2800281A1 (de) | 1978-07-13 |
US4102985A (en) | 1978-07-25 |
CA1091280A (fr) | 1980-12-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse | ||
AR | Application made for restoration | ||
DI | Inadmissibility of an action of restoration |