FR2346704A1 - Detecteur capacitif de pression - Google Patents

Detecteur capacitif de pression

Info

Publication number
FR2346704A1
FR2346704A1 FR7709210A FR7709210A FR2346704A1 FR 2346704 A1 FR2346704 A1 FR 2346704A1 FR 7709210 A FR7709210 A FR 7709210A FR 7709210 A FR7709210 A FR 7709210A FR 2346704 A1 FR2346704 A1 FR 2346704A1
Authority
FR
France
Prior art keywords
pressure detector
capacitive pressure
capacitive
detector
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7709210A
Other languages
English (en)
Other versions
FR2346704B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Setra Systems Inc
Original Assignee
Setra Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Setra Systems Inc filed Critical Setra Systems Inc
Publication of FR2346704A1 publication Critical patent/FR2346704A1/fr
Application granted granted Critical
Publication of FR2346704B1 publication Critical patent/FR2346704B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
    • G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
FR7709210A 1976-03-29 1977-03-28 Detecteur capacitif de pression Granted FR2346704A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/671,612 US4084438A (en) 1976-03-29 1976-03-29 Capacitive pressure sensing device

Publications (2)

Publication Number Publication Date
FR2346704A1 true FR2346704A1 (fr) 1977-10-28
FR2346704B1 FR2346704B1 (fr) 1982-04-09

Family

ID=24695219

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7709210A Granted FR2346704A1 (fr) 1976-03-29 1977-03-28 Detecteur capacitif de pression

Country Status (5)

Country Link
US (1) US4084438A (fr)
JP (1) JPS52126272A (fr)
DE (1) DE2709834A1 (fr)
FR (1) FR2346704A1 (fr)
GB (1) GB1551514A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2443054A1 (fr) * 1978-12-01 1980-06-27 Besco Ind Inc Transducteur capacitif de force
EP0018283A1 (fr) * 1979-04-16 1980-10-29 The Bendix Corporation Capteur de pression

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4160600A (en) * 1976-09-23 1979-07-10 Smiths Industries Limited Pressure-responsive apparatus
US4238661A (en) * 1978-10-02 1980-12-09 The Bendix Corporation Pressure-sensing capacitor and method of trimming same
US4238662A (en) * 1978-10-02 1980-12-09 The Bendix Corporation Pressure-sensing capacitor and method of trimming same
US4277814A (en) * 1979-09-04 1981-07-07 Ford Motor Company Semiconductor variable capacitance pressure transducer assembly
CA1154502A (fr) * 1979-09-04 1983-09-27 Joseph W. Crow Transducteur de pression a capacite variable a semiconducteur
US4262532A (en) * 1979-09-13 1981-04-21 General Electric Company Pressure and temperature sensor
DE3015356A1 (de) * 1980-04-22 1981-10-29 Robert Bosch Gmbh, 7000 Stuttgart Freitragende schichten sowie verfahren zur herstellung freitragender schichten, insbesondere fuer sensoren fuer brennkraftmaschinen
US4358814A (en) * 1980-10-27 1982-11-09 Setra Systems, Inc. Capacitive pressure sensor
US4389895A (en) * 1981-07-27 1983-06-28 Rosemount Inc. Capacitance pressure sensor
US4445383A (en) * 1982-06-18 1984-05-01 General Signal Corporation Multiple range capacitive pressure transducer
FI74350C (fi) * 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
JPS60233863A (ja) * 1984-05-04 1985-11-20 Fuji Electric Co Ltd 静電容量式圧力センサ
US4578735A (en) * 1984-10-12 1986-03-25 Knecht Thomas A Pressure sensing cell using brittle diaphragm
US4603371A (en) * 1984-10-12 1986-07-29 Rosemount Inc. Capacitive sensing cell made of brittle material
NL8500139A (nl) * 1985-01-21 1986-08-18 Advanced Micro Electronic Capacitief weegtoestel.
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
US4730496A (en) * 1986-06-23 1988-03-15 Rosemount Inc. Capacitance pressure sensor
US4785669A (en) * 1987-05-18 1988-11-22 Mks Instruments, Inc. Absolute capacitance manometers
US5062302A (en) * 1988-04-29 1991-11-05 Schlumberger Industries, Inc. Laminated semiconductor sensor with overpressure protection
FR2638524B1 (fr) * 1988-10-27 1994-10-28 Schlumberger Prospection Capteur de pression utilisable dans les puits de petrole
US5150275A (en) * 1991-07-01 1992-09-22 Setra Systems, Inc. Capacitive pressure sensor
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
US5442962A (en) * 1993-08-20 1995-08-22 Setra Systems, Inc. Capacitive pressure sensor having a pedestal supported electrode
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) * 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5763787A (en) * 1996-09-05 1998-06-09 Rosemont Inc. Carrier assembly for fluid sensor
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US5911162A (en) * 1997-06-20 1999-06-08 Mks Instruments, Inc. Capacitive pressure transducer with improved electrode support
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
US20040099061A1 (en) * 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6029525A (en) * 1998-02-04 2000-02-29 Mks Instruments, Inc. Capacitive based pressure sensor design
US6568274B1 (en) * 1998-02-04 2003-05-27 Mks Instruments, Inc. Capacitive based pressure sensor design
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6508129B1 (en) 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
CN1151367C (zh) 2000-01-06 2004-05-26 罗斯蒙德公司 微机电***(mems)用的电互联的晶粒生长
US6520020B1 (en) 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6772640B1 (en) 2000-10-10 2004-08-10 Mks Instruments, Inc. Multi-temperature heater for use with pressure transducers
FR2818676B1 (fr) * 2000-12-27 2003-03-07 Freyssinet Int Stup Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US6768958B2 (en) * 2002-11-26 2004-07-27 Lsi Logic Corporation Automatic calibration of a masking process simulator
US7570065B2 (en) * 2006-03-01 2009-08-04 Loadstar Sensors Inc Cylindrical capacitive force sensing device and method
US7353713B2 (en) 2003-04-09 2008-04-08 Loadstar Sensors, Inc. Flexible apparatus and method to enhance capacitive force sensing
US6993973B2 (en) * 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7737321B2 (en) * 2003-09-23 2010-06-15 Elliott Nyle S colostomy alert device and method
WO2006039236A2 (fr) * 2004-09-29 2006-04-13 Loadstar Sensors, Inc. Detection de variation de distance d'isolement au moyen de techniques capacitives
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) * 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) * 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7089798B2 (en) * 2004-10-18 2006-08-15 Silverbrook Research Pty Ltd Pressure sensor with thin membrane
US7159467B2 (en) * 2004-10-18 2007-01-09 Silverbrook Research Pty Ltd Pressure sensor with conductive ceramic membrane
US7234357B2 (en) * 2004-10-18 2007-06-26 Silverbrook Research Pty Ltd Wafer bonded pressure sensor
US7240560B2 (en) * 2004-10-18 2007-07-10 Silverbrook Research Pty Ltd Pressure sensor with remote power source
US7143652B2 (en) * 2004-10-18 2006-12-05 Silverbrook Research Pty Ltd Pressure sensor for high acceleration environment
US7194901B2 (en) * 2004-10-18 2007-03-27 Silverbrook Research Pty Ltd Pressure sensor with apertured membrane guard
US7204150B2 (en) * 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
DE102005008959B4 (de) * 2005-02-28 2012-08-30 Heinz Plöchinger Drucksensoren und Kombinations-Drucksensoren und deren Verwendung
US20060267321A1 (en) * 2005-05-27 2006-11-30 Loadstar Sensors, Inc. On-board vehicle seat capacitive force sensing device and method
US7343814B2 (en) * 2006-04-03 2008-03-18 Loadstar Sensors, Inc. Multi-zone capacitive force sensing device and methods
US20090015269A1 (en) * 2007-07-13 2009-01-15 Pinto Gino A Stray Capacitance Compensation for a Capacitive Sensor
US9016133B2 (en) * 2011-01-05 2015-04-28 Nxp, B.V. Pressure sensor with pressure-actuated switch
USRE49069E1 (en) 2012-12-12 2022-05-10 Johnson Controls Technology Company Side viewable lighted bezel for a display device
US11277893B2 (en) 2015-10-28 2022-03-15 Johnson Controls Technology Company Thermostat with area light system and occupancy sensor
US10655881B2 (en) 2015-10-28 2020-05-19 Johnson Controls Technology Company Thermostat with halo light system and emergency directions
US11107390B2 (en) 2018-12-21 2021-08-31 Johnson Controls Technology Company Display device with halo

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3750476A (en) * 1967-09-25 1973-08-07 Bissett Berman Corp Pressure transducer
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1559063A (en) * 1923-09-10 1925-10-27 American Res And Dev Company Pressure-responsive device
US2649579A (en) * 1950-02-01 1953-08-18 Standard Oil Dev Co Detector for seismic exploration
US3040582A (en) * 1958-11-26 1962-06-26 Bendix Corp Motion transmission mechanisms
US3356963A (en) * 1966-06-23 1967-12-05 Willard E Buck Fused quartz motion sensitive transducer
US3405559A (en) * 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer
US3643510A (en) * 1969-12-17 1972-02-22 Liquidonics Inc Fluid displacement pressure gauges
US3645137A (en) * 1970-04-16 1972-02-29 Bendix Corp Quartz pressure sensor
US3715638A (en) * 1971-05-10 1973-02-06 Bendix Corp Temperature compensator for capacitive pressure transducers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3750476A (en) * 1967-09-25 1973-08-07 Bissett Berman Corp Pressure transducer
DE2021479A1 (de) * 1970-05-02 1971-11-11 Kleinwaechter Hans Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten
US3858097A (en) * 1973-12-26 1974-12-31 Bendix Corp Pressure-sensing capacitor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2443054A1 (fr) * 1978-12-01 1980-06-27 Besco Ind Inc Transducteur capacitif de force
EP0018283A1 (fr) * 1979-04-16 1980-10-29 The Bendix Corporation Capteur de pression

Also Published As

Publication number Publication date
DE2709834A1 (de) 1977-10-13
FR2346704B1 (fr) 1982-04-09
JPS52126272A (en) 1977-10-22
US4084438A (en) 1978-04-18
GB1551514A (en) 1979-08-30

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Legal Events

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