FR2346704A1 - Detecteur capacitif de pression - Google Patents
Detecteur capacitif de pressionInfo
- Publication number
- FR2346704A1 FR2346704A1 FR7709210A FR7709210A FR2346704A1 FR 2346704 A1 FR2346704 A1 FR 2346704A1 FR 7709210 A FR7709210 A FR 7709210A FR 7709210 A FR7709210 A FR 7709210A FR 2346704 A1 FR2346704 A1 FR 2346704A1
- Authority
- FR
- France
- Prior art keywords
- pressure detector
- capacitive pressure
- capacitive
- detector
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0082—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means
- G01L9/0086—Transmitting or indicating the displacement of capsules by electric, electromechanical, magnetic, or electromechanical means using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/671,612 US4084438A (en) | 1976-03-29 | 1976-03-29 | Capacitive pressure sensing device |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2346704A1 true FR2346704A1 (fr) | 1977-10-28 |
FR2346704B1 FR2346704B1 (fr) | 1982-04-09 |
Family
ID=24695219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7709210A Granted FR2346704A1 (fr) | 1976-03-29 | 1977-03-28 | Detecteur capacitif de pression |
Country Status (5)
Country | Link |
---|---|
US (1) | US4084438A (fr) |
JP (1) | JPS52126272A (fr) |
DE (1) | DE2709834A1 (fr) |
FR (1) | FR2346704A1 (fr) |
GB (1) | GB1551514A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2443054A1 (fr) * | 1978-12-01 | 1980-06-27 | Besco Ind Inc | Transducteur capacitif de force |
EP0018283A1 (fr) * | 1979-04-16 | 1980-10-29 | The Bendix Corporation | Capteur de pression |
Families Citing this family (66)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4160600A (en) * | 1976-09-23 | 1979-07-10 | Smiths Industries Limited | Pressure-responsive apparatus |
US4238661A (en) * | 1978-10-02 | 1980-12-09 | The Bendix Corporation | Pressure-sensing capacitor and method of trimming same |
US4238662A (en) * | 1978-10-02 | 1980-12-09 | The Bendix Corporation | Pressure-sensing capacitor and method of trimming same |
US4277814A (en) * | 1979-09-04 | 1981-07-07 | Ford Motor Company | Semiconductor variable capacitance pressure transducer assembly |
CA1154502A (fr) * | 1979-09-04 | 1983-09-27 | Joseph W. Crow | Transducteur de pression a capacite variable a semiconducteur |
US4262532A (en) * | 1979-09-13 | 1981-04-21 | General Electric Company | Pressure and temperature sensor |
DE3015356A1 (de) * | 1980-04-22 | 1981-10-29 | Robert Bosch Gmbh, 7000 Stuttgart | Freitragende schichten sowie verfahren zur herstellung freitragender schichten, insbesondere fuer sensoren fuer brennkraftmaschinen |
US4358814A (en) * | 1980-10-27 | 1982-11-09 | Setra Systems, Inc. | Capacitive pressure sensor |
US4389895A (en) * | 1981-07-27 | 1983-06-28 | Rosemount Inc. | Capacitance pressure sensor |
US4445383A (en) * | 1982-06-18 | 1984-05-01 | General Signal Corporation | Multiple range capacitive pressure transducer |
FI74350C (fi) * | 1984-02-21 | 1988-01-11 | Vaisala Oy | Kapacitiv absoluttryckgivare. |
JPS60233863A (ja) * | 1984-05-04 | 1985-11-20 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
US4578735A (en) * | 1984-10-12 | 1986-03-25 | Knecht Thomas A | Pressure sensing cell using brittle diaphragm |
US4603371A (en) * | 1984-10-12 | 1986-07-29 | Rosemount Inc. | Capacitive sensing cell made of brittle material |
NL8500139A (nl) * | 1985-01-21 | 1986-08-18 | Advanced Micro Electronic | Capacitief weegtoestel. |
US4617606A (en) * | 1985-01-31 | 1986-10-14 | Motorola, Inc. | Capacitive pressure transducer |
US4730496A (en) * | 1986-06-23 | 1988-03-15 | Rosemount Inc. | Capacitance pressure sensor |
US4785669A (en) * | 1987-05-18 | 1988-11-22 | Mks Instruments, Inc. | Absolute capacitance manometers |
US5062302A (en) * | 1988-04-29 | 1991-11-05 | Schlumberger Industries, Inc. | Laminated semiconductor sensor with overpressure protection |
FR2638524B1 (fr) * | 1988-10-27 | 1994-10-28 | Schlumberger Prospection | Capteur de pression utilisable dans les puits de petrole |
US5150275A (en) * | 1991-07-01 | 1992-09-22 | Setra Systems, Inc. | Capacitive pressure sensor |
JP2896725B2 (ja) * | 1991-12-26 | 1999-05-31 | 株式会社山武 | 静電容量式圧力センサ |
US5442962A (en) * | 1993-08-20 | 1995-08-22 | Setra Systems, Inc. | Capacitive pressure sensor having a pedestal supported electrode |
US6484585B1 (en) | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
US5637802A (en) * | 1995-02-28 | 1997-06-10 | Rosemount Inc. | Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates |
US5665899A (en) * | 1996-02-23 | 1997-09-09 | Rosemount Inc. | Pressure sensor diagnostics in a process transmitter |
US5763787A (en) * | 1996-09-05 | 1998-06-09 | Rosemont Inc. | Carrier assembly for fluid sensor |
US5808205A (en) * | 1997-04-01 | 1998-09-15 | Rosemount Inc. | Eccentric capacitive pressure sensor |
US5911162A (en) * | 1997-06-20 | 1999-06-08 | Mks Instruments, Inc. | Capacitive pressure transducer with improved electrode support |
US5965821A (en) * | 1997-07-03 | 1999-10-12 | Mks Instruments, Inc. | Pressure sensor |
US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
US6029525A (en) * | 1998-02-04 | 2000-02-29 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
US6568274B1 (en) * | 1998-02-04 | 2003-05-27 | Mks Instruments, Inc. | Capacitive based pressure sensor design |
US6505516B1 (en) | 2000-01-06 | 2003-01-14 | Rosemount Inc. | Capacitive pressure sensing with moving dielectric |
US6561038B2 (en) | 2000-01-06 | 2003-05-13 | Rosemount Inc. | Sensor with fluid isolation barrier |
US6508129B1 (en) | 2000-01-06 | 2003-01-21 | Rosemount Inc. | Pressure sensor capsule with improved isolation |
CN1151367C (zh) | 2000-01-06 | 2004-05-26 | 罗斯蒙德公司 | 微机电***(mems)用的电互联的晶粒生长 |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
US6772640B1 (en) | 2000-10-10 | 2004-08-10 | Mks Instruments, Inc. | Multi-temperature heater for use with pressure transducers |
FR2818676B1 (fr) * | 2000-12-27 | 2003-03-07 | Freyssinet Int Stup | Procede de demontage d'un cable de precontrainte et dispositif pour la mise en oeuvre |
US6848316B2 (en) * | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
US6768958B2 (en) * | 2002-11-26 | 2004-07-27 | Lsi Logic Corporation | Automatic calibration of a masking process simulator |
US7570065B2 (en) * | 2006-03-01 | 2009-08-04 | Loadstar Sensors Inc | Cylindrical capacitive force sensing device and method |
US7353713B2 (en) | 2003-04-09 | 2008-04-08 | Loadstar Sensors, Inc. | Flexible apparatus and method to enhance capacitive force sensing |
US6993973B2 (en) * | 2003-05-16 | 2006-02-07 | Mks Instruments, Inc. | Contaminant deposition control baffle for a capacitive pressure transducer |
US7737321B2 (en) * | 2003-09-23 | 2010-06-15 | Elliott Nyle S | colostomy alert device and method |
WO2006039236A2 (fr) * | 2004-09-29 | 2006-04-13 | Loadstar Sensors, Inc. | Detection de variation de distance d'isolement au moyen de techniques capacitives |
US7201057B2 (en) * | 2004-09-30 | 2007-04-10 | Mks Instruments, Inc. | High-temperature reduced size manometer |
US7141447B2 (en) * | 2004-10-07 | 2006-11-28 | Mks Instruments, Inc. | Method of forming a seal between a housing and a diaphragm of a capacitance sensor |
US7137301B2 (en) * | 2004-10-07 | 2006-11-21 | Mks Instruments, Inc. | Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor |
US7089798B2 (en) * | 2004-10-18 | 2006-08-15 | Silverbrook Research Pty Ltd | Pressure sensor with thin membrane |
US7159467B2 (en) * | 2004-10-18 | 2007-01-09 | Silverbrook Research Pty Ltd | Pressure sensor with conductive ceramic membrane |
US7234357B2 (en) * | 2004-10-18 | 2007-06-26 | Silverbrook Research Pty Ltd | Wafer bonded pressure sensor |
US7240560B2 (en) * | 2004-10-18 | 2007-07-10 | Silverbrook Research Pty Ltd | Pressure sensor with remote power source |
US7143652B2 (en) * | 2004-10-18 | 2006-12-05 | Silverbrook Research Pty Ltd | Pressure sensor for high acceleration environment |
US7194901B2 (en) * | 2004-10-18 | 2007-03-27 | Silverbrook Research Pty Ltd | Pressure sensor with apertured membrane guard |
US7204150B2 (en) * | 2005-01-14 | 2007-04-17 | Mks Instruments, Inc. | Turbo sump for use with capacitive pressure sensor |
DE102005008959B4 (de) * | 2005-02-28 | 2012-08-30 | Heinz Plöchinger | Drucksensoren und Kombinations-Drucksensoren und deren Verwendung |
US20060267321A1 (en) * | 2005-05-27 | 2006-11-30 | Loadstar Sensors, Inc. | On-board vehicle seat capacitive force sensing device and method |
US7343814B2 (en) * | 2006-04-03 | 2008-03-18 | Loadstar Sensors, Inc. | Multi-zone capacitive force sensing device and methods |
US20090015269A1 (en) * | 2007-07-13 | 2009-01-15 | Pinto Gino A | Stray Capacitance Compensation for a Capacitive Sensor |
US9016133B2 (en) * | 2011-01-05 | 2015-04-28 | Nxp, B.V. | Pressure sensor with pressure-actuated switch |
USRE49069E1 (en) | 2012-12-12 | 2022-05-10 | Johnson Controls Technology Company | Side viewable lighted bezel for a display device |
US11277893B2 (en) | 2015-10-28 | 2022-03-15 | Johnson Controls Technology Company | Thermostat with area light system and occupancy sensor |
US10655881B2 (en) | 2015-10-28 | 2020-05-19 | Johnson Controls Technology Company | Thermostat with halo light system and emergency directions |
US11107390B2 (en) | 2018-12-21 | 2021-08-31 | Johnson Controls Technology Company | Display device with halo |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2021479A1 (de) * | 1970-05-02 | 1971-11-11 | Kleinwaechter Hans | Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten |
US3750476A (en) * | 1967-09-25 | 1973-08-07 | Bissett Berman Corp | Pressure transducer |
US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1559063A (en) * | 1923-09-10 | 1925-10-27 | American Res And Dev Company | Pressure-responsive device |
US2649579A (en) * | 1950-02-01 | 1953-08-18 | Standard Oil Dev Co | Detector for seismic exploration |
US3040582A (en) * | 1958-11-26 | 1962-06-26 | Bendix Corp | Motion transmission mechanisms |
US3356963A (en) * | 1966-06-23 | 1967-12-05 | Willard E Buck | Fused quartz motion sensitive transducer |
US3405559A (en) * | 1966-11-07 | 1968-10-15 | United Aircraft Corp | Pressure transducer |
US3643510A (en) * | 1969-12-17 | 1972-02-22 | Liquidonics Inc | Fluid displacement pressure gauges |
US3645137A (en) * | 1970-04-16 | 1972-02-29 | Bendix Corp | Quartz pressure sensor |
US3715638A (en) * | 1971-05-10 | 1973-02-06 | Bendix Corp | Temperature compensator for capacitive pressure transducers |
-
1976
- 1976-03-29 US US05/671,612 patent/US4084438A/en not_active Expired - Lifetime
-
1977
- 1977-03-07 DE DE19772709834 patent/DE2709834A1/de not_active Ceased
- 1977-03-18 GB GB11538/77A patent/GB1551514A/en not_active Expired
- 1977-03-28 FR FR7709210A patent/FR2346704A1/fr active Granted
- 1977-03-28 JP JP3341777A patent/JPS52126272A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3750476A (en) * | 1967-09-25 | 1973-08-07 | Bissett Berman Corp | Pressure transducer |
DE2021479A1 (de) * | 1970-05-02 | 1971-11-11 | Kleinwaechter Hans | Druckmessgeraet zur Messung von Drucken in Gasen und Fluessigkeiten |
US3858097A (en) * | 1973-12-26 | 1974-12-31 | Bendix Corp | Pressure-sensing capacitor |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2443054A1 (fr) * | 1978-12-01 | 1980-06-27 | Besco Ind Inc | Transducteur capacitif de force |
EP0018283A1 (fr) * | 1979-04-16 | 1980-10-29 | The Bendix Corporation | Capteur de pression |
Also Published As
Publication number | Publication date |
---|---|
DE2709834A1 (de) | 1977-10-13 |
FR2346704B1 (fr) | 1982-04-09 |
JPS52126272A (en) | 1977-10-22 |
US4084438A (en) | 1978-04-18 |
GB1551514A (en) | 1979-08-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |