FR2213788A1 - Drying appts - to remove liquid esp water from non-absorbent esp flat articles - Google Patents

Drying appts - to remove liquid esp water from non-absorbent esp flat articles

Info

Publication number
FR2213788A1
FR2213788A1 FR7301370A FR7301370A FR2213788A1 FR 2213788 A1 FR2213788 A1 FR 2213788A1 FR 7301370 A FR7301370 A FR 7301370A FR 7301370 A FR7301370 A FR 7301370A FR 2213788 A1 FR2213788 A1 FR 2213788A1
Authority
FR
France
Prior art keywords
esp
articles
water
sump
solvent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7301370A
Other languages
French (fr)
Other versions
FR2213788B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Allied Corp
Original Assignee
Allied Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Allied Chemical Corp filed Critical Allied Chemical Corp
Priority to FR7301370A priority Critical patent/FR2213788A1/en
Publication of FR2213788A1 publication Critical patent/FR2213788A1/en
Application granted granted Critical
Publication of FR2213788B1 publication Critical patent/FR2213788B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/005—Drying solid materials or objects by processes not involving the application of heat by dipping them into or mixing them with a chemical liquid, e.g. organic; chemical, e.g. organic, dewatering aids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D12/00—Displacing liquid, e.g. from wet solids or from dispersions of liquids or from solids in liquids, by means of another liquid

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Dispersion Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Drying Of Solid Materials (AREA)

Abstract

The drying appts. has a solvent sump, with an ultrasonic vibrator, into which articles are dipped. Vibrating solvent washes liquid off the article, and this liquid forms an upper liquid phase in the sump. Liquid overflows into a water-sepg. sump which has an upper pipe to draw off water, and a lower solvent draw-off pipe leading to a recirculation system. As an alternative to a vibrator a spray can be used to wash the articles, or a mechanism provided to agitate the articles in the sump. The method is continuous and partic. useful for drying a number of flat articles at room temp. e.g. silicon wafers carried in a basket, the flat surfaces of which are sepd. by vibrating solvent and completely dried.
FR7301370A 1973-01-16 1973-01-16 Drying appts - to remove liquid esp water from non-absorbent esp flat articles Granted FR2213788A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7301370A FR2213788A1 (en) 1973-01-16 1973-01-16 Drying appts - to remove liquid esp water from non-absorbent esp flat articles

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7301370A FR2213788A1 (en) 1973-01-16 1973-01-16 Drying appts - to remove liquid esp water from non-absorbent esp flat articles

Publications (2)

Publication Number Publication Date
FR2213788A1 true FR2213788A1 (en) 1974-08-09
FR2213788B1 FR2213788B1 (en) 1977-07-22

Family

ID=9113344

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7301370A Granted FR2213788A1 (en) 1973-01-16 1973-01-16 Drying appts - to remove liquid esp water from non-absorbent esp flat articles

Country Status (1)

Country Link
FR (1) FR2213788A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328497A1 (en) * 1975-10-25 1977-05-20 Schoeller & Co Elektrotech PROCESS AND INSTALLATION THAT CAN BE USED FOR DRYING PARTS CONTAINED IN PARTICULAR FROM GLASS
FR2369858A1 (en) * 1976-11-04 1978-06-02 Isc Chemicals Ltd PROCESS FOR DRYING ARTICLES AND APPARATUS USED IN THIS PROCESS
EP0017459A1 (en) * 1979-03-31 1980-10-15 Daikin Kogyo Co., Ltd. Process for removing water from surfaces of articles and water removing bath for use in the process
FR2486287A1 (en) * 1980-07-07 1982-01-08 Rca Corp METHOD FOR MANUFACTURING DISCS CONTAINING HIGH DENSITY INFORMATION
WO1987001740A1 (en) * 1985-09-13 1987-03-26 Serge Berruex Method and apparatus for rinsing surfaces with non-aqueous liquids

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1541592A (en) * 1966-11-15 1968-10-04 Du Pont A method of continuously removing water from the surface of a non-absorbent article by immersion in a non-aqueous bath and apparatus for carrying out this method
US3559297A (en) * 1969-03-10 1971-02-02 Allied Chem Process and apparatus for removing water from solid surfaces
US3589023A (en) * 1969-06-10 1971-06-29 Allied Chem Process and apparatus for removing water from solid surfaces at low temperatures
GB1285509A (en) * 1969-04-11 1972-08-16 Pechiney Saint Gobain Drying and cleaning of surfaces

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1541592A (en) * 1966-11-15 1968-10-04 Du Pont A method of continuously removing water from the surface of a non-absorbent article by immersion in a non-aqueous bath and apparatus for carrying out this method
US3559297A (en) * 1969-03-10 1971-02-02 Allied Chem Process and apparatus for removing water from solid surfaces
GB1285509A (en) * 1969-04-11 1972-08-16 Pechiney Saint Gobain Drying and cleaning of surfaces
US3589023A (en) * 1969-06-10 1971-06-29 Allied Chem Process and apparatus for removing water from solid surfaces at low temperatures

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328497A1 (en) * 1975-10-25 1977-05-20 Schoeller & Co Elektrotech PROCESS AND INSTALLATION THAT CAN BE USED FOR DRYING PARTS CONTAINED IN PARTICULAR FROM GLASS
FR2369858A1 (en) * 1976-11-04 1978-06-02 Isc Chemicals Ltd PROCESS FOR DRYING ARTICLES AND APPARATUS USED IN THIS PROCESS
EP0017459A1 (en) * 1979-03-31 1980-10-15 Daikin Kogyo Co., Ltd. Process for removing water from surfaces of articles and water removing bath for use in the process
FR2486287A1 (en) * 1980-07-07 1982-01-08 Rca Corp METHOD FOR MANUFACTURING DISCS CONTAINING HIGH DENSITY INFORMATION
WO1987001740A1 (en) * 1985-09-13 1987-03-26 Serge Berruex Method and apparatus for rinsing surfaces with non-aqueous liquids
US4936921A (en) * 1985-09-13 1990-06-26 Serge Berruex Method and apparatus for rinsing hydrophilic surfaces with a non-aqueous liquid

Also Published As

Publication number Publication date
FR2213788B1 (en) 1977-07-22

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