JPS52113060A - Washing apparatus - Google Patents
Washing apparatusInfo
- Publication number
- JPS52113060A JPS52113060A JP2862076A JP2862076A JPS52113060A JP S52113060 A JPS52113060 A JP S52113060A JP 2862076 A JP2862076 A JP 2862076A JP 2862076 A JP2862076 A JP 2862076A JP S52113060 A JPS52113060 A JP S52113060A
- Authority
- JP
- Japan
- Prior art keywords
- washing apparatus
- shower
- treatment liquid
- order
- water jet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
PURPOSE: To provide a water jet means by shower in order to readily remove droplets of the treatment liquid.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2862076A JPS5855661B2 (en) | 1976-03-18 | 1976-03-18 | cleaning equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2862076A JPS5855661B2 (en) | 1976-03-18 | 1976-03-18 | cleaning equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52113060A true JPS52113060A (en) | 1977-09-21 |
JPS5855661B2 JPS5855661B2 (en) | 1983-12-10 |
Family
ID=12253583
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2862076A Expired JPS5855661B2 (en) | 1976-03-18 | 1976-03-18 | cleaning equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5855661B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5782987U (en) * | 1980-11-05 | 1982-05-22 | ||
JPS58112703U (en) * | 1982-01-28 | 1983-08-02 | 三菱電機株式会社 | hydraulic operating device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000308857A (en) * | 1999-04-27 | 2000-11-07 | Tokyo Electron Ltd | Method and device for liquid treatment |
-
1976
- 1976-03-18 JP JP2862076A patent/JPS5855661B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5782987U (en) * | 1980-11-05 | 1982-05-22 | ||
JPS58112703U (en) * | 1982-01-28 | 1983-08-02 | 三菱電機株式会社 | hydraulic operating device |
Also Published As
Publication number | Publication date |
---|---|
JPS5855661B2 (en) | 1983-12-10 |
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