JPS52113060A - Washing apparatus - Google Patents

Washing apparatus

Info

Publication number
JPS52113060A
JPS52113060A JP2862076A JP2862076A JPS52113060A JP S52113060 A JPS52113060 A JP S52113060A JP 2862076 A JP2862076 A JP 2862076A JP 2862076 A JP2862076 A JP 2862076A JP S52113060 A JPS52113060 A JP S52113060A
Authority
JP
Japan
Prior art keywords
washing apparatus
shower
treatment liquid
order
water jet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2862076A
Other languages
Japanese (ja)
Other versions
JPS5855661B2 (en
Inventor
Kazunori Konishi
Okimitsu Yasuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP2862076A priority Critical patent/JPS5855661B2/en
Publication of JPS52113060A publication Critical patent/JPS52113060A/en
Publication of JPS5855661B2 publication Critical patent/JPS5855661B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)

Abstract

PURPOSE: To provide a water jet means by shower in order to readily remove droplets of the treatment liquid.
COPYRIGHT: (C)1977,JPO&Japio
JP2862076A 1976-03-18 1976-03-18 cleaning equipment Expired JPS5855661B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2862076A JPS5855661B2 (en) 1976-03-18 1976-03-18 cleaning equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2862076A JPS5855661B2 (en) 1976-03-18 1976-03-18 cleaning equipment

Publications (2)

Publication Number Publication Date
JPS52113060A true JPS52113060A (en) 1977-09-21
JPS5855661B2 JPS5855661B2 (en) 1983-12-10

Family

ID=12253583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2862076A Expired JPS5855661B2 (en) 1976-03-18 1976-03-18 cleaning equipment

Country Status (1)

Country Link
JP (1) JPS5855661B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5782987U (en) * 1980-11-05 1982-05-22
JPS58112703U (en) * 1982-01-28 1983-08-02 三菱電機株式会社 hydraulic operating device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000308857A (en) * 1999-04-27 2000-11-07 Tokyo Electron Ltd Method and device for liquid treatment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5782987U (en) * 1980-11-05 1982-05-22
JPS58112703U (en) * 1982-01-28 1983-08-02 三菱電機株式会社 hydraulic operating device

Also Published As

Publication number Publication date
JPS5855661B2 (en) 1983-12-10

Similar Documents

Publication Publication Date Title
JPS52113060A (en) Washing apparatus
JPS5288580A (en) Gas-liquid countercurrent contact apparatus
JPS5371565A (en) Reticule washing equipment
JPS541970A (en) Sea-sand clening method and apparatus therefor
JPS53133966A (en) Waste-water treating system
JPS5223866A (en) Rotating cleansing brush device
JPS522075A (en) Apparatus for washing the bottom of automobile
JPS52131647A (en) Contact oxidation type drainage treatment method
JPS5382063A (en) Cleansing apparatus
JPS5431973A (en) Device of reusing water remaining in washing machine
JPS52129689A (en) Solid/liquid separator
JPS5258657A (en) Hair washing machine
JPS5377036A (en) Treatment of liquid containing dimethyl terephthalate
JPS5431608A (en) Water suction mechanism for washer
JPS5230070A (en) Taking and washing device of undiluted solution from drum ca or the li ke
JPS5346847A (en) Facial treatment apparatus
JPS53144458A (en) Apparatus for washing marine sand
JPS52156051A (en) Beauty device
JPS5212775A (en) Water pouring apparatus for washing machine
JPS52107163A (en) Treating method for waste water containing optical bleaching agent
JPS5244462A (en) Filtration apparatus
JPS5241903A (en) Scum eliminating pump
JPS51140218A (en) Wax remover on the side wall of a tank
JPS5399668A (en) Washing apparatus
JPS51119157A (en) Circulating flow,air-exposure purification apparatus