FR2068670A1 - Corps semi-conducteurs a conductivites multiples et a substrat unique et procedes pour leur fabrication - Google Patents
Corps semi-conducteurs a conductivites multiples et a substrat unique et procedes pour leur fabricationInfo
- Publication number
- FR2068670A1 FR2068670A1 FR7042563A FR7042563A FR2068670A1 FR 2068670 A1 FR2068670 A1 FR 2068670A1 FR 7042563 A FR7042563 A FR 7042563A FR 7042563 A FR7042563 A FR 7042563A FR 2068670 A1 FR2068670 A1 FR 2068670A1
- Authority
- FR
- France
- Prior art keywords
- oxide layer
- substrate
- cavity
- layer
- prodn
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US88020369A | 1969-11-26 | 1969-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2068670A1 true FR2068670A1 (fr) | 1971-08-27 |
Family
ID=25375718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7042563A Pending FR2068670A1 (fr) | 1969-11-26 | 1970-11-26 | Corps semi-conducteurs a conductivites multiples et a substrat unique et procedes pour leur fabrication |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE2057895A1 (nl) |
FR (1) | FR2068670A1 (nl) |
NL (1) | NL7017085A (nl) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2194048A1 (nl) * | 1972-07-26 | 1974-02-22 | Texas Instruments Inc | |
FR2465316A1 (fr) * | 1979-09-17 | 1981-03-20 | Nippon Telegraph & Telephone | Dispositifs semi-conducteurs pourvus d'elements semi-conducteurs complementaires et procede de fabrication d'un dispositif semi-conducteur compose |
-
1970
- 1970-11-23 NL NL7017085A patent/NL7017085A/xx unknown
- 1970-11-25 DE DE19702057895 patent/DE2057895A1/de active Pending
- 1970-11-26 FR FR7042563A patent/FR2068670A1/fr active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2194048A1 (nl) * | 1972-07-26 | 1974-02-22 | Texas Instruments Inc | |
FR2465316A1 (fr) * | 1979-09-17 | 1981-03-20 | Nippon Telegraph & Telephone | Dispositifs semi-conducteurs pourvus d'elements semi-conducteurs complementaires et procede de fabrication d'un dispositif semi-conducteur compose |
Also Published As
Publication number | Publication date |
---|---|
NL7017085A (nl) | 1971-05-28 |
DE2057895A1 (de) | 1971-06-24 |
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