FR2042810A5 - - Google Patents

Info

Publication number
FR2042810A5
FR2042810A5 FR7011777A FR7011777A FR2042810A5 FR 2042810 A5 FR2042810 A5 FR 2042810A5 FR 7011777 A FR7011777 A FR 7011777A FR 7011777 A FR7011777 A FR 7011777A FR 2042810 A5 FR2042810 A5 FR 2042810A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7011777A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Application granted granted Critical
Publication of FR2042810A5 publication Critical patent/FR2042810A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/023—Means for mechanically adjusting components not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
FR7011777A 1969-04-02 1970-04-01 Expired FR2042810A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB07343/69A GB1237019A (en) 1969-04-02 1969-04-02 Improvements in or relating to charged particle beam apparatus

Publications (1)

Publication Number Publication Date
FR2042810A5 true FR2042810A5 (fr) 1971-02-12

Family

ID=10093512

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7011777A Expired FR2042810A5 (fr) 1969-04-02 1970-04-01

Country Status (5)

Country Link
US (1) US3638015A (fr)
DE (1) DE2015176A1 (fr)
FR (1) FR2042810A5 (fr)
GB (1) GB1237019A (fr)
NL (1) NL7004663A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2602911B1 (fr) * 1986-08-05 1991-06-28 Letyrant Claude Dispositif de deplacement d'echantillons dans une enceinte a atmosphere controlee
FR2644290A1 (fr) * 1989-03-10 1990-09-14 Labo Electronique Physique Micromanipulateur
JP2619565B2 (ja) * 1990-11-05 1997-06-11 株式会社日立製作所 電子ビーム描画装置
US5376799A (en) * 1993-04-26 1994-12-27 Rj Lee Group, Inc. Turbo-pumped scanning electron microscope
US5920073A (en) * 1997-04-22 1999-07-06 Schlumberger Technologies, Inc. Optical system
US6504393B1 (en) 1997-07-15 2003-01-07 Applied Materials, Inc. Methods and apparatus for testing semiconductor and integrated circuit structures
US6252412B1 (en) 1999-01-08 2001-06-26 Schlumberger Technologies, Inc. Method of detecting defects in patterned substrates
US7528614B2 (en) * 2004-12-22 2009-05-05 Applied Materials, Inc. Apparatus and method for voltage contrast analysis of a wafer using a tilted pre-charging beam
WO2012012548A2 (fr) * 2010-07-20 2012-01-26 The Research Foundation Of State University Of New York Procédés, dispositifs, et systèmes pour manipuler des flux de particules chargées

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3448262A (en) * 1965-03-15 1969-06-03 Hitachi Ltd Device for exchanging pole piece assemblies of an electron lens in an electron microscope
US3535514A (en) * 1966-05-24 1970-10-20 Rca Corp Positionable aperture for electron microscope

Also Published As

Publication number Publication date
DE2015176A1 (de) 1970-10-22
US3638015A (en) 1972-01-25
NL7004663A (fr) 1970-10-06
GB1237019A (en) 1971-06-30

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Legal Events

Date Code Title Description
ST Notification of lapse