FR2015564A1 - - Google Patents
Info
- Publication number
- FR2015564A1 FR2015564A1 FR6926118A FR6926118A FR2015564A1 FR 2015564 A1 FR2015564 A1 FR 2015564A1 FR 6926118 A FR6926118 A FR 6926118A FR 6926118 A FR6926118 A FR 6926118A FR 2015564 A1 FR2015564 A1 FR 2015564A1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S65/00—Glass manufacturing
- Y10S65/04—Electric heat
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US75225268A | 1968-08-13 | 1968-08-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2015564A1 true FR2015564A1 (fr) | 1970-04-30 |
Family
ID=25025536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR6926118A Withdrawn FR2015564A1 (fr) | 1968-08-13 | 1969-07-30 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US3560252A (fr) |
| DE (1) | DE1941254C3 (fr) |
| FR (1) | FR2015564A1 (fr) |
| GB (1) | GB1222461A (fr) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3798055A (en) * | 1968-12-13 | 1974-03-19 | Airco Inc | Vapor deposition process |
| US4023999A (en) * | 1972-06-14 | 1977-05-17 | Westinghouse Electric Corporation | Formation of openings in dielectric sheet |
| US3951642A (en) * | 1974-11-07 | 1976-04-20 | General Electric Company | Metallic coating powder containing Al and Hf |
| US4071638A (en) * | 1974-11-07 | 1978-01-31 | General Electric Company | Method of applying a metallic coating with improved resistance to high temperature to environmental conditions |
| US4321310A (en) * | 1980-01-07 | 1982-03-23 | United Technologies Corporation | Columnar grain ceramic thermal barrier coatings on polished substrates |
| US4321311A (en) * | 1980-01-07 | 1982-03-23 | United Technologies Corporation | Columnar grain ceramic thermal barrier coatings |
| US4281030A (en) * | 1980-05-12 | 1981-07-28 | Bell Telephone Laboratories, Incorporated | Implantation of vaporized material on melted substrates |
| EP0111611B1 (fr) * | 1982-10-28 | 1987-05-13 | International Business Machines Corporation | Perfectionnements aux procédés et équipements de dépôt par évaporation sous vide mettant en oeuvre un canon à électrons |
| US4492852A (en) * | 1983-02-11 | 1985-01-08 | At&T Bell Laboratories | Growth substrate heating arrangement for UHV silicon MBE |
| DE3930832A1 (de) * | 1989-09-15 | 1991-03-28 | Nishibori Mineo | Vorrichtung und verfahren zum beschichten von werkstuecken mittels bogenentladung |
| WO1992014859A1 (fr) * | 1991-02-19 | 1992-09-03 | Eifeler Werkzeuge Gmbh | Procede et dispositif de reduction de gouttelettes lors de l'enduction de surfaces avec des substances dures selon le procede physique de depot en phase gazeuse |
| KR100551980B1 (ko) * | 1997-11-03 | 2006-02-20 | 에이에스엠 아메리카, 인코포레이티드 | 저질량 지지체를 이용한 웨이퍼의 처리방법 및 장치 |
| DE10102991C2 (de) | 2000-02-19 | 2003-11-20 | Ald Vacuum Techn Ag | Einrichtung zum Aufheizen eines Werkstücks aus Metall |
| DE502005006824D1 (de) * | 2005-09-12 | 2009-04-23 | Siemens Ag | Verfahren zum Beschichten einer Turbinenschaufel |
| US8328945B2 (en) * | 2010-03-12 | 2012-12-11 | United Technologies Corporation | Coating apparatus and method with indirect thermal stabilization |
| US9885123B2 (en) | 2011-03-16 | 2018-02-06 | Asm America, Inc. | Rapid bake of semiconductor substrate with upper linear heating elements perpendicular to horizontal gas flow |
-
1968
- 1968-08-13 US US752252A patent/US3560252A/en not_active Expired - Lifetime
-
1969
- 1969-07-21 GB GB36472/69A patent/GB1222461A/en not_active Expired
- 1969-07-30 FR FR6926118A patent/FR2015564A1/fr not_active Withdrawn
- 1969-08-13 DE DE1941254A patent/DE1941254C3/de not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1941254C3 (de) | 1974-08-22 |
| DE1941254A1 (de) | 1970-06-18 |
| DE1941254B2 (de) | 1972-09-21 |
| US3560252A (en) | 1971-02-02 |
| GB1222461A (en) | 1971-02-17 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| CD | Change of name or company name | ||
| ST | Notification of lapse |