FR1396674A - Perfectionnements aux dispositifs à faisceaux électroniques - Google Patents

Perfectionnements aux dispositifs à faisceaux électroniques

Info

Publication number
FR1396674A
FR1396674A FR972630A FR972630A FR1396674A FR 1396674 A FR1396674 A FR 1396674A FR 972630 A FR972630 A FR 972630A FR 972630 A FR972630 A FR 972630A FR 1396674 A FR1396674 A FR 1396674A
Authority
FR
France
Prior art keywords
electronic beam
beam devices
devices
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR972630A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US276845A external-priority patent/US3243570A/en
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Priority to FR972630A priority Critical patent/FR1396674A/fr
Application granted granted Critical
Publication of FR1396674A publication Critical patent/FR1396674A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243—Beam current control or regulation circuits
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/10—Non-vacuum electron beam-welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
FR972630A 1963-04-30 1964-04-28 Perfectionnements aux dispositifs à faisceaux électroniques Expired FR1396674A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR972630A FR1396674A (fr) 1963-04-30 1964-04-28 Perfectionnements aux dispositifs à faisceaux électroniques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US276845A US3243570A (en) 1963-04-30 1963-04-30 Automatic gas pressure control for electron beam apparatus
FR972630A FR1396674A (fr) 1963-04-30 1964-04-28 Perfectionnements aux dispositifs à faisceaux électroniques

Publications (1)

Publication Number Publication Date
FR1396674A true FR1396674A (fr) 1965-04-23

Family

ID=26207320

Family Applications (1)

Application Number Title Priority Date Filing Date
FR972630A Expired FR1396674A (fr) 1963-04-30 1964-04-28 Perfectionnements aux dispositifs à faisceaux électroniques

Country Status (1)

Country Link
FR (1) FR1396674A (fr)

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