FR1396674A - Improvements to electronic beam devices - Google Patents
Improvements to electronic beam devicesInfo
- Publication number
- FR1396674A FR1396674A FR972630A FR972630A FR1396674A FR 1396674 A FR1396674 A FR 1396674A FR 972630 A FR972630 A FR 972630A FR 972630 A FR972630 A FR 972630A FR 1396674 A FR1396674 A FR 1396674A
- Authority
- FR
- France
- Prior art keywords
- electronic beam
- beam devices
- devices
- electronic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K15/00—Electron-beam welding or cutting
- B23K15/10—Non-vacuum electron beam-welding or cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR972630A FR1396674A (en) | 1963-04-30 | 1964-04-28 | Improvements to electronic beam devices |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US276845A US3243570A (en) | 1963-04-30 | 1963-04-30 | Automatic gas pressure control for electron beam apparatus |
FR972630A FR1396674A (en) | 1963-04-30 | 1964-04-28 | Improvements to electronic beam devices |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1396674A true FR1396674A (en) | 1965-04-23 |
Family
ID=26207320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR972630A Expired FR1396674A (en) | 1963-04-30 | 1964-04-28 | Improvements to electronic beam devices |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1396674A (en) |
-
1964
- 1964-04-28 FR FR972630A patent/FR1396674A/en not_active Expired
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