FI20145086A - Parannettu rengasgyroskooppirakenne ja gyroskooppi - Google Patents
Parannettu rengasgyroskooppirakenne ja gyroskooppiInfo
- Publication number
- FI20145086A FI20145086A FI20145086A FI20145086A FI20145086A FI 20145086 A FI20145086 A FI 20145086A FI 20145086 A FI20145086 A FI 20145086A FI 20145086 A FI20145086 A FI 20145086A FI 20145086 A FI20145086 A FI 20145086A
- Authority
- FI
- Finland
- Prior art keywords
- gyroscope
- improved ring
- improved
- gyroscope structure
- ring
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0043—Increasing angular deflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of microelectro-mechanical resonators
- H03H9/02338—Suspension means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0228—Inertial sensors
- B81B2201/0242—Gyroscopes
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Acoustics & Sound (AREA)
- Gyroscopes (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20145086A FI126070B (fi) | 2014-01-28 | 2014-01-28 | Parannettu rengasgyroskooppirakenne ja gyroskooppi |
TW104102077A TWI644080B (zh) | 2014-01-28 | 2015-01-22 | 改良的環形陀螺儀結構與陀螺儀 |
CN201580006372.8A CN105940283B (zh) | 2014-01-28 | 2015-01-28 | 改进的环形陀螺仪结构和陀螺仪 |
US14/607,397 US9612118B2 (en) | 2014-01-28 | 2015-01-28 | Ring gyroscope structure and gyroscope |
JP2016548288A JP6237917B2 (ja) | 2014-01-28 | 2015-01-28 | 改良されたリングジャイロスコープ構造およびジャイロスコープ |
PCT/IB2015/050640 WO2015114530A1 (en) | 2014-01-28 | 2015-01-28 | Improved ring gyroscope structure and gyroscope |
EP15705717.5A EP3100003B1 (en) | 2014-01-28 | 2015-01-28 | Improved ring gyroscope structure and gyroscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20145086A FI126070B (fi) | 2014-01-28 | 2014-01-28 | Parannettu rengasgyroskooppirakenne ja gyroskooppi |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20145086A true FI20145086A (fi) | 2015-07-29 |
FI126070B FI126070B (fi) | 2016-06-15 |
Family
ID=52544535
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20145086A FI126070B (fi) | 2014-01-28 | 2014-01-28 | Parannettu rengasgyroskooppirakenne ja gyroskooppi |
Country Status (7)
Country | Link |
---|---|
US (1) | US9612118B2 (fi) |
EP (1) | EP3100003B1 (fi) |
JP (1) | JP6237917B2 (fi) |
CN (1) | CN105940283B (fi) |
FI (1) | FI126070B (fi) |
TW (1) | TWI644080B (fi) |
WO (1) | WO2015114530A1 (fi) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10180323B2 (en) * | 2014-06-09 | 2019-01-15 | The Regents Of The University Of California | Axi-symmetric small-footprint gyroscope with interchangeable whole-angle and rate operation |
CN106441261B (zh) * | 2016-10-21 | 2019-05-10 | 厦门大学 | 一种微机械陀螺仪 |
GB2570732B (en) | 2018-02-06 | 2023-01-11 | Atlantic Inertial Systems Ltd | Angular rate sensors |
JP6769517B2 (ja) * | 2018-05-08 | 2020-10-14 | 株式会社村田製作所 | ピエゾリングジャイロスコープ |
JP6787437B2 (ja) * | 2018-05-08 | 2020-11-18 | 株式会社村田製作所 | ピエゾリングジャイロスコープ |
EP3908803A4 (en) * | 2019-01-08 | 2022-07-20 | Panasonic Intellectual Property Management Co., Ltd. | MEASURING DEVICE |
CN112683256B (zh) * | 2020-11-30 | 2023-05-30 | 瑞声科技(南京)有限公司 | Mems陀螺仪 |
CN114719835B (zh) * | 2022-02-22 | 2024-07-16 | 瑞声开泰科技(武汉)有限公司 | 微机械陀螺仪及电子产品 |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5025346A (en) * | 1989-02-17 | 1991-06-18 | Regents Of The University Of California | Laterally driven resonant microstructures |
EP0461761B1 (en) | 1990-05-18 | 1994-06-22 | British Aerospace Public Limited Company | Inertial sensors |
WO1993005400A1 (en) * | 1991-08-29 | 1993-03-18 | Bei Electronics, Inc. | Rotation sensor |
US5616864A (en) * | 1995-02-22 | 1997-04-01 | Delco Electronics Corp. | Method and apparatus for compensation of micromachined sensors |
US5955668A (en) * | 1997-01-28 | 1999-09-21 | Irvine Sensors Corporation | Multi-element micro gyro |
JP3882973B2 (ja) * | 1998-06-22 | 2007-02-21 | アイシン精機株式会社 | 角速度センサ |
JP3796991B2 (ja) * | 1998-12-10 | 2006-07-12 | 株式会社デンソー | 角速度センサ |
FR2821422B1 (fr) | 2001-02-23 | 2003-05-23 | Sagem | Resonateur mecanique planaire sensible selon un axe perpendiculaire a son plan |
GB0122254D0 (en) * | 2001-09-14 | 2001-11-07 | Bae Systems Plc | Vibratory gyroscopic rate sensor |
DE10238893A1 (de) * | 2002-08-24 | 2004-03-04 | Robert Bosch Gmbh | Drehratensensor |
US6837107B2 (en) * | 2003-04-28 | 2005-01-04 | Analog Devices, Inc. | Micro-machined multi-sensor providing 1-axis of acceleration sensing and 2-axes of angular rate sensing |
TW575175U (en) * | 2003-05-27 | 2004-02-01 | Ind Tech Res Inst | Ring body and supporting structure of vibrating type ring gyroscope |
CN100559121C (zh) * | 2003-10-20 | 2009-11-11 | 索尼株式会社 | 角速度检测器、利用角速度检测器的角速度检测方法及制造角速度检测器的方法 |
US7100446B1 (en) * | 2004-07-20 | 2006-09-05 | The Regents Of The University Of California | Distributed-mass micromachined gyroscopes operated with drive-mode bandwidth enhancement |
JP2009180506A (ja) * | 2008-01-29 | 2009-08-13 | Sumitomo Precision Prod Co Ltd | 角速度センサ |
GB0812788D0 (en) | 2008-07-12 | 2008-08-20 | Atlantic Inertial Systems Ltd | Improvements in or relating to vibrating structure gyroscopes |
US20100058861A1 (en) * | 2008-09-11 | 2010-03-11 | Analog Devices, Inc. | Piezoelectric Transducers and Inertial Sensors using Piezoelectric Transducers |
DE102009001248B4 (de) * | 2009-02-27 | 2020-12-17 | Hanking Electronics, Ltd. | MEMS-Gyroskop zur Ermittlung von Rotationsbewegungen um eine x-, y- oder z-Achse |
US8534127B2 (en) | 2009-09-11 | 2013-09-17 | Invensense, Inc. | Extension-mode angular velocity sensor |
WO2011133682A1 (en) * | 2010-04-20 | 2011-10-27 | Guiti Zolfagharkhani | Microelectromechanical gyroscopes and related apparatus and methods |
EP2544370B1 (en) * | 2011-07-06 | 2020-01-01 | Nxp B.V. | MEMS resonator |
EP2573516B1 (en) * | 2011-09-21 | 2013-11-20 | Tronics Microsystems S.A. | A micro-electromechanical gyro device |
DE102011057081A1 (de) * | 2011-12-28 | 2013-07-04 | Maxim Integrated Products, Inc. | Mikro-Drehratensensor und Verfahren zum Betreiben eines Mikro-Drehratensensors |
GB201205014D0 (en) | 2012-03-22 | 2012-05-09 | Atlantic Inertial Systems Ltd | Vibratory ring structure |
FI126071B (fi) * | 2014-01-28 | 2016-06-15 | Murata Manufacturing Co | Parannettu gyroskooppirakenne ja gyroskooppi |
-
2014
- 2014-01-28 FI FI20145086A patent/FI126070B/fi active IP Right Grant
-
2015
- 2015-01-22 TW TW104102077A patent/TWI644080B/zh active
- 2015-01-28 EP EP15705717.5A patent/EP3100003B1/en active Active
- 2015-01-28 US US14/607,397 patent/US9612118B2/en active Active
- 2015-01-28 WO PCT/IB2015/050640 patent/WO2015114530A1/en active Application Filing
- 2015-01-28 JP JP2016548288A patent/JP6237917B2/ja active Active
- 2015-01-28 CN CN201580006372.8A patent/CN105940283B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
EP3100003A1 (en) | 2016-12-07 |
EP3100003B1 (en) | 2019-06-26 |
CN105940283A (zh) | 2016-09-14 |
JP2017510795A (ja) | 2017-04-13 |
US20150211855A1 (en) | 2015-07-30 |
CN105940283B (zh) | 2019-01-22 |
TW201534866A (zh) | 2015-09-16 |
JP6237917B2 (ja) | 2017-11-29 |
WO2015114530A1 (en) | 2015-08-06 |
TWI644080B (zh) | 2018-12-11 |
FI126070B (fi) | 2016-06-15 |
US9612118B2 (en) | 2017-04-04 |
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