FI20115223A - Jousirakenne, resonaattori, resonaattorimatriisi ja anturi - Google Patents

Jousirakenne, resonaattori, resonaattorimatriisi ja anturi Download PDF

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Publication number
FI20115223A
FI20115223A FI20115223A FI20115223A FI20115223A FI 20115223 A FI20115223 A FI 20115223A FI 20115223 A FI20115223 A FI 20115223A FI 20115223 A FI20115223 A FI 20115223A FI 20115223 A FI20115223 A FI 20115223A
Authority
FI
Finland
Prior art keywords
resonator
sensor
matrix
spring construction
construction
Prior art date
Application number
FI20115223A
Other languages
English (en)
Swedish (sv)
Other versions
FI20115223L (fi
FI124020B (fi
FI20115223A0 (fi
Inventor
Anssi Blomqvist
Jaakko Ruohio
Original Assignee
Vti Technologies Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vti Technologies Oy filed Critical Vti Technologies Oy
Publication of FI20115223A0 publication Critical patent/FI20115223A0/fi
Priority to FI20115223A priority Critical patent/FI124020B/fi
Priority to JP2013555913A priority patent/JP6027029B2/ja
Priority to PCT/FI2012/050194 priority patent/WO2012120190A2/en
Priority to KR1020137025785A priority patent/KR101795364B1/ko
Priority to SG2013065347A priority patent/SG192998A1/en
Priority to EP12755335.2A priority patent/EP2681511B1/en
Priority to CN201280011285.8A priority patent/CN103492836B/zh
Priority to US13/407,860 priority patent/US9127943B2/en
Priority to TW101106686A priority patent/TWI554741B/zh
Publication of FI20115223L publication Critical patent/FI20115223L/fi
Publication of FI20115223A publication Critical patent/FI20115223A/fi
Priority to IL228048A priority patent/IL228048A/en
Application granted granted Critical
Publication of FI124020B publication Critical patent/FI124020B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Pressure Sensors (AREA)
  • Micromachines (AREA)
FI20115223A 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi FI124020B (fi)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI20115223A FI124020B (fi) 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi
PCT/FI2012/050194 WO2012120190A2 (en) 2011-03-04 2012-02-27 Spring structure, resonator, resonator array and sensor
JP2013555913A JP6027029B2 (ja) 2011-03-04 2012-02-27 ばね構造、共振器、共振器アレイおよびセンサ
KR1020137025785A KR101795364B1 (ko) 2011-03-04 2012-02-27 스프링 구조물, 공명기, 공명기 어레이 및 센서
SG2013065347A SG192998A1 (en) 2011-03-04 2012-02-27 Spring structure, resonator, resonator array and sensor
EP12755335.2A EP2681511B1 (en) 2011-03-04 2012-02-27 Spring structure, resonator, resonator array and sensor
CN201280011285.8A CN103492836B (zh) 2011-03-04 2012-02-27 弹簧结构、振荡器、振荡器阵列和传感器
US13/407,860 US9127943B2 (en) 2011-03-04 2012-02-29 Spring structure, resonator, resonator array and sensor
TW101106686A TWI554741B (zh) 2011-03-04 2012-03-01 彈簧結構、諧振器、諧振器陣列與感測器
IL228048A IL228048A (en) 2011-03-04 2013-08-20 Spring structure, resonator, resonator array and sensor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20115223 2011-03-04
FI20115223A FI124020B (fi) 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi

Publications (4)

Publication Number Publication Date
FI20115223A0 FI20115223A0 (fi) 2011-03-04
FI20115223L FI20115223L (fi) 2012-09-05
FI20115223A true FI20115223A (fi) 2012-09-05
FI124020B FI124020B (fi) 2014-02-14

Family

ID=43806435

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20115223A FI124020B (fi) 2011-03-04 2011-03-04 Jousirakenne, resonaattori, resonaattorimatriisi ja anturi

Country Status (10)

Country Link
US (1) US9127943B2 (fi)
EP (1) EP2681511B1 (fi)
JP (1) JP6027029B2 (fi)
KR (1) KR101795364B1 (fi)
CN (1) CN103492836B (fi)
FI (1) FI124020B (fi)
IL (1) IL228048A (fi)
SG (1) SG192998A1 (fi)
TW (1) TWI554741B (fi)
WO (1) WO2012120190A2 (fi)

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US9372084B2 (en) * 2012-04-04 2016-06-21 Seiko Epson Corporation Gyro sensor, electronic apparatus, and mobile unit
JP6195051B2 (ja) * 2013-03-04 2017-09-13 セイコーエプソン株式会社 ジャイロセンサー、電子機器、及び移動体
US9958271B2 (en) 2014-01-21 2018-05-01 Invensense, Inc. Configuration to reduce non-linear motion
FI126071B (fi) * 2014-01-28 2016-06-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
FI126557B (fi) 2014-05-07 2017-02-15 Murata Manufacturing Co Parannettu gyroskooppirakenne ja gyroskooppi
DE102014215038A1 (de) * 2014-07-31 2016-02-04 Robert Bosch Gmbh Mikromechanischer Sensor und Verfahren zur Herstellung eines mikromechanischen Sensors
KR101754634B1 (ko) * 2015-05-12 2017-07-07 주식회사 신성씨앤티 2자유도 감지 모드를 갖는 멤스 자이로스코프
DE102015213455A1 (de) * 2015-07-17 2017-01-19 Robert Bosch Gmbh OMM-Drehraten mit Antrieb ohne feststehende Elektroden
TWI632345B (zh) 2016-05-27 2018-08-11 日商村田製作所股份有限公司 振動的微機電陀螺儀之驅動振輻的持續性監控與相關方法
US10627235B2 (en) * 2016-12-19 2020-04-21 Analog Devices, Inc. Flexural couplers for microelectromechanical systems (MEMS) devices
JP6640176B2 (ja) * 2016-12-19 2020-02-05 アナログ ディヴァイスィズ インク 同期化マスジャイロスコープ
US10697774B2 (en) 2016-12-19 2020-06-30 Analog Devices, Inc. Balanced runners synchronizing motion of masses in micromachined devices
KR102052592B1 (ko) * 2017-02-24 2019-12-06 한국기계연구원 고열전도 질화규소 소결체의 제조방법
US10948294B2 (en) 2018-04-05 2021-03-16 Analog Devices, Inc. MEMS gyroscopes with in-line springs and related systems and methods
EP4162282A1 (en) 2020-06-08 2023-04-12 Analog Devices, Inc. Drive and sense stress relief apparatus
CN115812153A (zh) 2020-06-08 2023-03-17 美国亚德诺半导体公司 应力释放mems陀螺仪
US11698257B2 (en) 2020-08-24 2023-07-11 Analog Devices, Inc. Isotropic attenuated motion gyroscope

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JP3409565B2 (ja) * 1996-03-01 2003-05-26 日産自動車株式会社 角速度センサの自己診断方法
DE10108196A1 (de) 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
US7036372B2 (en) 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
US20050066728A1 (en) 2003-09-25 2005-03-31 Kionix, Inc. Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프
US7421897B2 (en) 2005-04-14 2008-09-09 Analog Devices, Inc. Cross-quad and vertically coupled inertial sensors
FR2895501B1 (fr) * 2005-12-23 2008-02-29 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec au moins deux massesm oscillantes couplees mecaniquement
WO2007104742A1 (de) * 2006-03-10 2007-09-20 Continental Teves Ag & Co. Ohg Drehratensensor mit kopplungsbalken
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
DE102007035806B4 (de) * 2007-07-31 2011-03-17 Sensordynamics Ag Mikromechanischer Drehratensensor
US8413509B2 (en) * 2008-04-14 2013-04-09 Freescale Semiconductor, Inc. Spring member for use in a microelectromechanical systems sensor
FI122397B (fi) * 2008-04-16 2011-12-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
DE102008042369B4 (de) 2008-09-25 2018-05-24 Robert Bosch Gmbh Koppelstruktur für eine Drehratensensorvorrichtung, Drehratensensorvorrichtung und Herstellungsverfahren
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FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
JP4868027B2 (ja) * 2009-05-26 2012-02-01 株式会社デンソー 加速度角速度センサ
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US8453504B1 (en) * 2010-01-23 2013-06-04 Minyao Mao Angular rate sensor with suppressed linear acceleration response
US8459111B1 (en) * 2010-01-23 2013-06-11 Minyao Mao Angular rate sensor with suppressed linear acceleration response
US8616057B1 (en) * 2010-01-23 2013-12-31 Minyao Mao Angular rate sensor with suppressed linear acceleration response
EP2584312B1 (en) * 2010-06-16 2020-02-05 Toyota Jidosha Kabushiki Kaisha Composite sensor

Also Published As

Publication number Publication date
EP2681511A4 (en) 2014-09-10
TW201248121A (en) 2012-12-01
US20120222483A1 (en) 2012-09-06
SG192998A1 (en) 2013-10-30
EP2681511B1 (en) 2017-07-26
IL228048A0 (en) 2013-09-30
JP2014510271A (ja) 2014-04-24
FI20115223L (fi) 2012-09-05
KR101795364B1 (ko) 2017-11-08
IL228048A (en) 2017-09-28
FI124020B (fi) 2014-02-14
CN103492836A (zh) 2014-01-01
EP2681511A2 (en) 2014-01-08
US9127943B2 (en) 2015-09-08
CN103492836B (zh) 2016-04-06
JP6027029B2 (ja) 2016-11-16
FI20115223A0 (fi) 2011-03-04
WO2012120190A2 (en) 2012-09-13
WO2012120190A3 (en) 2012-11-01
KR20140009434A (ko) 2014-01-22
TWI554741B (zh) 2016-10-21

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