FI20060181L - Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla - Google Patents

Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla Download PDF

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Publication number
FI20060181L
FI20060181L FI20060181A FI20060181A FI20060181L FI 20060181 L FI20060181 L FI 20060181L FI 20060181 A FI20060181 A FI 20060181A FI 20060181 A FI20060181 A FI 20060181A FI 20060181 L FI20060181 L FI 20060181L
Authority
FI
Finland
Prior art keywords
procedure
materials
laser ablation
producing surfaces
producing
Prior art date
Application number
FI20060181A
Other languages
English (en)
Swedish (sv)
Other versions
FI20060181A0 (fi
Inventor
Reijo Lappalainen
Vesa Myllymaeki
Lasse Pulli
Juha Maekitalo
Original Assignee
Picodeon Ltd Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Picodeon Ltd Oy filed Critical Picodeon Ltd Oy
Priority to FI20060181A priority Critical patent/FI20060181L/fi
Publication of FI20060181A0 publication Critical patent/FI20060181A0/fi
Priority to JP2008555824A priority patent/JP2009527914A/ja
Priority to FI20075140A priority patent/FI123964B/fi
Priority to PCT/FI2007/050101 priority patent/WO2007096480A1/en
Priority to PCT/FI2007/050107 priority patent/WO2007096486A1/en
Priority to PCT/FI2007/050102 priority patent/WO2007096481A1/en
Priority to US12/280,631 priority patent/US20100221489A1/en
Priority to KR1020087023133A priority patent/KR101395513B1/ko
Priority to US12/280,650 priority patent/US20090017318A1/en
Priority to US12/280,657 priority patent/US8741749B2/en
Priority to FI20075131A priority patent/FI20075131L/fi
Priority to CA002642867A priority patent/CA2642867A1/en
Priority to RU2008137490/02A priority patent/RU2467851C2/ru
Priority to EP20070704874 priority patent/EP1993777A2/en
Priority to KR1020087023252A priority patent/KR101398379B1/ko
Priority to CN201410149093.4A priority patent/CN104167464A/zh
Priority to FI20075138A priority patent/FI123716B/fi
Priority to PCT/FI2007/050105 priority patent/WO2007096484A2/en
Priority to EP20070704878 priority patent/EP1994195A1/en
Priority to JP2008555822A priority patent/JP5237124B2/ja
Priority to PCT/FI2007/050108 priority patent/WO2007096487A1/en
Priority to PCT/FI2007/050103 priority patent/WO2007096482A2/en
Priority to JP2008555823A priority patent/JP5237125B2/ja
Priority to FI20075134A priority patent/FI124358B/fi
Priority to EP07704875A priority patent/EP1993778A2/en
Priority to PCT/FI2007/000050 priority patent/WO2007096465A1/en
Priority to US12/280,602 priority patent/US20090126787A1/en
Priority to JP2008555820A priority patent/JP5237122B2/ja
Priority to EP07704867A priority patent/EP1993774A2/en
Priority to FI20075136A priority patent/FI124359B/fi
Priority to RU2008137489/02A priority patent/RU2467850C2/ru
Priority to BRPI0707014-4A priority patent/BRPI0707014A2/pt
Priority to KR1020087023172A priority patent/KR101399235B1/ko
Priority to PCT/FI2007/050104 priority patent/WO2007096483A2/en
Priority to JP2008555817A priority patent/JP2009527359A/ja
Priority to CN200780006700.XA priority patent/CN101389441B/zh
Priority to KR1020087023171A priority patent/KR101395425B1/ko
Priority to FI20075133A priority patent/FI124360B/fi
Priority to JP2008555821A priority patent/JP5237123B2/ja
Priority to FI20070158A priority patent/FI20070158L/fi
Priority to EP20070704876 priority patent/EP1993779A2/en
Priority to KR1020087023270A priority patent/KR20090004885A/ko
Priority to US12/280,636 priority patent/US20090136739A1/en
Priority to EP20070704872 priority patent/EP1993775A1/en
Priority to US12/280,609 priority patent/US8486073B2/en
Priority to FI20075137A priority patent/FI124357B/fi
Priority to PCT/FI2007/050106 priority patent/WO2007096485A2/en
Priority to CN200780006479.8A priority patent/CN101389440B/zh
Priority to FI20075139A priority patent/FI124523B/fi
Priority to EP20070704871 priority patent/EP1994194A1/en
Priority to PCT/FI2007/050097 priority patent/WO2007096476A2/en
Priority to EP07712592A priority patent/EP1991389A1/en
Priority to EP20070704873 priority patent/EP1993776A2/en
Priority to KR1020087023134A priority patent/KR101395393B1/ko
Priority to US12/280,641 priority patent/US20080311345A1/en
Priority to JP2008555825A priority patent/JP5414279B2/ja
Priority to US12/280,622 priority patent/US20090061210A1/en
Priority to US12/224,306 priority patent/US20090166343A1/en
Priority to EP20070704877 priority patent/EP1993780A1/en
Priority to FI20075141A priority patent/FI124524B/fi
Publication of FI20060181L publication Critical patent/FI20060181L/fi
Priority to KR1020087023253A priority patent/KR101467584B1/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/1224—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/361—Removing material for deburring or mechanical trimming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C23C14/0611—Diamond
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/081—Oxides of aluminium, magnesium or beryllium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/083—Oxides of refractory metals or yttrium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/087—Oxides of copper or solid solutions thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
FI20060181A 2006-02-23 2006-02-23 Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla FI20060181L (fi)

Priority Applications (61)

Application Number Priority Date Filing Date Title
FI20060181A FI20060181L (fi) 2006-02-23 2006-02-23 Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla
JP2008555824A JP2009527914A (ja) 2006-02-23 2007-02-23 太陽電池ならびに太陽電池を生産する装置および方法
FI20075140A FI123964B (fi) 2006-02-23 2007-02-23 Aurinkokenno ja järjestely ja menetelmä aurinkokennon valmistamiseksi
PCT/FI2007/050101 WO2007096480A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
PCT/FI2007/050107 WO2007096486A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
PCT/FI2007/050102 WO2007096481A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
US12/280,631 US20100221489A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
KR1020087023133A KR101395513B1 (ko) 2006-02-23 2007-02-23 플라스틱 기재 상의 코팅 및 코팅된 플라스틱 제품
US12/280,650 US20090017318A1 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
US12/280,657 US8741749B2 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
FI20075131A FI20075131L (fi) 2006-02-23 2007-02-23 Lääketieteellisen alustan päällystäminen ja päällystetty lääketieteellinen tuote
CA002642867A CA2642867A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
RU2008137490/02A RU2467851C2 (ru) 2006-02-23 2007-02-23 Солнечный элемент и способ и система для его изготовления
EP20070704874 EP1993777A2 (en) 2006-02-23 2007-02-23 Coating on a stone or ceramic substrate and a coated stone or ceramic product
KR1020087023252A KR101398379B1 (ko) 2006-02-23 2007-02-23 반도체 및 반도체를 생산하는 설비 및 방법
CN201410149093.4A CN104167464A (zh) 2006-02-23 2007-02-23 太阳能电池以及用于生产太阳能电池的设备和方法
FI20075138A FI123716B (fi) 2006-02-23 2007-02-23 Menetelmä tuotteen tietyn pinnan hiilinitridillä pinnoittamiseksi laserkasvatuksen avulla
PCT/FI2007/050105 WO2007096484A2 (en) 2006-02-23 2007-02-23 Coating with carbon nitride and carbon nitride coated product
EP20070704878 EP1994195A1 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
JP2008555822A JP5237124B2 (ja) 2006-02-23 2007-02-23 窒化炭素を用いたコーティングおよび窒化炭素をコーティングした製品
PCT/FI2007/050108 WO2007096487A1 (en) 2006-02-23 2007-02-23 Semiconductor and an arrangement and a method for producing a semiconductor
PCT/FI2007/050103 WO2007096482A2 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
JP2008555823A JP5237125B2 (ja) 2006-02-23 2007-02-23 金属基材上のコーティングおよびコーティングした製品
FI20075134A FI124358B (fi) 2006-02-23 2007-02-23 Lasisubstraatin päällystäminen ja päällystetty lasituote
EP07704875A EP1993778A2 (en) 2006-02-23 2007-02-23 Coating with carbon nitride and carbon nitride coated product
PCT/FI2007/000050 WO2007096465A1 (en) 2006-02-23 2007-02-23 Method for producing surfaces and materials by laser ablation
US12/280,602 US20090126787A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
JP2008555820A JP5237122B2 (ja) 2006-02-23 2007-02-23 ガラス基材の塗装方法及び塗装されたガラス製品
EP07704867A EP1993774A2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
FI20075136A FI124359B (fi) 2006-02-23 2007-02-23 Muovisubstraatin päällystäminen ja päällystetty muovituote
RU2008137489/02A RU2467850C2 (ru) 2006-02-23 2007-02-23 Покрытие из нитрида углерода и изделие с таким покрытием
BRPI0707014-4A BRPI0707014A2 (pt) 2006-02-23 2007-02-23 celula solar e um arranjo e um método para a produção de uma célula solar
KR1020087023172A KR101399235B1 (ko) 2006-02-23 2007-02-23 탄소 질화물 코팅 및 탄소 질화물 코팅된 제품
PCT/FI2007/050104 WO2007096483A2 (en) 2006-02-23 2007-02-23 Coating on a stone or ceramic substrate and a coated stone or ceramic product
JP2008555817A JP2009527359A (ja) 2006-02-23 2007-02-23 レーザ蒸散により表面および材料を提供する方法
CN200780006700.XA CN101389441B (zh) 2006-02-23 2007-02-23 塑料基底上的涂层方法和涂覆的塑料产品
KR1020087023171A KR101395425B1 (ko) 2006-02-23 2007-02-23 유리 기재 상의 코팅 및 코팅된 유리 제품
FI20075133A FI124360B (fi) 2006-02-23 2007-02-23 Kuitualustalle päällystäminen ja päällystetty kuitutuote
JP2008555821A JP5237123B2 (ja) 2006-02-23 2007-02-23 プラスチック基材の塗装方法及び塗装されたプラスチック製品
FI20070158A FI20070158L (fi) 2006-02-23 2007-02-23 Järjestely
EP20070704876 EP1993779A2 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
KR1020087023270A KR20090004885A (ko) 2006-02-23 2007-02-23 레이저 삭마에 의해 표면들 및 재료들을 형성하는 방법
US12/280,636 US20090136739A1 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
EP20070704872 EP1993775A1 (en) 2006-02-23 2007-02-23 Coating on a glass substrate and a coated glass product
US12/280,609 US8486073B2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
FI20075137A FI124357B (fi) 2006-02-23 2007-02-23 Kivi- tai keramiikkasubstraattien päällystäminen ja päällystetty kivi- tai keramiikkatuote
PCT/FI2007/050106 WO2007096485A2 (en) 2006-02-23 2007-02-23 Coating on a metal substrate and a coated metal product
CN200780006479.8A CN101389440B (zh) 2006-02-23 2007-02-23 利用碳氮化物的涂覆以及碳氮化物涂覆的产品
FI20075139A FI124523B (fi) 2006-02-23 2007-02-23 Metallisubstraatin päällystäminen ja päällystetty metallituote
EP20070704871 EP1994194A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
PCT/FI2007/050097 WO2007096476A2 (en) 2006-02-23 2007-02-23 Coating on a medical substrate and a coated medical product
EP07712592A EP1991389A1 (en) 2006-02-23 2007-02-23 Method for producing surfaces and materials by laser ablation
EP20070704873 EP1993776A2 (en) 2006-02-23 2007-02-23 Coating on a plastic substrate and a coated plastic product
KR1020087023134A KR101395393B1 (ko) 2006-02-23 2007-02-23 금속 기재 상의 코팅 및 코팅된 금속 제품
US12/280,641 US20080311345A1 (en) 2006-02-23 2007-02-23 Coating With Carbon Nitride and Carbon Nitride Coated Product
JP2008555825A JP5414279B2 (ja) 2006-02-23 2007-02-23 半導体ならびに半導体を生産する装置および方法
US12/280,622 US20090061210A1 (en) 2006-02-23 2007-02-23 Coating on a fiber substrate and a coated fiber product
US12/224,306 US20090166343A1 (en) 2006-02-23 2007-02-23 Method for Producing Surfaces and Materials by Laser Ablation
EP20070704877 EP1993780A1 (en) 2006-02-23 2007-02-23 Solar cell and an arrangement and a method for producing a solar cell
FI20075141A FI124524B (fi) 2006-02-23 2007-02-23 Järjestely ja menetelmä puolijohteen valmistamiseksi
KR1020087023253A KR101467584B1 (ko) 2006-02-23 2008-09-23 태양 전지 및 태양 전지를 생산하는 설비 및 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20060181A FI20060181L (fi) 2006-02-23 2006-02-23 Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla

Publications (2)

Publication Number Publication Date
FI20060181A0 FI20060181A0 (fi) 2006-02-23
FI20060181L true FI20060181L (fi) 2007-08-24

Family

ID=35953646

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20060181A FI20060181L (fi) 2006-02-23 2006-02-23 Menetelmä tuottaa pintoja ja materiaalia laserablaation avulla

Country Status (6)

Country Link
US (1) US20090166343A1 (fi)
EP (1) EP1991389A1 (fi)
JP (1) JP2009527359A (fi)
KR (1) KR20090004885A (fi)
FI (1) FI20060181L (fi)
WO (1) WO2007096465A1 (fi)

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JP2009527359A (ja) 2009-07-30
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WO2007096465A1 (en) 2007-08-30
EP1991389A1 (en) 2008-11-19
KR20090004885A (ko) 2009-01-12

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