ES424663A1 - Electron microscope for dark-field illumination - Google Patents

Electron microscope for dark-field illumination

Info

Publication number
ES424663A1
ES424663A1 ES424663A ES424663A ES424663A1 ES 424663 A1 ES424663 A1 ES 424663A1 ES 424663 A ES424663 A ES 424663A ES 424663 A ES424663 A ES 424663A ES 424663 A1 ES424663 A1 ES 424663A1
Authority
ES
Spain
Prior art keywords
specimen
electron microscope
field illumination
dark
varying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES424663A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of ES424663A1 publication Critical patent/ES424663A1/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

In an electron microscope dark-field illumination is obtained by including an annular diaphragm between the electron source and the second condenser lens and by varying the energisation of the condenser lenses whilst retaining imaging of the electron source on the specimen. The specimen is illuminated by a beam in the form of a hollow cone of varying apical angle. By means of a known objective diaphragm those electrons are selected from the scattered beam for the purpose of image formation which leave the specimen within a narrow cone about the optical axis, irrespective of the angle of incidence.
ES424663A 1973-03-28 1974-03-26 Electron microscope for dark-field illumination Expired ES424663A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7304298A NL7304298A (en) 1973-03-28 1973-03-28

Publications (1)

Publication Number Publication Date
ES424663A1 true ES424663A1 (en) 1976-06-01

Family

ID=19818520

Family Applications (1)

Application Number Title Priority Date Filing Date
ES424663A Expired ES424663A1 (en) 1973-03-28 1974-03-26 Electron microscope for dark-field illumination

Country Status (11)

Country Link
US (1) US3889114A (en)
JP (1) JPS49130668A (en)
BE (1) BE812849A (en)
CA (1) CA1002209A (en)
DE (1) DE2412675A1 (en)
ES (1) ES424663A1 (en)
FR (1) FR2223831B1 (en)
GB (1) GB1469777A (en)
IT (1) IT1003873B (en)
NL (1) NL7304298A (en)
SE (1) SE392365B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2541915A1 (en) * 1975-09-19 1977-03-31 Max Planck Gesellschaft BODY RAY MICROSCOPE WITH RING ZONE SEGMENT IMAGE
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
AT353519B (en) * 1978-03-07 1979-11-26 Oesterr Studien Atomenergie DEVICE FOR CONCENTRATING THE PRIMAERION BEAM
JPS63298949A (en) * 1987-05-28 1988-12-06 Jeol Ltd Analysis electron microscope observable wide and narrow domain simultaneously
JPH0233843A (en) * 1988-07-25 1990-02-05 Hitachi Ltd Scanning electronic microscope
JPH0594798A (en) * 1991-05-21 1993-04-16 Jeol Ltd Electronic optical observation device for focal depth changeable electron microscope, etc.
DE4412137A1 (en) * 1993-12-28 1995-10-26 Alexander Dr Zarubin Microscope that works with charged particles
US8642959B2 (en) * 2007-10-29 2014-02-04 Micron Technology, Inc. Method and system of performing three-dimensional imaging using an electron microscope
DE102009016861A1 (en) * 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh particle beam
CN103388406A (en) * 2013-07-29 2013-11-13 苏州市世好建材新技术工程有限公司 Spliced mortar spreader

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2464419A (en) * 1947-12-26 1949-03-15 Rca Corp Method of and apparatus for selectively achieving electronic darkfield and bright field illumation
DE2213208C3 (en) * 1972-03-16 1975-11-13 Max Planck Gesellschaft Rotationally symmetrical, spherically corrected corpuscular beam optical imaging system

Also Published As

Publication number Publication date
IT1003873B (en) 1976-06-10
CA1002209A (en) 1976-12-21
JPS49130668A (en) 1974-12-14
FR2223831A1 (en) 1974-10-25
NL7304298A (en) 1974-10-01
BE812849A (en) 1974-09-26
FR2223831B1 (en) 1977-09-30
SE392365B (en) 1977-03-21
DE2412675A1 (en) 1974-10-10
GB1469777A (en) 1977-04-06
US3889114A (en) 1975-06-10

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