ES2575382T3 - Fabricación de cuerpos semiconductores a partir de material fundido utilizando una chapa de interposición auto-sostenida - Google Patents
Fabricación de cuerpos semiconductores a partir de material fundido utilizando una chapa de interposición auto-sostenida Download PDFInfo
- Publication number
- ES2575382T3 ES2575382T3 ES11845655.7T ES11845655T ES2575382T3 ES 2575382 T3 ES2575382 T3 ES 2575382T3 ES 11845655 T ES11845655 T ES 11845655T ES 2575382 T3 ES2575382 T3 ES 2575382T3
- Authority
- ES
- Spain
- Prior art keywords
- ceramic sheet
- self
- supporting
- molten material
- manufacture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 239000012768 molten material Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000919 ceramic Substances 0.000 abstract 6
- 239000000463 material Substances 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 2
- 238000007493 shaping process Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/02—Liquid-phase epitaxial-layer growth using molten solvents, e.g. flux
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
- C04B41/4535—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied as a solution, emulsion, dispersion or suspension
- C04B41/4539—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied as a solution, emulsion, dispersion or suspension as a emulsion, dispersion or suspension
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5093—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials with elements other than metals or carbon
- C04B41/5096—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/007—Pulling on a substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/32—Seed holders, e.g. chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Metallurgy (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Electromagnetism (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Photovoltaic Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Recrystallisation Techniques (AREA)
- Ceramic Products (AREA)
Abstract
Procedimiento para realizar un cuerpo semiconductor (419) comprendiendo el procedimiento las etapas de: a. proporcionar un material semiconductor fundido (413), que presenta una superficie (415); b. proporcionar un molde poroso (45), que comprende una superficie de conformación (46); c. proporcionar un chapa cerámica auto sostenida (430) entre la superficie de conformación (46) y el material fundido (413); d. poner en contacto la superficie de conformación (46) con la chapa cerámica (430) y la chapa cerámica (430) con la superficie (415) del material fundido (413) durante un cierto período de contacto), de tal modo que un cuerpo (419) de material semiconductor (413) se solidifica en la chapa cerámica (430); y e. retirar el cuerpo solidificado (419) del contacto con el material semiconductor fundido (413) mientras se encuentra todavía en contacto con la chapa cerámica (430), en el que la chapa cerámica (430) es porosa y preferentemente el grado de porosidad se encuentra comprendido entre el 1 por ciento y el 80 %.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US41869910P | 2010-12-01 | 2010-12-01 | |
US418699P | 2010-12-01 | ||
PCT/US2011/062914 WO2012075306A2 (en) | 2010-12-01 | 2011-12-01 | Making semiconductor bodies from molten material using a free-standing interposer sheet |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2575382T3 true ES2575382T3 (es) | 2016-06-28 |
Family
ID=46172577
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES11845655.7T Active ES2575382T3 (es) | 2010-12-01 | 2011-12-01 | Fabricación de cuerpos semiconductores a partir de material fundido utilizando una chapa de interposición auto-sostenida |
Country Status (11)
Country | Link |
---|---|
US (1) | US9419167B2 (es) |
EP (1) | EP2647032B1 (es) |
JP (1) | JP5970469B2 (es) |
KR (1) | KR101889858B1 (es) |
CN (1) | CN103380481B (es) |
CA (1) | CA2819144C (es) |
ES (1) | ES2575382T3 (es) |
MY (1) | MY180243A (es) |
SG (1) | SG190288A1 (es) |
TW (1) | TWI667700B (es) |
WO (1) | WO2012075306A2 (es) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102008041250A1 (de) * | 2008-08-13 | 2010-02-25 | Ers Electronic Gmbh | Verfahren und Vorrichtung zum thermischen Bearbeiten von Kunststoffscheiben, insbesondere Moldwafern |
US9948539B2 (en) | 2014-08-29 | 2018-04-17 | The Nielsen Company (Us), Llc | Methods and apparatus to predict end of streaming media using a prediction model |
CN112368574B (zh) * | 2018-07-06 | 2023-08-01 | 蝴蝶网络有限公司 | 用于封装片上超声的方法和设备 |
CN111755321A (zh) * | 2020-05-20 | 2020-10-09 | 嘉兴市轩禾园艺技术有限公司 | 多晶硅半导体薄膜衬底的制备方法 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3903841A (en) | 1974-08-22 | 1975-09-09 | Gte Laboratories Inc | Vacuum holder in epitaxial growth apparatus |
US4777153A (en) * | 1986-05-06 | 1988-10-11 | Washington Research Foundation | Process for the production of porous ceramics using decomposable polymeric microspheres and the resultant product |
JPS63215506A (ja) * | 1987-02-27 | 1988-09-08 | Sankusu Kk | 多結晶シリコンの製造方法 |
EP0804381A1 (en) * | 1993-12-08 | 1997-11-05 | Massachusetts Institute Of Technology | Casting tooling |
MXPA02002594A (es) * | 1999-09-09 | 2002-08-30 | Allied Signal Inc | Aparato y metodo mejorados para la planarizacion de circuitos integrados. |
JP2001121413A (ja) | 1999-10-21 | 2001-05-08 | Toshiba Mach Co Ltd | 平板状の被加工材の保持方法 |
FR2807338B1 (fr) | 2000-04-11 | 2002-11-29 | Commissariat Energie Atomique | Paroi poreuse pour former une couche gazeuse de sustentation |
JP2003054932A (ja) | 2001-08-23 | 2003-02-26 | Sharp Corp | 半導体基板の製造装置、半導体基板およびその製造方法ならびに太陽電池 |
AU2003256825A1 (en) * | 2002-07-31 | 2004-02-16 | Astropower, Inc. | Method and apparatus for manufacturing net shape semiconductor wafers |
DE60316337T2 (de) * | 2002-10-18 | 2008-06-05 | Evergreen Solar Inc., Marlborough | Verfahren und vorrichtung zur kristallzüchtung |
NO326797B1 (no) * | 2005-06-10 | 2009-02-16 | Elkem As | Fremgangsmate og apparat for raffinering av smeltet materiale |
US20070295385A1 (en) * | 2006-05-05 | 2007-12-27 | Nanosolar, Inc. | Individually encapsulated solar cells and solar cell strings having a substantially inorganic protective layer |
JP5591695B2 (ja) * | 2007-06-26 | 2014-09-17 | マサチューセッツ インスティテュート オブ テクノロジー | 薄膜カプセル内の半導体ウェハの再結晶化およびその関連工程 |
US7720321B2 (en) * | 2007-07-20 | 2010-05-18 | General Electric Company | Fiber optic sensor and method for making |
US8062704B2 (en) * | 2007-08-02 | 2011-11-22 | Motech Americas, Llc | Silicon release coating, method of making same, and method of using same |
CN102421947B (zh) | 2009-03-09 | 2016-09-28 | 1366科技公司 | 从已熔化材料制造薄半导体本体的方法和装置 |
-
2011
- 2011-12-01 CA CA2819144A patent/CA2819144C/en active Active
- 2011-12-01 CN CN201180066564.XA patent/CN103380481B/zh not_active Expired - Fee Related
- 2011-12-01 ES ES11845655.7T patent/ES2575382T3/es active Active
- 2011-12-01 WO PCT/US2011/062914 patent/WO2012075306A2/en active Application Filing
- 2011-12-01 MY MYPI2013001956A patent/MY180243A/en unknown
- 2011-12-01 KR KR1020137017104A patent/KR101889858B1/ko active IP Right Grant
- 2011-12-01 US US13/990,498 patent/US9419167B2/en active Active
- 2011-12-01 SG SG2013037254A patent/SG190288A1/en unknown
- 2011-12-01 JP JP2013542181A patent/JP5970469B2/ja not_active Expired - Fee Related
- 2011-12-01 TW TW100144314A patent/TWI667700B/zh not_active IP Right Cessation
- 2011-12-01 EP EP11845655.7A patent/EP2647032B1/en not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
JP5970469B2 (ja) | 2016-08-17 |
CN103380481B (zh) | 2018-04-06 |
MY180243A (en) | 2020-11-25 |
TW201232642A (en) | 2012-08-01 |
WO2012075306A2 (en) | 2012-06-07 |
CA2819144A1 (en) | 2012-06-07 |
CN103380481A (zh) | 2013-10-30 |
JP2014507360A (ja) | 2014-03-27 |
WO2012075306A3 (en) | 2013-07-25 |
TWI667700B (zh) | 2019-08-01 |
US9419167B2 (en) | 2016-08-16 |
SG190288A1 (en) | 2013-06-28 |
KR20130132514A (ko) | 2013-12-04 |
EP2647032A2 (en) | 2013-10-09 |
KR101889858B1 (ko) | 2018-08-20 |
CA2819144C (en) | 2019-06-04 |
EP2647032A4 (en) | 2014-07-09 |
EP2647032B1 (en) | 2016-03-09 |
US20140113156A1 (en) | 2014-04-24 |
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