ES2178303T3 - Procedimiento para la fabricacion de un dispositivo micromecanico. - Google Patents
Procedimiento para la fabricacion de un dispositivo micromecanico.Info
- Publication number
- ES2178303T3 ES2178303T3 ES98965594T ES98965594T ES2178303T3 ES 2178303 T3 ES2178303 T3 ES 2178303T3 ES 98965594 T ES98965594 T ES 98965594T ES 98965594 T ES98965594 T ES 98965594T ES 2178303 T3 ES2178303 T3 ES 2178303T3
- Authority
- ES
- Spain
- Prior art keywords
- procedure
- manufacture
- micromechanical device
- layer
- adhesive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Chemically Coating (AREA)
- ing And Chemical Polishing (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
Procedimiento para la fabricación de un dispositivo micromecánico (100; 200; 300; 400; 600; 700) con las etapas: preparación de un substrato (10; 710) con una región de anclaje (20; 120; 220; 320; 325; 420; 425; 620; 755), formación de una capa de sacrificio (25) sobre el substrato (10; 710) dejando libre la región de anclaje (20; 120; 220; 320; 325; 420, 425; 620; 755); deposición de una capa adhesiva (30) sobre la capa de sacrificio (25) y la región de anclaje (20; 120; 220; 320, 325; 420, 425; 755); formación de una máscara (40, 50) sobre la capa adhesiva (30); deposición de una capa galvánica (35) sobre la región no enmascarada de la capa adhesiva (30); y retirada de la máscara (40, 50) y de la capa de sacrificio (25).
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19800745A DE19800745A1 (de) | 1998-01-12 | 1998-01-12 | Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2178303T3 true ES2178303T3 (es) | 2002-12-16 |
Family
ID=7854340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES98965594T Expired - Lifetime ES2178303T3 (es) | 1998-01-12 | 1998-12-01 | Procedimiento para la fabricacion de un dispositivo micromecanico. |
Country Status (6)
Country | Link |
---|---|
US (1) | US6514670B1 (es) |
EP (1) | EP1055015B1 (es) |
JP (1) | JP4204193B2 (es) |
DE (2) | DE19800745A1 (es) |
ES (1) | ES2178303T3 (es) |
WO (1) | WO1999035305A1 (es) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19847305B4 (de) * | 1998-10-14 | 2011-02-03 | Robert Bosch Gmbh | Herstellungsverfahren für eine mikromechanische Vorrichtung |
DE19941363B4 (de) * | 1999-08-31 | 2006-06-08 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung eines Mikroaktorbauteils |
US20020071169A1 (en) | 2000-02-01 | 2002-06-13 | Bowers John Edward | Micro-electro-mechanical-system (MEMS) mirror device |
US6753638B2 (en) | 2000-02-03 | 2004-06-22 | Calient Networks, Inc. | Electrostatic actuator for micromechanical systems |
US6585383B2 (en) | 2000-05-18 | 2003-07-01 | Calient Networks, Inc. | Micromachined apparatus for improved reflection of light |
WO2001098814A2 (en) * | 2000-05-31 | 2001-12-27 | Siwave, Inc. | Snap-down pivoting optical element |
US6560384B1 (en) | 2000-06-01 | 2003-05-06 | Calient Networks, Inc. | Optical switch having mirrors arranged to accommodate freedom of movement |
US6825967B1 (en) | 2000-09-29 | 2004-11-30 | Calient Networks, Inc. | Shaped electrodes for micro-electro-mechanical-system (MEMS) devices to improve actuator performance and methods for fabricating the same |
FR2820833B1 (fr) * | 2001-02-15 | 2004-05-28 | Teem Photonics | Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir |
KR20030008156A (ko) * | 2001-04-13 | 2003-01-24 | 코닌클리즈케 필립스 일렉트로닉스 엔.브이. | 전자 디바이스 제조 방법 |
WO2003001608A1 (fr) * | 2001-06-21 | 2003-01-03 | Mitsubishi Denki Kabushiki Kaisha | Procede de fabrication d'une structure a couches minces |
US6544863B1 (en) | 2001-08-21 | 2003-04-08 | Calient Networks, Inc. | Method of fabricating semiconductor wafers having multiple height subsurface layers |
FR2853645B1 (fr) * | 2003-04-14 | 2005-07-08 | Memscap | Procede de fabrication d'un composant electronique incluant une structure micro-electromecanique |
DE102007048882A1 (de) * | 2007-10-11 | 2009-04-23 | Robert Bosch Gmbh | Beschleunigungssensor |
ITGE20120071A1 (it) | 2012-07-19 | 2014-01-20 | Darts Engineering Srl | Sistema e metodo di monitoraggio di un territorio |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0644008B2 (ja) * | 1990-08-17 | 1994-06-08 | アナログ・ディバイセス・インコーポレーテッド | モノリシック加速度計 |
EP0508946B1 (de) * | 1991-04-10 | 1996-07-24 | Dyconex AG | Metallfolie mit einer strukturierten Oberfläche |
US5511428A (en) * | 1994-06-10 | 1996-04-30 | Massachusetts Institute Of Technology | Backside contact of sensor microstructures |
US5526951A (en) | 1994-09-30 | 1996-06-18 | Texas Instruments Incorporated | Fabrication method for digital micro-mirror devices using low temperature CVD |
DE19732250A1 (de) * | 1997-07-26 | 1999-01-28 | Bosch Gmbh Robert | Verfahren zur Herstellung metallischer Mikrostrukturen |
-
1998
- 1998-01-12 DE DE19800745A patent/DE19800745A1/de not_active Withdrawn
- 1998-12-01 ES ES98965594T patent/ES2178303T3/es not_active Expired - Lifetime
- 1998-12-01 DE DE59804215T patent/DE59804215D1/de not_active Expired - Lifetime
- 1998-12-01 JP JP2000527685A patent/JP4204193B2/ja not_active Expired - Fee Related
- 1998-12-01 WO PCT/DE1998/003521 patent/WO1999035305A1/de active IP Right Grant
- 1998-12-01 US US09/600,232 patent/US6514670B1/en not_active Expired - Fee Related
- 1998-12-01 EP EP98965594A patent/EP1055015B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JP4204193B2 (ja) | 2009-01-07 |
EP1055015B1 (de) | 2002-05-22 |
DE59804215D1 (de) | 2002-06-27 |
DE19800745A1 (de) | 1999-07-15 |
EP1055015A1 (de) | 2000-11-29 |
WO1999035305A1 (de) | 1999-07-15 |
US6514670B1 (en) | 2003-02-04 |
JP2002500390A (ja) | 2002-01-08 |
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