ES2106219T3 - Conjunto de robot. - Google Patents
Conjunto de robot.Info
- Publication number
- ES2106219T3 ES2106219T3 ES93106555T ES93106555T ES2106219T3 ES 2106219 T3 ES2106219 T3 ES 2106219T3 ES 93106555 T ES93106555 T ES 93106555T ES 93106555 T ES93106555 T ES 93106555T ES 2106219 T3 ES2106219 T3 ES 2106219T3
- Authority
- ES
- Spain
- Prior art keywords
- conveyors
- bucket
- arms
- robot set
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J18/00—Arms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
- B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
- B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
- B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
Landscapes
- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Specific Conveyance Elements (AREA)
Abstract
SE DESCRIBE UN MONTAJE ROBOT (2) QUE INCLUYE UN CUBO CENTRAL (4),CON DOS BRAZOS (6,8) DISPUESTOS PARA UNA ROTACION INDEPENDIENTE SOBRE EL CUBO. DOS TRANSPORTADORES (10,12) ORIENTADOS 180 S,EN DIRECCIONES OPUESTAS PARA EXTENDER UNO DE LOS TRANSPORTADORES RADIALMENTE DESDE EL CUBO CENTRAL, Y PARA ROTAR LOS BRAZOS EN LA MISMA DIRECCION Y ASI EFECTUAR LA ROTACION DE LOS TRANSPORTADORES.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US87342292A | 1992-04-23 | 1992-04-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2106219T3 true ES2106219T3 (es) | 1997-11-01 |
Family
ID=25361604
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES93106555T Expired - Lifetime ES2106219T3 (es) | 1992-04-23 | 1993-04-22 | Conjunto de robot. |
Country Status (5)
Country | Link |
---|---|
EP (2) | EP0742084B1 (es) |
JP (1) | JPH0773833B2 (es) |
KR (1) | KR100281239B1 (es) |
DE (2) | DE69330968T2 (es) |
ES (1) | ES2106219T3 (es) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5180276A (en) * | 1991-04-18 | 1993-01-19 | Brooks Automation, Inc. | Articulated arm transfer device |
JP3769802B2 (ja) * | 1996-02-09 | 2006-04-26 | 株式会社日立製作所 | 半導体装置の製造方法 |
US6364599B1 (en) | 1996-03-22 | 2002-04-02 | Komatsu Ltd. | Robot for handling |
JP3757016B2 (ja) * | 1997-02-20 | 2006-03-22 | ローツェ株式会社 | ハンドリング用ロボット |
US6132165A (en) * | 1998-02-23 | 2000-10-17 | Applied Materials, Inc. | Single drive, dual plane robot |
JP2000150615A (ja) * | 1998-11-17 | 2000-05-30 | Tokyo Electron Ltd | 搬送装置 |
US6609877B1 (en) * | 2000-10-04 | 2003-08-26 | The Boc Group, Inc. | Vacuum chamber load lock structure and article transport mechanism |
JP4485086B2 (ja) * | 2001-02-28 | 2010-06-16 | Juki株式会社 | 縫製装置 |
JP3804780B2 (ja) * | 2002-04-25 | 2006-08-02 | ナブテスコ株式会社 | ロボットアーム及びロボット |
JP4000036B2 (ja) | 2002-09-30 | 2007-10-31 | 東京エレクトロン株式会社 | 搬送装置 |
JP4515133B2 (ja) * | 2004-04-02 | 2010-07-28 | 株式会社アルバック | 搬送装置及びその制御方法並びに真空処理装置 |
JP4233520B2 (ja) * | 2004-12-28 | 2009-03-04 | ローツェ株式会社 | ハンドリング用ロボット |
JP5306908B2 (ja) * | 2009-06-03 | 2013-10-02 | 東京エレクトロン株式会社 | 搬送モジュール |
JP5525399B2 (ja) | 2010-09-16 | 2014-06-18 | 東京エレクトロン株式会社 | 搬送装置、基板処理システム及び姿勢制御機構 |
JP6581831B2 (ja) | 2015-07-28 | 2019-09-25 | 東京エレクトロン株式会社 | 保持部の姿勢維持機構 |
RU171274U1 (ru) * | 2016-11-22 | 2017-05-29 | Акционерное общество "Делан" | Анодный заземлитель |
JP6417444B2 (ja) * | 2017-04-20 | 2018-11-07 | 株式会社ダイヘン | 搬送装置 |
CN112768392B (zh) * | 2021-01-07 | 2024-06-21 | 北京北方华创微电子装备有限公司 | 晶片传输装置 |
CN114604621B (zh) * | 2022-04-02 | 2023-08-11 | 合肥哈工长隆智能装备科技有限公司 | 一种轮毂锻造自动化加工机器人 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1144724B (it) * | 1981-06-03 | 1986-10-29 | Comau Spa | Apparecchio manipolatore a due bracci contrapposti |
JPS60207786A (ja) * | 1984-03-29 | 1985-10-19 | ぺんてる株式会社 | ア−ム直線駆動型ロボツト |
EP0160305B1 (en) * | 1984-05-02 | 1989-10-25 | Kabushiki Kaisha Tokuda Seisakusho | Carrying device |
US4712971A (en) * | 1985-02-13 | 1987-12-15 | The Charles Stark Draper Laboratory, Inc. | Control arm assembly |
JPS61244475A (ja) * | 1985-04-22 | 1986-10-30 | 株式会社東芝 | 産業用ロボツト |
US4929146A (en) * | 1987-11-13 | 1990-05-29 | U.S. Philips Corporation | Manipulator |
JPH0825151B2 (ja) * | 1988-09-16 | 1996-03-13 | 東京応化工業株式会社 | ハンドリングユニット |
DE69032945T2 (de) * | 1989-10-20 | 1999-09-16 | Applied Materials, Inc. | Robotereinrichtung |
DE9200071U1 (de) * | 1992-01-04 | 1992-04-30 | G + W Bühler Maschinenbau GmbH & Co. KG, 7836 Bahlingen | Handhabungsgerät |
-
1993
- 1993-04-21 JP JP5094086A patent/JPH0773833B2/ja not_active Expired - Fee Related
- 1993-04-22 EP EP96112331A patent/EP0742084B1/en not_active Expired - Lifetime
- 1993-04-22 DE DE69330968T patent/DE69330968T2/de not_active Expired - Fee Related
- 1993-04-22 EP EP93106555A patent/EP0567121B1/en not_active Expired - Lifetime
- 1993-04-22 DE DE69312554T patent/DE69312554T2/de not_active Expired - Fee Related
- 1993-04-22 ES ES93106555T patent/ES2106219T3/es not_active Expired - Lifetime
- 1993-04-23 KR KR1019930006843A patent/KR100281239B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH0615592A (ja) | 1994-01-25 |
DE69312554T2 (de) | 1998-02-19 |
DE69330968D1 (de) | 2001-11-22 |
EP0567121B1 (en) | 1997-07-30 |
JPH0773833B2 (ja) | 1995-08-09 |
KR940005363A (ko) | 1994-03-21 |
KR100281239B1 (ko) | 2001-02-01 |
EP0742084A3 (en) | 1997-01-02 |
DE69312554D1 (de) | 1997-09-04 |
EP0742084B1 (en) | 2001-10-17 |
DE69330968T2 (de) | 2002-06-06 |
EP0742084A2 (en) | 1996-11-13 |
EP0567121A1 (en) | 1993-10-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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