ES2097976T3 - Dispositivo portaobjetos y sistema de transferencia de dibujo que lo utiliza. - Google Patents

Dispositivo portaobjetos y sistema de transferencia de dibujo que lo utiliza.

Info

Publication number
ES2097976T3
ES2097976T3 ES93302498T ES93302498T ES2097976T3 ES 2097976 T3 ES2097976 T3 ES 2097976T3 ES 93302498 T ES93302498 T ES 93302498T ES 93302498 T ES93302498 T ES 93302498T ES 2097976 T3 ES2097976 T3 ES 2097976T3
Authority
ES
Spain
Prior art keywords
transfer system
sliding device
range
drawing transfer
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES93302498T
Other languages
English (en)
Inventor
Kazunori Iwamoto
Nobushige Korenaga
Youzou Fukagawa
Toshiya Asano
Satoru Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP7755992A external-priority patent/JP3137717B2/ja
Priority claimed from JP05032053A external-priority patent/JP3135404B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of ES2097976T3 publication Critical patent/ES2097976T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H01J2237/20228—Mechanical X-Y scanning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20278—Motorised movement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Machine Tool Units (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

UN DISPOSITIVO PORTAOBJETOS INCLUYE UN PRIMER SISTEMA DE ACCIONAMIENTO DE MOVIMIENTO PRECISO PARA MOVER UN PORTAOBJETOS MOVIL A TRAVES DE UN PRIMER MARGEN; Y UN SEGUNDO SISTEMA DE ACCIONAMIENTO DE MOVIMIENTO RELATIVAMENTE BASTO PARA MOVER UN PORTAOBJETOS MOVIL A TRAVES DE UN SEGUNDO MARGEN EL CUAL ES CASI DE LA MISMA EXTENSION QUE EL PRIMER MARGEN.
ES93302498T 1992-03-31 1993-03-30 Dispositivo portaobjetos y sistema de transferencia de dibujo que lo utiliza. Expired - Lifetime ES2097976T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP7755992A JP3137717B2 (ja) 1992-03-31 1992-03-31 移動ステージ装置
JP05032053A JP3135404B2 (ja) 1993-02-22 1993-02-22 ステージ装置とこれを用いたシステム

Publications (1)

Publication Number Publication Date
ES2097976T3 true ES2097976T3 (es) 1997-04-16

Family

ID=26370573

Family Applications (1)

Application Number Title Priority Date Filing Date
ES93302498T Expired - Lifetime ES2097976T3 (es) 1992-03-31 1993-03-30 Dispositivo portaobjetos y sistema de transferencia de dibujo que lo utiliza.

Country Status (4)

Country Link
EP (1) EP0564255B1 (es)
AT (1) ATE149699T1 (es)
DE (1) DE69308347T2 (es)
ES (1) ES2097976T3 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002184686A (ja) * 2000-10-03 2002-06-28 Advantest Corp 電子ビーム露光装置
JP6342131B2 (ja) 2013-09-13 2018-06-13 株式会社東芝 受給エネルギー削減情報算出装置、受給エネルギー削減情報算出方法およびプログラム
US11231336B2 (en) * 2017-12-15 2022-01-25 Mitsubishi Electric Corporation Thrust measuring device
CN112873137B (zh) * 2020-12-29 2022-11-04 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 一种剥离工作台

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4425537A (en) * 1978-06-26 1984-01-10 Optimetrix Corporation X-Y Addressable workpiece positioner and mask aligner using same
US4993696A (en) * 1986-12-01 1991-02-19 Canon Kabushiki Kaisha Movable stage mechanism
CA1283143C (en) * 1987-06-11 1991-04-16 Ralph L. Hollis, Jr. Magnetically levitated fine motion robot wrist with programmable compliance
US4814622A (en) * 1987-11-06 1989-03-21 Bell Communications Research, Inc. High speed scanning tunneling microscope
DE69118315T2 (de) * 1990-11-01 1996-08-14 Canon Kk Waferhaltebefestigung für Belichtungsgerät

Also Published As

Publication number Publication date
EP0564255A2 (en) 1993-10-06
ATE149699T1 (de) 1997-03-15
DE69308347D1 (de) 1997-04-10
EP0564255A3 (es) 1994-02-23
EP0564255B1 (en) 1997-03-05
DE69308347T2 (de) 1997-07-10

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