ES2057886T3 - PROCEDURE FOR THE MANUFACTURE OF A SENSOR TO DETERMINE PRESSURE FORCES. - Google Patents
PROCEDURE FOR THE MANUFACTURE OF A SENSOR TO DETERMINE PRESSURE FORCES.Info
- Publication number
- ES2057886T3 ES2057886T3 ES91907858T ES91907858T ES2057886T3 ES 2057886 T3 ES2057886 T3 ES 2057886T3 ES 91907858 T ES91907858 T ES 91907858T ES 91907858 T ES91907858 T ES 91907858T ES 2057886 T3 ES2057886 T3 ES 2057886T3
- Authority
- ES
- Spain
- Prior art keywords
- manufacture
- pressure forces
- procedure
- sensor
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49099—Coating resistive material on a base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49103—Strain gauge making
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
SE PROPONE UN METODO Y UN DISPOSITIVO PARA LA FABRICACION DE SENSORESPREVISTOS EN PARTICULAR PARA LA DETERMINACION DE FUERZAS DE PRESION. EN LA TECNICA DE CAPA GRUESA SE APLICA PRIMERAMENTE POR LO MENOS SOBRE UNA PLACA SOPORTE (10) UNA CAPA AISLANTE (14), SOBRE ELLA UNA CAPA RESISTIVA SENSIBLE A LA PRESION (12) Y FINALMENTE PISTAS CONDUCTORAS (13). EL CONJUNTO DE LA CAPA (1114) SE COMPRIME A CONTINUACION JUNTO CON UNA MASA DE MOLDEO DE PLASTICO (15) EN UNA ESTAMPA DE COMPRESION (20-22). A CONTINUACION SE RETIRA LA PLACA SOPORTE (10) DE LA PIEZA PRENSADA.A METHOD AND A DEVICE FOR THE MANUFACTURE OF SPECIFIC SENSORS IS PROPOSED IN PARTICULAR FOR THE DETERMINATION OF PRESSURE FORCES. IN THE THICK LAYER TECHNIQUE AT LEAST APPLIES AT LEAST ON A SUPPORT PLATE (10) AN INSULATING LAYER (14), ON IT A PRESSURE SENSITIVE RESISTIVE LAYER (12) AND FINALLY CONDUCTIVE TRACKS (13). THE LAYER ASSEMBLY (1114) IS COMPRESSED BELOW TOGETHER WITH A PLASTIC MOLDING MASS (15) IN A COMPRESSION STAMP (20-22). THEN THE SUPPORT PLATE (10) IS REMOVED FROM THE PRESSED PART.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19904014511 DE4014511A1 (en) | 1989-04-14 | 1990-05-07 | Pressure sensor mfg. method - compressing film arrangement contg. thick film resistor with plastic compression mass after preparation of sensor surface |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2057886T3 true ES2057886T3 (en) | 1994-10-16 |
Family
ID=6405814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES91907858T Expired - Lifetime ES2057886T3 (en) | 1990-05-07 | 1991-04-29 | PROCEDURE FOR THE MANUFACTURE OF A SENSOR TO DETERMINE PRESSURE FORCES. |
Country Status (6)
Country | Link |
---|---|
US (1) | US5349746A (en) |
EP (1) | EP0527775B1 (en) |
JP (1) | JPH05506717A (en) |
DE (1) | DE59102443D1 (en) |
ES (1) | ES2057886T3 (en) |
WO (1) | WO1991017415A1 (en) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2584201B2 (en) * | 1994-01-14 | 1997-02-26 | インターナショナル・ビジネス・マシーンズ・コーポレイション | Power transducer, computer system and keyboard |
US6184865B1 (en) | 1996-10-23 | 2001-02-06 | International Business Machines Corporation | Capacitive pointing stick apparatus for symbol manipulation in a graphical user interface |
DE19753800C2 (en) * | 1997-12-04 | 1999-12-30 | Mannesmann Vdo Ag | Method for producing an electrical resistance and a mechanical-electrical converter |
DE19814261A1 (en) * | 1998-03-31 | 1999-10-14 | Mannesmann Vdo Ag | Strain sensitive resistance |
DE10252023B3 (en) * | 2002-11-06 | 2004-07-15 | Metallux Gmbh | pressure sensor |
DE10320090A1 (en) * | 2003-05-05 | 2004-08-26 | Infineon Technologies Ag | Electronic assembly, especially a circuit board, has conducting tracks between components made from carbonized plastic and or agglomerated nano-particles mounted on a plastic substrate |
US20060185446A1 (en) * | 2005-02-18 | 2006-08-24 | Speckhart Frank H | Printed strain gage for vehicle seats |
US7360438B2 (en) * | 2006-02-08 | 2008-04-22 | Honeywell International Inc. | Advanced thick film load cell |
WO2013192539A1 (en) | 2012-06-21 | 2013-12-27 | Nextinput, Inc. | Wafer level mems force dies |
WO2014008377A1 (en) | 2012-07-05 | 2014-01-09 | Ian Campbell | Microelectromechanical load sensor and methods of manufacturing the same |
WO2015106246A1 (en) | 2014-01-13 | 2015-07-16 | Nextinput, Inc. | Miniaturized and ruggedized wafer level mems force sensors |
EP3307671B1 (en) | 2015-06-10 | 2022-06-15 | Nextinput, Inc. | Ruggedized wafer level mems force sensor with a tolerance trench |
WO2018148510A1 (en) | 2017-02-09 | 2018-08-16 | Nextinput, Inc. | Integrated piezoresistive and piezoelectric fusion force sensor |
US11255737B2 (en) | 2017-02-09 | 2022-02-22 | Nextinput, Inc. | Integrated digital force sensors and related methods of manufacture |
WO2019018641A1 (en) | 2017-07-19 | 2019-01-24 | Nextinput, Inc. | Strain transfer stacking in a mems force sensor |
WO2019023309A1 (en) | 2017-07-25 | 2019-01-31 | Nextinput, Inc. | Integrated fingerprint and force sensor |
WO2019023552A1 (en) | 2017-07-27 | 2019-01-31 | Nextinput, Inc. | A wafer bonded piezoresistive and piezoelectric force sensor and related methods of manufacture |
JP6793103B2 (en) | 2017-09-29 | 2020-12-02 | ミネベアミツミ株式会社 | Strain gauge |
JP2019066453A (en) | 2017-09-29 | 2019-04-25 | ミネベアミツミ株式会社 | Strain gauge |
JP2019066454A (en) | 2017-09-29 | 2019-04-25 | ミネベアミツミ株式会社 | Strain gauge and sensor module |
JP2019066312A (en) | 2017-09-29 | 2019-04-25 | ミネベアミツミ株式会社 | Strain gauge |
US11579028B2 (en) | 2017-10-17 | 2023-02-14 | Nextinput, Inc. | Temperature coefficient of offset compensation for force sensor and strain gauge |
US11385108B2 (en) | 2017-11-02 | 2022-07-12 | Nextinput, Inc. | Sealed force sensor with etch stop layer |
US11874185B2 (en) | 2017-11-16 | 2024-01-16 | Nextinput, Inc. | Force attenuator for force sensor |
JP2019113411A (en) * | 2017-12-22 | 2019-07-11 | ミネベアミツミ株式会社 | Strain gauge and sensor module |
JP2019184344A (en) | 2018-04-05 | 2019-10-24 | ミネベアミツミ株式会社 | Strain gauge and manufacturing method therefor |
EP3855148A4 (en) | 2018-10-23 | 2022-10-26 | Minebea Mitsumi Inc. | Accelerator pedal, steering apparatus, 6-axis sensor, engine, bumper, and the like |
US10962427B2 (en) | 2019-01-10 | 2021-03-30 | Nextinput, Inc. | Slotted MEMS force sensor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3298863A (en) * | 1964-05-08 | 1967-01-17 | Joseph H Mccusker | Method for fabricating thin film transistors |
US3626256A (en) * | 1970-10-16 | 1971-12-07 | Transidyne Gen Corp | Thin film semiconductor strain gauges and method for making same |
US5070596A (en) * | 1988-05-18 | 1991-12-10 | Harris Corporation | Integrated circuits including photo-optical devices and pressure transducers and method of fabrication |
DE3912280A1 (en) * | 1989-04-14 | 1990-10-18 | Bosch Gmbh Robert | METHOD FOR PRODUCING A SENSOR FOR DETERMINING PRESSURE FORCES |
-
1991
- 1991-04-29 US US07/956,892 patent/US5349746A/en not_active Expired - Fee Related
- 1991-04-29 DE DE59102443T patent/DE59102443D1/en not_active Expired - Fee Related
- 1991-04-29 ES ES91907858T patent/ES2057886T3/en not_active Expired - Lifetime
- 1991-04-29 WO PCT/DE1991/000359 patent/WO1991017415A1/en active IP Right Grant
- 1991-04-29 EP EP91907858A patent/EP0527775B1/en not_active Expired - Lifetime
- 1991-04-29 JP JP91507685A patent/JPH05506717A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
WO1991017415A1 (en) | 1991-11-14 |
DE59102443D1 (en) | 1994-09-08 |
EP0527775A1 (en) | 1993-02-24 |
US5349746A (en) | 1994-09-27 |
EP0527775B1 (en) | 1994-08-03 |
JPH05506717A (en) | 1993-09-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ES2057886T3 (en) | PROCEDURE FOR THE MANUFACTURE OF A SENSOR TO DETERMINE PRESSURE FORCES. | |
DE3870910D1 (en) | DEVICE FOR MEASURING THE AREA DISTRIBUTION OF PRESSURE FORCES. | |
DE3376760D1 (en) | Transducer element, method for its manufacture and its use in a pressure pick-up device | |
EP0256799A3 (en) | Tactile sensor device | |
DE69031152D1 (en) | Capacitive detector | |
SE8000654L (en) | CIRCUIT CONTROL DEVICE | |
ATE460009T1 (en) | CAPACITIVE TOUCH SWITCH | |
FI102567B1 (en) | Capacitive force sensor | |
ES2118672T1 (en) | ABSTRACT PRESSURE DETECTOR OF CAPACITIVE TYPE AND ITS METHOD OF TRAINING. | |
IL92927A0 (en) | Capacitive pressure sensor with encircling third plate | |
EP0050231A3 (en) | Switching component with variable resistance | |
ATE241188T1 (en) | SENSOR FOR REPORTING CHANGES IN THE PRESENCE OF PERSONS OR OBJECTS | |
ES8305626A1 (en) | Keyboard key with embedded top character | |
ATE43720T1 (en) | FORCE MEASUREMENT DEVICE. | |
TW368677B (en) | Semiconductor device and method for making the same | |
ATE163089T1 (en) | SOUND SENSOR | |
DE59801867D1 (en) | FILM GAUGE | |
EP0149055A3 (en) | Device for the production of a tactile display area | |
ES2043944T3 (en) | PRESSURE OR FORCE SENSOR OF THICK FILM. | |
KR910008511A (en) | Phase fixing device | |
IT224286Z2 (en) | KINESIOLOGICAL PODOCEPTOR | |
FR2611588B1 (en) | SHEET MATERIAL COMPRISING AN ADHESIVE ON BOTH SIDES | |
DE3874884D1 (en) | ELECTRICAL FORCE AND / OR DEFLECTION SENSOR, ESPECIALLY FOR USE AS A PRESSURE SENSOR. | |
KR900015927A (en) | Press lamination method and device | |
ES2083020T3 (en) | MENU KEYS WITH PRESSURE SENSITIVE PARTIAL SURFACES FOR A VIDEO TERMINAL ARRANGED ON A BALANCING MACHINE. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
Ref document number: 527775 Country of ref document: ES |