EP3648182A4 - Semiconductor light-emitting element and method for manufacturing semiconductor light-emitting element - Google Patents
Semiconductor light-emitting element and method for manufacturing semiconductor light-emitting element Download PDFInfo
- Publication number
- EP3648182A4 EP3648182A4 EP18822830.8A EP18822830A EP3648182A4 EP 3648182 A4 EP3648182 A4 EP 3648182A4 EP 18822830 A EP18822830 A EP 18822830A EP 3648182 A4 EP3648182 A4 EP 3648182A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- emitting element
- semiconductor light
- manufacturing semiconductor
- manufacturing
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0066—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound
- H01L33/007—Processes for devices with an active region comprising only III-V compounds with a substrate not being a III-V compound comprising nitride compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/12—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a stress relaxation structure, e.g. buffer layer
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0083—Periodic patterns for optical field-shaping in or on the semiconductor body or semiconductor body package, e.g. photonic bandgap structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/14—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure
- H01L33/145—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a carrier transport control structure, e.g. highly-doped semiconductor layer or current-blocking structure with a current-blocking structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
- H01L33/40—Materials therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/58—Optical field-shaping elements
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017124547A JP6719424B2 (en) | 2017-06-26 | 2017-06-26 | Semiconductor light emitting device and method for manufacturing semiconductor light emitting device |
PCT/JP2018/022684 WO2019003932A1 (en) | 2017-06-26 | 2018-06-14 | Semiconductor light-emitting element and method for manufacturing semiconductor light-emitting element |
Publications (2)
Publication Number | Publication Date |
---|---|
EP3648182A1 EP3648182A1 (en) | 2020-05-06 |
EP3648182A4 true EP3648182A4 (en) | 2021-03-10 |
Family
ID=64740584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP18822830.8A Pending EP3648182A4 (en) | 2017-06-26 | 2018-06-14 | Semiconductor light-emitting element and method for manufacturing semiconductor light-emitting element |
Country Status (4)
Country | Link |
---|---|
US (1) | US11222995B2 (en) |
EP (1) | EP3648182A4 (en) |
JP (1) | JP6719424B2 (en) |
WO (1) | WO2019003932A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7169513B2 (en) * | 2019-12-23 | 2022-11-11 | 日亜化学工業株式会社 | Method for manufacturing light-emitting element |
JP7390258B2 (en) * | 2020-06-22 | 2023-12-01 | 日機装株式会社 | semiconductor light emitting device |
WO2024129716A1 (en) * | 2022-12-15 | 2024-06-20 | Lumileds Llc | Microleds with nanopatterned surface |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001041225A2 (en) * | 1999-12-03 | 2001-06-07 | Cree Lighting Company | Enhanced light extraction in leds through the use of internal and external optical elements |
US20060186424A1 (en) * | 2005-02-10 | 2006-08-24 | Akira Fujimoto | White LED and manufacturing method therefor |
JP2009010215A (en) * | 2007-06-28 | 2009-01-15 | Nichia Corp | Semiconductor light-emitting element |
US20100072501A1 (en) * | 2008-09-19 | 2010-03-25 | Nichia Corporation | Semiconductor light emitting device |
JP2016012684A (en) * | 2014-06-30 | 2016-01-21 | 旭化成イーマテリアルズ株式会社 | Semiconductor light emitting element |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10111501B4 (en) * | 2001-03-09 | 2019-03-21 | Osram Opto Semiconductors Gmbh | Radiation-emitting semiconductor component and method for its production |
JP3886341B2 (en) * | 2001-05-21 | 2007-02-28 | 日本電気株式会社 | Method for manufacturing gallium nitride crystal substrate and gallium nitride crystal substrate |
KR101183776B1 (en) * | 2003-08-19 | 2012-09-17 | 니치아 카가쿠 고교 가부시키가이샤 | Semiconductor device |
US7524686B2 (en) * | 2005-01-11 | 2009-04-28 | Semileds Corporation | Method of making light emitting diodes (LEDs) with improved light extraction by roughening |
KR100631981B1 (en) * | 2005-04-07 | 2006-10-11 | 삼성전기주식회사 | Vertical group iii-nitride light emitting device and method for manufacturing the same |
JP2009218569A (en) * | 2008-02-13 | 2009-09-24 | Toyoda Gosei Co Ltd | Group iii nitride semiconductor light-emitting device and production method therefor |
US8283676B2 (en) * | 2010-01-21 | 2012-10-09 | Siphoton Inc. | Manufacturing process for solid state lighting device on a conductive substrate |
US8981397B2 (en) * | 2010-02-12 | 2015-03-17 | Tsmc Solid State Lighting Ltd. | Light-emitting devices on textured substrates |
JP4928652B2 (en) * | 2010-08-06 | 2012-05-09 | パナソニック株式会社 | Semiconductor light emitting device |
WO2012017686A1 (en) * | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | Semiconductor light-emitting element |
TWI532214B (en) * | 2010-10-12 | 2016-05-01 | Lg伊諾特股份有限公司 | Light emitting device and light emitting device package thereof |
JP5594530B2 (en) | 2010-10-21 | 2014-09-24 | 創光科学株式会社 | Nitride semiconductor ultraviolet light emitting device |
JP5862354B2 (en) * | 2011-04-15 | 2016-02-16 | 三菱化学株式会社 | Nitride-based light-emitting diode device and manufacturing method thereof |
TWI464910B (en) * | 2011-05-23 | 2014-12-11 | Lextar Electronics Corp | Semiconductor light emitting structure |
TWI466323B (en) * | 2011-11-07 | 2014-12-21 | Ind Tech Res Inst | Light emitting diode |
CN104160520A (en) * | 2012-02-01 | 2014-11-19 | 松下电器产业株式会社 | Semiconductor light-emitting element, method for manufacturing same, and light source device |
US8981534B2 (en) * | 2012-09-14 | 2015-03-17 | Tsmc Solid State Lighting Ltd. | Pre-cutting a back side of a silicon substrate for growing better III-V group compound layer on a front side of the substrate |
JP2016139780A (en) * | 2015-01-23 | 2016-08-04 | 旭化成株式会社 | Substrate for light-emitting element and light-emitting element |
JP2016149462A (en) * | 2015-02-12 | 2016-08-18 | 豊田合成株式会社 | Light emitting element and manufacturing method of the same |
US10069037B2 (en) * | 2015-04-20 | 2018-09-04 | Epistar Corporation | Light-emitting device and manufacturing method thereof |
TWI605616B (en) * | 2015-08-12 | 2017-11-11 | 固美實國際股份有限公司 | Patterned substrate for light emitting diode |
EP3365925B1 (en) * | 2015-10-19 | 2021-04-14 | Lumileds LLC | Wavelength converted light emitting device with textured substrate |
JP6564348B2 (en) * | 2016-06-06 | 2019-08-21 | 日機装株式会社 | Deep ultraviolet light emitting device |
JP6871706B2 (en) * | 2016-09-30 | 2021-05-12 | 日機装株式会社 | Manufacturing method of semiconductor light emitting device |
JP7255965B2 (en) * | 2017-08-24 | 2023-04-11 | 日機装株式会社 | Method for manufacturing semiconductor light emitting device |
-
2017
- 2017-06-26 JP JP2017124547A patent/JP6719424B2/en active Active
-
2018
- 2018-06-14 WO PCT/JP2018/022684 patent/WO2019003932A1/en unknown
- 2018-06-14 EP EP18822830.8A patent/EP3648182A4/en active Pending
-
2019
- 2019-12-26 US US16/727,465 patent/US11222995B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001041225A2 (en) * | 1999-12-03 | 2001-06-07 | Cree Lighting Company | Enhanced light extraction in leds through the use of internal and external optical elements |
US20060186424A1 (en) * | 2005-02-10 | 2006-08-24 | Akira Fujimoto | White LED and manufacturing method therefor |
JP2009010215A (en) * | 2007-06-28 | 2009-01-15 | Nichia Corp | Semiconductor light-emitting element |
US20100072501A1 (en) * | 2008-09-19 | 2010-03-25 | Nichia Corporation | Semiconductor light emitting device |
JP2016012684A (en) * | 2014-06-30 | 2016-01-21 | 旭化成イーマテリアルズ株式会社 | Semiconductor light emitting element |
Non-Patent Citations (1)
Title |
---|
See also references of WO2019003932A1 * |
Also Published As
Publication number | Publication date |
---|---|
JP6719424B2 (en) | 2020-07-08 |
US11222995B2 (en) | 2022-01-11 |
WO2019003932A1 (en) | 2019-01-03 |
US20200144449A1 (en) | 2020-05-07 |
JP2019009318A (en) | 2019-01-17 |
EP3648182A1 (en) | 2020-05-06 |
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RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 33/20 20100101AFI20210202BHEP Ipc: H01L 33/32 20100101ALN20210202BHEP Ipc: H01L 33/58 20100101ALN20210202BHEP Ipc: H01L 33/00 20100101ALI20210202BHEP |
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Owner name: NIKKISO CO., LTD. |