EP3427010A1 - Kipptoleranter wegsensor - Google Patents
Kipptoleranter wegsensorInfo
- Publication number
- EP3427010A1 EP3427010A1 EP17700556.8A EP17700556A EP3427010A1 EP 3427010 A1 EP3427010 A1 EP 3427010A1 EP 17700556 A EP17700556 A EP 17700556A EP 3427010 A1 EP3427010 A1 EP 3427010A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- measuring
- correction
- track
- coil
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
- G01D5/2006—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
- G01D5/202—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
Definitions
- the invention relates to a displacement sensor and a method for determining a relative position with this displacement sensor.
- Measuring signal may be a frequency change of a resonant circuit comprising a measuring coil, which is arranged over an electrically conductive track.
- the electrically conductive track changes its width along a measurement path such that an overlap of the measurement coil with the electrically conductive track changes along the measurement path.
- the measuring coil induces a in the conductive track
- Such a rotation angle sensor is shown for example in DE 10 2004 033 083 AI.
- a tolerance-robust design usually requires the use of multiple measuring coils and a plurality of conductive tracks, which usually have an identical geometry, but are offset along the circumference of the object to be measured.
- Embodiments of the present invention may advantageously enable to provide a tolerance sensor robust path sensor.
- a displacement sensor can be
- a displacement sensor may also be a rotation angle sensor with which a relative rotation of two components relative to one another about an axis of rotation can be determined.
- the displacement sensor comprises an induction element with at least one electrically conductive measuring track element which runs along a measuring path; a sensor element which is movable relative to the induction element along the at least one measuring track element, wherein the sensor element comprises at least one measuring coil, which is arranged above the at least one measuring track element, wherein a
- Overlapping of the at least one measuring coil and the at least one measuring track element along the measuring path changes such that an induction of the at least one measuring coil from a position of the measuring coil on the
- Measuring path is dependent.
- the induction element has two electrically conductive
- Correction track elements which are adjacent to each other with respect to the measurement path are arranged, and the sensor element on two correction coils, with respect to the measuring path side by side over each one of the two
- Correction track elements are arranged and their coverage is constant with the correction track elements along the measurement path.
- the induction element can be, for example, a (approximately flexible) printed circuit board, on which the measuring track element and the correction track elements are formed as one or more conductor tracks.
- This printed circuit board can be arranged on a component whose movement is to be measured, but it is also possible for the induction element to be provided directly by the component to be measured, if it is electrically conductive.
- Measuring track element can be, for example, an increase on this component. Furthermore, the correction track elements can be provided directly by this component.
- the one or more measuring track elements and the correction track elements can each be formed by mutually separate electrically conductive tracks. But it is also possible that one or more of the measuring track elements and / or correction track elements by only one electrically conductive track
- measuring track elements may be provided from the edges of an electrically conductive track.
- a correction track may be provided from the center of an electrically conductive track. It is possible for each coil (measuring coil and / or correction coil) to each have a conductive track on the induction element which provides the respective measuring track element. But it is also possible that several coils (measuring coil and / or correction coil) to each have a conductive track on the induction element which provides the respective measuring track element. But it is also possible that several measuring track elements may be provided from the edges of an electrically conductive track.
- a correction track may be provided from the center of an electrically conductive track. It is possible for each coil (measuring coil and / or correction coil) to each have a conductive track on the induction element which provides the respective measuring track element. But it is also possible that several coil (measuring coil and / or correction coil) to each have a conductive track on the induction element which provides the respective measuring track element. But it is also possible that several coil (me
- Track elements (measuring track elements and / or correction track elements) are provided by only one electrically conductive track.
- the sensor element may be a printed circuit board in which the measuring coil and / or the correction coils are designed as planar coils.
- the sensor element may also include other components, such as a controller that can induce an alternating current in the coils and / or measure a frequency of the alternating voltage in these coils. It is possible that the bases of the correction coils substantially correspond to those of the measuring coils. It is also possible that the
- Correction coils have a smaller area than the measuring coil (s).
- the induction element and the sensor element are movable relative to each other.
- the induction element may be arranged on a shaft which is rotatable relative to the sensor element.
- the sensor element and the induction element can also be fastened to components which are displaceable relative to one another in the direction of the measurement path.
- the measuring coil (s) and the correction coils are in this case with a
- the coils can each be connected to a resonant circuit whose
- Frequency then changes with the respective inductance. This frequency can be evaluated as a measurement signal of the respective coil.
- the one or more measuring track elements change in width along the measuring path, for example, the inductance of the associated measuring coil and thus the associated frequency changes. From the frequency can thus be closed to the position of the measuring coil along the measuring path.
- the measurement signal can be changed by tilting or a change in distance, which can be corrected using the correction coils.
- the correction coils are juxtaposed with respect to the measurement path, i. along an x-direction when the measurement path is along the y-direction. Since the overlap of a correction coil with the associated
- Correction track element is independent of the position on the measuring path can, from the measurement signal of the correction coil (ie, the frequency of the AC voltage generated by the inductance of the correction coil) to the distance of Correction coil are closed to the correction track element. Based on the distance determined for each correction coil and the known one
- Geometry of the displacement sensor (such as the distance of the correction coils from each other and from the one or more measuring coils) can be closed to the distance of the measuring coil (s) of the respective measuring track element. With this distance then, for example, the frequency of the measuring coil can be corrected. Overall, the influence of tolerances on the measurement result can be almost neutralized.
- the displacement sensor can be manufactured inexpensively, since installation tolerances can be greater.
- the measuring track element has a variable width along the measuring path. For example, that can
- Measuring track element such change its width that results in a sinusoidal measurement signal with respect to the measurement path.
- a sinusoidally dependent on the way frequency can be easily evaluated
- Correction track elements along the measurement path to a constant width.
- the correction track elements may be wider than the associated correction coils.
- the correction coils along the measurement path can always be completely covered by the correction track elements.
- the at least one measuring coil is arranged between the two correction coils. If the correction coils are arranged in the x-direction next to the measuring coil (s), the
- the induction element has two electrically conductive measuring track elements, which are arranged next to one another along the measuring path with respect to the measuring path, wherein the
- Sensor element has two measuring coils, which are arranged with respect to the measuring path side by side over the two electrically conductive tracks.
- the displacement sensor may comprise two measuring coils lying next to one another in the x direction.
- the two measuring track elements are shaped identically in sections and the measuring track elements are arranged offset from one another in such a way that signals are induced in the respective measuring coils which are shifted with respect to one Meßwegposition to each other.
- the two measuring track elements may be formed such that one measuring coil generates a sinusoidal measuring signal along the measuring path and the other measuring coil generates a cosinusoidal measuring signal (i.e., a sinusoidal signal offset by 90 °). From the quotient, the position of the road can be calculated using the arctan function.
- a correction track element and a measuring track element run next to one another and are formed from an electrically conductive track. It is possible for a measuring track element and a correction track element to be formed by the same conductive structure on the
- Induction element can be provided.
- the associated measuring coil and the associated correction coil can then be arranged successively along the measuring path.
- an area of the correction coil may be smaller than that of the measuring coils.
- the correction coil may cover only a part of the conductive track that does not have a variable width.
- a measuring coil is formed from two sub-coils which are arranged next to each other with respect to the measuring path and which are arranged above two measuring track elements.
- a correction coil may be arranged with respect to the measuring path (ie with respect to the x-direction) between the two partial coils. It is possible that the correction coil in the y-direction, ie along the measuring path, of the two sub-coils is spaced. This correction coil can be arranged above a correction track element, which is arranged between the two measuring track elements.
- two adjacent measuring coils are divided in this way in two sub-coils.
- a correction coil can be provided for each of these measuring coils which is arranged with respect to the x-direction between the two partial coils.
- a particularly compact induction element can be realized, since for each combination of measuring coil and correction coil only one conductive track must be present (which then provides the two measuring track elements at the edge and the correction track element in the middle).
- the correction coil in this case is made smaller than the measuring coil by the surface and / or its extent in the x-direction, since the measuring coil covers the entire width of the conductive track (both measuring track elements and the
- correction track element The correction coil can be integrated to save space in the sensor element.
- a correction track element is flanked by two measurement track elements and the correction track element and the measurement track elements are formed from an electrically conductive track.
- the electrically conductive trace which is formed from the two measuring track elements (at their edge) and the correction track element (in the middle), can then have a minimum width that is equal to the width of the correction track element.
- this minimum width may be about 30% greater than the width of the correction coils.
- the displacement sensor is a
- the induction element may be arranged along a linear measuring path.
- the deflection depth of a two-wheeler can be measured.
- a linear path sensor can be used in a brake system.
- the gear position can be measured in an automatic transmission with such a linear displacement sensor.
- the displacement sensor is a
- Rotation angle sensor For example, the induction element on a shaft be arranged about a rotation axis. Such a rotation angle sensor can be used for the measurement of a camshaft position. Likewise, with such a rotation angle sensor, an angle of an eccentric shaft for a variable valve timing can be determined. Also, such a
- Rotation angle sensor can be used as a rotor position sensor for an electric motor for an electric vehicle.
- Another aspect of the invention relates to a method for determining a relative position of a sensor element and an induction element of a displacement sensor, as described above and below.
- the method may be performed by a controller, which may also be arranged on the sensor element.
- the method comprises: measuring two correction frequency signals of the two correction coils; Determining a distance of the respective correction coil from the induction element from the respective correction frequency signal; Determining a spacing of the at least one sensing coil from the inductor from the distances of the correction coils; Measuring at least one measurement frequency signal of the at least one measurement coil; Correcting the at least one measurement frequency signal based on the determined distance of the respective measurement coil; and
- Computer program can be implemented, requires little computing power and can be mapped with a standard microcontroller.
- Fig. 1 shows schematically a linear path sensor according to an embodiment of the invention.
- Fig. 2 shows schematically a rotation angle sensor according to an embodiment of the invention.
- Fig. 3 shows schematically an induction element for a displacement sensor according to an embodiment of the invention.
- FIG. 4 shows a schematic cross section through a displacement sensor according to an embodiment of the invention.
- Fig. 5 shows schematically an induction element for a displacement sensor according to an embodiment of the invention.
- Fig. 6 shows schematically an induction element for a displacement sensor according to an embodiment of the invention.
- Fig. 7 shows a schematic cross section through a displacement sensor according to an embodiment of the invention.
- Fig. 8 is a diagram illustrating a dependency of a frequency on a distance between an inductor and a coil.
- Fig. 9 is a diagram illustrating a dependency of a frequency on a measurement path.
- FIG. 1 shows a displacement sensor 10 in the form of a linear displacement sensor 10a, which comprises a sensor element 12 and an induction element 14.
- the induction element 14 may, for example, be a printed circuit board which is mounted on a component 16 whose relative position to the sensor element 12 is to be determined. Furthermore, it is possible that the induction element 14 is provided as a structure of an electrically conductive component 16.
- the sensor element 12 which may also include a circuit board 17, there may be a controller 18, which, as will be described below, from a coil located in the sensor element 12 a position of the
- Sensor element 12 along the measuring path M can determine.
- the measurement path M is aligned along a y-direction, while a width direction is determined by the x-direction.
- the distance of the sensor element 12 and the induction element 14 is determined in a z-direction.
- FIG. 2 shows a displacement sensor 10 in the form of a rotation angle sensor 10b, which comprises a sensor element 12 and an induction element 14.
- Sensor element 12 and the induction element 14 are rotatable relative to each other about an axis A. Since the induction element is wound around a shaft 16 ', this results in that the sensor element 12 and the induction element 14 along a (curved) measuring path M are mutually movable.
- the sensor element 12 and the induction element 14 may be constructed the same as in FIG.
- the induction element 14 may be a flexible printed circuit board and / or be provided by structuring the surface of the shaft 16 ', if this is electrically conductive.
- axis A is aligned in the x direction.
- the measurement path M is (locally) in the y-direction, assuming that the shaft 16 'rotates and the sensor element 12 is fixed.
- FIG. 3 shows an induction element 14, which comprises, for example, a (flexible) printed circuit board 22 on which several electrically conductive trace elements 20a, 20b, 20c, 20d are used up as metallization layers or printed conductors. It is also possible that the tracks 20a, 20b, 20c, 20d are formed as elevations or depressions on an electrically conductive component 16, 16 '.
- the induction element 14 is flat.
- the rotation angle sensor 10b the induction element 14 is curved into a circle (if only a part of 360 ° is to be detected).
- the track elements 20a to 20d are divided into two measuring track elements 20a, 20b and two correction track elements 20c, 20d.
- the two measuring track elements 20a, 20b run next to one another and / or in the direction of the measuring path M (that is to say in the y direction). Furthermore, the measuring track elements 20a, 20b extend between the two correction track elements 20c, 20d, which also extend in the direction of the measuring path.
- Measuring track elements 20a, 20b are each a measuring coil 24a, 24b. There is one each above the correction track elements 20c, 20d
- Correction coil 24c, 24d The measuring coils 24a, 24b and the correction coils 24c, 24d are arranged side by side (in the x-direction), wherein the measuring coils 24a, 24b are arranged within the two correction coils 24c, 24d. Further, all coils 24a, 24b, 24c, 24d may be the same size or have the same area.
- the measuring track elements 20a, 20b are structured in such a way that the
- each measuring track element 20a, 20b in the x-direction changes along the y-direction so that the coverage of the associated measuring coil 24a, 24b changes along the y-direction or along the measuring path.
- each measuring coil 24a, 24b generates a measuring signal which essentially depends on the position of the respective one
- Measuring coil 24a, 24b on the measuring path M depends.
- each measuring track element 20a, 20b can be curved outwards in sections (in the x-direction or in the opposite direction of the x-direction), so that an arcuate structure arises that repeats periodically.
- each measuring track element 20a, 20b may be mirror-symmetrical with respect to a central axis running parallel to the measuring path.
- the two measuring track elements 20a, 20b may be shaped identically in sections, but be displaced relative to one another along the measuring path M, in order in this way generate different measurement signals in the correction coils 24a, 24b. As shown, the measurement track elements 20a, 20b may be shifted by half a period, resulting in maximally different measurement signals.
- correction track elements 20c, 20d need not be structured and may be independent of the rotation / displacement or the measurement path
- Measuring signal depends on the distance (in the z-direction) of the respective correction coil 24c, 24d of the induction element 14.
- FIG. 4 shows a cross section through a displacement sensor 10 (in the form of a rotation angle sensor 10b), on which a tilting of the sensor element 12 relative to the induction element 14 is shown.
- the removal of the coils 24a to 24d deviates from a nominal distance Ung Znom, resulting in that the measurement signals of the measuring coils 24a, 24b are distorted, but can be corrected by the measurement signals of the correction coils 24c, 24d.
- FIGS. 5 and 6 show further embodiments of FIG.
- Induction elements 14 in which a correction track element 20c, 20d and measuring track elements 20a, 20b are integrated with each other.
- Measuring track elements 20a, 20b are each provided by a separate electrically conductive track (i.e., a track separate from the other tracks).
- electrically conductive traces which have the same shape as the measuring track elements 20a, 20b from FIG. 3, are in each case two
- Measuring track elements 20a (or 20b) and a correction track element 20c (or 20d) divided. It is to be understood that this division is made by the arrangement of the coils 24a to 24d and the two measuring track elements 20a (or 20b) and the correction track element 20c (or 20d) can be connected together or can be provided by a single metallization layer. It However, it is also possible that the measuring track elements 20a (or 20b) and the correction track element 20c (or 20d) are separated from each other.
- each measuring track element 20a, 20b can be curved outward in sections (in the x-direction or in the opposite direction of the x-direction), so that an arcuate structure arises that repeats periodically.
- the other edge can be straight or run parallel to the measuring path.
- the width of the track formed from the measurement track elements 20a (or 20b) and the correction track element 20c (or 20d) may periodically change between a minimum width and a maximum width along the measurement path.
- the minimum width may be the width of the correction track element 20c (or 20d).
- the measuring coil 24a (or 24b) in the width direction (x direction) covers the associated measuring track elements 20a (or 20b) and
- correction track elements 20c (or 20d) completely.
- the measuring coil 24a (or 24b) can be as wide as the maximum width of the track formed from the associated track elements.
- the correction coil 24c (or 24d) only covers the correction track element 20c (or 20d) in the width direction (x direction).
- the correction coil 24c (or 24d) can be just as wide or slightly narrower than the minimum width of the track formed from the associated track elements.
- the measuring coils 24a, 24b are arranged next to one another in the x-direction.
- the correction coils are arranged side by side in the x-direction. In this case, the correction coils in the y-direction or in the direction of the measuring path M are spaced apart from the measuring coils 24a, 24b.
- FIG. 6 shows a cross section through a displacement sensor 10 in the form of a linear position sensor with an induction element 14 and a coil structure from FIG. 6. Analogously to FIG. 4, it is shown that the removal of the coils 24a to 24d due to a tilting of one nominal distance z n0 m may differ.
- FIG. 7 further shows that the measuring track elements 20a, 20b and the
- Correction track elements 20c, 20d are arranged on the sensor element 12 facing side of the circuit board 22.
- Rotation angle sensor 10b may have a structure according to FIGS. 3, 5 or 6.
- the measuring coils 24a, 24b and the correction coils 24c, 24d may each be connected to a resonant circuit, which is excited by the controller 18 to oscillate.
- the frequency of the respective resonant circuit depends on the inductance of the respective coil 24a to 24d, which in turn depends on the
- the controller can run at runtime the frequencies of the two
- Fig. 8 shows a diagram with the relationship between the frequency of a coil 24a to 24d and their distance from the induction element 14. From this context, which are interpolated for example in the controller 18 or as a table may be stored, the controller 18 may calculate a distance from a frequency (and vice versa).
- the distances are determined for a, for example, of the distances z c.
- this can be done via a linear interpolation.
- the controller can now correct the measured frequency of the measuring coils.
- Fig. 9 is a diagram showing the measuring signals of the measuring coils 24a, 24b as they are generated without tilting (i.e., when calibrated) by the measuring coils 24a, 24b.
- f o is a minimum frequency that is generated when no overlap occurs (for example, when the inductor 14 is removed).
- the minimum frequency f o depends on the coil geometry and resonant capacitance (and not on the distance and inductor 14) and can be determined by calibration.
- fmin (znomi, 2) is the frequency at minimum coverage (at the
- Nominal distance z n0 mi, 2) and f m ax (z n omi, 2) is the frequency at maximum
- Correction coil 24b are defined by design and specimen scatter and can be determined by calibration. By methods of the entire measurement range during calibration, the control may the minimum frequency fmin (znomi, 2) and maximum frequency f and m ax (z n omi, 2) of each measuring coil 24a, 24b determine.
- the controller 18 is now the (corrected) frequency of the respective measuring coil 24a, 24b at maximum coverage f m ax (e.g. a, b) in this Determine the distance. This can be done via the relationship shown in FIG. 8.
- the controller 18 can then determine the position y on the measuring path.
- the measuring track elements 20a, 20b may be shaped such that a sinusoidal measuring signal results via the measuring path M. Furthermore, the measuring track elements 20a, 20b can do so
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102016204016.2A DE102016204016A1 (de) | 2016-03-11 | 2016-03-11 | Kipptoleranter Wegsensor |
PCT/EP2017/050988 WO2017153074A1 (de) | 2016-03-11 | 2017-01-18 | Kipptoleranter wegsensor |
Publications (1)
Publication Number | Publication Date |
---|---|
EP3427010A1 true EP3427010A1 (de) | 2019-01-16 |
Family
ID=57821993
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP17700556.8A Withdrawn EP3427010A1 (de) | 2016-03-11 | 2017-01-18 | Kipptoleranter wegsensor |
Country Status (6)
Country | Link |
---|---|
US (1) | US11118940B2 (de) |
EP (1) | EP3427010A1 (de) |
JP (1) | JP6714716B2 (de) |
CN (1) | CN108779991B (de) |
DE (1) | DE102016204016A1 (de) |
WO (1) | WO2017153074A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3803277B1 (de) | 2018-05-24 | 2022-09-28 | Bosch Car Multimedia Portugal, S.A. | Linearer positionssensor |
DE102019213387A1 (de) * | 2019-09-04 | 2021-03-04 | Zf Friedrichshafen Ag | Induktive Verschiebungs- und/oder Positionserfassung |
DE102020119967A1 (de) | 2020-07-29 | 2022-02-03 | Schaeffler Technologies AG & Co. KG | Sensoranordnung zur Linearwegerfassung |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0158110U (de) * | 1987-10-07 | 1989-04-11 | ||
DE59201199D1 (de) * | 1992-02-14 | 1995-02-23 | Heidenhain Gmbh Dr Johannes | Wegmesseinrichtung. |
JP4643782B2 (ja) * | 1999-12-10 | 2011-03-02 | 株式会社キーエンス | 渦電流式変位計とそれを用いた距離測定方法 |
DE10025661A1 (de) * | 2000-05-24 | 2001-12-06 | Balluff Gebhard Feinmech | Wegmeßsystem |
US6720760B2 (en) * | 2001-11-14 | 2004-04-13 | Mitutoyo Corporation | Induced current position transducers having improved scale loop structures |
DE102004025156B3 (de) * | 2004-05-21 | 2005-07-21 | Knorr-Bremse Systeme für Nutzfahrzeuge GmbH | Verfahren zur Fehlerkorrektur eines Wegsensorsignals |
DE102004033083A1 (de) | 2004-07-08 | 2006-01-26 | Robert Bosch Gmbh | Wirbelstromsensor zur kontinuierlichen Weg- oder Winkelmessung |
JP2006194720A (ja) * | 2005-01-13 | 2006-07-27 | Mitsutoyo Corp | セパレート型エンコーダ、及び、その取付方法 |
GB0501803D0 (en) * | 2005-01-28 | 2005-03-09 | Howard Mark A | Position encoder |
US7449878B2 (en) | 2005-06-27 | 2008-11-11 | Ksr Technologies Co. | Linear and rotational inductive position sensor |
DE102006026543B4 (de) * | 2006-06-07 | 2010-02-04 | Vogt Electronic Components Gmbh | Lagegeber und zugehöriges Verfahren zum Erfassen einer Position eines Läufers einer Maschine |
EP2038616B1 (de) * | 2006-06-07 | 2013-01-02 | Vogt Electronic Components GmbH | Positionskodierer und verfahren zum detektieren der position eines beweglichen teils einer maschine |
EP1884749B1 (de) * | 2006-07-31 | 2012-05-02 | ZF Friedrichshafen AG | Induktive Positions- oder Winkelmesseinrichtung |
US7719263B2 (en) * | 2006-11-22 | 2010-05-18 | Zf Friedrichshafen Ag | Inductive position measuring device or goniometer |
US8710827B2 (en) * | 2008-03-19 | 2014-04-29 | Sagentia Limited | Processing circuitry for use with a position sensor |
DE102010027017A1 (de) * | 2010-07-08 | 2012-01-12 | Siemens Aktiengesellschaft | Induktive Sensoreinrichtung sowie induktiver Näherungssensor mit einer induktiven Sensoreinrichtung |
JP2013246051A (ja) * | 2012-05-25 | 2013-12-09 | Panasonic Corp | 変位検出装置 |
JP2015001375A (ja) * | 2013-06-12 | 2015-01-05 | DBLab合同会社 | 回転角度検出装置 |
US10775199B2 (en) * | 2016-08-24 | 2020-09-15 | Mitutoyo Corporation | Winding and scale configuration for inductive position encoder |
-
2016
- 2016-03-11 DE DE102016204016.2A patent/DE102016204016A1/de active Pending
-
2017
- 2017-01-18 US US16/084,178 patent/US11118940B2/en active Active
- 2017-01-18 WO PCT/EP2017/050988 patent/WO2017153074A1/de active Application Filing
- 2017-01-18 JP JP2018547881A patent/JP6714716B2/ja active Active
- 2017-01-18 EP EP17700556.8A patent/EP3427010A1/de not_active Withdrawn
- 2017-01-18 CN CN201780016002.1A patent/CN108779991B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
WO2017153074A1 (de) | 2017-09-14 |
CN108779991B (zh) | 2021-05-28 |
JP2019507884A (ja) | 2019-03-22 |
US20200292355A1 (en) | 2020-09-17 |
JP6714716B2 (ja) | 2020-06-24 |
CN108779991A (zh) | 2018-11-09 |
DE102016204016A1 (de) | 2017-09-14 |
US11118940B2 (en) | 2021-09-14 |
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