EP3333429B1 - Vacuum device - Google Patents

Vacuum device Download PDF

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Publication number
EP3333429B1
EP3333429B1 EP16203143.9A EP16203143A EP3333429B1 EP 3333429 B1 EP3333429 B1 EP 3333429B1 EP 16203143 A EP16203143 A EP 16203143A EP 3333429 B1 EP3333429 B1 EP 3333429B1
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EP
European Patent Office
Prior art keywords
vacuum device
vacuum
functional unit
accordance
region
Prior art date
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Application number
EP16203143.9A
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German (de)
French (fr)
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EP3333429A1 (en
Inventor
Herbert Stammler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP16203143.9A priority Critical patent/EP3333429B1/en
Publication of EP3333429A1 publication Critical patent/EP3333429A1/en
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Publication of EP3333429B1 publication Critical patent/EP3333429B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Definitions

  • the present invention relates to a vacuum device, in particular a vacuum pump, with an electrically operable functional unit which is at least partially arranged in a vacuum area of the vacuum device and is connected to at least one electrical conductor which emerges from the functional unit at an outlet area and into a pressure area which is sealed off from the vacuum area leads.
  • a functional unit such as an electric motor of a rotor of a vacuum pump, which is at least partially arranged in a vacuum area, has to be connected electrically or in terms of information technology to a unit arranged in a pressure area, e.g. a control unit.
  • a pressure area e.g. a control unit.
  • plug connectors with cast contacts for example so-called MIL plugs
  • a seal for example an O-ring
  • a circuit board of a control device is used to press a seal against a housing element in order to create a seal.
  • a vacuum device is in JP 2002 180988 A disclosed.
  • a vacuum device is shown which, among other things, has a sealing body enclosing a functional unit.
  • a vacuum pump with a gas-tight electrical feedthrough with a seal combining a potting compound body and a sealing ring is in DE 10 2006 036493 A1 disclosed.
  • one or more conductors from the functional unit to the unit located outside or in the pressure area lead at least partially through a vacuum area.
  • this vacuum area there is generally a low pressure of a process gas, which is present depending on the application, during operation of the vacuum device.
  • low pressures can favor glow discharges on the conductor or conductors or between the conductors.
  • glow discharges can also damage components of the vacuum device and even destroy them.
  • Low pressures can present a problem, particularly in the event that the functional unit is an electric motor and power has to be transmitted via the conductors, since relatively high voltages are generally used here, which in turn increase the risk of glow discharges. All of this applies in principle even when the conductors have cable insulation, because cable insulation regularly shows imperfections or develops such imperfections over a period of time.
  • the invention prevents the conductor from passing through the vacuum region and being exposed to the risk of corona discharges. This increases the operational reliability of the vacuum device and thus its service life.
  • the exit area is advantageously the area which, according to the findings of the inventors, is particularly endangered or dangerous if it is in the vacuum area.
  • the invention can therefore be viewed as based on the idea of shifting the seal between the vacuum area and the pressure area "inwards", so to speak, i.e. so close to the functional unit that there is space for laying the conductor running outside the functional unit or for leading out the conductor cannot be evacuated by the vacuum device, are therefore in the pressure range and therefore do not pose a hazard.
  • the invention also offers a structurally particularly simple and therefore cost-effective solution.
  • the conductor does not have to be cast separately from the functional unit at an opposite end of the conductor, as is provided in solutions known from the prior art.
  • the outside of the functional unit is formed by a sealing body, at least in the outlet area, and the electrical conductor is led out of the sealing body.
  • the sealing body can preferably be at least essentially rigid.
  • the sealing body is formed by a casting compound.
  • the potting compound can in particular include or be plastic and/or glass. Direct through-contacting of the functional unit is particularly advantageous here.
  • the functional unit can be at least essentially completely surrounded by the potting compound.
  • the electrical conductor is led out of the sealing body. Safety against corona discharge can thus be further improved.
  • the potting compound in particular plastic and/or glass, is cast onto the functional unit, with the functional unit preferably being at least essentially completely surrounded by the potting compound.
  • the seal is formed by the interaction of the sealing body with a component of the vacuum device, in particular a housing element or section.
  • the sealing body interacts either indirectly with the component via at least one additional seal, for example an O-ring or a surface seal.
  • one O-ring in particular arranged eccentrically in relation to a rotor axis, or two O-rings, in particular arranged concentrically in relation to a rotor axis, can be provided for this purpose.
  • One O-ring can in particular lead to a particularly good seal, while two O-rings can promote simple production.
  • other numbers and arrangements of additional seals are also conceivable.
  • the sealing surface can be formed by machining a rigid or solidified casting compound.
  • a sealing surface, also machined, for example, can also be formed on a counter-element for the sealing body, in particular a component of the vacuum device, in particular a housing element of the same.
  • the seal between the vacuum area and the pressure area is located inside a housing of the vacuum device.
  • the seal between the vacuum area and the pressure area can be produced by a relative movement between the functional unit and the vacuum device that takes place during assembly.
  • the functional unit can be braced against a counter-element, with a seal, for example an O-ring, being compressed between the functional unit and counter-element for sealing.
  • the relative movement can run essentially parallel to a rotor axis of the vacuum pump.
  • the fact that many components in a vacuum pump are already plugged together axially can be used to advantage, so that assembly is kept simple.
  • the electrical conductor is routed to a control circuit board for the functional unit located in the printing area.
  • the control circuit board can be attached to the outside of the vacuum device, for example.
  • the control circuit board can, for example, include a controller for an electric motor of a vacuum pump.
  • the circuit board does not have to fulfill a sealing function here, since the seal between the vacuum area and the pressure area takes place closer to the functional unit, in relation to the extension of the conductor from the functional unit to the circuit board, i.e. in an area "upstream" of the circuit board, so to speak.
  • the exit area is located inside a housing of the vacuum device, with the electrical conductor outside the exit area running through the vacuum device in an exposed manner at least in certain areas.
  • exposed does not mean that there is no insulation, but only that the conductor is outside of the sealing body, i.e. in particular is not surrounded by casting compound; like a freely laid cable.
  • an interface between the electrical conductor and another electrical component e.g. another conductor, such as a cable, or e.g. a circuit board, is provided in or at the outlet area.
  • another electrical component e.g. another conductor, such as a cable, or e.g. a circuit board.
  • the exit area can be processed more easily, in particular to form a sealing surface, if the conductor does not hang out of the exit area as a cable and could thus impede a processing tool.
  • a connection between the conductor and the further component at the interface can be produced by a relative movement between the functional unit and the vacuum device that takes place during assembly.
  • the additional component can thereby be mounted independently of the functional unit.
  • the interface can include a plug connection, for example.
  • An interface part assigned to the further component can be fastened, in particular to further simplify assembly, for example to an opposite for the functional unit, in particular a housing part.
  • the functional unit can, for example, comprise or be a stator of an electric motor of the vacuum device.
  • the functional unit can also include or be a magnetic bearing stator, for example.
  • the prior art vacuum pump 10 shown comprises a pump inlet 14 surrounded by an inlet flange 12 and a plurality of pump stages for conveying the gas present at the pump inlet 14 to an in 1 not shown pump outlet.
  • the vacuum pump 10 comprises a stator with a static housing 16 and a rotor which is arranged in the housing 16 and has a rotor shaft 20 which is mounted such that it can rotate about a rotor axis or axis of rotation 18.
  • the vacuum pump 10 is embodied as a turbomolecular pump and comprises a plurality of turbomolecular pump stages connected in series with one another for pumping purposes, with a plurality of turbomolecular rotor disks 22 connected to the rotor shaft 20 and a plurality of turbomolecular stator disks 24 arranged in the axial direction between the rotor disks 22 and fixed in the housing 16, which are secured by spacer rings 26 are held at a desired axial distance from one another.
  • the rotor disks 22 and stator disks 24 provide an axial pumping action directed in the direction of the arrow 30 .
  • the vacuum pump 10 also comprises three Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes.
  • the part of the Holweck pump stages on the rotor side comprises a rotor hub 32 connected to the rotor shaft 20 and two Holweck rotor sleeves 34, 36 in the shape of a cylinder jacket, fastened to the rotor hub 32 and carried by it, which are oriented coaxially to the rotor axis 18 and are nested in one another in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 38, 40 are provided, which are also oriented coaxially to the axis of rotation 18 and are nested in one another in the radial direction.
  • the pumping-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces of a Holweck rotor sleeve, which face one another and form a narrow radial Holweck gap 34, 36 and a Holweck stator sleeve 38, 40 are formed.
  • one of the active pump surfaces is smooth, in the present case that of the Holweck rotor sleeve 34 or 36, and the opposite active pump surface of the Holweck stator sleeve 38, 40 has a structure with grooves running helically around the axis of rotation 18 in the axial direction in which the gas is driven forward by the rotation of the rotor and thereby pumped.
  • the rotatable mounting of the rotor shaft 20 is brought about by a roller bearing 42 in the area of the pump outlet and a permanent magnet bearing 44 in the area of the pump inlet 14 .
  • the permanent magnet bearing 44 comprises a rotor-side bearing half 46 and a stator-side bearing half 48, each of which comprises a ring stack of a plurality of permanent-magnetic rings 50, 52 stacked on top of one another in the axial direction, with the magnet rings 50, 52 lying opposite one another, forming a radial bearing gap 54.
  • An emergency or safety bearing 56 is provided within the permanent magnet bearing 44, which is designed as an unlubricated roller bearing and runs idle without contact during normal operation of the vacuum pump and only engages in the event of an excessive radial deflection of the rotor relative to the stator in order to create a radial stop for to form the rotor that prevents collision of the rotor-side structures with the stator-side structures.
  • a conical spray nut 58 is provided on the rotor shaft 20 with an outer diameter that increases towards the roller bearing 42, which is in sliding contact with a scraper of a plurality of absorbent discs 60 soaked with an operating medium, such as a lubricant stands. In operation it will Operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 58 and, as a result of the centrifugal force, is conveyed along the spray nut 58 in the direction of the increasing outer diameter of the spray nut 58 to the roller bearing 42, where it fulfills a lubricating function, for example.
  • the vacuum pump 10 includes a drive motor 62 for driving the rotor in rotation, the runner or rotor of which is formed by the rotor shaft 20 .
  • a control unit 64 controls the drive motor 62 .
  • the turbomolecular pumping stages provide a pumping action in the direction of arrow 30 in the scoop area 28 .
  • the drive motor 62 of the vacuum pump 10 of 2 has a motor stator 66 or stator, which forms a functional unit within the meaning of the invention.
  • the motor stator 66 is connected to the control unit 64 via a conductor 68 .
  • the conductor 68 originates within the motor stator 66 or the functional unit and emerges from this at an exit area and runs from there through a passage 70, which is formed in a housing part 72 of the vacuum pump, to a circuit board 74 connected to the control unit 64.
  • the conductor 68 is routed in the passage 70 in a substantially exposed manner.
  • the duct 70 is sealed from a vacuum area 76 by a seal, which in this embodiment comprises two concentrically arranged O-rings 78 .
  • the corridor 70 is not evacuated when the vacuum pump 10 is in operation, ie it is part of a pressure region 80 in which essentially atmospheric pressure prevails in this embodiment.
  • the exit area of the conductor 68 is therefore located in the pressure area 80 and the conductor 68 is in the vacuum area 76 not exposed, so that glow discharges on the conductor 68, which can occur in particular at low pressure, are effectively avoided.
  • the motor stator 66 comprises a multiplicity of windings, not shown in detail, which are led out of the motor stator 68 via the conductor 68 .
  • the motor stator 66 is essentially completely cast, so that the windings or the conductor 68 are separated from the vacuum region 76 by a cast body.
  • the potting body forms a sealing body here.
  • Plastic is provided as the casting material.
  • the cast body forms a seal between the vacuum area 76 and the pressure area 80, namely by compressing a seal, here the O-rings 78, between the cast body and the housing part 72.
  • the seal can be produced in a simple manner in that the motor stator 66 at the assembly of the vacuum pump 10 is brought into its predetermined position, ie is inserted axially into the housing part 72, the O-rings 78 having to be positioned accordingly beforehand.
  • an exit area of a conductor 68 from a motor stator 66 is located in the vacuum area 76, because the seal between the vacuum area 76 and the pressure area 80 is here far away from the motor stator 66, namely by an O-ring 78 compressed by means of a circuit board 74.
  • a conductor 68 exits a motor stator 66 at an exit area located in a pressure area 80 .
  • the motor stator 66 is surrounded by a potting substantially, which in contrast to the embodiment of 2 extends further down and forms an eccentric extension 67 on the motor stator 66 here.
  • a seal with an O-ring 78 arranged eccentrically with respect to the rotor axis 18 is provided between the pressure area 80 and the vacuum area 76 .
  • the O-ring 78 is compressed between the cast body or the motor stator 66 on the one hand and the housing part 72 on the other hand for sealing purposes.
  • the housing part 72 according to FIG 2 particularly easy to manufacture, since a sealing surface for the O-rings 78 runs concentrically with the rotor axis 18 like this.
  • the sealing surface can be manufactured, for example by turning, with the same clamping as the other concentric features of the housing part.
  • a counterforce is uniformly transmitted to the motor stator 66 over its circumference via the compressed O-rings 78 , so that there is no risk of the motor stator 66 being misaligned with respect to the rotor axis 18 .
  • the embodiment of 3 offers a particularly good seal, since one eccentric O-ring 78 has a relatively short circumference and thus a relatively small potentially diffusion-active surface.
  • connection between the conductor 68 and the circuit board 74 is also made differently.
  • the conductor 68 is soldered directly to the circuit board.
  • the conductor is connected to the circuit board 74 via a plug connection 82 .
  • the conductor 68 for example, can be designed to be somewhat longer than is shown here in order to simplify assembly.
  • the seal between the vacuum area 76 and the pressure area 80 is inside a housing of the vacuum pump and the seal is created during assembly from the inside, specifically here by positioning the motor stator 66 in the housing.
  • Figure 4A shows a den Figures 1 to 3 a cross section of a vacuum pump 10 that essentially corresponds to the sectional plane.
  • a rotor axis 18 is indicated—without having a true-to-scale distance from the rest of the illustration—to illustrate the approximate positioning and orientation of the present embodiment.
  • a conductor 68 originates in a motor stator 66 and exits the motor stator 66 at an exit area, the exit area being in a pressure area 80 .
  • the pressure area 80 is sealed off from a vacuum area 76 by an O-ring 78 .
  • the O-ring 78 is arranged in a groove 83 of the motor stator 66 .
  • the O-ring 78 can be clamped on an inner wall of the groove 83, for example.
  • other configurations are also conceivable, for example two O-rings that are not completely concentric. In the following, however, an eccentric O-ring 78 is only assumed in each case as an example.
  • the conductor 68 emerges via a bushing 84 from the motor stator 66 or the functional unit.
  • the conductor 68 can advantageously be routed from the functional unit 66 to the socket 84 in at least a partial area while maintaining minimum distances from any other conductors that may be present without their own cable insulation, in order to have the best possible in this area
  • the connection of the conductor 68 to the socket 84 can - like the connection of the conductor 68 with the circuit board 74 according to the embodiment of 2 and 3 - Take place, for example, by soldering, welding, clamping, clamping cutting or plugging.
  • the socket 84 forms part of an interface to a further component, here a further conductor 86.
  • the conductor 86 has a plug 88 for connection to the conductor 68 or to the socket 84.
  • Conductor 86 is corresponding to conductor 68 in 2 or 3 led to a circuit board 74 of a control unit 64, not shown here.
  • a connection between the conductor 68 and the further conductor 86 at the interface, i.e. here between socket 84 and plug 88 can be produced by a relative movement between the functional unit 66 and the vacuum device 10 during assembly.
  • the socket 84 is arranged in the motor stator 66 in such a way that it or its contacts do not protrude or only insignificantly protrude from an imaginary enveloping body of the motor stator 66 . This simplifies the manufacture of the groove 83 or a sealing surface for the seal, since no protruding contacts or even cables hanging out restrict machining.
  • the socket 84 for example, alternatively provided connector or with regard to the embodiments of 2 , 3 and 6 the conductor 68 can optionally also against mechanical impact, especially during the cutting Machining of sealing surfaces or grooves, are protected, in the case of the bushing 84, for example, by a cap.
  • Both the motor stator 66 and the housing part 72 have respective sealing surfaces 90 on the surfaces facing the O-ring 78, which have a high surface quality for the purpose of a good sealing effect, which can be achieved, for example, by means of machining.
  • FIG. 4B 12 is the bushing 84 and motor stator 66, respectively, in plan view with reference to FIG Figure 4A from below, shown.
  • the socket 84 has three contacts which are jointly surrounded by the groove 83 and an O-ring 78 arranged therein.
  • the embodiment shown also has an interface between a conductor 68 emerging from the motor stator 66 and a further conductor 86, which is designed as a plug-socket connection 88, 84.
  • the O-ring 78 is in Figure 5A placed on a non-circular circumferential sealing surface 90 of a housing part 72 which, in this exemplary embodiment, is approximately oval or rounded rectangular. During assembly, the O-ring is held in position in the non-circular, in this case approximately oval or rectangular, rounded recess in the housing part 72 essentially by its restoring force to the original manufacturing shape, in this case a circular shape.
  • socket 84 is four-contact in this embodiment.
  • FIG. 6 further embodiment has in contrast to the embodiments of 4 and 5 a continuous conductor 68 at least in the exit area.
  • the conductor 68 has five cores, as shown in cross section in FIG Figure 6B is visible.
  • the O-ring 78 is essentially the same here Figure 5A arranged, but is centered on a projection of the motor stator 66 and at the assembly is advantageously held in position essentially by its weight.
  • the conductor 68 is surrounded in the exit area by a sealing body, namely by a casting compound or a casting body, which is cast onto the motor stator 66 or the functional unit and encloses it at least partially, in particular essentially completely.
  • a functional unit according to the invention can be of different types, for example comprising a magnetic bearing stator or the like.

Description

Die vorliegende Erfindung betrifft ein Vakuumgerät, insbesondere Vakuumpumpe, mit einer elektrisch betreibbaren Funktionseinheit, die zumindest teilweise in einem Vakuumbereich des Vakuumgerätes angeordnet und mit zumindest einem elektrischen Leiter verbunden ist, der an einem Austrittsbereich aus der Funktionseinheit austritt und in einen gegenüber dem Vakuumbereich abgedichteten Druckbereich führt.The present invention relates to a vacuum device, in particular a vacuum pump, with an electrically operable functional unit which is at least partially arranged in a vacuum area of the vacuum device and is connected to at least one electrical conductor which emerges from the functional unit at an outlet area and into a pressure area which is sealed off from the vacuum area leads.

Bei Vakuumgeräten ist es regelmäßig der Fall, dass eine zumindest teilweise in einem Vakuumbereich angeordnete Funktionseinheit, wie z.B. ein Elektromotor eines Rotors einer Vakuumpumpe, elektrisch oder informationstechnisch mit einer in einem Druckbereich angeordneten Einheit, z.B. einer Steuerungseinheit, zu verbinden ist. Dabei muss jedoch eine Abdichtung zwischen Vakuumbereich und Druckbereich gewährleistet werden.In the case of vacuum devices, it is regularly the case that a functional unit, such as an electric motor of a rotor of a vacuum pump, which is at least partially arranged in a vacuum area, has to be connected electrically or in terms of information technology to a unit arranged in a pressure area, e.g. a control unit. However, a seal between the vacuum area and the pressure area must be ensured.

Im Stand der Technik werden zur Abdichtung z.B. Steckverbinder mit vergossenen Kontakten, beispielsweise sogenannte MIL-Stecker, verwendet, wobei die Steckverbinder eine Dichtung, z.B. einen O-Ring, gegen ein Gehäuseelement des Vakuumgerätes pressen. Bei einer alternativen aus dem Stand der Technik bekannten Lösung wird eine Platine eines Steuergeräts dazu genutzt, eine Dichtung gegen ein Gehäuseelement zu verpressen, um eine Abdichtung zu realisieren. Eine derartige Lösung ist beispielsweise in der EP 1 843 043 A2 offenbart.In the prior art, plug connectors with cast contacts, for example so-called MIL plugs, are used for sealing, with the plug connectors pressing a seal, for example an O-ring, against a housing element of the vacuum device. In an alternative solution known from the prior art, a circuit board of a control device is used to press a seal against a housing element in order to create a seal. Such a solution is for example in EP 1 843 043 A2 disclosed.

Ein Vakuumgerät nach dem Oberbegriff des Anspruchs 1 ist in der JP 2002 180988 A offenbart. In der EP 2 060 793 A2 ist ein Vakuumgerät gezeigt, welches unter anderem einen eine Funktionseinheit umschließenden Dichtkörper aufweist.A vacuum device according to the preamble of claim 1 is in JP 2002 180988 A disclosed. In the EP 2 060 793 A2 a vacuum device is shown which, among other things, has a sealing body enclosing a functional unit.

Eine Vakuumpumpe mit einer gasdichten elektrischen Durchführung mit einer Abdichtung die einen Vergussmasse-Körper und einen Dichtring kombiniert, ist in DE 10 2006 036493 A1 offenbart.A vacuum pump with a gas-tight electrical feedthrough with a seal combining a potting compound body and a sealing ring is in DE 10 2006 036493 A1 disclosed.

Den Konstruktionen des Standes der Technik ist gemein, dass ein oder mehrere Leiter von der Funktionseinheit zu der außen oder im Druckbereich befindlichen Einheit zumindest teilweise durch einen Vakuumbereich führen. In diesem Vakuumbereich herrscht beim Betrieb des Vakuumgeräts allgemein ein niedriger Druck eines je nach Anwendungsfall vorhandenen Prozessgases. Niedrige Drücke können allerdings Glimmentladungen an dem oder den Leitern bzw. zwischen den Leitern begünstigen. Glimmentladungen können neben einfachen Funktionsstörungen auch zur Beschädigung von Komponenten des Vakuumgeräts bis hin zu ihrer Zerstörung führen.It is common to the constructions of the prior art that one or more conductors from the functional unit to the unit located outside or in the pressure area lead at least partially through a vacuum area. In this vacuum area, there is generally a low pressure of a process gas, which is present depending on the application, during operation of the vacuum device. However, low pressures can favor glow discharges on the conductor or conductors or between the conductors. In addition to simple malfunctions, glow discharges can also damage components of the vacuum device and even destroy them.

Niedrige Drücke können sich insbesondere für den Fall, dass die Funktionseinheit ein Elektromotor ist und über die Leiter Leistung übertragen werden muss, als problematisch darstellen, da hierbei im Allgemeinen relativ hohe Spannungen Anwendung finden, welche wiederum eine Gefahr von Glimmentladungen erhöhen. Dies alles gilt grundsätzlich auch dann, wenn die Leiter eine Kabelisolierung aufweisen, denn eine Kabelisolierung weist regelmäßig Unvollkommenheiten auf oder entwickelt solche nach einer gewissen Zeit.Low pressures can present a problem, particularly in the event that the functional unit is an electric motor and power has to be transmitted via the conductors, since relatively high voltages are generally used here, which in turn increase the risk of glow discharges. All of this applies in principle even when the conductors have cable insulation, because cable insulation regularly shows imperfections or develops such imperfections over a period of time.

Es ist eine Aufgabe der Erfindung, die Lebensdauer von Vakuumgeräten mit konstruktiv und herstellungstechnisch möglichst einfachen Mitteln zu verlängern, wobei insbesondere die Gefahr von Glimmentladungen in Vakuumgeräten verringert werden soll.It is an object of the invention to extend the service life of vacuum devices using means that are as simple as possible in terms of design and production technology, with the aim in particular of reducing the risk of corona discharges in vacuum devices.

Diese Aufgabe wird durch ein Vakuumgerät mit den Merkmalen des Anspruchs 1 gelöst, und insbesondere dadurch, dass der Austrittsbereich innerhalb des Druckbereiches gelegen ist.This object is achieved by a vacuum device having the features of claim 1, and in particular in that the outlet area is located within the pressure area.

Durch die Erfindung wird verhindert, dass der Leiter durch den Vakuumbereich hindurch verläuft und einer Gefahr von Glimmentladungen ausgesetzt ist. Hierdurch werden die Betriebssicherheit des Vakuumgeräts und damit seine Lebensdauer erhöht.The invention prevents the conductor from passing through the vacuum region and being exposed to the risk of corona discharges. This increases the operational reliability of the vacuum device and thus its service life.

Als Austrittsbereich ist dabei vorteilhafterweise der Bereich vorgesehen, der nach den Erkenntnissen der Erfinder besonders gefährdet bzw. gefährlich ist, wenn er im Vakuumbereich liegt. Die Erfindung kann also auf dem Gedanken beruhend angesehen werden, die Abdichtung zwischen Vakuumbereich und Druckbereich gewissermaßen "nach innen" zu verlagern, d.h. so nahe an die Funktionseinheit heran, dass Räume zum Verlegen des außerhalb der Funktionseinheit verlaufenden Leiters bzw. zum Herausführen des Leiters aus dem Vakuumgerät nicht evakuiert werden, folglich im Druckbereich liegen und somit keine Gefahr darstellen.The exit area is advantageously the area which, according to the findings of the inventors, is particularly endangered or dangerous if it is in the vacuum area. The invention can therefore be viewed as based on the idea of shifting the seal between the vacuum area and the pressure area "inwards", so to speak, i.e. so close to the functional unit that there is space for laying the conductor running outside the functional unit or for leading out the conductor cannot be evacuated by the vacuum device, are therefore in the pressure range and therefore do not pose a hazard.

Neben der verbesserten Betriebssicherheit bietet die Erfindung aber auch eine konstruktiv besonders einfache und damit kostengünstige Lösung. Beispielsweise muss der Leiter nicht separat von der Funktionseinheit an einem gegenüberliegenden Leiterende vergossen werden, wie es bei aus dem Stand der Technik bekannten Lösungen vorgesehen ist.In addition to the improved operational reliability, the invention also offers a structurally particularly simple and therefore cost-effective solution. For example, the conductor does not have to be cast separately from the functional unit at an opposite end of the conductor, as is provided in solutions known from the prior art.

Erfindungsgemäß ist die Außenseite der Funktionseinheit zumindest im Austrittsbereich von einem Dichtkörper gebildet und der elektrische Leiter ist aus dem Dichtkörper herausgeführt. Dabei kann der Dichtkörper bevorzugt zumindest im Wesentlichen starr sein.According to the invention, the outside of the functional unit is formed by a sealing body, at least in the outlet area, and the electrical conductor is led out of the sealing body. In this case, the sealing body can preferably be at least essentially rigid.

Erfindungsgemäß ist der Dichtkörper von einer Vergussmasse gebildet. Dies erlaubt eine besonders gute Abschirmung des Leiters von dem Vakuumbereich und somit eine besonders hohe Sicherheit gegen Glimmentladungen. Die Vergussmasse kann insbesondere Kunststoff und/oder Glas umfassen oder sein. Besonders vorteilhaft ist hierbei eine direkte Durchkontaktierung der Funktionseinheit.According to the invention, the sealing body is formed by a casting compound. This allows a particularly good shielding of the conductor from the vacuum area and thus a particularly high level of security against glow discharges. The potting compound can in particular include or be plastic and/or glass. Direct through-contacting of the functional unit is particularly advantageous here.

Insbesondere stehen außer der Vergussmasse keine anderen Teile oder Bereiche und insbesondere keine elektrisch leitenden Teile bzw. Bereiche der Funktionseinheit im Kontakt mit dem Vakuumbereich. Die Wahrscheinlichkeit einer Glimmentladung wird somit wirksam verringert.In particular, apart from the casting compound, no other parts or areas and in particular no electrically conductive parts or areas of the functional unit are in contact with the vacuum area. The probability of a glow discharge is thus effectively reduced.

Beispielsweise kann die Funktionseinheit zumindest im Wesentlichen vollständig von der Vergussmasse umgeben sein. Dabei ist der elektrische Leiter aus dem Dichtkörper herausgeführt So kann die Sicherheit gegen Glimmentladung weiter verbessert werden.For example, the functional unit can be at least essentially completely surrounded by the potting compound. In this case, the electrical conductor is led out of the sealing body. Safety against corona discharge can thus be further improved.

Erfindungsgemäß ist die, insbesondere Kunststoff und/oder Glas umfassende, Vergussmasse an die Funktionseinheit angegossen, wobei bevorzugt die Funktionseinheit zumindest im Wesentlichen vollständig von der Vergussmasse umgeben Erfindungsgemäß ist eine Abdichtung zwischen Vakuumbereich und Druckbereich von dem Dichtkörper gebildet.According to the invention, the potting compound, in particular plastic and/or glass, is cast onto the functional unit, with the functional unit preferably being at least essentially completely surrounded by the potting compound.

Erfindungsgemäß ist die Abdichtung durch Zusammenwirken des Dichtkörpers mit einer Komponente des Vakuumgerätes, insbesondere einem Gehäuseelement oder -abschnitt, gebildet. Dabei wirkt der Dichtkörper entweder mit der Komponente mittelbar über zumindest eine zusätzliche Dichtung, z.B. einen O-Ring oder eine Flächendichtung, zusammen. Beispielsweise kann hierfür ein, insbesondere in Bezug auf eine Rotorachse exzentrisch angeordneter, O-Ring oder es können zwei, insbesondere in Bezug auf eine Rotorachse konzentrisch angeordnete, O-Ringe vorgesehen sein. Dabei kann ein O-Ring insbesondere zu einer besonders guten Abdichtung führen, während zwei O-Ringe eine einfache Herstellung begünstigen können. Es sind aber auch andere Zahlen und Anordnungen von zusätzlichen Dichtungen denkbar.According to the invention, the seal is formed by the interaction of the sealing body with a component of the vacuum device, in particular a housing element or section. In this case, the sealing body interacts either indirectly with the component via at least one additional seal, for example an O-ring or a surface seal. For example, one O-ring, in particular arranged eccentrically in relation to a rotor axis, or two O-rings, in particular arranged concentrically in relation to a rotor axis, can be provided for this purpose. One O-ring can in particular lead to a particularly good seal, while two O-rings can promote simple production. However, other numbers and arrangements of additional seals are also conceivable.

Es kann ferner vorgesehen sein, dass der Dichtkörper mit zumindest einer Dichtfläche, insbesondere von hoher Oberflächengüte, für eine zusätzliche Dichtung versehen ist, wobei bevorzugt die Dichtfläche durch Bearbeiten der den Dichtkörper bildenden Vergussmasse gebildet ist. Beispielsweise kann die Dichtfläche durch spanende Bearbeitung einer starren bzw. erstarrten Vergussmasse ausgebildet werden. Eine Dichtfläche, ebenfalls beispielsweise spanend bearbeitet, kann auch an einem Gegenelement für den Dichtkörper, insbesondere einer Komponente des Vakuumgeräts, insbesondere einem Gehäuseelement desselben, ausgebildet sein.Provision can furthermore be made for the sealing body to be provided with at least one sealing surface, in particular with a high surface quality, for an additional seal, the sealing surface preferably being formed by processing the casting compound forming the sealing body. For example, the sealing surface can be formed by machining a rigid or solidified casting compound. A sealing surface, also machined, for example, can also be formed on a counter-element for the sealing body, in particular a component of the vacuum device, in particular a housing element of the same.

Bei einer Weiterbildung der Erfindung ist die Abdichtung zwischen Vakuumbereich und Druckbereich im Inneren eines Gehäuses des Vakuumgerätes gelegen.In a development of the invention, the seal between the vacuum area and the pressure area is located inside a housing of the vacuum device.

Gemäß einer Ausführungsform ist die Abdichtung zwischen Vakuumbereich und Druckbereich durch eine bei der Montage erfolgende Relativbewegung zwischen Funktionseinheit und Vakuumgerät herstellbar. Beispielsweise kann die Funktionseinheit gegen ein Gegenelement verspannt werden, wobei zwischen Funktionseinheit und Gegenelement eine Dichtung, beispielsweise ein O-Ring, zur Abdichtung komprimiert wird. Beispielsweise für den Fall, dass das Vakuumgerät eine Vakuumpumpe ist oder umfasst, kann die Relativbewegung im Wesentlichen parallel zu einer Rotorachse der Vakuumpumpe verlaufen. Dabei lässt es sich vorteilhaft ausnutzen, dass bei einer Vakuumpumpe häufig viele Komponenten ohnehin axial zusammengesteckt werden, sodass die Montage einfach gehalten wird.According to one embodiment, the seal between the vacuum area and the pressure area can be produced by a relative movement between the functional unit and the vacuum device that takes place during assembly. For example, the functional unit can be braced against a counter-element, with a seal, for example an O-ring, being compressed between the functional unit and counter-element for sealing. For example, in the event that the vacuum device is or includes a vacuum pump, the relative movement can run essentially parallel to a rotor axis of the vacuum pump. Advantageously, the fact that many components in a vacuum pump are already plugged together axially can be used to advantage, so that assembly is kept simple.

Weiterhin kann vorgesehen sein, dass der elektrische Leiter zu einer im Druckbereich befindlichen Steuerungsplatine für die Funktionseinheit geführt ist. Die Steuerungsplatine kann beispielsweise außen an dem Vakuumgerät anbracht sein. Die Steuerungsplatine kann z.B. eine Steuerung für einen Elektromotor einer Vakuumpumpe umfassen. Anders als bei manchen Lösungen im Stand der Technik braucht hier die Platine keine Abdichtfunktion zu erfüllen, da die Abdichtung zwischen Vakuumbereich und Druckbereich näher an der Funktionseinheit erfolgt, bezogen auf die Erstreckung des Leiters von der Funktionseinheit zu der Platine also gewissermaßen an einem "stromaufwärts" der Platine gelegenen Bereich.Furthermore, it can be provided that the electrical conductor is routed to a control circuit board for the functional unit located in the printing area. The control circuit board can be attached to the outside of the vacuum device, for example. The control circuit board can, for example, include a controller for an electric motor of a vacuum pump. Unlike some prior art solutions the circuit board does not have to fulfill a sealing function here, since the seal between the vacuum area and the pressure area takes place closer to the functional unit, in relation to the extension of the conductor from the functional unit to the circuit board, i.e. in an area "upstream" of the circuit board, so to speak.

Bei einer weiteren Ausführungsform ist der Austrittsbereich im Inneren eines Gehäuses des Vakuumgerätes gelegen, wobei der elektrische Leiter außerhalb des Austrittsbereiches zumindest bereichsweise freiliegend durch das Vakuumgerät verläuft. Der Begriff "freiliegend" bedeutet dabei nicht, dass keine Isolierung vorhanden ist, sondern lediglich, dass der Leiter außerhalb des Dichtkörpers liegt, d.h. insbesondere nicht von Vergussmasse umgeben ist; also wie ein frei verlegtes Kabel.In a further embodiment, the exit area is located inside a housing of the vacuum device, with the electrical conductor outside the exit area running through the vacuum device in an exposed manner at least in certain areas. The term "exposed" does not mean that there is no insulation, but only that the conductor is outside of the sealing body, i.e. in particular is not surrounded by casting compound; like a freely laid cable.

Bei noch einer Weiterbildung ist im oder am Austrittsbereich eine Schnittstelle zwischen dem elektrischen Leiter und einer weiteren elektrischen Komponente, z.B. einem weiteren Leiter, wie z.B. einem Kabel, oder z.B. einer Platine, vorgesehen. Dies erlaubt eine besonders einfache Herstellung des Vakuumgeräts. Beispielsweise lässt sich der Austrittsbereich leichter, insbesondere zur Ausbildung einer Dichtfläche, bearbeiten, wenn der Leiter nicht als Kabel aus dem Austrittsbereich heraushängt und so ein Bearbeitungswerkzeug behindern könnte.In another development, an interface between the electrical conductor and another electrical component, e.g. another conductor, such as a cable, or e.g. a circuit board, is provided in or at the outlet area. This allows a particularly simple production of the vacuum device. For example, the exit area can be processed more easily, in particular to form a sealing surface, if the conductor does not hang out of the exit area as a cable and could thus impede a processing tool.

Gemäß einer weiteren Ausführungsform ist eine Verbindung zwischen dem Leiter und der weiteren Komponente an der Schnittstelle durch eine bei der Montage erfolgende Relativbewegung zwischen Funktionseinheit und Vakuumgerät herstellbar. Hierdurch lässt sich die Montage des Vakuumgeräts vereinfachen. Insbesondere kann die weitere Komponente dadurch unabhängig von der Funktionseinheit montierbar sein. Beispielsweise muss daher bei der Montage der Funktionseinheit in dem Vakuumgerät nicht gleichzeitig zu der mechanischen Einbringung auch auf Kabelführung geachtet werden, was die Montage gerade bei der allgemein üblichen kompakten Bauweise von Vakuumgeräten, insbesondere Vakuumpumpen, erheblich vereinfacht. Die Schnittstelle kann beispielsweise eine Steckverbindung umfassen. Ein der weiteren Komponente zugeordneter Schnittstellenteil kann, insbesondere zur weiteren Vereinfachung der Montage, beispielsweise an einem Gegenteil für die Funktionseinheit, insbesondere einem Gehäuseteil, befestigt sein.According to a further embodiment, a connection between the conductor and the further component at the interface can be produced by a relative movement between the functional unit and the vacuum device that takes place during assembly. This simplifies the assembly of the vacuum device. In particular, the additional component can thereby be mounted independently of the functional unit. For example, when assembling the functional unit in the vacuum device, it is not necessary to pay attention to cable routing at the same time as mechanical insertion, which makes assembly particularly difficult with the generally customary compact design of vacuum devices, in particular vacuum pumps. considerably simplified. The interface can include a plug connection, for example. An interface part assigned to the further component can be fastened, in particular to further simplify assembly, for example to an opposite for the functional unit, in particular a housing part.

Die Funktionseinheit kann beispielsweise einen Stator eines Elektromotors des Vakuumgerätes umfassen oder ein solcher sein. Die Funktionseinheit kann aber beispielsweise auch einen Magnetlagerstator umfassen oder ein solcher sein.The functional unit can, for example, comprise or be a stator of an electric motor of the vacuum device. However, the functional unit can also include or be a magnetic bearing stator, for example.

Die Erfindung wird nachfolgend lediglich beispielhaft anhand der schematischen Zeichnung erläutert.

Fig. 1
zeigt eine Vakuumpumpe des Standes der Technik.
Fig. 2
zeigt eine erfindungsgemäße Vakuumpumpe.
Fig. 3
zeigt eine weitere Ausführungsform einer erfindungsgemäßen Vakuumpumpe.
Fig. 4
zeigt in einer Detailansicht einen erfindungsgemäßen Austrittsbereich. Dabei zeigt Fig. 4A eine Schnittdarstellung entlang eines axialen Schnitts und Fig. 4B zeigt einen Teil einer Schnittstelle am Austrittsbereich in einer Draufsicht.
Fig. 5
zeigt eine weitere Ausführungsform eines erfindungsgemäßen Austrittbereichs in entsprechenden Einzeldarstellungen.
Fig. 6
zeigt noch eine weitere Ausführungsform eines erfindungsgemäßen Austrittsbereichs ebenfalls in entsprechenden Einzeldarstellungen, wobei hier jedoch keine Schnittstelle vorgesehen ist.
The invention is explained below purely by way of example with reference to the schematic drawing.
1
shows a prior art vacuum pump.
2
shows a vacuum pump according to the invention.
3
shows a further embodiment of a vacuum pump according to the invention.
4
shows a detailed view of an outlet area according to the invention. while showing Figure 4A a sectional view along an axial section and Figure 4B shows a part of an interface at the exit area in a plan view.
figure 5
shows a further embodiment of an outlet area according to the invention in corresponding individual representations.
6
shows another embodiment of an outlet area according to the invention, also in corresponding individual representations, but no interface is provided here.

Die in Fig. 1 gezeigte Vakuumpumpe 10 des Standes der Technik umfasst einen von einem Einlassflansch 12 umgebenen Pumpeneinlass 14 sowie mehrere Pumpstufen zur Förderung des an dem Pumpeneinlass 14 anstehenden Gases zu einem in Fig. 1 nicht dargestellten Pumpenauslass. Die Vakuumpumpe 10 umfasst einen Stator mit einem statischen Gehäuse 16 und einen in dem Gehäuse 16 angeordneten Rotor mit einer um eine Rotorachse bzw. Rotationsachse 18 drehbar gelagerten Rotorwelle 20.In the 1 The prior art vacuum pump 10 shown comprises a pump inlet 14 surrounded by an inlet flange 12 and a plurality of pump stages for conveying the gas present at the pump inlet 14 to an in 1 not shown pump outlet. The vacuum pump 10 comprises a stator with a static housing 16 and a rotor which is arranged in the housing 16 and has a rotor shaft 20 which is mounted such that it can rotate about a rotor axis or axis of rotation 18.

Die Vakuumpumpe 10 ist als Turbomolekularpumpe ausgebildet und umfasst mehrere pumpwirksam miteinander in Serie geschaltete turbomolekulare Pumpstufen mit mehreren mit der Rotorwelle 20 verbundenen turbomolekularen Rotorscheiben 22 und mehreren in axialer Richtung zwischen den Rotorscheiben 22 angeordneten und in dem Gehäuse 16 festgelegten turbomolekularen Statorscheiben 24, die durch Distanzringe 26 in einem gewünschten axialen Abstand zueinander gehalten sind. Die Rotorscheiben 22 und Statorscheiben 24 stellen in einem Schöpfbereich 28 eine in Richtung des Pfeils 30 gerichtete axiale Pumpwirkung bereit.The vacuum pump 10 is embodied as a turbomolecular pump and comprises a plurality of turbomolecular pump stages connected in series with one another for pumping purposes, with a plurality of turbomolecular rotor disks 22 connected to the rotor shaft 20 and a plurality of turbomolecular stator disks 24 arranged in the axial direction between the rotor disks 22 and fixed in the housing 16, which are secured by spacer rings 26 are held at a desired axial distance from one another. In a scoop region 28 , the rotor disks 22 and stator disks 24 provide an axial pumping action directed in the direction of the arrow 30 .

Die Vakuumpumpe 10 umfasst zudem drei in radialer Richtung ineinander angeordnete und pumpwirksam miteinander in Serie geschaltete Holweck-Pumpstufen. Der rotorseitige Teil der Holweck-Pumpstufen umfasst eine mit der Rotorwelle 20 verbundene Rotornabe 32 und zwei an der Rotornabe 32 befestigte und von dieser getragene zylindermantelförmige Holweck-Rotorhülsen 34, 36, die koaxial zu der Rotorachse 18 orientiert und in radialer Richtung ineinander geschachtelt sind. Ferner sind zwei zylindermantelförmige Holweck-Statorhülsen 38, 40 vorgesehen, die ebenfalls koaxial zu der Rotationsachse 18 orientiert und in radialer Richtung ineinander geschachtelt sind. Die pumpaktiven Oberflächen der Holweck-Pumpstufen sind jeweils durch die einander unter Ausbildung eines engen radialen Holweck-Spalts gegenüberliegenden radialen Mantelflächen jeweils einer Holweck-Rotorhülse 34, 36 und einer Holweck-Statorhülse 38, 40 gebildet. Dabei ist jeweils eine der pumpaktiven Oberflächen glatt ausgebildet, im vorliegenden Fall die der Holweck-Rotorhülse 34 bzw. 36, und die gegenüberliegende pumpaktive Oberfläche der Holweck-Statorhülse 38, 40 weist eine Strukturierung mit schraubenlinienförmig um die Rotationsachse 18 herum in axialer Richtung verlaufenden Nuten auf, in denen durch die Rotation des Rotors das Gas vorangetrieben und dadurch gepumpt wird.The vacuum pump 10 also comprises three Holweck pump stages which are arranged one inside the other in the radial direction and are connected in series with one another for pumping purposes. The part of the Holweck pump stages on the rotor side comprises a rotor hub 32 connected to the rotor shaft 20 and two Holweck rotor sleeves 34, 36 in the shape of a cylinder jacket, fastened to the rotor hub 32 and carried by it, which are oriented coaxially to the rotor axis 18 and are nested in one another in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 38, 40 are provided, which are also oriented coaxially to the axis of rotation 18 and are nested in one another in the radial direction. The pumping-active surfaces of the Holweck pump stages are each formed by the radial lateral surfaces of a Holweck rotor sleeve, which face one another and form a narrow radial Holweck gap 34, 36 and a Holweck stator sleeve 38, 40 are formed. In each case, one of the active pump surfaces is smooth, in the present case that of the Holweck rotor sleeve 34 or 36, and the opposite active pump surface of the Holweck stator sleeve 38, 40 has a structure with grooves running helically around the axis of rotation 18 in the axial direction in which the gas is driven forward by the rotation of the rotor and thereby pumped.

Die drehbare Lagerung der Rotorwelle 20 wird durch ein Wälzlager 42 im Bereich des Pumpenauslasses und ein Permanentmagnetlager 44 im Bereich des Pumpeneinlasses 14 bewirkt.The rotatable mounting of the rotor shaft 20 is brought about by a roller bearing 42 in the area of the pump outlet and a permanent magnet bearing 44 in the area of the pump inlet 14 .

Das Permanentmagnetlager 44 umfasst eine rotorseitige Lagerhälfte 46 und eine statorseitige Lagerhälfte 48, die jeweils einen Ringstapel aus mehreren in axialer Richtung aufeinandergestapelten permanentmagnetischen Ringen 50, 52 umfassen, wobei die Magnetringe 50, 52 unter Ausbildung eines radialen Lagerspalts 54 einander gegenüberliegen.The permanent magnet bearing 44 comprises a rotor-side bearing half 46 and a stator-side bearing half 48, each of which comprises a ring stack of a plurality of permanent-magnetic rings 50, 52 stacked on top of one another in the axial direction, with the magnet rings 50, 52 lying opposite one another, forming a radial bearing gap 54.

Innerhalb des Permanentmagnetlagers 44 ist ein Not- oder Fanglager 56 vorgesehen, das als ungeschmiertes Wälzlager ausgebildet ist und im normalen Betrieb der Vakuumpumpe ohne Berührung leer läuft und erst bei einer übermäßigen radialen Auslenkung des Rotors gegenüber dem Stator in Eingriff gelangt, um einen radialen Anschlag für den Rotor zu bilden, der eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen verhindert.An emergency or safety bearing 56 is provided within the permanent magnet bearing 44, which is designed as an unlubricated roller bearing and runs idle without contact during normal operation of the vacuum pump and only engages in the event of an excessive radial deflection of the rotor relative to the stator in order to create a radial stop for to form the rotor that prevents collision of the rotor-side structures with the stator-side structures.

In Bereich des Wälzlagers 42 ist an der Rotorwelle 20 eine konische Spritzmutter 58 mit einem zu dem Wälzlager 42 hin zunehmenden Außendurchmesser vorgesehen, die mit einem Abstreifer eines mehrere mit einem Betriebsmittel, wie zum Beispiel einem Schmiermittel, getränkte saugfähige Scheiben 60 umfassenden Betriebsmittelspeichers in gleitendem Kontakt steht. Im Betrieb wird das Betriebsmittel durch kapillare Wirkung von dem Betriebsmittelspeicher über den Abstreifer auf die rotierende Spritzmutter 58 übertragen und infolge der Zentrifugalkraft entlang der Spritzmutter 58 in Richtung des größer werdenden Außendurchmessers der Spritzmutter 58 zu dem Wälzlager 42 hin gefördert, wo es zum Beispiel eine schmierende Funktion erfüllt.In the area of the roller bearing 42, a conical spray nut 58 is provided on the rotor shaft 20 with an outer diameter that increases towards the roller bearing 42, which is in sliding contact with a scraper of a plurality of absorbent discs 60 soaked with an operating medium, such as a lubricant stands. In operation it will Operating fluid is transferred by capillary action from the operating fluid reservoir via the scraper to the rotating spray nut 58 and, as a result of the centrifugal force, is conveyed along the spray nut 58 in the direction of the increasing outer diameter of the spray nut 58 to the roller bearing 42, where it fulfills a lubricating function, for example.

Die Vakuumpumpe 10 umfasst einen Antriebsmotor 62 zum drehenden Antreiben des Rotors, dessen Läufer bzw. Rotor durch die Rotorwelle 20 gebildet ist. Eine Steuerungseinheit 64 steuert den Antriebsmotor 62 an.The vacuum pump 10 includes a drive motor 62 for driving the rotor in rotation, the runner or rotor of which is formed by the rotor shaft 20 . A control unit 64 controls the drive motor 62 .

Die turbomolekularen Pumpstufen stellen in dem Schöpfbereich 28 eine Pumpwirkung in Richtung des Pfeils 30 bereit.The turbomolecular pumping stages provide a pumping action in the direction of arrow 30 in the scoop area 28 .

In Fig. 2 ist eine erfindungsgemäße Vakuumpumpe 10 dargestellt, die ebenfalls die zu Fig. 1 beschriebenen Merkmale aufweist. Der Antriebsmotor 62 der Vakuumpumpe 10 der Fig. 2 weist einen Motorstator 66 bzw. Ständer auf, der eine Funktionseinheit im Sinne der Erfindung bildet. Der Motorstator 66 ist mit der Steuerungseinheit 64 über einen Leiter 68 verbunden. Der Leiter 68 entspringt innerhalb des Motorstators 66 bzw. der Funktionseinheit und tritt aus dieser an einem Austrittsbereich aus und verläuft von dort aus durch einen Gang 70, welcher in einem Gehäuseteil 72 der Vakuumpumpe ausgebildet ist, zu einer mit der Steuerungseinheit 64 verbundenen Platine 74. Der Leiter 68 ist in dem Gang 70 im Wesentlichen freiliegend verlegt.In 2 is a vacuum pump 10 according to the invention shown, which also to 1 has the features described. The drive motor 62 of the vacuum pump 10 of 2 has a motor stator 66 or stator, which forms a functional unit within the meaning of the invention. The motor stator 66 is connected to the control unit 64 via a conductor 68 . The conductor 68 originates within the motor stator 66 or the functional unit and emerges from this at an exit area and runs from there through a passage 70, which is formed in a housing part 72 of the vacuum pump, to a circuit board 74 connected to the control unit 64. The conductor 68 is routed in the passage 70 in a substantially exposed manner.

Der Gang 70 ist gegenüber einem Vakuumbereich 76 durch eine Dichtung abgedichtet, welche in dieser Ausführungsform zwei konzentrisch angeordnete O-Ringe 78 umfasst. Der Gang 70 ist im Betrieb der Vakuumpumpe 10 nicht evakuiert, ist also Teil eines Druckbereichs 80, in dem bei dieser Ausführungsform im Wesentlichen atmosphärischer Druck herrscht. Der Austrittsbereich des Leiters 68 ist folglich im Druckbereich 80 gelegen und der Leiter 68 ist dem Vakuumbereich 76 nicht ausgesetzt, sodass Glimmentladungen an dem Leiter 68, welche insbesondere bei niedrigem Druck auftreten können, wirksam vermieden werden.The duct 70 is sealed from a vacuum area 76 by a seal, which in this embodiment comprises two concentrically arranged O-rings 78 . The corridor 70 is not evacuated when the vacuum pump 10 is in operation, ie it is part of a pressure region 80 in which essentially atmospheric pressure prevails in this embodiment. The exit area of the conductor 68 is therefore located in the pressure area 80 and the conductor 68 is in the vacuum area 76 not exposed, so that glow discharges on the conductor 68, which can occur in particular at low pressure, are effectively avoided.

Der Motorstator 66 umfasst eine Vielzahl von nicht näher dargestellten Wicklungen, die über den Leiter 68 aus dem Motorstator 68 herausgeführt sind. Der Motorstator 66 ist in dieser Ausführungsform im Wesentlichen vollständig vergossen, sodass die Wicklungen bzw. der Leiter 68 durch einen Vergusskörper von dem Vakuumbereich 76 getrennt sind. Der Vergusskörper bildet hier einen Dichtkörper. Als Vergussmaterial ist Kunststoff vorgesehen.The motor stator 66 comprises a multiplicity of windings, not shown in detail, which are led out of the motor stator 68 via the conductor 68 . In this embodiment, the motor stator 66 is essentially completely cast, so that the windings or the conductor 68 are separated from the vacuum region 76 by a cast body. The potting body forms a sealing body here. Plastic is provided as the casting material.

Der Vergusskörper bildet eine Abdichtung zwischen Vakuumbereich 76 und Druckbereich 80, und zwar durch Kompression einer Dichtung, hier der O-Ringe 78, zwischen dem Vergusskörper und dem Gehäuseteil 72. Die Abdichtung lässt sich dabei auf einfache Weise dadurch herstellen, dass der Motorstator 66 bei der Montage der Vakuumpumpe 10 in seine vorbestimmte Position gebracht wird, also axial in das Gehäuseteil 72 eingesetzt wird, wobei die O-Ringe 78 zuvor entsprechend zu positionieren sind.The cast body forms a seal between the vacuum area 76 and the pressure area 80, namely by compressing a seal, here the O-rings 78, between the cast body and the housing part 72. The seal can be produced in a simple manner in that the motor stator 66 at the assembly of the vacuum pump 10 is brought into its predetermined position, ie is inserted axially into the housing part 72, the O-rings 78 having to be positioned accordingly beforehand.

Bei der bekannten Vakuumpumpe 10 der Fig. 1 ist hingegen ein Austrittsbereich eines Leiters 68 aus einem Motorstator 66 im Vakuumbereich 76 gelegen, denn die Abdichtung zwischen Vakuumbereich 76 und Druckbereich 80 ist hier weit entfernt von dem Motorstator 66, nämlich durch einen mittels einer Platine 74 komprimierten O-Ring 78, gebildet.In the known vacuum pump 10 of 1 On the other hand, an exit area of a conductor 68 from a motor stator 66 is located in the vacuum area 76, because the seal between the vacuum area 76 and the pressure area 80 is here far away from the motor stator 66, namely by an O-ring 78 compressed by means of a circuit board 74.

In Fig. 3 ist ein weiteres, als Vakuumpumpe 10 ausgeführtes, erfindungsgemäßes Vakuumgerät dargestellt. Ein Leiter 68 tritt aus einem Motorstator 66 an einem Austrittsbereich aus, der in einem Druckbereich 80 gelegen ist. Der Motorstator 66 ist von einem Vergusskörper im Wesentlichen umschlossen, welcher sich im Gegensatz zur Ausführungsform der Fig. 2 weiter nach unten erstreckt und hier einen exzentrischen Fortsatz 67 an dem Motorstator 66 bildet.In 3 Another vacuum device according to the invention, designed as a vacuum pump 10, is shown. A conductor 68 exits a motor stator 66 at an exit area located in a pressure area 80 . The motor stator 66 is surrounded by a potting substantially, which in contrast to the embodiment of 2 extends further down and forms an eccentric extension 67 on the motor stator 66 here.

Zwischen Druckbereich 80 und Vakuumbereich 76 ist eine Abdichtung mit einem exzentrisch in Bezug auf die Rotorachse 18 angeordneten O-Ring 78 vorgesehen. Der O-Ring 78 ist zwischen dem Vergusskörper bzw. dem Motorstator 66 einerseits und dem Gehäuseteil 72 andererseits zur Abdichtung komprimiert.A seal with an O-ring 78 arranged eccentrically with respect to the rotor axis 18 is provided between the pressure area 80 and the vacuum area 76 . The O-ring 78 is compressed between the cast body or the motor stator 66 on the one hand and the housing part 72 on the other hand for sealing purposes.

Die unterschiedlichen O-Ring-Konfigurationen der Fig. 2 und 3 bieten individuelle Vorteile. Beispielsweise ist das Gehäuseteil 72 gemäß Fig. 2 besonders einfach zu fertigen, da eine Dichtfläche für die O-Ringe 78 wie diese konzentrisch zur Rotorachse 18 verläuft. Das bedeutet, dass die Dichtfläche z.B. durch Drehen bei derselben Einspannung gefertigt werden kann wie die übrigen konzentrischen Formmerkmale des Gehäuseteils. Außerdem wird über die komprimierten O-Ringe 78 eine Gegenkraft auf den Motorstator 66 über dessen Umfang gleichmäßig übertragen, sodass keine Fehlstellung des Motorstators 66 in Bezug auf die Rotorachse 18 zu befürchten ist. Die Ausführungsform der Fig. 3 bietet dagegen eine besonders gute Abdichtung, da der eine exzentrische O-Ring 78 einen relativ kurzen Umfang und damit eine relativ kleine potentiell diffusionsaktive Fläche aufweist.The different O-ring configurations of the 2 and 3 offer individual advantages. For example, the housing part 72 according to FIG 2 particularly easy to manufacture, since a sealing surface for the O-rings 78 runs concentrically with the rotor axis 18 like this. This means that the sealing surface can be manufactured, for example by turning, with the same clamping as the other concentric features of the housing part. In addition, a counterforce is uniformly transmitted to the motor stator 66 over its circumference via the compressed O-rings 78 , so that there is no risk of the motor stator 66 being misaligned with respect to the rotor axis 18 . The embodiment of 3 on the other hand, offers a particularly good seal, since one eccentric O-ring 78 has a relatively short circumference and thus a relatively small potentially diffusion-active surface.

In den Ausführungsformen der Fig. 2 und 3 ist außerdem die Verbindung zwischen dem Leiter 68 und der Platine 74 unterschiedlich ausgeführt. In Fig. 2 ist der Leiter 68 direkt an der Platine angelötet. In Fig. 3 ist der Leiter dagegen über eine Steckverbindung 82 mit der Platine 74 verbunden. In beiden Varianten bzw. ganz allgemein kann zur Vereinfachung der Montage beispielsweise der Leiter 68 etwas länger ausgeführt sein, als es hier dargestellt ist.In the embodiments of 2 and 3 the connection between the conductor 68 and the circuit board 74 is also made differently. In 2 the conductor 68 is soldered directly to the circuit board. In 3 On the other hand, the conductor is connected to the circuit board 74 via a plug connection 82 . In both variants, or more generally, the conductor 68, for example, can be designed to be somewhat longer than is shown here in order to simplify assembly.

Bei den hier dargestellten erfindungsgemäßen Ausführungsformen liegt die Abdichtung zwischen Vakuumbereich 76 und Druckbereich 80 im Inneren eines Gehäuses der Vakuumpumpe und die Abdichtung wird bei der Montage von innen, hier nämlich durch Positionieren des Motorstators 66 im Gehäuse, hergestellt.In the embodiments according to the invention shown here, the seal between the vacuum area 76 and the pressure area 80 is inside a housing of the vacuum pump and the seal is created during assembly from the inside, specifically here by positioning the motor stator 66 in the housing.

In Fig. 4 ist eine weitere Ausführungsform eines erfindungsgemäß ausgestalteten Austrittsbereichs in einer Detailansicht gezeigt. Fig. 4A zeigt dabei einen den Fig. 1 bis 3 hinsichtlich der Schnittebene im Wesentlichen entsprechenden Querschnitt einer Vakuumpumpe 10. Eine Rotorachse 18 ist - ohne einen maßstabsgetreuen Abstand zur restlichen Darstellung aufzuweisen - zur Illustration der ungefähren Positionierung und Ausrichtung der vorliegenden Ausführungsform angedeutet.In 4 a further embodiment of an outlet area configured according to the invention is shown in a detailed view. Figure 4A shows a den Figures 1 to 3 a cross section of a vacuum pump 10 that essentially corresponds to the sectional plane. A rotor axis 18 is indicated—without having a true-to-scale distance from the rest of the illustration—to illustrate the approximate positioning and orientation of the present embodiment.

Ein Leiter 68 entspringt in einem Motorstator 66 und tritt an einem Austrittsbereich aus dem Motorstator 66 aus, wobei der Austrittsbereich in einem Druckbereich 80 liegt. Der Druckbereich 80 ist gegenüber einem Vakuumbereich 76 über einen O-Ring 78 abgedichtet.A conductor 68 originates in a motor stator 66 and exits the motor stator 66 at an exit area, the exit area being in a pressure area 80 . The pressure area 80 is sealed off from a vacuum area 76 by an O-ring 78 .

Der O-Ring 78 ist bei dieser Ausführungsform in einer Nut 83 des Motorstators 66 angeordnet. Um den O-Ring 78 bei der Montage des Vakuumgeräts in Position zu halten, kann der O-Ring 78 beispielsweise auf einer Innenwand der Nut 83 gespannt sein. Grundsätzlich kann die hier und können auch die in den Fig. 5 und 6 gezeigten O-Ring- bzw. Abdichtungskonfigurationen in Übereinstimmung mit Fig. 2 oder Fig. 3 ausgestaltet sein, d.h. es können sowohl zwei konzentrische wie auch ein exzentrischer O-Ring vorgesehen sein. Darüber hinaus sind natürlich auch weitere Konfigurationen denkbar, beispielsweise zwei nicht vollständig konzentrische O-Ringe. Im Folgenden wird aber lediglich beispielhaft jeweils von einem exzentrischen O-Ring 78 ausgegangen.In this embodiment, the O-ring 78 is arranged in a groove 83 of the motor stator 66 . In order to hold the O-ring 78 in position during assembly of the vacuum device, the O-ring 78 can be clamped on an inner wall of the groove 83, for example. In principle, the ones here and can also be found in the Figures 5 and 6 O-ring and seal configurations shown in accordance with 2 or 3 be designed, ie it can be provided both two concentric and an eccentric O-ring. In addition, of course, other configurations are also conceivable, for example two O-rings that are not completely concentric. In the following, however, an eccentric O-ring 78 is only assumed in each case as an example.

Der Leiter 68 tritt im Austrittsbereich über eine Buchse 84 aus dem Motorstator 66 bzw. der Funktionseinheit aus. Der Leiter 68 kann vorteilhafterweise mindestens in einem Teilbereich unter Einhaltung von Mindestabständen zu gegebenenfalls weiteren vorhandenen Leitern ohne eigene Kabelisolierung von der Funktionseinheit 66 zur Buchse 84 geführt werden, um in diesem Bereich eine bestmögliche Abdichtung zwischen der auch in diesem Ausführungsbeispiel vorgesehenen Vergussmasse der Funktionseinheit 66 und dem Leiter 68 zu erreichen. Die Anbindung des Leiters 68 an die Buchse 84 kann - wie die Verbindung des Leiters 68 mit der Platine 74 gemäß dem Ausführungsbeispiel der Fig. 2 und 3 - beispielsweise durch Löten, Schweißen, Klemmen, Klemmschneiden oder Einstecken erfolgen.In the exit area, the conductor 68 emerges via a bushing 84 from the motor stator 66 or the functional unit. The conductor 68 can advantageously be routed from the functional unit 66 to the socket 84 in at least a partial area while maintaining minimum distances from any other conductors that may be present without their own cable insulation, in order to have the best possible in this area To achieve sealing between the potting compound of the functional unit 66 and the conductor 68, which is also provided in this exemplary embodiment. The connection of the conductor 68 to the socket 84 can - like the connection of the conductor 68 with the circuit board 74 according to the embodiment of 2 and 3 - Take place, for example, by soldering, welding, clamping, clamping cutting or plugging.

Die Buchse 84 bildet einen Teil einer Schnittstelle zu einer weiteren Komponente, hier einem weiteren Leiter 86. Der Leiter 86 weist zur Verbindung mit dem Leiter 68 bzw. mit der Buchse 84 einen Stecker 88 auf. Der Leiter 86 ist entsprechend dem Leiter 68 in Fig. 2 oder 3 zu einer hier nicht gezeigten Platine 74 einer Steuerungseinheit 64 geführt.The socket 84 forms part of an interface to a further component, here a further conductor 86. The conductor 86 has a plug 88 for connection to the conductor 68 or to the socket 84. Conductor 86 is corresponding to conductor 68 in 2 or 3 led to a circuit board 74 of a control unit 64, not shown here.

Der Stecker 88 kann im Gegensatz zur Darstellung in Fig. 4 vorteilhafterweise auch unabhängig von der Buchse 84 in dem Vakuumgerät 10 befestigt sein, beispielsweise durch einen im Gang 70 angeordneten Sitz für den Stecker 80. Dabei kann beispielsweise eine Verbindung zwischen dem Leiter 68 und dem weiteren Leiter 86 an der Schnittstelle, also hier zwischen Buchse 84 und Stecker 88, durch eine bei der Montage erfolgende Relativbewegung zwischen Funktionseinheit 66 und Vakuumgerät 10 herstellbar sein.In contrast to the illustration in 4 advantageously also be fixed independently of the socket 84 in the vacuum device 10, for example by a seat for the plug 80 arranged in the aisle 70. For example, a connection between the conductor 68 and the further conductor 86 at the interface, i.e. here between socket 84 and plug 88 can be produced by a relative movement between the functional unit 66 and the vacuum device 10 during assembly.

Die Buchse 84 ist derart in dem Motorstator 66 angeordnet, dass sie bzw. ihre Kontakte nicht oder nur unwesentlich aus einem gedachten Hüllkörper des Motorstators 66 herausragen. Hierdurch wird die Herstellung der Nut 83 oder einer Dichtfläche für die Dichtung vereinfacht, da somit keine herausstehenden Kontakte oder gar heraushängende Kabel eine spanende Bearbeitung einschränken. Die Buchse 84, ein z.B. alternativ vorgesehener Stecker oder im Hinblick auf die Ausführungsformen der Fig. 2, 3 und 6 der Leiter 68 können gegebenenfalls zusätzlich gegen mechanische Einwirkung, insbesondere während der spanenden Bearbeitung von Dichtflächen oder Nuten, geschützt werden, im Fall der Buchse 84 beispielsweise durch eine Kappe.The socket 84 is arranged in the motor stator 66 in such a way that it or its contacts do not protrude or only insignificantly protrude from an imaginary enveloping body of the motor stator 66 . This simplifies the manufacture of the groove 83 or a sealing surface for the seal, since no protruding contacts or even cables hanging out restrict machining. The socket 84, for example, alternatively provided connector or with regard to the embodiments of 2 , 3 and 6 the conductor 68 can optionally also against mechanical impact, especially during the cutting Machining of sealing surfaces or grooves, are protected, in the case of the bushing 84, for example, by a cap.

Sowohl der Motorstator 66 als auch das Gehäuseteil 72 weisen an dem O-Ring 78 zugewandten Flächen jeweilige Dichtflächen 90 auf, die zwecks guter Dichtwirkung eine hohe Oberflächengüte aufweisen, welche z.B. mittels spanender Bearbeitung erreicht werden kann.Both the motor stator 66 and the housing part 72 have respective sealing surfaces 90 on the surfaces facing the O-ring 78, which have a high surface quality for the purpose of a good sealing effect, which can be achieved, for example, by means of machining.

In Fig. 4B ist die Buchse 84 bzw. der Motorstator 66 in einer Draufsicht, in Bezug auf Fig. 4A von unten, gezeigt. Die Buchse 84 weist drei Kontakte auf, die gemeinsam von der Nut 83 bzw. einem darin angeordneten O-Ring 78 umschlossen sind.In Figure 4B 12 is the bushing 84 and motor stator 66, respectively, in plan view with reference to FIG Figure 4A from below, shown. The socket 84 has three contacts which are jointly surrounded by the groove 83 and an O-ring 78 arranged therein.

Die in Fig. 5 gezeigte Ausführungsform weist ebenfalls eine Schnittstelle zwischen einem aus dem Motorstator 66 austretenden Leiter 68 und einem weiteren Leiter 86 auf, die als Stecker-Buchse-Verbindung 88, 84 ausgebildet ist. Der O-Ring 78 ist in Fig. 5A auf eine nicht-kreisförmige, in diesem Ausführungsbeispiel näherungsweise oval bzw. rechteckig abgerundet umlaufende Dichtfläche 90 eines Gehäuseteils 72 aufgelegt. Bei der Montage wird der O-Ring also im Wesentlichen durch seine Rückstellkraft zur herstellungsbedingten Ursprungsform, in diesem Fall einer Kreisform, in der nicht-kreisförmigen, in diesem Fall näherungsweise ovalen bzw. rechteckig abgerundeten Ausnehmung im Gehäuseteil 72 in Position gehalten. Wie in Fig. 5B gezeigt, ist die Buchse 84 in dieser Ausführungsform mit vier Kontakten ausgeführt.In the figure 5 The embodiment shown also has an interface between a conductor 68 emerging from the motor stator 66 and a further conductor 86, which is designed as a plug-socket connection 88, 84. The O-ring 78 is in Figure 5A placed on a non-circular circumferential sealing surface 90 of a housing part 72 which, in this exemplary embodiment, is approximately oval or rounded rectangular. During assembly, the O-ring is held in position in the non-circular, in this case approximately oval or rectangular, rounded recess in the housing part 72 essentially by its restoring force to the original manufacturing shape, in this case a circular shape. As in Figure 5B As shown, socket 84 is four-contact in this embodiment.

Die in Fig. 6 gezeigte weitere Ausführungsform weist im Gegensatz zu den Ausführungsformen der Fig. 4 und 5 einen zumindest im Austrittsbereich durchgehenden Leiter 68 auf. Der Leiter 68 weist fünf Adern auf, wie es im Querschnitt gemäß Fig. 6B sichtbar ist. Der O-Ring 78 ist hier im Wesentlichen entsprechend Fig. 5A angeordnet, wird jedoch an einem Vorsprung des Motorstators 66 zentriert und bei der Montage vorteilhaft im Wesentlichen durch seine Gewichtskraft in Position gehalten.In the 6 shown further embodiment has in contrast to the embodiments of 4 and 5 a continuous conductor 68 at least in the exit area. The conductor 68 has five cores, as shown in cross section in FIG Figure 6B is visible. The O-ring 78 is essentially the same here Figure 5A arranged, but is centered on a projection of the motor stator 66 and at the assembly is advantageously held in position essentially by its weight.

Auch in den Ausführungsbeispielen der Fig. 4 bis 6 ist der Leiter 68 im Austrittsbereich von einem Dichtkörper nämlich von einer Vergussmasse bzw. einem Vergusskörper umschlossen, der bzw. die an den Motorstator 66 bzw. die Funktionseinheit angegossen ist und diesen zumindest teilweise, insbesondere im Wesentlichen vollständig, umschließt.Also in the embodiments of Figures 4 to 6 the conductor 68 is surrounded in the exit area by a sealing body, namely by a casting compound or a casting body, which is cast onto the motor stator 66 or the functional unit and encloses it at least partially, in particular essentially completely.

Obwohl anhand der Figuren lediglich als Motorstatoren ausgebildete Funktionseinheiten betrachtet wurden, kann eine erfindungsgemäße Funktionseinheit von unterschiedlicher Art sein, beispielsweise einen Magnetlagerstator oder ähnliches umfassen.Although only functional units embodied as motor stators were considered based on the figures, a functional unit according to the invention can be of different types, for example comprising a magnetic bearing stator or the like.

BezugszeichenlisteReference List

1010
Vakuumpumpevacuum pump
1212
Einlassflanschinlet flange
1414
Pumpeneinlasspump inlet
1616
Gehäusecasing
1818
Rotationsachseaxis of rotation
2020
Rotorwellerotor shaft
2222
Rotorscheiberotor disc
2424
Statorscheibestator disc
2626
Distanzringspacer ring
2828
Schöpfbereichscoop area
3030
Pfeilarrow
3232
Rotornaberotor hub
3434
Holweck-RotorhülseHolweck rotor sleeve
3636
Holweck-RotorhülseHolweck rotor sleeve
3838
Holweck-StatorhülseHolweck stator sleeve
4040
Holweck-StatorhülseHolweck stator sleeve
4242
Wälzlagerroller bearing
4444
Permanentmagnetlagerpermanent magnet bearing
4646
rotorseitige Lagerhälfterotor-side bearing half
4848
statorseitige Lagerhälftestator bearing half
5050
permanentmagnetischer Ringpermanent magnetic ring
5252
permanentmagnetischer Ringpermanent magnetic ring
5454
radialer Lagerspaltradial bearing gap
5656
Not- oder FanglagerEmergency or catch camp
5858
konische Spritzmutterconical injection nut
6060
saugfähige Scheibeabsorbent disc
6262
Antriebsmotordrive motor
6464
Steuerungseinheitcontrol unit
6666
Motorstatormotor stator
6767
Fortsatzextension
6868
Leiterladder
7070
Ganggear
7272
Gehäuseteilhousing part
7474
Platinecircuit board
7676
Vakuumbereichvacuum area
7878
O-Ringo ring
8080
Druckbereichprint area
8282
Steckverbindungconnector
8383
Nutgroove
8484
BuchseRifle
8686
Leiterladder
8888
Steckerplug
9090
Dichtflächesealing surface

Claims (13)

  1. A vacuum device, in particular a vacuum pump, comprising
    an electrically operable functional unit (66) which is at least partly arranged in a vacuum region (76) of the vacuum device and which is connected to at least one electrical conductor (68) which exits from the functional unit (66) at an outlet region and which leads into a pressure region (80) which is sealed with respect to the vacuum region (76),
    wherein the outlet region is disposed within the pressure region (80),
    wherein an outer side of the functional unit (66) is formed by a sealing body at least in the outlet region and the electrical conductor (68) is led out of the sealing body,
    wherein a seal between the vacuum region (76) and the pressure region (80) is formed by the sealing body,
    wherein the seal is formed by a cooperation of the sealing body with a component (72) of the vacuum device,
    and wherein the sealing body cooperates with the component (72) indirectly via at least one additional seal (78),
    characterized in that
    the sealing body is formed by a casting compound.
  2. A vacuum device in accordance with claim 1,
    characterized in that
    the sealing body is rigid.
  3. A vacuum device in accordance with claim 2,
    characterized in that
    the casting compound comprises plastic and/or glass.
  4. A vacuum device in accordance with any one of the preceding claims, characterized in that
    the functional unit (66) is completely surrounded by the casting compound.
  5. A vacuum device in accordance with any one of the claims 2 to 4, characterized in that
    the casting compound, in particular comprising plastic and/or glass, is molded onto the functional unit (66), with preferably the functional unit (66) being at least substantially completely surrounded by the casting compound.
  6. A vacuum device in accordance with any one of the claims 2 to 5, characterized in that
    the sealing body is provided with at least one sealing surface (90) for the additional seal (78), with preferably the sealing surface (90) being formed by machining the casting compound forming the sealing body.
  7. A vacuum device in accordance with any one of the preceding claims, characterized in that
    the seal between the vacuum region (76) and the pressure region (80) is disposed in the interior of a housing (72) of the vacuum device.
  8. A vacuum device in accordance with any one of the preceding claims, characterized in that
    the seal between the vacuum region (76) and the pressure region (80) can be produced by a relative movement between the functional unit (66) and the vacuum device that takes place during the assembly.
  9. A vacuum device in accordance with any one of the preceding claims, characterized in that
    the electrical conductor (68) is led to a control board (74), located in the pressure region (80), for the functional unit (66).
  10. A vacuum device in accordance with any one of the preceding claims, characterized in that
    the outlet region is disposed in the interior of a housing (72) of the vacuum device and the electrical conductor (68) outside the outlet region extends through the vacuum device in an at least regionally exposed manner.
  11. A vacuum device in accordance with any one of the preceding claims, characterized in that
    an interface between the electrical conductor (68) and a further electrical component (86) is provided in or at the outlet region.
  12. A vacuum device in accordance with claim 11,
    characterized in that
    a connection between the conductor (68) and the further component (86) can be established at the interface by a relative movement between the functional unit (66) and the vacuum device that takes place during the assembly.
  13. A vacuum device in accordance with any one of the preceding claims, characterized in that
    the functional unit comprises a stator (66) of an electric motor of the vacuum device.
EP16203143.9A 2016-12-09 2016-12-09 Vacuum device Active EP3333429B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP16203143.9A EP3333429B1 (en) 2016-12-09 2016-12-09 Vacuum device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP16203143.9A EP3333429B1 (en) 2016-12-09 2016-12-09 Vacuum device

Publications (2)

Publication Number Publication Date
EP3333429A1 EP3333429A1 (en) 2018-06-13
EP3333429B1 true EP3333429B1 (en) 2022-02-09

Family

ID=57542796

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5652473A (en) * 1994-12-26 1997-07-29 Alcatel Cit Rotary assembly including in particular radial support means and a magnetic axial abutment
DE102006036493A1 (en) * 2006-08-04 2008-02-21 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102013222905A1 (en) * 2013-11-11 2015-05-13 Oerlikon Leybold Vacuum Gmbh Drive and control device for a vacuum pump, vacuum pump and method for producing a control board for a vacuum pump

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4222747B2 (en) * 2000-10-03 2009-02-12 株式会社荏原製作所 Vacuum pump
DE102006016405A1 (en) 2006-04-07 2007-10-11 Pfeiffer Vacuum Gmbh Vacuum pump with drive unit
DE102007053980A1 (en) * 2007-11-13 2009-05-14 Pfeiffer Vacuum Gmbh vacuum pump

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5652473A (en) * 1994-12-26 1997-07-29 Alcatel Cit Rotary assembly including in particular radial support means and a magnetic axial abutment
DE102006036493A1 (en) * 2006-08-04 2008-02-21 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102013222905A1 (en) * 2013-11-11 2015-05-13 Oerlikon Leybold Vacuum Gmbh Drive and control device for a vacuum pump, vacuum pump and method for producing a control board for a vacuum pump

Also Published As

Publication number Publication date
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