EP3008343B1 - Vacuum pump, and method for operating a vacuum pump - Google Patents

Vacuum pump, and method for operating a vacuum pump Download PDF

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Publication number
EP3008343B1
EP3008343B1 EP14726958.3A EP14726958A EP3008343B1 EP 3008343 B1 EP3008343 B1 EP 3008343B1 EP 14726958 A EP14726958 A EP 14726958A EP 3008343 B1 EP3008343 B1 EP 3008343B1
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EP
European Patent Office
Prior art keywords
vacuum pump
switching element
check valve
closing
fluid
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EP14726958.3A
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German (de)
French (fr)
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EP3008343A1 (en
Inventor
Christophe DESPESSE
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Leybold GmbH
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Leybold GmbH
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Priority to PL14726958T priority Critical patent/PL3008343T3/en
Publication of EP3008343A1 publication Critical patent/EP3008343A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • F04C18/344—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member
    • F04C18/3441—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members with vanes reciprocating with respect to the inner member the inner and outer member being in contact along one line or continuous surface substantially parallel to the axis of rotation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/02—Lubrication; Lubricant separation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/12—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet

Definitions

  • the invention relates to a vacuum pump and a method for operating a vacuum pump.
  • Vacuum pumps such as, for example, rotary vane pumps, have a suction chamber in a pump housing.
  • a conveying element In the pumping chamber for conveying a gaseous medium, a conveying element is arranged.
  • the conveying element In a rotary vane pump, the conveying element has an eccentrically arranged in the cylindrical suction chamber rotor element in which a plurality of slides are arranged. The slides are slidably held in slots of the rotor element and abut against the inside of the pump chamber.
  • the eccentrically arranged rotor element By rotating the eccentrically arranged rotor element, the medium is conveyed by means of the chambers, which change in size through the rotation and are arranged between adjacent slides, from an inlet of the pump chamber to an outlet.
  • a check valve is arranged in the region of the inlet. In a mechanical embodiment of the check valve, this is adjusted via a spring. In order to ensure a safe closing of the suction nozzle, the valve must be close to its Be set sealing surface. At low pressures, in particular less than 1 mbar at the pump inlet, there is the disadvantage that the delivery rate of the pump decreases at low pressures.
  • the object of the invention is to provide a vacuum pump and a method for operating a vacuum pump, wherein even at low pressures of in particular less than 1 mbar at the inlet, even without provision of an electromagnetic valve, the highest possible pumping power can be achieved.
  • the object is achieved according to the invention by a vacuum pump according to claim 1 and a method for operating a vacuum pump according to claim 7.
  • the vacuum pump according to the invention which may in particular be a rotary vane pump, has a suction chamber in a housing. At least one conveying element is arranged in the suction space.
  • a rotary vane pump is an eccentrically arranged in a cylindrical suction chamber, cylindrical conveyor element with slidable slides. The slides are located on the inner wall of the pump chamber.
  • the suction space is connected to an inlet and an outlet. Due to the rotational movement of the conveyor element, in particular, a gaseous medium is conveyed through the inlet in the direction of the outlet in order to evacuate a space connected to the inlet.
  • a check valve is arranged, which closes the inlet when the vacuum pump is switched off.
  • the check valve may be integrated in an inlet channel forming the inlet.
  • a fluid device is provided according to the invention.
  • the fluid device acts on turning off the vacuum pump to close the check valve on this.
  • This has the advantage that the check valve is wide and in particular fully opened even at low pressures in the inlet region. As a result, a large pump power can continue to be realized even at low pressures.
  • By providing the check valve actuating fluid device it is possible to increase the gap between the check valve and the suction port compared to a mechanical spring-set check valve. Optionally, such a spring can be completely eliminated.
  • this has a fluidically actuated switching element such as a control piston.
  • a fluid acts to close the check valve on the check valve.
  • the switching element is connected via a connecting channel to the check valve, wherein the connecting channel is connected either directly to the check valve or via the inlet channel, through which the medium to be conveyed is sucked into the suction chamber.
  • the switching element of the fluid device is connected to a feed channel in which a pressurized fluid is provided. With the aid of the pressurized fluid, a pressure is exerted on the switching piston during operation of the vacuum pump, so that it is held in a closed position. In the closed position, the connecting channel between the switching element and the check valve is closed. This is particularly advantageous if the connecting channel is not connected directly to the check valve, but indirectly via the inlet channel with the check valve, since otherwise fluid would be sucked from the connecting channel into the pump chamber of the vacuum pump.
  • the supply channel is connected to the connecting channel by actuation of the switching element, ie in particular by displacement of the switching piston. Then, fluid flows from the supply channel through the connecting channel and possibly through the inlet channel in the direction of the check valve and closes it, so that after switching off the vacuum pump no medium can flow back into the evacuated space.
  • the switching element is connected to a closing channel.
  • actuation of the switching element can take place.
  • pressure it is particularly preferable for pressure to be applied to the switching element via the closing channel during the operation of the vacuum pump during the operation of the vacuum pump. With a corresponding pressure reduction or a corresponding pressure drop then takes place opening of the switching element, i. in particular, a displacement of the control piston.
  • the construction of pressure in the closing channel this is connected to the outlet of the vacuum pump. Since there is a significantly higher pressure at the outlet of the vacuum pump than at the inlet of the vacuum pump, it is possible to conduct this pressure for closing the switching element via the closing channel to the switching element, so that the pressure acts in particular on the switching piston.
  • the pressure at the pump outlet drops.
  • the pressure in the closing channel connected to the outlet or the outlet region also decreases. This results in an opening of the fluid device.
  • the opening process can be assisted by a spring, for example.
  • a support can take place due to a pressure acting on the switching element via the feed channel.
  • the switching element is configured such that the pressure prevailing in the closing channel and the pressure prevailing in the supply channel in the opposite direction acts on the switching element in particular on opposing piston surfaces of the switching piston.
  • the feed channel is connected to a pressure generating device of the vacuum pump. This is in particular the compression zone in the vacuum generator just before its outlet.
  • the piston geometry of the switching element is designed such that the switching element has a cavity which is connected to the feed channel. As a result, a corresponding effective area is formed within the switching element.
  • the above-described inventive principle of the action on a check valve by means of a fluid device is not limited to rotary vane pumps, but can also be used in vacuum pumps of other types. Regardless of the design of the vacuum pump, it is particularly preferred that the conveyed medium is used as the fluid which is supplied to the switching channel and serves to switch the switching element, in particular the switching piston.
  • An oil-lubricated vacuum pump such as a rotary vane pump, is a mixture of gas and oil since the oil which seals the rotary vane relative to the inner wall of the suction chamber is carried in small quantities.
  • the invention relates to a method for operating the above-described vacuum pump. This is advantageously developed as described above.
  • the switching of the check valve is carried out according to the inventive method when switching off the vacuum pump fluidic actuation of the switching element, ie in particular the switching piston of the fluid device, whereby the check valve is thereby closed.
  • fluid is conveyed in the direction of the check valve or flows in the direction of the check valve.
  • the fluid preferably flows through the supply channel via the switching element into the connecting channel.
  • fluid is supplied to the closing channel for closing the switching element during the pressure build-up operation, wherein this fluid is, in particular, fluid conveyed by the vacuum pump.
  • this fluid is, in particular, the fluid delivered by the vacuum pump from the space to be evacuated, in particular gas.
  • the method is advantageously developed as described above with reference to the device.
  • FIG. 1 is shown as an example of a vacuum pump, a rotary vane pump.
  • This has a housing 10 in which a pump chamber 12 is formed.
  • a rotary member 14 (pump rotor) is formed, which together with Sliders 16 forms a conveyor element.
  • the sliders 16 are slidable in slots 18 disposed in the rotor element 14.
  • an oil supply into the slots 18 takes place via an internal oil supply, so that the oil seals the slides 16 with respect to the inner wall 20 of the pump chamber 12.
  • the rotation element 14 is arranged eccentrically, by rotating the rotation element 14, a conveying of in particular gaseous medium, which is sucked through an inlet 22 and expelled through an outlet 24, takes place.
  • the inlet 22 is connected to an inlet port 26.
  • the suction of the medium to be conveyed takes place, so that a space connected to the inlet pipe 26 to be evacuated space is evacuated.
  • a check valve 28 and possibly a filter element or sieve 30 is arranged within the inlet 22, 26.
  • a fluid means 36 is provided.
  • This has a connecting channel 38, which is arranged in the illustrated embodiment between a switching element 40 and the connecting channel 38.
  • the fluid device 36 has a supply channel 42 connected to the oil box or oil reservoir, which also communicates with the switching element 40 connected is.
  • a cavity 43 is provided within the switching element 40, into which the feed channel 42 opens.
  • a closing channel 44 is connected to the switching element 40. The closing channel 44 is further connected to the outlet 24 of the vacuum generator or in the region of the outlet 24 with the suction chamber 12.
  • the medium sucked into the chambers 32 through the inlet channel 22 is compressed, so that there is a higher pressure at the outlet 24 than at the inlet 22. Due to the connection with the closing channel 44, this pressure also prevails on the switching element 40, which is designed in particular as a switching piston. By this pressure, the switching element 40 is closed, so that no fluid enters the connecting channel 38 (FIG. Fig. 2 ). At the same time, a pressure is applied to the switching element 40 via the feed channel 42, which, however, exerts a smaller force on the switching piston 40 as a function of the effective piston surfaces than the pressure prevailing in the closing channel 44. This ensures that the fluid device 36 remains closed during operation.
  • the piston 40 preferably has a cavity into which fluid when the valve is closed ( Fig. 2 ) flows through the feed channel 42 so that these a force on the piston in Fig. 2 exerts to the left, wherein the counterforce is generated by the pressure prevailing in the switching channel 44.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpe sowie ein Verfahren zum Betreiben einer Vakuumpumpe.The invention relates to a vacuum pump and a method for operating a vacuum pump.

Vakuumpumpen wie bspw. Drehschieberpumpen weisen in einem Pumpengehäuse einen Schöpfraum auf. In dem Schöpfraum ist zum Fördern eines gasförmigen Mediums ein Förderelement angeordnet. Bei einer Drehschieberpumpe weist das Förderelement ein exzentrisch in dem zylindrischen Schöpfraum angeordnetes Rotorelement auf, in dem mehrere Schieber angeordnet sind. Die Schieber sind in Schlitzen des Rotorelements verschiebbar gehalten und liegen an der Innenseite des Schöpfraums an. Durch Rotation des exzentrisch angeordneten Rotorelements erfolgt ein Fördern des Mediums mit Hilfe der sich in ihrer Größe durch die Rotation verändernden, zwischen benachbarten Schiebern angeordneten Kammern von einem Einlass des Schöpfraums zu einem Auslass. Um beim Ausschalten der Vakuumpumpe ein Zurückströmen von Medium in den von der Vakuumpumpe zu evakuierenden Raum zu vermeiden, ist im Bereich des Einlasses ein Rückschlagventil angeordnet. In einer mechanischen Ausführungsform des Rückschlagventils ist dies über eine Feder eingestellt. Um ein sicheres Schließen des Saugstutzens zu gewährleisten, muss das Ventil nah an dessen Dichtungsfläche eingestellt sein. Bei geringen Drücken von insbesondere weniger als 1 mbar am Pumpeneinlass besteht der Nachteil, dass die Förderleistung der Pumpe bei geringen Drücken abnimmt.Vacuum pumps, such as, for example, rotary vane pumps, have a suction chamber in a pump housing. In the pumping chamber for conveying a gaseous medium, a conveying element is arranged. In a rotary vane pump, the conveying element has an eccentrically arranged in the cylindrical suction chamber rotor element in which a plurality of slides are arranged. The slides are slidably held in slots of the rotor element and abut against the inside of the pump chamber. By rotating the eccentrically arranged rotor element, the medium is conveyed by means of the chambers, which change in size through the rotation and are arranged between adjacent slides, from an inlet of the pump chamber to an outlet. In order to avoid a backflow of medium into the space to be evacuated by the vacuum pump when switching off the vacuum pump, a check valve is arranged in the region of the inlet. In a mechanical embodiment of the check valve, this is adjusted via a spring. In order to ensure a safe closing of the suction nozzle, the valve must be close to its Be set sealing surface. At low pressures, in particular less than 1 mbar at the pump inlet, there is the disadvantage that the delivery rate of the pump decreases at low pressures.

Aus EP 2530325 ist es bekannt, zusätzlich zu dem Rückschlagventil ein Steuerventil vorzusehen, das das Rückschlagventil betätigt. Im Betrieb ist das Steuerventil über einen Kanal mit einer Ölpumpe verbunden. Durch den von der Ölpumpe erzeugten Druck wird ein Schließkolben des Steuerventils in der Geschlossen-Stellung gehalten. Beim Abschalten der Vakuumpumpe wird auch die Ölpumpe mit abgeschaltet. Da der Schaltkolben des Steuerventils federbelastet ist, erfolgt ein Öffnen des Steuerventils. Dies führt dazu, dass ein mit dem Steuerventil verbundender Druckluftkanal geöffnet wird und über einen weiteren Kanal Druckluft zum Rückschlagventil strömt und dies in eine Geschlossen-Stellung drückt. Mit dieser Konstruktion ist es erforderlich, eine Ölpumpe vorzusehen, die während des Betriebs einen Öldruck zum Schließen des Steuerventils aufrechterhält. Des Weiteren muss auch nach dem Ausschalten der Pumpe ein Druckluftbehälter vorgesehen sein, aus dem Druckluft zum Schließen des Rückschlagventils diesem zugeführt werden kann.Out EP 2530325 It is known to provide, in addition to the check valve, a control valve which actuates the check valve. In operation, the control valve is connected via a channel to an oil pump. By the pressure generated by the oil pump, a closing piston of the control valve is held in the closed position. When switching off the vacuum pump and the oil pump is switched off. Since the control piston of the control valve is spring-loaded, an opening of the control valve takes place. As a result, a compressed air duct connected to the control valve is opened and compressed air flows to the check valve via another duct and forces this into a closed position. With this construction, it is necessary to provide an oil pump that maintains an oil pressure during operation for closing the control valve. Furthermore, even after switching off the pump, a compressed air tank must be provided from the compressed air to close the check valve can be supplied to this.

Anstelle des Vorsehens eines federeingestellten Rückschlagventils ist es ferner bekannt ein elektromagnetisch schaltbares Ventil vorzusehen. Hierdurch kann die Pumpleistung auch bei niedrigen Drücken am Pumpeneinlass aufrechterhalten werden. Das Vorsehen eines elektromagnetischen Ventils weist jedoch den Nachteil auf, dass eine entsprechende Steuereinrichtung sowie eine Stromversorgung vorgesehen sein müssen.Instead of providing a spring-set check valve, it is also known to provide an electromagnetically switchable valve. As a result, the pump power can be maintained even at low pressures at the pump inlet. However, the provision of an electromagnetic valve has the disadvantage that a corresponding control device and a power supply must be provided.

Aufgabe der Erfindung ist es, eine Vakuumpumpe sowie ein Verfahren zum Betreiben einer Vakuumpumpe zu schaffen, wobei auch bei niedrigen Drücken von insbesondere weniger als 1 mbar am Einlass auch ohne Vorsehen eines elektromagnetischen Ventils, eine möglichst hohe Pumpleistung erzielt werden kann.The object of the invention is to provide a vacuum pump and a method for operating a vacuum pump, wherein even at low pressures of in particular less than 1 mbar at the inlet, even without provision of an electromagnetic valve, the highest possible pumping power can be achieved.

Die Lösung der Aufgabe erfolgt erfindungsgemäß durch eine Vakuumpumpe gemäß Anspruch 1 sowie ein Verfahren zum Betreiben einer Vakuumpumpe gemäß Anspruch 7.The object is achieved according to the invention by a vacuum pump according to claim 1 and a method for operating a vacuum pump according to claim 7.

Die erfindungsgemäße Vakuumpumpe, bei der es sich insbesondere um eine Drehschieberpumpe handeln kann, weist in einem Gehäuse einen Schöpfraum auf. In dem Schöpfraum ist mindestens ein Förderelement angeordnet. Bei einer Drehschieberpumpe handelt es sich um ein exzentrisch in einem zylindrischen Schöpfraum angeordnetes, zylindrisches Förderelement mit in Schlitzen verschiebbaren Schiebern. Die Schieber liegen an der Innenwand des Schöpfraumes an. Ferner ist der Schöpfraum mit einem Einlass und einem Auslass verbunden. Durch die Rotationsbewegung des Förderelements erfolgt ein Fördern von insbesondere gasförmigem Medium durch den Einlass in Richtung des Auslasses, um einen mit dem Einlass verbundenen Raum zu evakuieren. Im Bereich des Einlasses ist ein Rückschlagventil angeordnet, das den Einlass beim Ausschalten der Vakuumpumpe verschließt. Hierbei kann das Rückschlagventil in einen den Einlass ausbildenden Einlasskanal integriert sein. Durch das Rückschlagventil ist ein Zurückströmen des geförderten Mediums in den evakuierten Raum vermieden. Um auch bei niedrigen Drücken im Einlassbereich von insbesondere weniger als 1 mbar eine hohe Förderleistung der Pumpe zu realisieren, ist erfindungsgemäß eine Fluideinrichtung vorgesehen. Die Fluideinrichtung wirkt beim Ausschalten der Vakuumpumpe zum Verschließen des Rückschlagventils auf dieses ein. Dies hat den Vorteil, dass das Rückschlagventil auch bei geringen Drücken im Einlassbereich weit und insbesondere vollständig geöffnet ist. Hierdurch kann weiterhin auch bei niedrigen Drücken eine große Pumpleistung realisiert werden. Durch Vorsehen der das Rückschlagventil betätigenden Fluideinrichtung ist es möglich, den Spalt zwischen Rückschlagventil und Saugstutzen im Vergleich zu einem mechanischen federeingestellten Rückschlagventil zu vergrößern. Gegebenenfalls kann eine derartige Feder auch vollständig entfallen.The vacuum pump according to the invention, which may in particular be a rotary vane pump, has a suction chamber in a housing. At least one conveying element is arranged in the suction space. A rotary vane pump is an eccentrically arranged in a cylindrical suction chamber, cylindrical conveyor element with slidable slides. The slides are located on the inner wall of the pump chamber. Further, the suction space is connected to an inlet and an outlet. Due to the rotational movement of the conveyor element, in particular, a gaseous medium is conveyed through the inlet in the direction of the outlet in order to evacuate a space connected to the inlet. In the area of the inlet, a check valve is arranged, which closes the inlet when the vacuum pump is switched off. In this case, the check valve may be integrated in an inlet channel forming the inlet. By the check valve backflow of the pumped medium is avoided in the evacuated space. In order to realize a high delivery rate of the pump even at low pressures in the inlet region of in particular less than 1 mbar, a fluid device is provided according to the invention. The fluid device acts on turning off the vacuum pump to close the check valve on this. This has the advantage that the check valve is wide and in particular fully opened even at low pressures in the inlet region. As a result, a large pump power can continue to be realized even at low pressures. By providing the check valve actuating fluid device, it is possible to increase the gap between the check valve and the suction port compared to a mechanical spring-set check valve. Optionally, such a spring can be completely eliminated.

Bei einer besonders bevorzugten Ausführungsform der Fluideinrichtung weist diese ein fluidisch betätigtes Schaltelement wie einen Schaltkolben auf. Je nach Stellung des Schaltkolbens wirkt ein Fluid zum Schließen des Rückschlagventils auf das Rückschlagventil ein. Das Vorsehen einer Fluideinrichtung bzw. eines fluidisch betätigbaren Schaltelement, bei dem es sich insbesondere um einen Schaltkolben handelt, weist insbesondere den Vorteil auf, dass die Betätigung der Fluideinrichtung durch Fluid erfolgt und insofern keine elektrische Steuerung und keine Stromversorgung erforderlich ist.In a particularly preferred embodiment of the fluid device, this has a fluidically actuated switching element such as a control piston. Depending on the position of the control piston, a fluid acts to close the check valve on the check valve. The provision of a fluid device or of a fluidically operable switching element, which is in particular a switching piston, has the particular advantage that the actuation of the fluid device is effected by fluid and insofar as no electrical control and no power supply is required.

Ferner ist das Schaltelement über einen Verbindungskanal mit dem Rückschlagventil verbunden, wobei der Verbindungskanal entweder unmittelbar mit dem Rückschlagventil oder über den Einlasskanal, durch den das zu fördernde Medium in den Schöpfraum gesaugt wird, verbunden ist. Erfindungsgemäß ist das Schaltelement der Fluideinrichtung mit einem Zuführkanal verbunden, in dem ein unter Druck stehendes Fluid vorgesehen ist. Mit Hilfe des unter Druck stehenden Fluids wird im Betrieb der Vakuumpumpe ein Druck auf den Schaltkolben ausgeübt, so dass dieser in einer Geschlossenstellung gehalten wird. In der Geschlossenstellung ist der Verbindungskanal zwischen dem Schaltelement und dem Rückschlagventil verschlossen. Dies ist insbesondere vorteilhaft, wenn der Verbindungskanal nicht unmittelbar mit dem Rückschlagventil, sondern mittelbar über den Einlasskanal mit dem Rückschlagventil verbunden ist, da ansonsten Fluid aus dem Verbindungskanal in den Schöpfraum der Vakuumpumpe gesaugt würde.Further, the switching element is connected via a connecting channel to the check valve, wherein the connecting channel is connected either directly to the check valve or via the inlet channel, through which the medium to be conveyed is sucked into the suction chamber. According to the invention, the switching element of the fluid device is connected to a feed channel in which a pressurized fluid is provided. With the aid of the pressurized fluid, a pressure is exerted on the switching piston during operation of the vacuum pump, so that it is held in a closed position. In the closed position, the connecting channel between the switching element and the check valve is closed. This is particularly advantageous if the connecting channel is not connected directly to the check valve, but indirectly via the inlet channel with the check valve, since otherwise fluid would be sucked from the connecting channel into the pump chamber of the vacuum pump.

Beim Ausschalten der Vakuumpumpe erfolgt ein Verbinden des Zuführkanals mit dem Verbindungskanal durch Betätigen des Schaltelements, d.h. insbesondere durch Verschieben des Schaltkolbens. Sodann strömt Fluid aus dem Zuführkanal durch den Verbindungskanal und ggf. durch den Einlasskanal in Richtung des Rückschlagventils und verschließt dieses, so dass nach dem Ausschalten der Vakuumpumpe kein Medium in den evakuieren Raum zurückströmen kann.When the vacuum pump is switched off, the supply channel is connected to the connecting channel by actuation of the switching element, ie in particular by displacement of the switching piston. Then, fluid flows from the supply channel through the connecting channel and possibly through the inlet channel in the direction of the check valve and closes it, so that after switching off the vacuum pump no medium can flow back into the evacuated space.

Des Weiteren ist es bevorzugt, dass das Schaltelement mit einem Schließkanal verbunden ist. Durch Verändern des Drucks eines Fluids in dem Schließkanal kann ein Betätigen des Schaltelements erfolgen. Besonders bevorzugt ist es hierbei, dass zum Schließen des Schaltelements während des Betriebs der Vakuumpumpe an dem Schaltelement über den Schließkanal Druck anliegt. Bei einer entsprechenden Druckreduzierung bzw. einem entsprechenden Druckabfall erfolgt sodann ein Öffnen des Schaltelements, d.h. insbesondere ein Verschieben des Schaltkolbens. Besonders bevorzugt ist es, dass zum Aufbau von Druck in dem Schließkanal dieser mit dem Auslass der Vakuumpumpe verbunden ist. Da am Auslass der Vakuumpumpe ein deutlich höherer Druck als am Einlass der Vakuumpumpe herrscht, ist es möglich diesen Druck zum Verschließen des Schaltelements über den Schließkanal zu dem Schaltelement zu leiten, so dass der Druck insbesondere auf den Schaltkolben einwirkt.Furthermore, it is preferred that the switching element is connected to a closing channel. By varying the pressure of a fluid in the closing channel, actuation of the switching element can take place. In this case, it is particularly preferable for pressure to be applied to the switching element via the closing channel during the operation of the vacuum pump during the operation of the vacuum pump. With a corresponding pressure reduction or a corresponding pressure drop then takes place opening of the switching element, i. in particular, a displacement of the control piston. It is particularly preferred that the construction of pressure in the closing channel, this is connected to the outlet of the vacuum pump. Since there is a significantly higher pressure at the outlet of the vacuum pump than at the inlet of the vacuum pump, it is possible to conduct this pressure for closing the switching element via the closing channel to the switching element, so that the pressure acts in particular on the switching piston.

Beim Abschalten der Vakuumpumpe sinkt der Druck am Pumpenauslass. Dies führt dazu, dass bei dieser bevorzugten Ausführungsform auch der Druck in den mit dem Auslass bzw. dem Auslassbereich verbundenen Schließkanal sinkt. Hierdurch erfolgt ein Öffnen der Fluideinrichtung. Der Öffnungsvorgang kann hierbei beispielsweise durch eine Feder unterstützt werden. Zusätzlich oder anstelle der Feder kann ein Unterstützen aufgrund eines über den Zuführkanal auf das Schaltelement wirkenden Druckes erfolgen.When switching off the vacuum pump, the pressure at the pump outlet drops. As a result, in this preferred embodiment, the pressure in the closing channel connected to the outlet or the outlet region also decreases. This results in an opening of the fluid device. The opening process can be assisted by a spring, for example. In addition to or instead of the spring, a support can take place due to a pressure acting on the switching element via the feed channel.

Bei einer besonders bevorzugten Ausführungsform ist das Schaltelement derart ausgestaltet, dass der in dem Schließkanal herrschende Druck und der in dem Zufuhrkanal herrschende Druck in entgegengesetzte Richtung auf das Schaltelement insbesondere auf einander gegenüberliegende Kolbenflächen des Schaltkolbens wirkt. Dies hat den Vorteil, dass, solange während des Betriebs der Druck in dem Schließkanal höher ist als in dem Zuführkanal, der Schaltkolben verschlossen bleibt, sofern die einander gegenüberliegenden Kolbenflächen gleich groß sind. Bei unterschiedlich großen Kolbenflächen sind für den Schaltzustand des Schaltelements, d.h. für die Lage des Schaltkolbens, die einander entgegengerichteten Kräfte ausschlaggebend. Diese hängen von dem Druck und der Größe der wirksamen Kolbenfläche ab. Durch eine entsprechende Anpassung der Kolbengeometrie kann diese somit auf die herrschenden Drücke angepasst werden, so dass einerseits im Betrieb ein sicheres Verschließen des Schaltelemets gewährleistet ist und andererseits beim Ausschalten der Vakuumpumpe ein schnelles Öffnen des Schaltelements sichergestellt ist. Vorzugsweise ist der Zuführkanal mit einer Druckerzeugungseinrichtung der Vakuumpumpe verbunden. Hierbei handelt es sich insbesondere um die Kompressionszone im Vakuumgenerator kurz vor dessen Auslass.In a particularly preferred embodiment, the switching element is configured such that the pressure prevailing in the closing channel and the pressure prevailing in the supply channel in the opposite direction acts on the switching element in particular on opposing piston surfaces of the switching piston. This has the advantage that, as long as during operation, the pressure in the closing channel is higher than in the feed channel, the switching piston remains closed, provided that the opposed piston surfaces are the same size. In the case of differently sized piston surfaces, for the switching state of the switching element, ie for the position of the switching piston, the opposing forces are decisive. These depend on the pressure and the size of the effective piston area. By a corresponding adjustment of the piston geometry, this can thus be adapted to the prevailing pressures, so that on the one hand in operation a secure closing of the Schaltelemets is ensured and on the other hand, a fast opening of the switching element is ensured when switching off the vacuum pump. Preferably, the feed channel is connected to a pressure generating device of the vacuum pump. This is in particular the compression zone in the vacuum generator just before its outlet.

Insbesondere ist die Kolbengeometrie des Schaltelements derart ausgebildet, dass das Schaltelement einen Hohlraum aufweist, der mit dem Zuführkanal verbunden ist. Hierdurch ist eine entsprechende wirksame Fläche innerhalb des Schaltelements ausgebildet.In particular, the piston geometry of the switching element is designed such that the switching element has a cavity which is connected to the feed channel. As a result, a corresponding effective area is formed within the switching element.

Das vorstehend beschriebene erfindungsgemäße Prinzip des Einwirkens auf ein Rückschlagventil mit Hilfe einer Fluideinrichtung ist nicht auf Drehschieberpumpen beschränkt, sondern kann auch bei Vakuumpumpen anderer Bauart eingesetzt werden. Unabhängig von der Bauart der Vakuumpumpe ist es besonders bevorzugt, dass als Fluid, das dem Schaltkanal zugeführt wird und zum Schalten des Schaltelements insbesondere des Schaltkolbens dient, das geförderte Medium verwendet wird. Bei einer ölgeschmierten Vakuumpumpe wie einer Drehschieberpumpe handelt es sich um ein Gemisch aus Gas und Öl, da das die Drehschieber gegenüber der Innenwand des Schöpfraums abdichtende Öl in geringen Mengen mitgefördert wird.The above-described inventive principle of the action on a check valve by means of a fluid device is not limited to rotary vane pumps, but can also be used in vacuum pumps of other types. Regardless of the design of the vacuum pump, it is particularly preferred that the conveyed medium is used as the fluid which is supplied to the switching channel and serves to switch the switching element, in particular the switching piston. An oil-lubricated vacuum pump, such as a rotary vane pump, is a mixture of gas and oil since the oil which seals the rotary vane relative to the inner wall of the suction chamber is carried in small quantities.

Ferner betrifft die Erfindung ein Verfahren zum Betreiben der vorstehend beschriebenen Vakuumpumpe. Diese ist wie vorstehend beschrieben vorteilhaft weitergebildet. Das Schalten des Rückschlagventils erfolgt gemäß des erfindungsgemäßen Verfahrens beim Ausschalten der Vakuumpumpe durch
fluidisches Betätigen des Schaltelements, d.h. insbesondere des Schaltkolbens der Fluideinrichtung, wobei hierdurch das Rückschlagventil verschlossen wird.Furthermore, the invention relates to a method for operating the above-described vacuum pump. This is advantageously developed as described above. The switching of the check valve is carried out according to the inventive method when switching off the vacuum pump
fluidic actuation of the switching element, ie in particular the switching piston of the fluid device, whereby the check valve is thereby closed.

Insbesondere wird zum Schließen des Rückschlagventils durch den Verbindungskanal Fluid in Richtung des Rückschlagventils gefördert bzw. strömt in Richtung des Rückschlagventils. Ferner strömt das Fluid vorzugsweise durch den Zuführkanal über das Schaltelement in den Verbindungskanal. Des Weiteren ist es bevorzugt, dass zum Schließen des Schaltelements während des Betriebs zum Druckaufbau Fluid dem Schließkanal zugeführt wird, wobei es sich bei diesem Fluid insbesondere um von der Vakuumpumpe gefördertes Fluid handelt. Hierbei handelt es sich insbesondere um das von der Vakuumpumpe aus dem zu evakuierenden Raum geförderte Fluid, insbesondere Gas. Vorzugsweise ist das Verfahren wie vorstehend anhand der Vorrichtung beschrieben vorteilhaft weitergebildet.In particular, to close the check valve through the connecting channel fluid is conveyed in the direction of the check valve or flows in the direction of the check valve. Furthermore, the fluid preferably flows through the supply channel via the switching element into the connecting channel. Furthermore, it is preferred that fluid is supplied to the closing channel for closing the switching element during the pressure build-up operation, wherein this fluid is, in particular, fluid conveyed by the vacuum pump. This is, in particular, the fluid delivered by the vacuum pump from the space to be evacuated, in particular gas. Preferably, the method is advantageously developed as described above with reference to the device.

Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert.The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.

Es zeigen

Fig. 1
eine schematische Schnittansicht einer Drehschieberpumpe,
Fig. 2
eine schematische Schnittansicht der fluidischen Schalteinrichtung im Betrieb und
Fig. 3
eine schematische Schnittansicht der flüidischen Schalteinrichtung im Stillstand.
Show it
Fig. 1
a schematic sectional view of a rotary vane pump,
Fig. 2
a schematic sectional view of the fluidic switching device in operation and
Fig. 3
a schematic sectional view of the Flüidischen switching device at a standstill.

In der Figur 1 ist als Beispiel einer Vakuumpumpe eine Drehschieberpumpe dargestellt. Diese weist ein Gehäuse 10 auf, in dem ein Schöpfraum 12 ausgebildet ist. Innerhalb des zylindrischen Schöpfraumes ist ein Rotationselement 14 (Pumpen-Rotor) ausgebildet, das zusammen mit Schiebern 16 ein Förderelement bildet. Die Schieber 16 sind in Schlitzen 18, die in dem Rotorelement 14 angeordnet sind, verschiebbar. Bspw. über eine innenliegende Ölzufuhr erfolgt eine Ölzufuhr in die Schlitze 18, so dass das Öl die Schieber 16 gegenüber der Innenwand 20 des Schöpfraums 12 abdichtet. Da das Rotationselement 14 exzentrisch angeordnet ist, erfolgt durch Drehen des Rotationselements 14 ein Fördern von insbesondere gasförmigem Medium, das durch einen Einlass 22 angesaugt und durch einen Auslass 24 ausgestoßen wird.In the FIG. 1 is shown as an example of a vacuum pump, a rotary vane pump. This has a housing 10 in which a pump chamber 12 is formed. Within the cylindrical pumping chamber, a rotary member 14 (pump rotor) is formed, which together with Sliders 16 forms a conveyor element. The sliders 16 are slidable in slots 18 disposed in the rotor element 14. For example. an oil supply into the slots 18 takes place via an internal oil supply, so that the oil seals the slides 16 with respect to the inner wall 20 of the pump chamber 12. Since the rotation element 14 is arranged eccentrically, by rotating the rotation element 14, a conveying of in particular gaseous medium, which is sucked through an inlet 22 and expelled through an outlet 24, takes place.

Der Einlass 22 ist mit einem Einlassstutzen 26 verbunden. In dem Einlassstutzen 26 erfolgt das Ansaugen des zu fördernden Mediums, so dass ein mit dem Einlassstutzen 26 verbundener zu evakuierender Raum evakuiert wird. Innerhalb des Einlasses 22, 26 ist ein Rückschlagventil 28 sowie ggf. ein Filterelement oder Sieb 30 angeordnet.The inlet 22 is connected to an inlet port 26. In the inlet pipe 26, the suction of the medium to be conveyed takes place, so that a space connected to the inlet pipe 26 to be evacuated space is evacuated. Within the inlet 22, 26, a check valve 28 and possibly a filter element or sieve 30 is arranged.

Aufgrund des in einer ersten Kammer 32 des Schöpfraums 12 herrschenden Drucks, der niedriger als der Druck in dem zu evakuierenden Raum ist, erfolgt ein Bewegen des Rückschlagventils 28 in Fig. 1 nach unten entgegen der Kraft einer im dargestellten Ausführungsbeispiel in dem Einlasskanal 22 angeordneten Spiralfeder 34. Da die Spiralfeder 34 nur eine relativ geringe Kraft erzeugt, die das Rückschlagventil 28 nach oben in eine Verschlussstellung bewegen würde, ist das Rückschlagventil 28 auch bei geringen Drücken im Einlassbereich vorzugsweise vollständig geöffnet.Due to the prevailing in a first chamber 32 of the pump chamber 12 pressure, which is lower than the pressure in the space to be evacuated, a movement of the check valve 28 in Fig. 1 downwardly against the force of a coil spring 34 disposed in the inlet duct 22 in the illustrated embodiment. Since the coil spring 34 generates only a relatively small force that would move the check valve 28 upwardly into a closed position, the check valve 28 will be in the inlet region even at low pressures preferably completely open.

Um ein schnelles und sicheres Verschließen, d.h. Bewegen des Rückschlagventils 28 in Fig. 1 nach oben beim Ausschalten der Vakuumpumpe sicherzustellen, ist eine Fluideinrichtung 36 vorgesehen. Diese weist einen Verbindungskanal 38 auf, der im dargestellten Ausführungsbeispiel zwischen einem Schaltelement 40 und dem Verbindungskanal 38 angeordnet ist.To a quick and safe closing, ie moving the check valve 28 in Fig. 1 to ensure upward when turning off the vacuum pump, a fluid means 36 is provided. This has a connecting channel 38, which is arranged in the illustrated embodiment between a switching element 40 and the connecting channel 38.

Ferner weist die Fluideinrichtung 36 einen mit dem Ölkasten bzw. Ölreservoir verbundenen Zuführkanal 42 auf, der ebenfalls mit dem Schaltelement 40 verbunden ist. Hierbei ist in besonders bevorzugter Ausführungsform innerhalb des Schaltelements 40 ein Hohlraum 43 vorgesehen, in den der Zuführkanal 42 mündet. Des Weiteren ist ein Schließkanal 44 mit dem Schaltelement 40 verbunden. Der Schließkanal 44 ist ferner mit dem Auslass 24 des Vakuumgenerators oder im Bereich des Auslasses 24 mit dem Schöpfraum 12 verbunden.Furthermore, the fluid device 36 has a supply channel 42 connected to the oil box or oil reservoir, which also communicates with the switching element 40 connected is. Here, in a particularly preferred embodiment, a cavity 43 is provided within the switching element 40, into which the feed channel 42 opens. Furthermore, a closing channel 44 is connected to the switching element 40. The closing channel 44 is further connected to the outlet 24 of the vacuum generator or in the region of the outlet 24 with the suction chamber 12.

Während des Betriebs der Vakuumpumpe wird das in den Kammern 32 durch den Einlasskanal 22 angesaugte Medium komprimiert, so dass am Auslass 24 ein höherer Druck als am Einlass 22 herrscht. Aufgrund der Verbindung mit dem Schließkanal 44 herrscht dieser Druck auch an dem insbesondere als Schaltkolben ausgebildeten Schaltelement 40. Durch diesen Druck wird das Schaltelement 40 geschlossen, so dass kein Fluid in den Verbindungskanal 38 gelangt (Fig. 2). Gleichzeitig liegt an dem Schaltelement 40 über dem Zuführkanal 42 ein Druck an, der jedoch in Abhängigkeit der wirksamen Kolbenflächen eine geringere Kraft auf den Schaltkolben 40 ausübt als der in dem Schließkanal 44 herrschende Druck. Hierdurch ist sichergestellt, dass die Fluideinrichtung 36 während des Betriebs verschlossen bleibt.During operation of the vacuum pump, the medium sucked into the chambers 32 through the inlet channel 22 is compressed, so that there is a higher pressure at the outlet 24 than at the inlet 22. Due to the connection with the closing channel 44, this pressure also prevails on the switching element 40, which is designed in particular as a switching piston. By this pressure, the switching element 40 is closed, so that no fluid enters the connecting channel 38 (FIG. Fig. 2 ). At the same time, a pressure is applied to the switching element 40 via the feed channel 42, which, however, exerts a smaller force on the switching piston 40 as a function of the effective piston surfaces than the pressure prevailing in the closing channel 44. This ensures that the fluid device 36 remains closed during operation.

Beim Ausschalten der Vakuumpumpe sinkt der Druck am Auslass 24 und somit auch in dem Schließkanal 44. Dies führt dazu, dass der in dem Zuführkanal 42 herrschende Druck eine größere Kraft auf das Schaltelement 40 ausübt als die durch den Druck in der Leitung 44 erzeugte Kraft. Hierdurch wird das Schaltelement 40 in Fig. 1 und 2 nach links in die in Fig. 3 dargestellte Stellung bewegt. Dies bewirkt ein Öffnen des Verbindungskanals 38, so dass Fluid aus dem Zuführkanal 42 in den Verbindungskanal 38 strömt (Pfeil 46). Aus dem Verbindungskanal 38 strömt das Fluid in den Einlasskanal 22 in - Richtung des Rückschlagventils 24 und verschließt dieses.When switching off the vacuum pump, the pressure at the outlet 24 and thus also in the closing channel 44 decreases. As a result, the pressure prevailing in the feed channel 42 exerts a greater force on the switching element 40 than the force generated by the pressure in the line 44. As a result, the switching element 40 in Fig. 1 and 2 to the left in the Fig. 3 shown position moves. This causes opening of the connecting channel 38, so that fluid flows from the feed channel 42 into the connecting channel 38 (arrow 46). From the connecting channel 38, the fluid flows into the inlet channel 22 in the direction of the check valve 24 and closes it.

Der Kolben 40 weist vorzugsweise einen Hohlraum auf, in den Fluid bei geschlossenem Ventil (Fig. 2) durch den Zuführkanal 42 strömt, so dass diese eine Kraft auf den Kolben in Fig. 2 nach links ausübt, wobei die Gegenkraft durch den in dem Schaltkanal 44 herrschenden Druck erzeugt wird.The piston 40 preferably has a cavity into which fluid when the valve is closed ( Fig. 2 ) flows through the feed channel 42 so that these a force on the piston in Fig. 2 exerts to the left, wherein the counterforce is generated by the pressure prevailing in the switching channel 44.

Claims (11)

  1. A vacuum pump, particularly a rotary vane pump, comprising
    a suction chamber (12) formed in a pump housing (10),
    a conveying element (14, 16) arranged in the suction chamber,
    an inlet (22) connected to the suction chamber (12) and an outlet (24) connected to the suction chamber (12),
    a back-check valve (28) configured to close the inlet (22) upon switch-off of the vacuum pump, and
    a fluid device (36) configured to act on the back-check valve (28) upon switch-off of the vacuum pump for closing the back-check valve (28), comprising a fluidically operated switching element (40) which is connected to a closing duct (44) and, via a connecting duct (38), to the back-check valve (28),
    wherein the closing duct (44) is connected to the outlet (24) of the vacuum pump so that, during operation of the vacuum pump, a pressure is applied to the switching element (40) for closing the switching element (40),
    characterized in that
    the switching element (40) is connected to a supply duct (42) comprising a pressurized fluid.
  2. The vacuum pump according to claim 1, characterized in that the fluidically operated switching element (40) comprises a switching piston.
  3. The vacuum pump according to claim 1 or 2, characterized in that, upon switch-off of the vacuum pump, the supply duct (42) is connected the connecting duct (38) by actuation of the switching element (40).
  4. The vacuum pump according to any one of claims 1 to 3, characterized in that the pressure prevailing in the closing duct (44) and the pressure prevailing in the supply duct (42) act in opposite directions on the switching element (40), particularly on mutually opposite piston surfaces of the switching piston.
  5. The vacuum pump according to any one of claims 1 to 4, characterized in that, in the switching element (40) and particularly in the switching piston, a cavity (43) is provided which is connected to the supply duct (42).
  6. The vacuum pump according to any one of claims 1 to 5, characterized in that the supply duct (42) is connected to a pressure generating device.
  7. A method for operating a vacuum pump according to any one of claims 1 to 6, wherein, upon switch-off of the vacuum pump, the back-check valve (28) is closed by fluidic actuation of the switching element (40) of the fluid device (36).
  8. The method for operating a vacuum pump according to claim 7, wherein, for closing the back-check valve (28), a fluid, particularly a lubricant, is caused to flow through the connecting duct (38) in the direction of the back-check valve (28).
  9. The method for operating a vacuum pump according to claim 7 or 8, wherein, for closing the switching element (40) during operation, fluid is supplied to the closing duct (44) for pressure build-up.
  10. The method for operating a vacuum pump according to claim 9, wherein the pressurized fluid is generated by the vacuum pump, said fluid being particularly the fluid discharged by the vacuum pump from the to-be-evacuated space.
  11. The method for operating a vacuum pump according to claim 7 to 10, wherein, upon switch-off of the vacuum pump, the supply duct (42) is connected to the connecting duct (38) by actuation of the switching element (40).
EP14726958.3A 2013-06-11 2014-05-26 Vacuum pump, and method for operating a vacuum pump Active EP3008343B1 (en)

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PCT/EP2014/060838 WO2014198524A1 (en) 2013-06-11 2014-05-26 Vacuum pump, and method for operating a vacuum pump

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ES (1) ES2749125T3 (en)
PL (1) PL3008343T3 (en)
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WO (1) WO2014198524A1 (en)

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CN113531986A (en) * 2020-04-17 2021-10-22 海信（山东）冰箱有限公司 Refrigerator with a door

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WO2014198524A1 (en) 2014-12-18
CN105378284A (en) 2016-03-02
CN105378284B (en) 2017-07-25
TW201510362A (en) 2015-03-16
PL3008343T3 (en) 2020-01-31
ES2749125T3 (en) 2020-03-19
TWI622703B (en) 2018-05-01
DE102013210854A1 (en) 2014-12-11
EP3008343A1 (en) 2016-04-20

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