EP2980409A1 - Machine à fluide du type à volute - Google Patents

Machine à fluide du type à volute Download PDF

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Publication number
EP2980409A1
EP2980409A1 EP14774465.0A EP14774465A EP2980409A1 EP 2980409 A1 EP2980409 A1 EP 2980409A1 EP 14774465 A EP14774465 A EP 14774465A EP 2980409 A1 EP2980409 A1 EP 2980409A1
Authority
EP
European Patent Office
Prior art keywords
cooling
scroll
drive shaft
orbiting scroll
casing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP14774465.0A
Other languages
German (de)
English (en)
Other versions
EP2980409A4 (fr
Inventor
Tamotsu Fujioka
Junichi Asami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Publication of EP2980409A1 publication Critical patent/EP2980409A1/fr
Publication of EP2980409A4 publication Critical patent/EP2980409A4/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C1/00—Rotary-piston machines or engines
    • F01C1/02—Rotary-piston machines or engines of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F01C1/0207—Rotary-piston machines or engines of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F01C1/0215—Rotary-piston machines or engines of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle

Definitions

  • the present invention relates to scroll fluid machines applied, for example, to compressors, vacuum pumps, expansion machines, etc., and particularly including a cooling mechanism capable of effectively cooling compression heat generated during a compression process.
  • Scroll compressors become hot during the compression process, with a temperature as high as 200 degrees centigrade, and therefore need a cooling mechanism.
  • the scroll compressors have high temperature particularly in the center of a compression chamber formed between a fixed scroll and an orbiting scroll.
  • a conventional cooling mechanism for example, a plurality of cooling fins are formed in the fixed and orbiting scrolls to be parallel to one another, and a sirocco fan is attached to a drive shaft for driving the orbiting scroll.
  • the sirocco fan circulates cooling air between the cooling fins and thus achieves air cooling.
  • cooling temperature differs from the upstream to the downstream of the cooling air passing between the cooling fins, and this makes it difficult to effectively cool a high-temperature area (which is one of characteristics of scroll compressors) in the center of the compression chamber.
  • Balance between the volume of air directed to the fixed scroll and the volume of air directed to the orbiting scroll is controlled by air-deflector plates or the like disposed in cooling-air passages. According to this method, however, it is not easy to effectively cool the orbiting scroll in orbital motion, resulting in the increase of the power consumption required for the cooling.
  • the cooling mechanism of the scroll air compressor disclosed in Patent Document 1 has a cooling-air inlet in the center of the rear face of the fixed scroll. Also, a long cooling passage is continuously formed between the casing and the rear face of the fixed scroll, in the rear face of the orbiting scroll, and between the casing and the electric motor. Air is taken in from the inlet by a single cooling fan attached to the drive shaft, and cooling air is made to flow through the cooling passage. As the result, the fixed and orbiting scrolls, the electric motor, and the like are forcefully cooled in sequence.
  • a fixed-side cooling-air passage formed along the rear face of the fixed scroll and an orbiting-side cooling-air passage formed along the rear face of the orbiting scroll are separately formed. Rotation of the centrifugal fan attached to the drive shaft causes cooling air to flow through these two cooling-air passages. Cooling air flows passing through the cooling-air passages form parallel flows running in the same direction after entering from two adjacent inflow openings. The cooling air flows then join together at the outlets formed in the rear faces of the scrolls to be guided by the centrifugal fan.
  • the cooling mechanism disclosed in the Patent Document 2 creates cooling air flowing in one direction from the inlet to the outlet.
  • a cooling mechanism of this type is not capable of improving a cooling effect particularly on the center of the compression chamber in which temperature becomes high.
  • the mechanism also requires a large-size duct for guiding the cooling air flows to the centrifugal fan, which join together at the outlets of the passages formed in the rear faces of the scrolls, so that the casing is increased in size.
  • an object of the present invention is at least one of improving a cooling effect particularly on the center of a sealed chamber in which temperature becomes high, reducing power consumption of a cooling fan for creating cooling air, and suppressing an increase in size of a casing, in a scroll fluid machine.
  • the invention is applied to a scroll fluid machine including a casing formed into a cylindrical shape and having open axial ends; a fixed scroll attached to the casing; an orbiting scroll situated to face the fixed scroll; a drive shaft to which the orbiting scroll is connected through an eccentric shaft that is eccentric to a rotation axis of the drive shaft, the drive shaft that rotates to bring the orbiting scroll into orbital motion; and a rotation-preventing mechanism configured to prevent rotation of the orbiting scroll.
  • a plurality of sealed chambers are formed between the fixed scroll and the orbiting scroll.
  • the scroll fluid machine to be applied is a scroll compressor, a scroll vacuum pump or the like, a plurality of compression chambers as the plurality of sealed chambers are formed between the fixed scroll and the orbiting scroll.
  • a working medium is compressed in the plurality of compression chambers.
  • the scroll fluid machine to be applied is a scroll expander, a plurality of expansion chambers as the plurality of sealed chambers are formed between the fixed scroll and the orbiting scroll. A working medium is expanded in the plurality of expansion chambers.
  • the scroll fluid machine of the invention includes a cooling fan that is attached to the drive shaft and creates cooling air inside the casing by rotation of the drive shaft, and an outlet opening that is formed in a partition wall of the casing, which faces an outer peripheral end of the cooling fan.
  • the scroll fluid machine further includes first and second cooling-air passages configured as described below. The scroll fluid machine is configured so that the cooling fan causes cooling air to flow through the first and second cooling-air passages.
  • the cylindrical casing may have an arbitrary shape provided with openings at both ends and may have another shape, such as a square shape, other than the cylindrical shape.
  • the first cooling-air passage has a first inlet opening formed in a partition wall of the casing, which faces the center of a rear face of the fixed scroll, extends along the rear face of the fixed scroll, curves near an outer peripheral end of the fixed scroll, extends along a rear face of the orbiting scroll, further extends from the center of the rear face of the orbiting scroll along the drive shaft, and reaches the outlet opening.
  • the second cooling-air passage has a plurality of second inlet openings formed in a partition wall of the casing, which faces an outer peripheral end of the orbiting scroll, the plurality of second inlet openings being arranged dispersedly in a circumferential direction of the orbiting scroll, extends along the rear face of the orbiting scroll, extends from the center of the rear face of the orbiting scroll along the drive shaft, and reaches the outlet opening.
  • the center of the sealed chamber is cooled first by low-temperature air which has freshly been introduced from the first inlet opening. Even in the downstream thereof, it is possible to increase a cooling effect on the center of the sealed chamber and the drive shaft to which heat is easily transmitted from the center of the sealed chamber since the first and second cooling-air passages are formed along the rear faces of the fixed and orbiting scrolls and the periphery of the drive shaft.
  • the cooling-air passage of the Patent Document 1 is formed outside a bearing portion supporting a drive shaft and an electric motor, so that a cooling effect on the drive shaft to which heat is easily transmitted from the center of the sealed chamber is smaller than that in the configuration of the present invention.
  • the second cooling-air passage of the Patent Document 2 is formed outside the tubular portion of a bearing, which surrounds the drive shaft, so that a cooling effect on the drive shaft is smaller than that in the configuration of the present invention.
  • the invention decreases pressure loss of the cooling air and then reduces power consumption of the cooling fan. Also, the second inlet openings are arranged dispersedly in the circumferential direction of the orbiting scroll, so that the casing is not increased in size.
  • the first cooling-air passage may be situated in the outer peripheral end of the orbiting scroll to be located between the plurality of second inlet openings arranged dispersedly in the circumferential direction. This makes it possible to arrange the first cooling-air passage dispersedly in the circumferential direction in the outer peripheral ends of the fixed and orbiting scrolls. This eliminates the need to place the large-size duct for the first cooling-air passage in a circumferential portion of the casing, which suppresses the increase in size of the casing.
  • a first cooling fin group may be provided, which includes a plurality of cooling fins formed in the rear face of the fixed scroll to radially extend from the center of the rear face of the fixed scroll.
  • a second cooling fin group may be provided, which includes a plurality of cooling fins formed in the rear face of the orbiting scroll to radially extend from the center of the rear face of the orbiting scroll.
  • the second cooling-air passage may be formed between the rear face of the orbiting scroll and the first cooling-air passage.
  • the first and second cooling-air passages may be situated concentrically on the rear face side of the orbiting scroll and around the drive shaft with the drive shaft positioned at the center, so as to surround the drive shaft.
  • first and second cooling-air passages are situated concentrically with the drive shaft positioned at the center, so as to surround the drive shaft, the configuration of the duct for forming these passages can be downsized, which also decreases the size of the casing.
  • the rotation-preventing mechanism may be situated between the fixed scroll and the orbiting scroll.
  • the rotation-preventing mechanism may include a crank member with which a pair of shafts whose axes are eccentric to each other are integrally formed.
  • the rotation-preventing mechanism may be a crankshaft mechanism in which one of the pair of shafts is rotatably supported by the fixed scroll, and the other of the pair of shafts is rotatably supported by the orbiting scroll.
  • the first and second cooling-air passages improve the cooling effect on the fixed and orbiting scrolls (particularly the center of the sealed chamber).
  • the invention also decreases the pressure loss of the cooling air, thus reduces the power consumption of the scroll fluid machine, and downsizes the casing.
  • a casing of the scroll compressor 10 includes a cylindrical casing 12a that covers a drive (driving) shaft side and a casing 12b that covers orbiting and fixed scroll side and has a substantially oval tube-like shape.
  • a circular opening 14 is formed in one end of the casing 12a as viewed in an axial direction of the drive shaft. The opening 14 is formed for the purpose of inserting a drive shaft 18 therein and also attaching an electric motor (not shown) for driving the drive shaft 18 into rotation.
  • a hollow cylinder-like inlet duct 16 forming an inlet opening through which cooling air is taken in is disposed integrally with the center of the casing 12b.
  • a square cross-sectional outlet duct 20 forming an outlet opening through which the cooling air is discharged is disposed integrally with the casing 12a.
  • five square cross-sectional inlet ducts 22a to 22e forming inlet openings through which the cooling air is taken in are arranged dispersedly in a circumferential direction.
  • an eccentric (off-center) shaft 24 is integrally formed in an end face of the drive shaft 18.
  • the eccentric shaft 24 has an axis positioned parallel and eccentric to an axis of the drive shaft 18. When the drive shaft 18 rotates, the eccentric shaft 24 comes into swivel (orbital) motion.
  • An orbiting scroll 26 includes a circular end plate 26a and a spiral lap 26b formed integrally with the end plate 26a.
  • a cylindrical bearing 28 is fitted to the center of a rear face (opposite side to a fixed scroll 32) 27 of the orbiting scroll 26, and the eccentric shaft 24 is rotatably supported by the bearing 28 with a roller bearing 30 interposed therebetween. This enables the orbiting scroll 26 to make orbital motion with the eccentric shaft 24.
  • the fixed scroll 32 includes a circular end plate 32a and a spiral lap 32b formed integrally with the end plate 32a.
  • the fixed scroll 32 is fixed to the casing 12b.
  • a plurality of compression chambers c are formed between the fixed scroll 32 and the orbiting scroll 26.
  • air is sucked in from an intake port 34 (see Fig. 5 ) and compressed in the plurality of compression chambers c.
  • the air is then discharged from a discharge port 36 formed in the center of the fixed scroll 32.
  • the compressed air discharged from the discharge port 36 is supplied to a demander from a discharge pipe 38 connected to the discharge port 36.
  • the center of a rear face (opposite side to the orbiting scroll 26) 33 of the fixed scroll 32 is located to face the opening of the inlet duct 16.
  • pin crank mechanisms 40 as rotation-preventing mechanisms are disposed in three points at intervals of 120 degrees in a circumferential direction.
  • the pin crank mechanisms 40 each include a crank member 42 provided with a pair of pin shafts (pivots) 44a and 44b.
  • the pair of pin shafts 44a and 44b are positioned so that axes thereof are parallel and eccentric to each other.
  • the pin shaft 44a is rotatably supported by the end plate 26a with a roller bearing 46 interposed therebetween.
  • the pin shaft 44b is rotatably supported by the end plate 32a with a roller bearing 48 interposed therebetween.
  • the pin crank mechanisms 40 thus configured prevent the rotation of the orbiting scroll 26.
  • a centrifugal fan 50 is attached to the drive shaft 18.
  • the centrifugal fan 50 has a circular end plate 50a attached to the drive shaft 18 and a plurality of blades 50b attached to the end plate 50a.
  • the plurality of blades 50b are arranged along a circumferential direction.
  • the centrifugal fan 50 rotates with the drive shaft 18 to send cooling air which has entered along the drive shaft 18, in a radially outward direction.
  • a first cooling fin group 52 is formed in the rear face 33 of the end plate 32a.
  • the first cooling fin group 52 includes a large number of straight-line cooling fins 52a radially extending from an area surrounding the discharge port 36 in a radially outward direction with the discharge port 36 positioned in the center.
  • a second cooling fin group 54 is formed in the rear face 27 of the end plate 26a.
  • the second cooling fin group 54 includes a large number of straight-line cooling fins 54a radially extending from an area surrounding the bearing 28 in a radially outward direction with the bearing 28 positioned in the center.
  • the scroll compressor 10 is further provided with a first cooling-air passage mainly for cooling the fixed scroll 32, and a second cooling-air passage mainly for cooling the orbiting scroll 26.
  • a first cooling-air passage mainly for cooling the fixed scroll 32
  • a second cooling-air passage mainly for cooling the orbiting scroll 26.
  • a duct 56 is disposed with a clearance from the rear face 27 of the orbiting scroll 26 and a tip end portion of the drive shaft 18.
  • the duct 56 has a shape that covers the rear face 27 and the tip end portion of the drive shaft 18.
  • An interior space of the duct 56 forms the second cooling-air passage leading to the inlet ducts 22a to 22e.
  • a duct 58 is disposed outside the duct 56 so as to surround the duct 56 with a clearance from the duct 56.
  • the first cooling-air passage leading to the inlet duct 16 is formed between the inlet ducts 22a to 22e.
  • An interior space of the duct 58 forms the cooling-air passages leading to the inlet duct 16.
  • the ducts 56 and 58 are arranged coaxially with the drive shaft 18.
  • the rotation of the centrifugal fan 50 causes cooling air a1 to be sucked in from the inlet duct 16.
  • the cooling air a1 enters toward the center of the rear face 33 of the fixed scroll 32, and flows from the center toward the outer peripheral end, passing between the cooling fins 52a along the rear face 33 of the fixed scroll 32, to thereby cool the fixed scroll 32.
  • the cooling air a1 flows through the passages formed between the inlet ducts 22a to 22e into a passage formed between the ducts 56 and 58, namely, a passage extending along the rear face 27 of the orbiting scroll 26, and cools the orbiting scroll 26 and the drive shaft 18 in the passage.
  • the cooling air a1 then reaches the centrifugal fan 50.
  • the cooling air a1 is delivered by the centrifugal fan 50 in a radially outward direction of the centrifugal fan 50 and discharged from the discharge duct 20.
  • the rotation of the centrifugal fan 50 causes cooling air a2 to be sucked in from the inlet ducts 22a to 22e into the inside of the casing 12b.
  • the cooling air a2 flows through the second cooling-air passage formed inside the duct 56.
  • the cooling air a2 flows between the cooling fins 54a along the rear face 27 of the orbiting scroll 26, to thereby cool the orbiting scroll 26.
  • the cooling air a2 then veers away and flows around the drive shaft 18, cools the drive shaft 18, and then reaches the centrifugal fan 50.
  • the cooling air a2 is delivered by the centrifugal fan 50 in the radially outward direction of the centrifugal fan 50 and discharged from the outlet duct 20.
  • the cooling air a1 passing through the first cooling-air passage flows between the cooling fins 52a, which improves the cooling effect on the fixed scroll 32.
  • the cooling air a2 that has been sucked in from the inlet ducts 22a to 22e flows between the cooling fins 54a, to thereby improve a cooling effect on the orbiting scroll 26.
  • the cooling air a1 and the cooling air a2, which pass through the ducts 56 and 58, are directed to be collected in the center of the compression chambers. This increases a flow rate of the cooling air in the center of the compression chambers and thus improves the cooling effect on the center of the compression chambers.
  • the cooling-air passage is divided into the first and second cooling-air passages, and the cooling fins 52a and 54a are arranged to extend along a substantially parallel direction to the flowing direction of the cooling air, so that pressure loss of the cooling air can be decreased. This reduces power consumption of the scroll compressor 10.
  • the inlet ducts 22a to 22e are arranged dispersedly in a circumferential direction in the casing 12b, and the first cooling-air passage is dispersedly arranged between the inlet ducts 22a to 22e, which makes it possible to avoid an increase in size of the casing 12b. Since the ducts 56 and 58 are arranged coaxially with the drive shaft 18, the casing 12a can be downsized, which decreases the size of the casing 12a.
  • pin crank mechanisms 40 are provided as a rotation-preventing mechanism, this enables simplification and cost reduction of the rotation-preventing mechanism, and also prevents the increase in size of the casing.
  • the centrifugal fan 50 capable of increasing static pressure is provided as a cooling fan, which increases flow rates of the cooling air a1 and the cooling air a2. This also improves the cooling effect.
  • the invention makes it possible to materialize the scroll fluid machine in which the cooling effect on the center of the sealed chamber is improved; power consumption is reduced; and the casing is downsized.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Rotary Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP14774465.0A 2013-03-29 2014-03-27 Machine à fluide du type à volute Withdrawn EP2980409A4 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013072381A JP6195722B2 (ja) 2013-03-29 2013-03-29 スクロール式流体機械
PCT/JP2014/058742 WO2014157452A1 (fr) 2013-03-29 2014-03-27 Machine à fluide du type à volute

Publications (2)

Publication Number Publication Date
EP2980409A1 true EP2980409A1 (fr) 2016-02-03
EP2980409A4 EP2980409A4 (fr) 2016-11-09

Family

ID=51624414

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14774465.0A Withdrawn EP2980409A4 (fr) 2013-03-29 2014-03-27 Machine à fluide du type à volute

Country Status (4)

Country Link
EP (1) EP2980409A4 (fr)
JP (1) JP6195722B2 (fr)
CN (1) CN105102818B (fr)
WO (1) WO2014157452A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3388682A1 (fr) * 2017-04-12 2018-10-17 Pfeiffer Vacuum Gmbh Corps de refroidissement pour une pompe à vide et son procédé de fabrication

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018053795A (ja) * 2016-09-28 2018-04-05 三井精機工業株式会社 スクロールコンプレッサの冷却機構
CN107255076B (zh) * 2017-06-08 2019-05-31 中国石油大学(华东) 一种涡旋压缩机的径向随变机构
JP7118668B2 (ja) * 2018-03-07 2022-08-16 アネスト岩田株式会社 往復動式圧縮機
KR102050810B1 (ko) * 2019-06-13 2019-12-04 터보윈 주식회사 냉각 열평형이 가능한 고속 터보기계
GB2589104A (en) * 2019-11-19 2021-05-26 Edwards Ltd Scroll pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59192883A (ja) * 1983-04-15 1984-11-01 Hitachi Ltd スクロ−ル流体機械
JPH0953589A (ja) 1995-08-18 1997-02-25 Tokico Ltd スクロール式流体機械
JPH09228975A (ja) * 1996-02-22 1997-09-02 Asuka Japan:Kk スクロール形流体機械における送風冷却装置
JP2000045972A (ja) * 1998-07-31 2000-02-15 Tokico Ltd スクロール式流体機械
JP4768457B2 (ja) * 2006-01-27 2011-09-07 アネスト岩田株式会社 スクロール流体機械
JP2008008268A (ja) * 2006-06-30 2008-01-17 Hitachi Ltd スクロール式流体機械
JP5286108B2 (ja) 2009-03-02 2013-09-11 株式会社日立産機システム スクロール式流体機械

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3388682A1 (fr) * 2017-04-12 2018-10-17 Pfeiffer Vacuum Gmbh Corps de refroidissement pour une pompe à vide et son procédé de fabrication

Also Published As

Publication number Publication date
JP6195722B2 (ja) 2017-09-13
CN105102818A (zh) 2015-11-25
JP2014196688A (ja) 2014-10-16
EP2980409A4 (fr) 2016-11-09
CN105102818B (zh) 2017-09-19
WO2014157452A1 (fr) 2014-10-02

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